CN104227243A - Laser deep processing equipment and processing method for hard material - Google Patents
Laser deep processing equipment and processing method for hard material Download PDFInfo
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- CN104227243A CN104227243A CN201410462585.9A CN201410462585A CN104227243A CN 104227243 A CN104227243 A CN 104227243A CN 201410462585 A CN201410462585 A CN 201410462585A CN 104227243 A CN104227243 A CN 104227243A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
Abstract
The invention discloses laser deep processing equipment for hard material. The laser deep processing equipment for the hard material comprises a high-power laser and a low-power laser, wherein laser light beams emitted from the high-power laser and the low-power laser directly act on the surface of a workpiece after passing through a light path system; the light path system successively comprises a beam expander, a 1/2 wave plate, a polarized lens, a galvanometer and field lens device and a blowing device used for blowing to the surface of the workpeice along a laser light beam irradiation direction; the power of the high-power laser is greater than 100W, and the power of the low-power laser is smaller than 100W. According to the laser deep processing equipment for the hard material, materials are firstly quickly cut by the high-power laser, then, the cut materials are quickly repaired by the lower-power laser to realize efficient high-quality deep processing of the hard material, and the laser deep processing equipment has the advantages of high processing quality and high efficiency.
Description
Technical field
The present invention relates to laser cutting finishing technology field, particularly relate to a kind of hard material laser deep processing equipment and processing method.
Background technology
Traditional hard material (as sapphire, pottery, tungsten carbide etc.) cutting is the machine cuts adopting diamond tool directly to contact, the method is more effective for the cutting of large scale material, but it is wide to there is otch in the cutting for small-size materials, inefficient shortcoming, and the shortcoming of abnormity processing should not be carried out, the diamond edge of a knife easily weares and teares in addition, and material removing rate is low, affects cutting efficiency.
In recent years, laser processing technology is widely used in the cutting of hard material, especially small size cutting, laser cutting utilizes the high power density laser bundle of line focus to irradiate workpiece, make illuminated go out material melt rapidly, vaporize, ablation or reach burning-point, thus realize a kind of method for hot cutting that workpiece cuts.As shown in Figure 1, its working mechanism is laser beam focusing material surface mainly for the operation principle of existing this LASER HEAT cutting method, makes photon energy convert chemical energy or heat energy to sputtering of materials out.
More specifically, the method for above-mentioned laser cutting hard material is: first, and adopt superpower laser to carry out fly-cutting to hard material, the major advantage of the method comprises: (1) noncontact, avoids cutter material to the pollution of rapidoprint; (2) there is not tool wear problem, easily be automated control, improve cutting efficiency; (3) hot spot of laser is little, and energy density is high, and cutting speed is fast, and therefore cut quality is better; (4) various shape processing can be carried out, meet the needs of device.
In above-mentioned laser processing, superpower laser (optical fiber or CO2) more than main employing hectowatt grade realizes the high efficiency cutting of hard material, which solve the problems existed in traditional machine cuts, as avoid cutter to the pollution of material, improve working (machining) efficiency and improve cut quality to a certain extent.But, this laser deep processing due to be adopt high power laser light complete, therefore cutting after cut surface and edge quality good not, as there is the problems such as coarse, welding is remaining, need to carry out complicated post processing, to obtain a smooth and clean cut surface and edge.Complicated post processing not only increases cost and time, and has been difficult to for the mechanical treatment of microcell etc.
Summary of the invention
The object of the present invention is to provide a kind of hard material laser deep processing equipment and processing method, during for solving hard material laser cutting in prior art, particularly during small cutting, producing coarse at cut surface, the problem of welding remnants.
For achieving the above object, technical scheme proposed by the invention is:
A kind of hard material laser deep processing equipment of the present invention, it comprises: a high power laser, one low-power laser, described high power laser is identical with the laser light wavelength that described low-power laser is launched, and laser beam directly acts on surface of the work after a light path system, wherein said high power laser launch laser beam the light path system of process comprise successively along laser beam irradiation direction: a beam expanding lens, one polarized lenses, one galvanometer and field lens device, the light path system that described low-power laser launches process described in the laser light velocity comprises successively along laser direction of illumination: a beam expanding lens, one 1/2 slides, one polarized lenses, and galvanometer and a field lens device, one blowning installation for blowing to surface of the work, the power of described high power laser is greater than 100W, and the power of described low-power laser is less than 100W.
A kind of hard material laser deep processing equipment, it comprises: a high power laser, one low-power laser, the optical maser wavelength that described high power laser and low-power laser are launched is different, and laser beam directly acts on surface of the work after light path system, wherein said high power laser and described low-power laser launch laser beam the light path system of process comprise successively along laser beam irradiation direction: a beam expanding lens, a galvanometer and field lens device; One blowning installation for blowing to surface of the work, the power of described high power laser is greater than 100W, and the power of described low-power laser is less than 100W.
Wherein, the wave-length coverage of described high power laser and described low-power laser is 266nm to 1064nm.
Wherein, described high power laser is optical fiber laser or CO2 laser instrument or solid-state laser.
Wherein, described low-power laser is Nd:YAG, YVO4, YLF type solid-state laser.
Wherein, also comprise a laser control and cooling system, one for the control of workpiece and operating system.A processing method for hard material laser deep processing, is characterized in that, comprise the following steps:
The first step, first carry out fly-cutting with high power laser to workpiece, described high power laser directly acts on surface of the work after a light path system;
Second step, uses low-power laser instead and carries out Rapid-Repair to workpiece, and remove coarse and welding remnants, described low-power laser acts on surface of the work through a light path system.
Wherein, also comprise a regulating step between the described first step and second step, described regulating step regulates light path system, and regulates repetition rate and the translational speed of laser instrument.
Compared with prior art, a kind of hard material laser deep processing equipment of the present invention and processing method adopt superpower laser first to carry out fly-cutting to material, then low power laser is adopted to carry out Rapid-Repair to the material after cutting, to realize efficient, the high-quality deep processing of hard material, its crudy is high, and efficiency is high.
Accompanying drawing explanation
Fig. 1 is the structure chart of existing a kind of hard material laser deep processing equipment;
Fig. 2 is the structural representation that a kind of hard material laser deep processing equipment of the present invention adopts identical long wavelength laser;
Fig. 3 is the structural representation that a kind of hard material laser deep processing equipment of the present invention adopts different wave length laser instrument;
Fig. 4 is the flow chart of a kind of hard material laser deep working method of the present invention;
Fig. 5 is the first step machining sketch chart of a kind of hard material laser deep processing equipment of the present invention;
Fig. 6 is the second step machining sketch chart of a kind of hard material laser deep processing equipment of the present invention.
Detailed description of the invention
Below with reference to accompanying drawing, elaboration is further given to the present invention.
Refer to Fig. 1 to accompanying drawing 6, one of the present invention can carry out high efficiency to hard material, the laser cutting machine of high-quality deep processing and processing method, refer to accompanying drawing 2 and accompanying drawing 3, a kind of hard material laser deep processing equipment comprises: a high power (> hectowatt grade) laser instrument, one low-power (< hectowatt grade) laser instrument, the optical path matched with it, galvanometer and field lens, two laser instruments are common on the same device with the optics corresponded, there is the processing platform that is common, certainly, equipment also comprises the frame for movement of support of optical device, cooling system, air supply system, power supply, the necessary structure such as control system.Above-mentioned laser process equipment is processed hard material by two kinds of different laser beams, the deep processing of hard material is realized by the cooperation of two kinds of laser, after hard material is cut, there is good cut surface and edge quality, reduce processing cost and cycle simultaneously.
Embodiment 1
Refer to accompanying drawing 2, accompanying drawing 2 is the structure chart of a kind of hard material laser deep processing equipment of the first embodiment of the present invention, this hard material laser deep processing equipment comprises: the laser instrument 102 and 109 of two transmitting phase co-wavelengths, 102 is high power laser, 109 is low-power laser, wherein said laser instrument 102 is greater than the laser instrument of 100W for power, and described laser instrument 109 is less than the laser instrument of 100W for power; Be located at the first beam expanding lens 103 and the second beam expanding lens 1010 of described high power laser 102 and low-power laser 109 front end respectively, the first wherein said beam expanding lens 103 and the second described beam expanding lens 1010 can be referred to as beam expanding lens.Laser directive one polarized lenses 104 after the first beam expanding lens 103 launched by described high power laser 102.Laser beam directive one speculum 105 after described polarized lenses 104, the laser beam after described speculum 105 reflects enters a galvanometer and field lens device 107 through speculum 106 secondary reflection.Laser beam directive after described galvanometer and field lens device 107 is positioned at the workpiece to be added on workbench 1012.Wherein, described laser beam 101 side directly acting on workpiece to be added is also provided with a blowning installation 108, and described blowning installation 108 is cut the waste material at position for blowing away workpiece; its two, this blowning installation 108 can blow multiple inert gas, as nitrogen etc.; for the protection of cut surface, place is not oxidized; it three is that this blowning installation 108 can take away the heat at finished surface place, improves crudy; it four is; this blowning installation 108 can blow combustion-supporting gas, as oxygen, to accelerate cutting speed.
Accompanying drawings 2, in this embodiment, the laser that another low-power laser 109 is launched is after one second beam expanding lens 1010, first directive 1 slide 1041, directive one speculum 1011 afterwards, after speculum 1011 changes laser beam direction, the polarized lenses 104 described in laser beam directive.Laser beam after polarized lenses 104 again through and the laser beam that above-mentioned high power laser 102 is launched walk after identical light path and penetrate from galvanometer and field lens 107, and directly act on surface of the work to be processed.More specifically, the laser beam that described low-power laser 109 is launched is after polarized lenses 104, after the speculum 106 of speculum 105 and secondary reflection, enter galvanometer and field lens device 107 successively, the laser beam same purpose after galvanometer and field lens device 107 process is in the surface of workpiece to be processed.Wherein, described laser beam 101 side directly acting on workpiece to be added is also provided with a blowning installation 108; described blowning installation 108 is cut the waste material at position for blowing away workpiece; they are two years old; this blowning installation 108 can blow multiple inert gas; as nitrogen etc.; for the protection of cut surface, place is not oxidized; it three is that this blowning installation 108 can take away the heat at finished surface place, improves crudy; it four is; this blowning installation 108 can blow combustion-supporting gas, as oxygen, to accelerate cutting speed.But described high power laser 102 and low-power laser 109 work at times, and carry out the process of different step to workpiece to be processed.Wherein said beam expanding lens 103 or 1010, polarized lenses 104, and speculum 105 is or/and reflective mirror 106, and galvanometer and field lens device 107 can be referred to as a light path system.
In actual process, laser instrument, light path system and platform control by operating system.Wherein the type of high power laser 102 and low-power laser 109 can be selected according to concrete material and process requirements (comprising wavelength, pulsewidth, frequency and power), power is different with pulsewidth, high power laser 102 power is greater than hectowatt rank, and low-power laser 109 power is less than hectowatt rank.Wherein, described high power laser 102 and the wave-length coverage of low-power laser 109 can be 266nm to 1064nm.
Wherein it should be noted that in the present embodiment, the concrete structure of light path system can carry out necessary adjustment according to embody rule environment, such as according to the design of concrete board, wherein speculum 105,106 can remove, and by position adjustment, laser beam is directly incident in galvanometer.The present embodiment just wherein a kind of implementation, does not limit structure identical therewith.
Wherein, in the present embodiment, this hard material laser deep processing equipment also comprises a laser control and cooling system 1014, described laser control and cooling system 1014 are for controlling the laser parameter of laser instrument, and duty etc., described cooling system is used for carrying out cooling processing to whole equipment.Cooling system described here comprises circulating water cooling system and the cold air circulating system type of cooling.This hard material laser deep processing equipment also comprises a control and operating system 1013, and this control and operating system 1013 are for controlling the mobile control procedure of workpiece on workbench 1012.
Accompanying drawings 4, on the basis of the hard material deep processing equipment of said structure, the invention also discloses a kind of processing method can carrying out high efficiency, high-quality deep processing to hard material, the method comprises the steps:
Step S1, with the hard material that high power laser fly-cutting is to be processed, makes it form required shape and structure (as accompanying drawing 5).High power laser light beam is produced by laser instrument 102, and the material to be processed incided via its light path system (this light path system comprises beam expander 103, polarized lenses 104, speculum 105, galvanometer and field lens 106) on processing platform, suitable repetition rate and translational speed is selected to carry out fly-cutting to material, in process, blowning installation 107 is adopted to blow to it, to play the effect of cooling and cleaning.The object of step S1 mainly realizes the fly-cutting of hard material, the shape required for formation and structure, ensures that the damage of splitting or other unrepairables does not appear in machined material or sample simultaneously.High power laser 102 power can more than hectowatt grade, and working (machining) efficiency is very high, but can cause the poor quality at cut surface and edge due to high power fly-cutting, occurs coarse and welding remaining.
Step S2, with short wavelength or pulse laser Rapid-Repair, removes coarse and welding remnants, to form smooth and clean surface, as shown in Figure 6.After first step S1 process finishing, turn off high power laser 102, low-power laser 109 is opened behind the position of adjustment sample, now laser beam 101 is produced by low-power laser 109, and via its light path system, (this light path system comprises: beam expanding lens 1010, 1/2 slide 1041, polarized lenses 104, speculum 1011, speculum 105, galvanometer and field lens 107) incide material to be processed on processing platform 1012, suitable repetition rate and translational speed is selected to carry out Rapid-Repair to material, in process, adopt blowning installation 108 to blow to it, to play the effect of cooling and cleaning.The object of step S2 be to first step processing after material repair further, obtain smooth and clean finished surface, the cut surface had after guarantee deep processing and edge quality, but do not affect the shape of deep processing, pattern and structure.The power of low-power laser 109 is lower, therefore, it is possible to repair further the cut surface after first step processing and edge, with the cut surface obtained and edge quality.Wherein, high power laser 102 can be optical fiber or CO2 laser instrument, and its wavelength can be 266nm-1064nm, wherein preferred 1064nm, and power is greater than hectowatt grade; Wherein, high power laser 109 can be the types of solid laser instruments such as Nd:YAG, YVO4, YLF, and its wavelength can be 266nm-1064nm, and power is less than hectowatt grade.
Disclose in the present embodiment and a kind ofly can carry out high efficiency, the laser cutting machine of high-quality deep processing and processing method to hard material, high power laser is adopted first to carry out fly-cutting to material, then low-power laser is adopted to carry out Rapid-Repair, to realize efficient, the high-quality deep processing of hard material to the material after cutting.
Embodiment 2
Refer to accompanying drawing 3, accompanying drawing 3 is the structure chart of a kind of hard material laser deep processing equipment of the second embodiment of the present invention, this hard material laser deep processing equipment comprises: the laser instrument 202 and 209 of two transmitting different wave lengths, 202 is high power laser, 209 is low-power laser, and the wavelength of described high power laser 202 is longer, the wavelength of described low-power laser 209 is shorter.Wherein said laser instrument 202 is greater than the laser instrument of 100W for power, and described laser instrument 209 is less than the laser instrument of 100W for power.Be located at the first beam expanding lens 203 and the second beam expanding lens 2010 of described high power laser 202 and low-power laser 209 front end respectively, the first wherein said beam expanding lens 203 and the second described beam expanding lens 2010 can be referred to as beam expanding lens.Laser directive one speculum 205 after the first beam expanding lens 203 launched by described high power laser 202, and the laser beam after described speculum 205 reflects enters a galvanometer and field lens device 207 through speculum 206 secondary reflection.Laser beam directive after described galvanometer and field lens device 207 is positioned at the band workpiece on workbench 2012.Wherein, described laser beam 201 side directly acting on workpiece to be added is also provided with a blowning installation 2081; described blowning installation 2081 is cut the waste material at position for blowing away workpiece; its two, this blowning installation 2081 can blow multiple inert gas, as nitrogen etc.; for the protection of cut surface, place is not oxidized; it three is that this blowning installation 2081 can take away the heat at finished surface place, improves crudy.It four is that this blowning installation 2081 can blow combustion-supporting gas, as oxygen, to accelerate cutting speed.
Accompanying drawings 2, in this embodiment, the laser that another low-power laser 209 is launched after a beam expanding lens 2010, first directive one first speculum 2011, then directive one second speculum 2061.Optical path direction is changed, in laser beam directive one galvanometer after the second described speculum 2061 and field lens device 2071 through the second described speculum 2061.Laser beam 20101 after described galvanometer and field lens device 2071 process directly acts on the workpiece to be added on workbench 2012.Same as described above; the side of described laser beam 20101 is provided with a blowning installation 208; described blowning installation 208 is blown directly to surface of the work to be processed, and described blowning installation 208 is cut the waste material at position for blowing away workpiece, they are two years old; this blowning installation 208 can blow multiple inert gas; as nitrogen etc., for the protection of cut surface, place is not oxidized, and it three is; this blowning installation 208 can take away the heat at finished surface place, improves crudy.It four is that this blowning installation can blow combustion-supporting gas, as oxygen, to accelerate cutting speed.
Wherein said beam expanding lens 203 or 2010, speculum 206 is or/and speculum 2061, and galvanometer and field lens device 207 or 2071 can be referred to as a light path system.
In actual process, laser instrument, light path system and platform control by operating system.Wherein the type of high power laser 202 and low-power laser 209 can be selected according to concrete material and process requirements (comprising wavelength, pulsewidth, frequency and power), the wavelength of high power laser 202 and low-power laser 209 can be 1064nm, 532nm, 355nm etc., power is different with pulsewidth, laser instrument 202 power is greater than hectowatt rank, and laser instrument 209 power is less than hectowatt rank.Wherein, described high power laser 202 and the wave-length coverage of low-power laser 209 can be 266nm to 1064nm.
Wherein it should be noted that in the present embodiment, the concrete structure of light path system can carry out necessary adjustment according to embody rule environment, such as according to the design of concrete board, wherein speculum 205,206 can remove, and by position adjustment, laser beam is directly incident in galvanometer.The present embodiment just wherein a kind of implementation, does not limit structure identical therewith.
Wherein, in the present embodiment, this hard material laser deep processing equipment also comprises a laser control and cooling system 2014, described laser control and cooling system are for controlling the laser parameter of laser instrument, and duty etc., described cooling system is used for carrying out cooling processing to whole equipment.This hard material laser deep processing equipment also comprises a control and operating system 2013, and this control carries control procedure for operating system 2013 for controlling the mobile of workpiece on workbench 2012.
In the present embodiment, the laser beam that the laser beam that sends of high power laser 202 and low-power laser send finally acts on the surface of workpiece to be added respectively by a light path system.Wherein said high power laser 202 is different from the wavelength of low-power laser 209.
As the simple principle figure that Fig. 3 is involved laser process equipment, equipment practical structures and layout will be changed to some extent according to real needs, but the general principle of processing is constant.
Accompanying drawings 4, on the basis of the hard material deep processing equipment of said structure, the invention also discloses a kind of processing method can carrying out high efficiency, high-quality deep processing to hard material, the method comprises the steps:
Step S1, with the hard material that high power laser fly-cutting is to be processed, makes it form required shape and structure (as accompanying drawing 5).High power laser light beam is produced by laser instrument 202, and the material to be processed incided via its light path system (this light path system comprises beam expander 203, speculum 205, galvanometer and field lens 207) on processing platform, suitable repetition rate and translational speed is selected to carry out fly-cutting to material, in process, blowning installation 207 is adopted to blow to it, to play the effect of cooling and cleaning.The object of step S1 mainly realizes the fly-cutting of hard material, the shape required for formation and structure, ensures that the damage of splitting or other unrepairables does not appear in machined material or sample simultaneously.High power laser 202 power can more than hectowatt grade, and working (machining) efficiency is very high, but can cause the poor quality at cut surface and edge due to high power fly-cutting, occurs coarse and welding remaining.
Step S2, with short wavelength or pulse laser Rapid-Repair, removes coarse and welding remnants, to form smooth and clean surface, as shown in Figure 6.After first step S1 process finishing, turn off high power laser 202, low-power laser 209 is opened after adjustment sample position, now laser beam 20101 is produced by low-power laser 209, and the material to be processed incided via its light path system (this light path system comprises: beam expander 2011, speculum 2061, galvanometer and field lens 2071) on processing platform 2012, suitable repetition rate and translational speed is selected to carry out Rapid-Repair to material, in process, blowning installation 208 is adopted to blow to it, to play the effect of cooling and cleaning.The object of step S2 be to first step processing after material repair further, obtain smooth and clean finished surface, the cut surface had after guarantee deep processing and edge quality, but do not affect the shape of deep processing, pattern and structure.The power of low-power laser 209 is lower, therefore, it is possible to repair further the cut surface after first step processing and edge, with the cut surface obtained and edge quality.Wherein, high power laser 102 can be optical fiber or CO2 laser instrument, and its wavelength can be 266nm-1064nm, wherein preferred 1064nm, and power is greater than hectowatt grade; Wherein, high power laser 209 can be the type laser such as Nd:YAG, YVO4, YLF, and its wavelength can be 266nm-1064nm, wherein preferred 266nm-532nm, and power is less than hectowatt grade.
The invention discloses and a kind ofly can carry out high efficiency, the laser cutting machine of high-quality deep processing and processing method to hard material, long-wave high-power laser instrument is adopted first to carry out fly-cutting to material, then short wavelength's low-power laser is adopted to carry out Rapid-Repair, to realize efficient, the high-quality deep processing of hard material to the material after cutting.
The operation principle of the hard material deep processing equipment of the application is as follows:
Same board fills two dissimilar laser instruments and corresponding optics and system, utilize operating system to make platform movement and to the switching of laser instrument to complete involved hard material two step deep processing.Wherein the concrete installation of laser instrument and optical system can process needs adjustment according to reality, and control system also can be selected according to concrete processing needs.
In involved laser process equipment, the fly-cutting of high power laser light to hard material utilizes the high power density laser bundle of line focus to irradiate workpiece, irradiated material is melted rapidly, vaporizes, ablation or reach burning-point, blow down melt substance by the high velocity air coaxial with light beam simultaneously, thus realize material to cut open fast.Involved superpower laser generally hectowatt rank even more than, adopt high pulse energy to realize the high efficiency processing of material.
In involved laser process equipment, low power laser carries out Rapid-Repair to the hard material after first step processing is the coarse and welding that the long laser of radiothermy removes the generation of first step machining fast, the heat affecting that such laser produces is less, energy is lower, laser energy is only adopted coarse and welding to be removed, and do not affect the shape and structure that first step cutting formed, form smooth and clean surface.
In above-mentioned hard material deep processing cutting machine, can be implemented in the two step processing same board realizing hard material, and fly-cutting and Rapid-Repair, first superpower laser is adopted to carry out fly-cutting to material, shape required for formation and structure, then adopt low power laser to carry out Rapid-Repair to materials processing surface and edge, form smooth and clean surface.
Foregoing; be only preferred embodiment of the present invention; not for limiting embodiment of the present invention; those of ordinary skill in the art are according to central scope of the present invention and spirit; can carry out corresponding flexible or amendment very easily, therefore protection scope of the present invention should be as the criterion with the protection domain required by claims.
Claims (8)
1. a hard material laser deep processing equipment, it is characterized in that, comprise: a high power laser, one low-power laser, described high power laser is identical with the laser light wavelength that described low-power laser is launched, and laser beam directly acts on surface of the work after a light path system, wherein said high power laser launch laser beam the light path system of process comprise successively along laser beam irradiation direction: a beam expanding lens, one polarized lenses, one galvanometer and field lens device, the light path system that described low-power laser launches process described in the laser light velocity comprises successively along laser direction of illumination: a beam expanding lens, one 1/2 slides, one polarized lenses, and galvanometer and a field lens device, one blowning installation for blowing to surface of the work, the power of described high power laser is greater than 100W, and the power of described low-power laser is less than 100W.
2. a hard material laser deep processing equipment, it is characterized in that, it comprises: a high power laser, one low-power laser, the optical maser wavelength that described high power laser and low-power laser are launched is different, and laser beam directly acts on surface of the work after light path system, wherein said high power laser and described low-power laser launch laser beam the light path system of process comprise successively along laser beam irradiation direction: a beam expanding lens, a galvanometer and field lens device; One blowning installation for blowing to surface of the work, the power of described high power laser is greater than 100W, and the power of described low-power laser is less than 100W.
3. hard material laser deep processing equipment as claimed in claim 1 or 2, it is characterized in that, described high power laser is optical fiber laser, CO2 laser instrument or solid-state laser.
4. hard material laser deep processing equipment as claimed in claim 1 or 2, it is characterized in that, described low-power laser is Nd:YAG, YVO4, YLF type solid-state laser.
5. hard material laser deep processing equipment as claimed in claim 1 or 2, is characterized in that, also comprise a laser control and cooling system, for control and the operating system of workpiece.
6. hard material laser deep processing equipment as claimed in claim 1 or 2, it is characterized in that, the wave-length coverage of described high power laser and described low-power laser is 266nm to 1064nm.
7. a processing method for hard material laser deep processing, is characterized in that, comprises the following steps:
The first step, first carry out fly-cutting with high power laser to workpiece, described high power laser directly acts on surface of the work after a light path system;
Second step, uses low-power laser instead and carries out Rapid-Repair to workpiece, and remove coarse and welding remnants, described low-power laser acts on surface of the work through a light path system.
8. the processing method of hard material laser deep processing as claimed in claim 7, it is characterized in that, also comprise a regulating step between the described first step and second step, described regulating step regulates light path system, and regulates repetition rate and the translational speed of laser instrument.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112917019A (en) * | 2021-01-21 | 2021-06-08 | 京东方科技集团股份有限公司 | Laser cutting apparatus and control method thereof |
| CN113348047A (en) * | 2018-11-22 | 2021-09-03 | 普雷茨特两合公司 | Method for cutting a workpiece by means of a laser beam and laser processing system for carrying out the method |
| CN114227013A (en) * | 2021-12-31 | 2022-03-25 | 杭州银湖激光科技有限公司 | Laser processing method for glass capable of reducing edge breakage |
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| CN112917019A (en) * | 2021-01-21 | 2021-06-08 | 京东方科技集团股份有限公司 | Laser cutting apparatus and control method thereof |
| CN114227013A (en) * | 2021-12-31 | 2022-03-25 | 杭州银湖激光科技有限公司 | Laser processing method for glass capable of reducing edge breakage |
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