CN104185613B - 用于由电熔化的合成的石英玻璃制造成形体的方法 - Google Patents
用于由电熔化的合成的石英玻璃制造成形体的方法 Download PDFInfo
- Publication number
- CN104185613B CN104185613B CN201380017833.2A CN201380017833A CN104185613B CN 104185613 B CN104185613 B CN 104185613B CN 201380017833 A CN201380017833 A CN 201380017833A CN 104185613 B CN104185613 B CN 104185613B
- Authority
- CN
- China
- Prior art keywords
- granule
- quartz glass
- microgranule
- vitreous
- helium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 156
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000008187 granular material Substances 0.000 claims abstract description 106
- 239000001307 helium Substances 0.000 claims abstract description 72
- 229910052734 helium Inorganic materials 0.000 claims abstract description 72
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 72
- 239000007789 gas Substances 0.000 claims abstract description 65
- 238000002844 melting Methods 0.000 claims abstract description 24
- 230000008018 melting Effects 0.000 claims abstract description 24
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 23
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 23
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 23
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 23
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 23
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 16
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 claims abstract description 9
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 3
- 238000000034 method Methods 0.000 claims description 82
- 239000013078 crystal Substances 0.000 claims description 61
- 239000004531 microgranule Substances 0.000 claims description 57
- 239000011521 glass Substances 0.000 claims description 21
- 238000010438 heat treatment Methods 0.000 claims description 20
- 239000000463 material Substances 0.000 claims description 19
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 13
- 229910052593 corundum Inorganic materials 0.000 claims description 13
- 229910001845 yogo sapphire Inorganic materials 0.000 claims description 13
- 238000012545 processing Methods 0.000 claims description 12
- 238000000746 purification Methods 0.000 claims description 12
- 238000005469 granulation Methods 0.000 claims description 8
- 230000003179 granulation Effects 0.000 claims description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 5
- 238000000197 pyrolysis Methods 0.000 claims description 5
- 239000010453 quartz Substances 0.000 claims description 5
- 239000004575 stone Substances 0.000 claims description 5
- 230000002194 synthesizing effect Effects 0.000 claims description 5
- 239000003513 alkali Substances 0.000 claims description 4
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000000460 chlorine Substances 0.000 claims description 3
- 229910052801 chlorine Inorganic materials 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- 150000002367 halogens Chemical class 0.000 claims description 2
- 239000002245 particle Substances 0.000 abstract description 24
- 230000015572 biosynthetic process Effects 0.000 abstract description 8
- 238000004017 vitrification Methods 0.000 abstract description 2
- 238000010309 melting process Methods 0.000 abstract 1
- 239000000843 powder Substances 0.000 description 17
- 230000008569 process Effects 0.000 description 15
- 239000001257 hydrogen Substances 0.000 description 13
- 229910052739 hydrogen Inorganic materials 0.000 description 13
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 12
- 230000002085 persistent effect Effects 0.000 description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 9
- 238000001035 drying Methods 0.000 description 9
- 239000003245 coal Substances 0.000 description 8
- 239000000956 alloy Substances 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 239000000779 smoke Substances 0.000 description 7
- 230000008859 change Effects 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 6
- 238000007906 compression Methods 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 5
- 238000007499 fusion processing Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229910052757 nitrogen Inorganic materials 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 206010039509 Scab Diseases 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 238000011068 loading method Methods 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 3
- 239000000945 filler Substances 0.000 description 3
- 239000005350 fused silica glass Substances 0.000 description 3
- 230000004927 fusion Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 238000012216 screening Methods 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N titanium dioxide Inorganic materials O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000011437 continuous method Methods 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000000265 homogenisation Methods 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000001698 pyrogenic effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 125000005372 silanol group Chemical group 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004438 BET method Methods 0.000 description 1
- 101100298222 Caenorhabditis elegans pot-1 gene Proteins 0.000 description 1
- 244000061176 Nicotiana tabacum Species 0.000 description 1
- 235000002637 Nicotiana tabacum Nutrition 0.000 description 1
- 229910003910 SiCl4 Inorganic materials 0.000 description 1
- 238000003723 Smelting Methods 0.000 description 1
- 238000000563 Verneuil process Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 159000000013 aluminium salts Chemical class 0.000 description 1
- 229910000329 aluminium sulfate Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 239000007900 aqueous suspension Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000011449 brick Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000004031 devitrification Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000029142 excretion Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000000156 glass melt Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- XZWYZXLIPXDOLR-UHFFFAOYSA-N metformin Chemical compound CN(C)C(=N)NC(N)=N XZWYZXLIPXDOLR-UHFFFAOYSA-N 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 150000002835 noble gases Chemical class 0.000 description 1
- 238000006068 polycondensation reaction Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 230000007306 turnover Effects 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
- 238000005550 wet granulation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
- C03B5/033—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by using resistance heaters above or in the glass bath, i.e. by indirect resistance heating
- C03B5/0336—Shaft furnaces
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/10—Forming beads
- C03B19/108—Forming porous, sintered or foamed beads
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/10—Forming beads
- C03B19/1095—Thermal after-treatment of beads, e.g. tempering, crystallisation, annealing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/02—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating
- C03B5/033—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture in electric furnaces, e.g. by dielectric heating by using resistance heaters above or in the glass bath, i.e. by indirect resistance heating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Glass Melting And Manufacturing (AREA)
- Glass Compositions (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102012006914.6 | 2012-04-05 | ||
| DE102012006914.6A DE102012006914B4 (de) | 2012-04-05 | 2012-04-05 | Verfahren zur Herstellung synthetischer Quarzglaskörnung |
| DE102012008123.5 | 2012-04-25 | ||
| DE201210008123 DE102012008123B4 (de) | 2012-04-25 | 2012-04-25 | Verfahren zur Herstellung eines Formkörpers aus elektrogeschmolzenem synthetischem Quarzglas |
| PCT/EP2013/056364 WO2013149882A1 (de) | 2012-04-05 | 2013-03-26 | Verfahren zur herstellung eines formkörpers aus elektrogeschmolzenem synthetischem quarzglas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104185613A CN104185613A (zh) | 2014-12-03 |
| CN104185613B true CN104185613B (zh) | 2017-05-03 |
Family
ID=47998441
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380017833.2A Active CN104185613B (zh) | 2012-04-05 | 2013-03-26 | 用于由电熔化的合成的石英玻璃制造成形体的方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20150052948A1 (enExample) |
| EP (1) | EP2834200B1 (enExample) |
| JP (1) | JP6129293B2 (enExample) |
| CN (1) | CN104185613B (enExample) |
| WO (1) | WO2013149882A1 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20130219963A1 (en) * | 2010-10-28 | 2013-08-29 | Heraeus Quarzglas Gmbh & Co. Kg | Method for producing synthetic quartz glass granules |
| KR20180094087A (ko) | 2015-12-18 | 2018-08-22 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 실리카 과립으로부터 실리카 유리 제품의 제조 |
| JP6940235B2 (ja) | 2015-12-18 | 2021-09-22 | ヘレウス クワルツグラス ゲーエムベーハー ウント コンパニー カーゲー | 高融点金属の溶融坩堝内での石英ガラス体の調製 |
| KR20180095619A (ko) | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 실리카 유리 제조 동안 규소 함량의 증가 |
| KR20180095615A (ko) * | 2015-12-18 | 2018-08-27 | 헤래우스 크바르츠글라스 게엠베하 ＆ 컴파니 케이지 | 낮은 OH, Cl, 및 Al 함량을 갖는 발열성 이산화규소 과립으로 제조된 석영 유리 |
| CN108698883A (zh) | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | 石英玻璃制备中的二氧化硅的喷雾造粒 |
| WO2017103153A1 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Glasfasern und vorformen aus quarzglas mit geringem oh-, cl- und al-gehalt |
| CN108698894A (zh) * | 2015-12-18 | 2018-10-23 | 贺利氏石英玻璃有限两合公司 | 在多腔式烘箱中制备石英玻璃体 |
| CN109153593A (zh) | 2015-12-18 | 2019-01-04 | 贺利氏石英玻璃有限两合公司 | 合成石英玻璃粉粒的制备 |
| EP3390303B1 (de) | 2015-12-18 | 2024-02-07 | Heraeus Quarzglas GmbH & Co. KG | Herstellung von quarzglaskörpern mit taupunktkontrolle im schmelzofen |
| EP3390298A1 (de) * | 2015-12-18 | 2018-10-24 | Heraeus Quarzglas GmbH & Co. KG | Herstellen und nachbehandeln eines quarzglaskörpers |
| TWI733723B (zh) | 2015-12-18 | 2021-07-21 | 德商何瑞斯廓格拉斯公司 | 不透明石英玻璃體的製備 |
| WO2017103131A1 (de) | 2015-12-18 | 2017-06-22 | Heraeus Quarzglas Gmbh & Co. Kg | Verringern des erdalkalimetallgehalts von siliziumdioxidgranulat durch behandlung von kohlenstoffdotiertem siliziumdioxidgranulat bei hoher temperatur |
| JP7560262B2 (ja) * | 2020-03-17 | 2024-10-02 | ノリタケ株式会社 | ロータリーキルン |
| KR20230115304A (ko) * | 2020-11-16 | 2023-08-02 | 모멘티브 퍼포먼스 머티리얼즈 쿼츠, 인크. | 중공 석영 실린더를 생산하기 위한 시스템 및 방법 |
| CN112520987B (zh) * | 2020-12-03 | 2022-01-28 | 东海县奥兰石英科技有限公司 | 一种多级连熔集成法生产大直径石英管的制备方法 |
| CN112624579B (zh) * | 2020-12-03 | 2021-09-17 | 东海县奥兰石英科技有限公司 | 一种一体集成法生产大直径透明石英坨的制备方法及装置 |
| CN118637812B (zh) * | 2024-08-12 | 2024-11-05 | 中建材玻璃新材料研究院集团有限公司 | 一种微晶玻璃分配及成形装置 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004038602B3 (de) * | 2004-08-07 | 2005-12-29 | Heraeus Quarzglas Gmbh & Co. Kg | Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben |
| DE102005045051A1 (de) * | 2005-09-21 | 2007-03-22 | Industrie-Ofenbau Rudolf Brands Gmbh | Drehrohrofen |
| CN102099304A (zh) * | 2008-07-19 | 2011-06-15 | 赫罗伊斯石英玻璃股份有限两合公司 | 掺杂氮的石英玻璃制造方法及适于其实施的石英玻璃粒子 |
| DE102010021693A1 (de) * | 2010-05-27 | 2011-12-01 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung von Quarzglaskörnung |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2038627A (en) * | 1935-07-18 | 1936-04-28 | Corning Glass Works | Method of making glass |
| US2134050A (en) | 1937-02-27 | 1938-10-25 | Warren C Kimbrough | Gas trap |
| US4225443A (en) | 1978-03-22 | 1980-09-30 | The Taulman Company | Sintered-glass-granule filter medium |
| DE3405298A1 (de) * | 1984-02-15 | 1985-09-05 | Klöckner-Humboldt-Deutz AG, 5000 Köln | Anlage und verfahren zum kontinuierlichen kalzinieren von aluminiumhydroxid |
| GB8627735D0 (en) | 1986-11-20 | 1986-12-17 | Tsl Group Plc | Vitreous silica |
| DE4424044A1 (de) * | 1994-07-11 | 1996-01-18 | Heraeus Quarzglas | Verfahren zur Herstellung von Kieselsäuregranulat und Verwendung des so hergestellten Granulats |
| EP0737653B1 (en) * | 1995-04-10 | 1998-01-14 | Heraeus Quarzglas GmbH | Process for continuously refining of quartz powder |
| JPH10287416A (ja) | 1997-04-08 | 1998-10-27 | Mitsubishi Chem Corp | 合成石英粉の製造方法 |
| DE19937861C2 (de) | 1999-08-13 | 2003-03-20 | Heraeus Quarzglas | Verfahren für die Herstellung dichter Quarzglas-Körnung |
| JP2001089125A (ja) * | 1999-09-28 | 2001-04-03 | Shinetsu Quartz Prod Co Ltd | 多孔質シリカ顆粒、その製造方法及び該多孔質シリカ顆粒を用いた合成石英ガラス粉の製造方法 |
| EP1088789A3 (en) * | 1999-09-28 | 2002-03-27 | Heraeus Quarzglas GmbH & Co. KG | Porous silica granule, its method of production and its use in a method for producing quartz glass |
| JP4548625B2 (ja) * | 1999-09-28 | 2010-09-22 | 信越石英株式会社 | 高純度合成石英ガラス粉の製造方法 |
| US6739155B1 (en) * | 2000-08-10 | 2004-05-25 | General Electric Company | Quartz making an elongated fused quartz article using a furnace with metal-lined walls |
| JP4117641B2 (ja) * | 2001-11-26 | 2008-07-16 | ジャパンスーパークォーツ株式会社 | 合成石英粉の処理方法およびその石英ガラス製品 |
| US8485815B2 (en) * | 2008-05-13 | 2013-07-16 | Harper International Corporation | Overhung rotary tube furnace |
-
2013
- 2013-03-26 CN CN201380017833.2A patent/CN104185613B/zh active Active
- 2013-03-26 JP JP2015503821A patent/JP6129293B2/ja active Active
- 2013-03-26 US US14/391,005 patent/US20150052948A1/en not_active Abandoned
- 2013-03-26 EP EP13712545.6A patent/EP2834200B1/de not_active Not-in-force
- 2013-03-26 WO PCT/EP2013/056364 patent/WO2013149882A1/de not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102004038602B3 (de) * | 2004-08-07 | 2005-12-29 | Heraeus Quarzglas Gmbh & Co. Kg | Elektrogeschmolzenes, synthetisches Quarzglas, insbesondere für den Einsatz in der Lampen- und in der Halbleiterfertigung und Verfahren zur Herstellung desselben |
| DE102005045051A1 (de) * | 2005-09-21 | 2007-03-22 | Industrie-Ofenbau Rudolf Brands Gmbh | Drehrohrofen |
| CN102099304A (zh) * | 2008-07-19 | 2011-06-15 | 赫罗伊斯石英玻璃股份有限两合公司 | 掺杂氮的石英玻璃制造方法及适于其实施的石英玻璃粒子 |
| DE102010021693A1 (de) * | 2010-05-27 | 2011-12-01 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung von Quarzglaskörnung |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6129293B2 (ja) | 2017-05-17 |
| JP2015520095A (ja) | 2015-07-16 |
| US20150052948A1 (en) | 2015-02-26 |
| CN104185613A (zh) | 2014-12-03 |
| EP2834200A1 (de) | 2015-02-11 |
| WO2013149882A1 (de) | 2013-10-10 |
| EP2834200B1 (de) | 2017-01-18 |
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