CN104241149B - A kind of welding method of semiconductor chip - Google Patents

A kind of welding method of semiconductor chip Download PDF

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Publication number
CN104241149B
CN104241149B CN201310245796.2A CN201310245796A CN104241149B CN 104241149 B CN104241149 B CN 104241149B CN 201310245796 A CN201310245796 A CN 201310245796A CN 104241149 B CN104241149 B CN 104241149B
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CN
China
Prior art keywords
semiconductor chip
paste
soldering paste
coated
soldering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201310245796.2A
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Chinese (zh)
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CN104241149A (en
Inventor
孙良
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Changzhou Galaxy century microelectronics Limited by Share Ltd
Original Assignee
ZHANGZHOU YINHESHIJI MICRO-ELECTRONIC Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by ZHANGZHOU YINHESHIJI MICRO-ELECTRONIC Co Ltd filed Critical ZHANGZHOU YINHESHIJI MICRO-ELECTRONIC Co Ltd
Priority to CN201310245796.2A priority Critical patent/CN104241149B/en
Publication of CN104241149A publication Critical patent/CN104241149A/en
Application granted granted Critical
Publication of CN104241149B publication Critical patent/CN104241149B/en
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/83Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
    • H01L2224/8334Bonding interfaces of the layer connector
    • H01L2224/83359Material

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)

Abstract

The invention discloses the welding method of a kind of semiconductor chip, have step in detail below: take out semiconductor chip, the front and back at semiconductor chip is coated with and is covered with soldering paste;The semiconductor chip of dual coating soldering paste is put into high temperature welding furnace, makes semiconductor chip surface form weld layer;Use scribing machine that the front and back of semiconductor chip is delineated photoetching groove and form required figure;The semiconductor chip that front and back is coated with soldering paste contacts with copper-base, forms semi-conductor discrete device through high-temperature soldering technique.After using the technique of the present invention, the front and back of semiconductor chip is coated with and is covered with soldering paste, replaces the plating metal on surface of conventional semiconductor chip, and the surface making semiconductor chip is the most oxidizable, it is ensured that the compactness on its surface.

Description

A kind of welding method of semiconductor chip
Technical field
The present invention relates to the welding method of a kind of semiconductor chip.
Background technology
In the past, after semiconductor chip surface plating through scribing, shelve, after the technique such as welding, surface portion oxygen can be caused Changing, even surface soundness also has certain impact.
Summary of the invention
In order to overcome defect of the prior art, the present invention provides the welding method of a kind of semiconductor chip, makes quasiconductor Chip is not likely to produce cavity when welding, improves the performance of product.
The technical solution adopted for the present invention to solve the technical problems is: the welding method of a kind of semiconductor chip, has Step in detail below:
A: take out semiconductor chip, the front and back at semiconductor chip is coated with and is covered with soldering paste;
B: the semiconductor chip of dual coating soldering paste is put into high temperature welding furnace, makes semiconductor chip surface form welding Layer;
C: use scribing machine that the front and back of semiconductor chip is delineated photoetching groove and form required figure;
D: the semiconductor chip that front and back is coated with soldering paste contacts with copper-base, forms half through high-temperature soldering technique Conductor discrete device.
Further, in described step a, the method to semiconductor chip coating soldering paste is:
1., by semiconductor chip face up and put into printer fixed platform, cover steel mesh, and alignment patterns, use print Brush machine by paste application on the front of semiconductor chip;
2., then take out semiconductor chip, the semiconductor chip back side is put into upward printer fixed platform, cover steel Net, and alignment patterns, use printer by paste application on the back side of semiconductor chip.
Further, semiconductor chip is put into infrared-ray oven baking after 1. terminating by described step, treats semiconductor core Take out after the paste hardening in sheet front;
Semiconductor chip is put into infrared-ray oven baking after 2. terminating by described step, treats the weldering at the semiconductor chip back side Take out after cream hardening.
The beneficial effect that the present invention is brought: after using the technique of the present invention, the front and back coating of semiconductor chip Upper soldering paste, replaces the plating metal on surface of conventional semiconductor chip, and the surface making semiconductor chip is the most oxidizable, it is ensured that its surface Compactness.
Soldering paste on semiconductor chip after infrared-ray oven, paste hardening, it can be ensured that sky will not be produced after welding Hole, substantially increases properties of product.
Accompanying drawing explanation
Fig. 1 is the structural representation of semiconductor chip;
Fig. 2 is the profile of the semiconductor chip after welding procedure.
Wherein, 1, semiconductor chip, 2, light fluting, 3, weld layer.
Detailed description of the invention
As shown in Fig. 1 Fig. 2,
Embodiment one: the welding method of a kind of semiconductor chip, has a step in detail below:
A: take out semiconductor chip 1, the front and back at semiconductor chip 1 is coated with and is covered with soldering paste;
B: the semiconductor chip 1 of dual coating soldering paste is put into high temperature welding furnace, makes semiconductor chip 1 surface form welding Layer 3;
C: use scribing machine that the front and back of semiconductor chip 1 is delineated light fluting 2 and form required figure;
D: the semiconductor chip 1 that front and back is coated with soldering paste contacts with copper-base, is formed through high-temperature soldering technique Semi-conductor discrete device.
Embodiment two: the welding method of a kind of semiconductor chip, has a step in detail below:
A: take out semiconductor chip 1, the front and back at semiconductor chip 1 is coated with and is covered with soldering paste;Semiconductor chip 1 is coated with The method covering soldering paste is:
1., by semiconductor chip 1 face up and put into printer fixed platform, cover steel mesh, and alignment patterns, use print Brush machine by paste application on the front of semiconductor chip 1;
2., then take out semiconductor chip 1, semiconductor chip 1 back side is put into upward printer fixed platform, cover steel Net, and alignment patterns, use printer by paste application on the back side of semiconductor chip 1;
Convenient of course for practical operation, when to semiconductor chip 1 backside coating soldering paste, can not be by semiconductor chip 1 takes out, but directly overturns on printer for clamping the fixture of semiconductor chip 1, so operates just enhanced convenience.
And ensure the quality of follow-up weld layer 3, after 1. step terminates, semiconductor chip 1 can be put into infrared-ray oven Baking, takes out after the paste hardening in semiconductor chip 1 front, and puts into red by semiconductor chip 1 after 2. step terminates Outside line baking oven toasts, and takes out after the paste hardening at semiconductor chip 1 back side.So, semiconductor chip 1 is entering into height Before temperature soldering furnace, its surface is stone, is unlikely to deform abrasion.
B: the semiconductor chip 1 of dual coating soldering paste is put into high temperature welding furnace, makes semiconductor chip 1 surface form welding Layer 3.
C: use scribing machine that the front and back of semiconductor chip 1 is delineated light fluting 2 and form required figure.
D: the semiconductor chip 1 that front and back is coated with soldering paste contacts with copper-base, is formed through high-temperature soldering technique Semi-conductor discrete device.
After using the technique of the present invention, the front and back of semiconductor chip 1 is coated with and is covered with soldering paste, replaces conventional semiconductor core The plating metal on surface of sheet 1, the surface making semiconductor chip 1 is the most oxidizable, it is ensured that the compactness on its surface.
Soldering paste on semiconductor chip 1 after infrared-ray oven, paste hardening, it can be ensured that sky will not be produced after welding Hole, substantially increases properties of product.

Claims (3)

1. a welding method for semiconductor chip, is characterized in that: have a step in detail below:
A: take out semiconductor chip (1), the front and back at semiconductor chip (1) is coated with and is covered with soldering paste;
B: the semiconductor chip (1) of dual coating soldering paste is put into high temperature welding furnace, makes semiconductor chip (1) surface form welding Layer (3);
C: use scribing machine that the front and back of semiconductor chip (1) is delineated the figure needed for light fluting (2) is formed;
D: the semiconductor chip (1) that front and back is coated with soldering paste contacts with copper-base, forms half through high-temperature soldering technique Conductor discrete device.
The welding method of a kind of semiconductor chip the most according to claim 1, is characterized in that: in described step a half-and-half The method of conductor chip (1) coating soldering paste is:
1., by semiconductor chip (1) face up and put into printer fixed platform, cover steel mesh, and alignment patterns, use printing Machine by paste application on the front of semiconductor chip (1);
2., then take out semiconductor chip (1), semiconductor chip (1) back side is put into upward printer fixed platform, cover steel Net, and alignment patterns, use printer by paste application on the back side of semiconductor chip (1).
The welding method of a kind of semiconductor chip the most according to claim 2, is characterized in that: after 1. described step terminates Semiconductor chip (1) is put into infrared-ray oven baking, takes out after the paste hardening in semiconductor chip (1) front;
Semiconductor chip (1) is put into infrared-ray oven baking after 2. terminating by described step, treats semiconductor chip (1) back side Take out after paste hardening.
CN201310245796.2A 2013-06-18 2013-06-18 A kind of welding method of semiconductor chip Active CN104241149B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310245796.2A CN104241149B (en) 2013-06-18 2013-06-18 A kind of welding method of semiconductor chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310245796.2A CN104241149B (en) 2013-06-18 2013-06-18 A kind of welding method of semiconductor chip

Publications (2)

Publication Number Publication Date
CN104241149A CN104241149A (en) 2014-12-24
CN104241149B true CN104241149B (en) 2016-12-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310245796.2A Active CN104241149B (en) 2013-06-18 2013-06-18 A kind of welding method of semiconductor chip

Country Status (1)

Country Link
CN (1) CN104241149B (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200512848A (en) * 2003-09-26 2005-04-01 Advanced Semiconductor Eng Transparent packaging in wafer level
JP2008112961A (en) * 2006-10-04 2008-05-15 Rohm Co Ltd Method for manufacturing semiconductor device, and semiconductor device
CN102527676A (en) * 2011-12-14 2012-07-04 青岛吉阳新能源有限公司 Cleaning process method for etching resistant mask slurry
CN103325758A (en) * 2013-05-16 2013-09-25 华天科技(西安)有限公司 FCQFN encapsulation part preventing solder balls from collapsing and manufacturing process of FCQFN encapsulation part

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200512848A (en) * 2003-09-26 2005-04-01 Advanced Semiconductor Eng Transparent packaging in wafer level
JP2008112961A (en) * 2006-10-04 2008-05-15 Rohm Co Ltd Method for manufacturing semiconductor device, and semiconductor device
CN102527676A (en) * 2011-12-14 2012-07-04 青岛吉阳新能源有限公司 Cleaning process method for etching resistant mask slurry
CN103325758A (en) * 2013-05-16 2013-09-25 华天科技(西安)有限公司 FCQFN encapsulation part preventing solder balls from collapsing and manufacturing process of FCQFN encapsulation part

Also Published As

Publication number Publication date
CN104241149A (en) 2014-12-24

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Address after: 213022 Changzhou, North New District, Jiangsu Yangtze River Road, No. 19

Patentee after: Changzhou Galaxy century microelectronics Limited by Share Ltd

Address before: 213000 Changzhou, North New District, Jiangsu Yangtze River Road, No. 19

Patentee before: Changzhou Galaxy Century Micro-Electronics Co., Ltd.