CN104109633A - 用于纳米孔dna测序的隧穿结的制造 - Google Patents
用于纳米孔dna测序的隧穿结的制造 Download PDFInfo
- Publication number
- CN104109633A CN104109633A CN201410155307.9A CN201410155307A CN104109633A CN 104109633 A CN104109633 A CN 104109633A CN 201410155307 A CN201410155307 A CN 201410155307A CN 104109633 A CN104109633 A CN 104109633A
- Authority
- CN
- China
- Prior art keywords
- tunnel junctions
- electrode layer
- barrier film
- nanoporous
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/483—Physical analysis of biological material
- G01N33/487—Physical analysis of biological material of liquid biological material
- G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
- G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
-
- C—CHEMISTRY; METALLURGY
- C12—BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
- C12Q—MEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
- C12Q1/00—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
- C12Q1/68—Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions involving nucleic acids
- C12Q1/6869—Methods for sequencing
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1603—Process or apparatus coating on selected surface areas
- C23C18/1607—Process or apparatus coating on selected surface areas by direct patterning
- C23C18/161—Process or apparatus coating on selected surface areas by direct patterning from plating step, e.g. inkjet
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1635—Composition of the substrate
- C23C18/1644—Composition of the substrate porous substrates
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/02—Electroplating of selected surface areas
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
- C25D7/12—Semiconductors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/1601—Process or apparatus
- C23C18/1633—Process of electroless plating
- C23C18/1675—Process conditions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
- C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
- C23C18/31—Coating with metals
- C23C18/42—Coating with noble metals
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/12—Process control or regulation
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/50—Electroplating: Baths therefor from solutions of platinum group metals
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Proteomics, Peptides & Aminoacids (AREA)
- Physics & Mathematics (AREA)
- Electrochemistry (AREA)
- Zoology (AREA)
- Wood Science & Technology (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Biophysics (AREA)
- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Microbiology (AREA)
- Genetics & Genomics (AREA)
- General Engineering & Computer Science (AREA)
- Bioinformatics & Cheminformatics (AREA)
- Biotechnology (AREA)
- Food Science & Technology (AREA)
- Urology & Nephrology (AREA)
- Hematology (AREA)
- Medicinal Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nanotechnology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
Abstract
Description
Claims (20)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/865,669 US9046511B2 (en) | 2013-04-18 | 2013-04-18 | Fabrication of tunneling junction for nanopore DNA sequencing |
US13/865,669 | 2013-04-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104109633A true CN104109633A (zh) | 2014-10-22 |
CN104109633B CN104109633B (zh) | 2017-09-26 |
Family
ID=51706622
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410155307.9A Expired - Fee Related CN104109633B (zh) | 2013-04-18 | 2014-04-17 | 用于纳米孔dna 测序的隧穿结的制造 |
Country Status (2)
Country | Link |
---|---|
US (2) | US9046511B2 (zh) |
CN (1) | CN104109633B (zh) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106471369A (zh) * | 2014-05-05 | 2017-03-01 | 双孔人公司 | 利用纳米细孔的目标检测 |
CN107530638A (zh) * | 2015-02-24 | 2018-01-02 | 渥太华大学 | 在受控击穿期间通过激光照射而在膜上定位纳米孔制造 |
CN108474785A (zh) * | 2016-01-21 | 2018-08-31 | 豪夫迈·罗氏有限公司 | 使用氮化钛作为反电极 |
CN109455662A (zh) * | 2018-11-26 | 2019-03-12 | 广东工业大学 | 一种新型固态纳米孔结构 |
CN111090002A (zh) * | 2019-12-24 | 2020-05-01 | 中国科学院苏州生物医学工程技术研究所 | 纳米孔基因测序微电流检测装置及电流稳定的补偿方法 |
CN111108591A (zh) * | 2017-09-22 | 2020-05-05 | 应用材料公司 | 形成用于生物应用的自支撑膜的方法 |
US10670590B2 (en) | 2013-05-06 | 2020-06-02 | Ontera Inc. | Target detection with nanopore |
CN111634882A (zh) * | 2020-06-10 | 2020-09-08 | 深圳市儒翰基因科技有限公司 | 一种硅基固态纳米孔及制备方法、硅基固态纳米孔测序仪 |
US10871482B2 (en) | 2013-05-06 | 2020-12-22 | Ontera Inc. | Target detection with nanopore and a polymer scaffold complex |
CN112300913A (zh) * | 2020-11-11 | 2021-02-02 | 深圳市儒翰基因科技有限公司 | 一种dna测序装置、固态纳米孔阵列及其制备方法 |
CN112578106A (zh) * | 2020-04-13 | 2021-03-30 | 南京大学 | 一种纳米孔道单分子蛋白质测序仪 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10344324B2 (en) * | 2014-03-26 | 2019-07-09 | International Business Machines Corporation | Electrical trapping and stretching of charged biomolecules by single electrode gating structure |
CN106929565A (zh) * | 2015-12-30 | 2017-07-07 | 北京大学 | 基于纳米结构的蛋白质单分子电子器件及其制备和应用 |
US10640827B2 (en) | 2017-02-01 | 2020-05-05 | Seagate Technology Llc | Fabrication of wedge shaped electrode for enhanced DNA sequencing using tunneling current |
US10761058B2 (en) | 2017-02-01 | 2020-09-01 | Seagate Technology Llc | Nanostructures to control DNA strand orientation and position location for transverse DNA sequencing |
US10889857B2 (en) | 2017-02-01 | 2021-01-12 | Seagate Technology Llc | Method to fabricate a nanochannel for DNA sequencing based on narrow trench patterning process |
US10731210B2 (en) | 2017-02-01 | 2020-08-04 | Seagate Technology Llc | Fabrication of nanochannel with integrated electrodes for DNA sequencing using tunneling current |
US10641726B2 (en) * | 2017-02-01 | 2020-05-05 | Seagate Technology Llc | Fabrication of a nanochannel for DNA sequencing using electrical plating to achieve tunneling electrode gap |
US10752947B2 (en) | 2017-03-09 | 2020-08-25 | Seagate Technology Llc | Method to amplify transverse tunneling current discrimination of DNA nucleotides via nucleotide site specific attachment of dye-peptide |
US20180259475A1 (en) | 2017-03-09 | 2018-09-13 | Seagate Technology Llc | Vertical nanopore coupled with a pair of transverse electrodes having a uniform ultrasmall nanogap for dna sequencing |
JP7324835B2 (ja) * | 2018-08-28 | 2023-08-10 | エフ. ホフマン-ラ ロシュ アーゲー | ルテニウム含有電極を備えるナノポアシーケンシングデバイス |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6627067B1 (en) * | 1999-06-22 | 2003-09-30 | President And Fellows Of Harvard College | Molecular and atomic scale evaluation of biopolymers |
US20040229386A1 (en) * | 1999-06-22 | 2004-11-18 | President And Fellows Of Harvard College | Controlled fabrication of gaps in electrically conducting structures |
US20120076710A1 (en) * | 2006-09-08 | 2012-03-29 | David Waller | Method and device for catchment of platinum group metals in a gas stream |
CN102687027A (zh) * | 2010-02-02 | 2012-09-19 | 阿利桑那卅评议会 | 用于测序聚合物的受控的隧道间隙设备 |
CN103376275A (zh) * | 2012-04-17 | 2013-10-30 | 国际商业机器公司 | 用于电区分碱基或识别生物分子的方法以及纳米器件 |
Family Cites Families (82)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4576829A (en) | 1984-12-28 | 1986-03-18 | Rca Corporation | Low temperature growth of silicon dioxide on silicon |
US4692992A (en) | 1986-06-25 | 1987-09-15 | Rca Corporation | Method of forming isolation regions in a semiconductor device |
JP2583770B2 (ja) | 1986-09-17 | 1997-02-19 | 大塚製薬株式会社 | 遺伝子 |
US5747339A (en) | 1990-06-25 | 1998-05-05 | Research Foundation For Microbial Diseases Of Osaka | Non-A, non-B hepatitis virus genomic CDNA and antigen polypeptide |
US5671086A (en) | 1995-04-18 | 1997-09-23 | The Regents, University Of California | Method and apparatus for accurately manipulating an object during microelectrophoresis |
KR100396110B1 (ko) | 1998-03-10 | 2003-08-27 | 인터내셔널 비지네스 머신즈 코포레이션 | 이중 직경 컨택트 플러그 및 그 제조 방법 |
AU3867400A (en) | 1999-03-19 | 2000-10-09 | Duke University | Methods of using bioelastomers |
US6621191B1 (en) | 1999-05-13 | 2003-09-16 | Matsushita Electric Industrial Co., Inc. | Structure containing organic molecular layer and use thereof |
US6180490B1 (en) | 1999-05-25 | 2001-01-30 | Chartered Semiconductor Manufacturing Ltd. | Method of filling shallow trenches |
US6783643B2 (en) | 1999-06-22 | 2004-08-31 | President And Fellows Of Harvard College | Control of solid state dimensional features |
US8232582B2 (en) | 2000-04-24 | 2012-07-31 | Life Technologies Corporation | Ultra-fast nucleic acid sequencing device and a method for making and using the same |
US6413792B1 (en) | 2000-04-24 | 2002-07-02 | Eagle Research Development, Llc | Ultra-fast nucleic acid sequencing device and a method for making and using the same |
US20050019784A1 (en) | 2002-05-20 | 2005-01-27 | Xing Su | Method and apparatus for nucleic acid sequencing and identification |
US20040180369A1 (en) | 2003-01-16 | 2004-09-16 | North Carolina State University | Photothermal detection of nucleic acid hybridization |
US7410564B2 (en) | 2003-01-27 | 2008-08-12 | Agilent Technologies, Inc. | Apparatus and method for biopolymer identification during translocation through a nanopore |
US7282130B2 (en) | 2003-01-31 | 2007-10-16 | Agilent Technologies, Inc. | Apparatus and method for control of biopolymer translocation through a nanopore |
CA2517216A1 (en) | 2003-02-28 | 2004-10-07 | Brown University | Nanopores, methods for using same, methods for making same and methods for characterizing biomolecules using same |
US7250115B2 (en) | 2003-06-12 | 2007-07-31 | Agilent Technologies, Inc | Nanopore with resonant tunneling electrodes |
US7347921B2 (en) | 2003-07-17 | 2008-03-25 | Agilent Technologies, Inc. | Apparatus and method for threading a biopolymer through a nanopore |
US6990852B2 (en) | 2003-07-28 | 2006-01-31 | Becton Dickinson & Company | System and method for detecting particles |
US6777260B1 (en) | 2003-08-14 | 2004-08-17 | Silicon Storage Technology, Inc. | Method of making sub-lithographic sized contact holes |
WO2005017025A2 (en) | 2003-08-15 | 2005-02-24 | The President And Fellows Of Harvard College | Study of polymer molecules and conformations with a nanopore |
US20050084980A1 (en) | 2003-10-17 | 2005-04-21 | Intel Corporation | Method and device for detecting a small number of molecules using surface-enhanced coherant anti-stokes raman spectroscopy |
US7075161B2 (en) * | 2003-10-23 | 2006-07-11 | Agilent Technologies, Inc. | Apparatus and method for making a low capacitance artificial nanopore |
US7285433B2 (en) | 2003-11-06 | 2007-10-23 | General Electric Company | Integrated devices with optical and electrical isolation and method for making |
US6962849B1 (en) | 2003-12-05 | 2005-11-08 | Advanced Micro Devices, Inc. | Hard mask spacer for sublithographic bitline |
US20050158763A1 (en) | 2003-12-19 | 2005-07-21 | Albena Ivanisevic | Aligned long DNA molecules on templates and methods for preparing |
US7279337B2 (en) * | 2004-03-10 | 2007-10-09 | Agilent Technologies, Inc. | Method and apparatus for sequencing polymers through tunneling conductance variation detection |
US20050202446A1 (en) | 2004-03-11 | 2005-09-15 | Yang Dan-Hui D. | Methods for biopolymer sequencing using metal inclusions |
US7238485B2 (en) | 2004-03-23 | 2007-07-03 | President And Fellows Of Harvard College | Methods and apparatus for characterizing polynucleotides |
DE102004054818B4 (de) | 2004-11-12 | 2009-02-26 | Qimonda Ag | Verfahren zum reversiblen Oxidationsschutz von Mikro-Bauelementen |
KR100679704B1 (ko) | 2005-01-10 | 2007-02-06 | 한국과학기술원 | 분자소자와 바이오 센서를 위한 나노갭 또는 나노 전계효과 트랜지스터 제작방법 |
EP1848986A4 (en) | 2005-01-25 | 2009-07-29 | Massachusetts Inst Technology | DEVICE FOR ELECTROKINETIC CONCENTRATION AND USE METHOD THEREFOR |
EP2239342A3 (en) | 2005-02-01 | 2010-11-03 | AB Advanced Genetic Analysis Corporation | Reagents, methods and libraries for bead-based sequencing |
US7727363B2 (en) | 2005-02-02 | 2010-06-01 | Ut-Battelle, Llc | Microfluidic device and methods for focusing fluid streams using electroosmotically induced pressures |
US8039368B2 (en) | 2005-03-21 | 2011-10-18 | The Trustees Of The University Of Pennsylvania | Nanogaps: methods and devices containing same |
CN102183630A (zh) | 2005-04-06 | 2011-09-14 | 哈佛大学校长及研究员协会 | 用碳纳米管控制的分子鉴定 |
TWI287041B (en) | 2005-04-27 | 2007-09-21 | Jung-Tang Huang | An ultra-rapid DNA sequencing method with nano-transistors array based devices |
WO2006122317A2 (en) | 2005-05-11 | 2006-11-16 | The Regents Of The University Of California | Nanofabrication processes and devices for the controlled assembly of functionalized nanostructures |
US7540717B2 (en) | 2005-06-03 | 2009-06-02 | The Hong Kong University Of Science And Technology | Membrane nanopumps based on porous alumina thin films, membranes therefor and a method of fabricating such membranes |
US7947485B2 (en) | 2005-06-03 | 2011-05-24 | Hewlett-Packard Development Company, L.P. | Method and apparatus for molecular analysis using nanoelectronic circuits |
US20070020146A1 (en) | 2005-06-29 | 2007-01-25 | Young James E | Nanopore structure and method using an insulating substrate |
US20070048745A1 (en) | 2005-08-30 | 2007-03-01 | Joyce Timothy H | Systems and methods for partitioned nanopore analysis of polymers |
US20070190542A1 (en) | 2005-10-03 | 2007-08-16 | Ling Xinsheng S | Hybridization assisted nanopore sequencing |
US7351648B2 (en) | 2006-01-19 | 2008-04-01 | International Business Machines Corporation | Methods for forming uniform lithographic features |
US7619257B2 (en) | 2006-02-16 | 2009-11-17 | Alcatel-Lucent Usa Inc. | Devices including graphene layers epitaxially grown on single crystal substrates |
WO2008048710A2 (en) | 2006-04-26 | 2008-04-24 | The Board Of Trustees Of The University Of Illinois | Nanometer-scale sharpening of conductor tips |
US20100025263A1 (en) | 2006-05-05 | 2010-02-04 | University Of Utah Research Foundation | Nanopore particle analyzer, method of preparation and use thereof |
US7553730B2 (en) | 2006-07-14 | 2009-06-30 | Agilent Technologies, Inc. | Methods of fabrication employing nanoscale mandrels |
WO2008010959A2 (en) | 2006-07-14 | 2008-01-24 | The Trustees Of The University Of Pennsylvania | Beam ablation lithography |
US20080032290A1 (en) | 2006-08-03 | 2008-02-07 | Young James E | Nanopore flow cells |
US8003319B2 (en) | 2007-02-02 | 2011-08-23 | International Business Machines Corporation | Systems and methods for controlling position of charged polymer inside nanopore |
WO2008121445A2 (en) | 2007-02-13 | 2008-10-09 | The Trustees Of The University Of Pennsylvania | Parallel fabrication of nanogaps and devices thereof |
WO2008124706A2 (en) | 2007-04-06 | 2008-10-16 | Arizona Board Of Regents Acting For And On Behalf Of Arizona State University | Devices and methods for target molecule characterization |
US9034637B2 (en) | 2007-04-25 | 2015-05-19 | Nxp, B.V. | Apparatus and method for molecule detection using nanopores |
US9121843B2 (en) | 2007-05-08 | 2015-09-01 | Trustees Of Boston University | Chemical functionalization of solid-state nanopores and nanopore arrays and applications thereof |
US20100252434A1 (en) | 2007-08-28 | 2010-10-07 | University Of Florida Research Foundation, Inc. | Bio-Sensor Using Gated Electrokinetic Transport |
EP3540436B1 (en) | 2007-09-12 | 2023-11-01 | President And Fellows Of Harvard College | High-resolution molecular sensor |
US8273532B2 (en) | 2007-10-02 | 2012-09-25 | President And Fellows Of Harvard College | Capture, recapture, and trapping of molecules with a nanopore |
KR20100117570A (ko) | 2008-01-03 | 2010-11-03 | 내셔널 유니버시티 오브 싱가포르 | 기능성화된 그래핀 옥사이드 |
US8435397B2 (en) | 2008-01-25 | 2013-05-07 | Mphase Technologies, Inc. | Device for fluid spreading and transport |
US8183648B2 (en) | 2008-01-25 | 2012-05-22 | Ut-Battelle, Llc | Nanoscopic electrode molecular probes |
GB2473333B (en) | 2008-02-28 | 2011-08-24 | Electronic Bio Sciences Llc | System and method to improve sequencing accuracy of a polymer |
US20090232724A1 (en) | 2008-03-11 | 2009-09-17 | Ali Afzali-Ardakani | Method of separating metallic and semiconducting carbon nanotubes from a mixture of same |
US8628649B2 (en) | 2008-03-18 | 2014-01-14 | Arizona Board Of Regents Acting For And On Behalf Of Arizona State University | Nanopore and carbon nanotube based DNA sequencer and a serial recognition sequencer |
JP5388309B2 (ja) | 2008-03-28 | 2014-01-15 | 公益財団法人北九州産業学術推進機構 | 複合薄膜及びそれを備えた雰囲気センサ並びに光導波路センサ |
US8940173B2 (en) | 2008-05-29 | 2015-01-27 | Lawrence Livermore National Security, Llc | Membranes with functionalized carbon nanotube pores for selective transport |
US8278220B2 (en) | 2008-08-08 | 2012-10-02 | Fei Company | Method to direct pattern metals on a substrate |
US7560141B1 (en) | 2008-11-11 | 2009-07-14 | International Business Machines Corporation | Method of positioning patterns from block copolymer self-assembly |
JP5410786B2 (ja) * | 2009-02-27 | 2014-02-05 | 株式会社日立ハイテクサイエンス | 集束イオンビーム装置 |
US8986928B2 (en) | 2009-04-10 | 2015-03-24 | Pacific Biosciences Of California, Inc. | Nanopore sequencing devices and methods |
US8110410B2 (en) | 2009-06-29 | 2012-02-07 | International Business Machines Corporation | Nanofludic field effect transistor based on surface charge modulated nanochannel |
US20140335513A9 (en) | 2009-09-30 | 2014-11-13 | Quantapore, Inc. | Hybrid nanopore device with optical detection and methods of using same |
WO2011082419A2 (en) | 2010-01-04 | 2011-07-07 | Life Technologies Corporation | Dna sequencing methods and detectors and systems for carrying out the same |
US9359675B2 (en) | 2010-04-22 | 2016-06-07 | Basf Se | Producing two-dimensional sandwich nanomaterials based on graphene |
US8828138B2 (en) | 2010-05-17 | 2014-09-09 | International Business Machines Corporation | FET nanopore sensor |
CN102095768B (zh) | 2010-11-16 | 2014-07-09 | 浙江大学 | 一种亚纳米厚度的纳米孔传感器 |
US20120146162A1 (en) | 2010-12-13 | 2012-06-14 | Samsung Electronics Co., Ltd. | Nanosensor and method of manufacturing the same |
US8852407B2 (en) | 2011-01-28 | 2014-10-07 | International Business Machines Corporation | Electron beam sculpting of tunneling junction for nanopore DNA sequencing |
US8986524B2 (en) | 2011-01-28 | 2015-03-24 | International Business Machines Corporation | DNA sequence using multiple metal layer structure with different organic coatings forming different transient bondings to DNA |
US20120193235A1 (en) | 2011-01-28 | 2012-08-02 | International Business Machines Corporation | Dna motion control based on nanopore with organic coating forming transient bonding to dna |
KR101906967B1 (ko) | 2012-04-05 | 2018-10-11 | 삼성전자주식회사 | 나노갭 센서 및 이의 제조 방법 |
-
2013
- 2013-04-18 US US13/865,669 patent/US9046511B2/en not_active Expired - Fee Related
- 2013-08-20 US US13/971,532 patent/US9222930B2/en not_active Expired - Fee Related
-
2014
- 2014-04-17 CN CN201410155307.9A patent/CN104109633B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6627067B1 (en) * | 1999-06-22 | 2003-09-30 | President And Fellows Of Harvard College | Molecular and atomic scale evaluation of biopolymers |
US20040229386A1 (en) * | 1999-06-22 | 2004-11-18 | President And Fellows Of Harvard College | Controlled fabrication of gaps in electrically conducting structures |
US20120076710A1 (en) * | 2006-09-08 | 2012-03-29 | David Waller | Method and device for catchment of platinum group metals in a gas stream |
CN102687027A (zh) * | 2010-02-02 | 2012-09-19 | 阿利桑那卅评议会 | 用于测序聚合物的受控的隧道间隙设备 |
CN103376275A (zh) * | 2012-04-17 | 2013-10-30 | 国际商业机器公司 | 用于电区分碱基或识别生物分子的方法以及纳米器件 |
Cited By (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10871482B2 (en) | 2013-05-06 | 2020-12-22 | Ontera Inc. | Target detection with nanopore and a polymer scaffold complex |
US10670590B2 (en) | 2013-05-06 | 2020-06-02 | Ontera Inc. | Target detection with nanopore |
CN106471369A (zh) * | 2014-05-05 | 2017-03-01 | 双孔人公司 | 利用纳米细孔的目标检测 |
CN106471369B (zh) * | 2014-05-05 | 2019-11-15 | 奥特拉公司 | 利用纳米细孔的目标检测 |
CN107530638A (zh) * | 2015-02-24 | 2018-01-02 | 渥太华大学 | 在受控击穿期间通过激光照射而在膜上定位纳米孔制造 |
US10753009B2 (en) | 2015-02-24 | 2020-08-25 | The University Of Ottawa | Localizing nanopore fabrication on a membrane by laser illumination during controlled breakdown |
CN108474785A (zh) * | 2016-01-21 | 2018-08-31 | 豪夫迈·罗氏有限公司 | 使用氮化钛作为反电极 |
CN111108591B (zh) * | 2017-09-22 | 2021-06-08 | 应用材料公司 | 形成用于生物应用的自支撑膜的方法 |
CN111108591A (zh) * | 2017-09-22 | 2020-05-05 | 应用材料公司 | 形成用于生物应用的自支撑膜的方法 |
CN109455662A (zh) * | 2018-11-26 | 2019-03-12 | 广东工业大学 | 一种新型固态纳米孔结构 |
CN111090002A (zh) * | 2019-12-24 | 2020-05-01 | 中国科学院苏州生物医学工程技术研究所 | 纳米孔基因测序微电流检测装置及电流稳定的补偿方法 |
CN112578106A (zh) * | 2020-04-13 | 2021-03-30 | 南京大学 | 一种纳米孔道单分子蛋白质测序仪 |
CN112578106B (zh) * | 2020-04-13 | 2022-04-22 | 南京大学 | 一种纳米孔道单分子蛋白质测序仪 |
CN111634882A (zh) * | 2020-06-10 | 2020-09-08 | 深圳市儒翰基因科技有限公司 | 一种硅基固态纳米孔及制备方法、硅基固态纳米孔测序仪 |
CN112300913A (zh) * | 2020-11-11 | 2021-02-02 | 深圳市儒翰基因科技有限公司 | 一种dna测序装置、固态纳米孔阵列及其制备方法 |
Also Published As
Publication number | Publication date |
---|---|
US9222930B2 (en) | 2015-12-29 |
CN104109633B (zh) | 2017-09-26 |
US9046511B2 (en) | 2015-06-02 |
US20140312003A1 (en) | 2014-10-23 |
US20140312002A1 (en) | 2014-10-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN104109633A (zh) | 用于纳米孔dna测序的隧穿结的制造 | |
US8858764B2 (en) | Electron beam sculpting of tunneling junction for nanopore DNA sequencing | |
US10267784B2 (en) | DNA sequencing using multiple metal layer structure with different organic coatings forming different transient bondings to DNA | |
US8764968B2 (en) | DNA sequencing using multiple metal layer structure with organic coatings forming transient bonding to DNA bases | |
Vilan et al. | Large-area, ensemble molecular electronics: motivation and challenges | |
KR102144995B1 (ko) | 그래핀 나노포어를 포함하는 나노포어 소자 및 그 제조 방법 | |
US7385295B2 (en) | Fabrication of nano-gap electrode arrays by the construction and selective chemical etching of nano-crosswire stacks | |
US20140166487A1 (en) | High-Resolution Molecular Sensor | |
CN103189305B (zh) | 纳米孔和纳米流体器件中尺寸的反馈控制 | |
JP2009521332A (ja) | ナノギャップおよびナノギャップセンサの製造方法 | |
KR100565174B1 (ko) | 나노갭 전극소자의 제작 방법 | |
US20130299448A1 (en) | Fabricate self-formed nanometer pore array at wafer scale for dna sequencing | |
CN103922275B (zh) | 晶片级自形成纳米通道及其制造方法 | |
Koshi et al. | Voltage and current conditions for nanoparticle chain formation using dielectrophoresis | |
US20140262433A1 (en) | Nano electrode and manufacturing method thereof | |
Trasobares et al. | Hybrid molecular graphene transistor as an operando and optoelectronic platform | |
Yang et al. | Probing switching mechanism of memristor for neuromorphic computing | |
CN113406162A (zh) | 一种形成纳米间隙电极对的制备方法 | |
Tencer et al. | Chip-scale electrochemical differentiation of SAM-coated gold features using a probe array | |
Ghimire et al. | Potentiometric and SERS Detection of Single Nanoparticle Collision Events on a Surface Functionalized Gold Nanoelectrode | |
TWI261904B (en) | Method for introducing/probing signal from circuit by using electrically conductive viscid material with focused ion beam | |
US9146211B1 (en) | Nano-ring gate electrode nanochannels | |
US9428805B2 (en) | DNA sequencing using a suspended carbon nanotube | |
KR20120031652A (ko) | 나노스케일 탐침을 내재한 나노세공 제조방법 | |
Strobel | Nanoscale contacts to organic molecules based on layered semiconductor substrates |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20171107 Address after: Grand Cayman, Cayman Islands Patentee after: GLOBALFOUNDRIES INC. Address before: American New York Patentee before: Core USA second LLC Effective date of registration: 20171107 Address after: American New York Patentee after: Core USA second LLC Address before: American New York Patentee before: International Business Machines Corp. |
|
TR01 | Transfer of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170926 Termination date: 20190417 |
|
CF01 | Termination of patent right due to non-payment of annual fee |