CN104245609B - 用于制备合成石英玻璃粒料的方法 - Google Patents

用于制备合成石英玻璃粒料的方法 Download PDF

Info

Publication number
CN104245609B
CN104245609B CN201380022734.3A CN201380022734A CN104245609B CN 104245609 B CN104245609 B CN 104245609B CN 201380022734 A CN201380022734 A CN 201380022734A CN 104245609 B CN104245609 B CN 104245609B
Authority
CN
China
Prior art keywords
drum
pellets
mullite
quartz glass
sio2
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201380022734.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN104245609A (zh
Inventor
W.莱曼
A.霍夫曼
T.凯泽
M.阿尔恩特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Quarzglas GmbH and Co KG
Original Assignee
Heraeus Quarzglas GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Quarzglas GmbH and Co KG filed Critical Heraeus Quarzglas GmbH and Co KG
Publication of CN104245609A publication Critical patent/CN104245609A/zh
Application granted granted Critical
Publication of CN104245609B publication Critical patent/CN104245609B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/16—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay
    • C04B35/18—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on silicates other than clay rich in aluminium oxide
    • C04B35/185—Mullite 3Al2O3-2SiO2
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/10—Forming beads
    • C03B19/1095—Thermal after-treatment of beads, e.g. tempering, crystallisation, annealing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62665—Flame, plasma or melting treatment
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/64—Burning or sintering processes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/18—After-treatment
    • C23C4/185—Separation of the coating from the substrate
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
    • F27B7/02—Rotary-drum furnaces, i.e. horizontal or slightly inclined of multiple-chamber or multiple-drum type
    • F27B7/04—Rotary-drum furnaces, i.e. horizontal or slightly inclined of multiple-chamber or multiple-drum type with longitudinal divisions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B7/00—Rotary-drum furnaces, i.e. horizontal or slightly inclined
    • F27B7/20—Details, accessories or equipment specially adapted for rotary-drum furnaces
    • F27B7/34—Arrangements of heating devices
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2201/00—Type of glass produced
    • C03B2201/02—Pure silica glass, e.g. pure fused quartz
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5427—Particle size related information expressed by the size of the particles or aggregates thereof millimeter or submillimeter sized, i.e. larger than 0,1 mm
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/74—Physical characteristics
    • C04B2235/77—Density
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Structural Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Thermal Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Ceramic Products (AREA)
  • Silicon Compounds (AREA)
CN201380022734.3A 2012-04-30 2013-04-17 用于制备合成石英玻璃粒料的方法 Active CN104245609B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE201210008437 DE102012008437B3 (de) 2012-04-30 2012-04-30 Verfahren zur Herstellung synthetischer Quarzglaskörnung
DE102012008437.4 2012-04-30
PCT/EP2013/057957 WO2013164189A1 (de) 2012-04-30 2013-04-17 Verfahren zur herstellung synthetischer quarzglaskörnung

Publications (2)

Publication Number Publication Date
CN104245609A CN104245609A (zh) 2014-12-24
CN104245609B true CN104245609B (zh) 2016-08-24

Family

ID=47828220

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380022734.3A Active CN104245609B (zh) 2012-04-30 2013-04-17 用于制备合成石英玻璃粒料的方法

Country Status (6)

Country Link
US (1) US9580348B2 (enExample)
EP (1) EP2844618B1 (enExample)
JP (1) JP6150882B2 (enExample)
CN (1) CN104245609B (enExample)
DE (1) DE102012008437B3 (enExample)
WO (1) WO2013164189A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108779015B (zh) * 2015-12-18 2021-10-26 贺利氏石英玻璃有限两合公司 从二氧化硅粉末制备石英玻璃体
EP3390303B1 (de) 2015-12-18 2024-02-07 Heraeus Quarzglas GmbH & Co. KG Herstellung von quarzglaskörpern mit taupunktkontrolle im schmelzofen
CN108698883A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 石英玻璃制备中的二氧化硅的喷雾造粒
CN108698894A (zh) 2015-12-18 2018-10-23 贺利氏石英玻璃有限两合公司 在多腔式烘箱中制备石英玻璃体
KR20180094087A (ko) 2015-12-18 2018-08-22 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 과립으로부터 실리카 유리 제품의 제조
TWI733723B (zh) 2015-12-18 2021-07-21 德商何瑞斯廓格拉斯公司 不透明石英玻璃體的製備
KR20180095619A (ko) 2015-12-18 2018-08-27 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 실리카 유리 제조 동안 규소 함량의 증가
WO2017103131A1 (de) 2015-12-18 2017-06-22 Heraeus Quarzglas Gmbh & Co. Kg Verringern des erdalkalimetallgehalts von siliziumdioxidgranulat durch behandlung von kohlenstoffdotiertem siliziumdioxidgranulat bei hoher temperatur
JP6940235B2 (ja) 2015-12-18 2021-09-22 ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー 高融点金属の溶融坩堝内での石英ガラス体の調製
TWI764879B (zh) * 2015-12-18 2022-05-21 德商何瑞斯廓格拉斯公司 降低二氧化矽顆粒之碳含量及石英玻璃體之製備
US10427970B1 (en) * 2016-10-03 2019-10-01 Owens-Brockway Glass Container Inc. Glass coatings and methods to deposit same
EP3739283B1 (de) * 2019-05-17 2022-02-23 Heraeus Quarzglas GmbH & Co. KG Verfahren zur behandlung rieselfähiger anorganischer körnung sowie zur durchführung des verfahrens geeignetes drehrohr
CN113149622B (zh) * 2021-05-29 2022-08-09 山东鲁铭新型材料股份有限公司 一种微晶氧化铝高温回转窑用内衬的制备方法
CN120289169B (zh) * 2025-06-12 2025-08-19 湖南旗滨医药材料科技有限公司 一种高抗蚀性药用玻璃旋转管及其制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225443A (en) * 1978-03-22 1980-09-30 The Taulman Company Sintered-glass-granule filter medium
DE3001371A1 (de) * 1980-01-16 1981-08-06 Langlet, Weber KG Oberflächenveredlung Nachf., 5270 Gummersbach Keramischer oder oxidkeramischer, bindemittelfreier hohlkoerper und verfahren zu seiner herstellung
JPS62292642A (ja) * 1986-06-11 1987-12-19 Hitachi Chem Co Ltd シリカガラスの製造法
CN1498196A (zh) * 2001-03-23 2004-05-19 �����ɷ� 石英玻璃的构造元件及其制造方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3758318A (en) * 1971-03-29 1973-09-11 Kaiser Aluminium Chem Corp Production of mullite refractory
US4225332A (en) 1978-08-14 1980-09-30 Owens-Corning Fiberglas Corporation Energy efficient pollution abating glass manufacturing process with external recovery of heat from furnace flue gases
JPS61286264A (ja) * 1985-06-11 1986-12-16 株式会社ニッカト− 加熱炉用管状部材及びその製造方法
JPS639964A (ja) * 1986-06-30 1988-01-16 Nec Corp 半導体記憶素子製造法
GB8627735D0 (en) * 1986-11-20 1986-12-17 Tsl Group Plc Vitreous silica
DE3836934A1 (de) * 1988-10-29 1990-05-03 Heraeus Schott Quarzschmelze Verfahren zum reinigen von teilchenfoermigem siliziumdioxid
DE4039504A1 (de) * 1990-12-11 1992-06-17 Vaw Ver Aluminium Werke Ag Verfahren zur extraktion von metallen aus metallhaltigen rohstoffen
EP0737653B1 (en) * 1995-04-10 1998-01-14 Heraeus Quarzglas GmbH Process for continuously refining of quartz powder
JPH10148469A (ja) * 1996-11-20 1998-06-02 Mitsubishi Chem Corp 外熱式ロータリキルン及びこれを用いた粉粒状高純度材料の製造方法
JPH10287416A (ja) * 1997-04-08 1998-10-27 Mitsubishi Chem Corp 合成石英粉の製造方法
DE19729505A1 (de) * 1997-07-10 1999-01-14 Heraeus Quarzglas Verfahren zur Herstellung von Si0¶2¶-Granulat
DE19937861C2 (de) 1999-08-13 2003-03-20 Heraeus Quarzglas Verfahren für die Herstellung dichter Quarzglas-Körnung
EP1088789A3 (en) 1999-09-28 2002-03-27 Heraeus Quarzglas GmbH & Co. KG Porous silica granule, its method of production and its use in a method for producing quartz glass
JP4548625B2 (ja) * 1999-09-28 2010-09-22 信越石英株式会社 高純度合成石英ガラス粉の製造方法
JP3813413B2 (ja) * 2000-06-09 2006-08-23 トーカロ株式会社 外熱式ロータリーキルン
JP2005076959A (ja) * 2003-08-29 2005-03-24 Murata Mfg Co Ltd 連続式熱処理装置
DE102004038602B3 (de) * 2004-08-07 2005-12-29 Heraeus Quarzglas Gmbh & Co. Kg Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben
US20130219963A1 (en) * 2010-10-28 2013-08-29 Heraeus Quarzglas Gmbh & Co. Kg Method for producing synthetic quartz glass granules

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4225443A (en) * 1978-03-22 1980-09-30 The Taulman Company Sintered-glass-granule filter medium
DE3001371A1 (de) * 1980-01-16 1981-08-06 Langlet, Weber KG Oberflächenveredlung Nachf., 5270 Gummersbach Keramischer oder oxidkeramischer, bindemittelfreier hohlkoerper und verfahren zu seiner herstellung
JPS62292642A (ja) * 1986-06-11 1987-12-19 Hitachi Chem Co Ltd シリカガラスの製造法
CN1498196A (zh) * 2001-03-23 2004-05-19 �����ɷ� 石英玻璃的构造元件及其制造方法

Also Published As

Publication number Publication date
CN104245609A (zh) 2014-12-24
JP2015516941A (ja) 2015-06-18
DE102012008437B3 (de) 2013-03-28
WO2013164189A1 (de) 2013-11-07
US20150107301A1 (en) 2015-04-23
US9580348B2 (en) 2017-02-28
JP6150882B2 (ja) 2017-06-21
EP2844618A1 (de) 2015-03-11
EP2844618B1 (de) 2016-08-10

Similar Documents

Publication Publication Date Title
CN104245609B (zh) 用于制备合成石英玻璃粒料的方法
JP6231074B2 (ja) 合成石英ガラス粒体の製造法
JP6129293B2 (ja) 電気溶融された合成石英ガラスから成形体を製造する方法
JP5801407B2 (ja) 合成石英ガラス顆粒の製造方法
JP4746240B2 (ja) 石英ガラスるつぼの製造方法。
JP4681189B2 (ja) 不透明石英ガラスの製造方法、該方法に適したＳｉＯ２粒子および不透明石英ガラス物品
TWI589537B (zh) 用於產製二氧化矽粒子之合成石英玻璃的方法及適用於該方法之二氧化矽粒子
JP2001080927A (ja) 緻密な石英ガラス粒子の製造方法
US6129899A (en) Processes for producing synthetic quartz powder and producing shaped quartz glass
JP2001354438A (ja) 不透明合成石英ガラスから作られる部材の製造法と、この方法によって製造される石英ガラス管
JP2013519624A (ja) 石英ガラスるつぼの製造法
JP2001089125A (ja) 多孔質シリカ顆粒、その製造方法及び該多孔質シリカ顆粒を用いた合成石英ガラス粉の製造方法
CN103118995B (zh) 制造带有透明的由合成石英制成的内层的石英玻璃坩埚的方法
JP4497333B2 (ja) 合成石英ガラス粉の製造方法
JP2000344535A (ja) 石英ガラス成形体のリサイクル方法
JPH10101324A (ja) 合成石英粉の製造方法及び石英ガラス成形体の製造方法

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant