CN104084884B - 一种cmp片状研磨修整器及其生产方法 - Google Patents
一种cmp片状研磨修整器及其生产方法 Download PDFInfo
- Publication number
- CN104084884B CN104084884B CN201410313824.4A CN201410313824A CN104084884B CN 104084884 B CN104084884 B CN 104084884B CN 201410313824 A CN201410313824 A CN 201410313824A CN 104084884 B CN104084884 B CN 104084884B
- Authority
- CN
- China
- Prior art keywords
- ultra
- fine abrasive
- layer
- cmp
- abrasive particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 18
- 238000000227 grinding Methods 0.000 title abstract description 16
- 239000002245 particle Substances 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 16
- 229910052751 metal Inorganic materials 0.000 claims abstract description 16
- 239000011159 matrix material Substances 0.000 claims abstract description 10
- 239000000126 substance Substances 0.000 claims abstract description 6
- 239000006061 abrasive grain Substances 0.000 claims description 21
- 238000005520 cutting process Methods 0.000 claims description 19
- 239000007767 bonding agent Substances 0.000 claims description 8
- 239000011248 coating agent Substances 0.000 claims description 8
- 238000000576 coating method Methods 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 5
- 229910004835 Na2B4O7 Inorganic materials 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 238000010792 warming Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 abstract 2
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910052593 corundum Inorganic materials 0.000 description 3
- 239000010431 corundum Substances 0.000 description 3
- 239000004576 sand Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000011002 quantification Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/12—Dressing tools; Holders therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
- B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410313824.4A CN104084884B (zh) | 2014-07-03 | 2014-07-03 | 一种cmp片状研磨修整器及其生产方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410313824.4A CN104084884B (zh) | 2014-07-03 | 2014-07-03 | 一种cmp片状研磨修整器及其生产方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN104084884A CN104084884A (zh) | 2014-10-08 |
CN104084884B true CN104084884B (zh) | 2017-02-15 |
Family
ID=51632701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410313824.4A Active CN104084884B (zh) | 2014-07-03 | 2014-07-03 | 一种cmp片状研磨修整器及其生产方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN104084884B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112388522A (zh) * | 2019-08-12 | 2021-02-23 | 南昌巨晶砂轮科技有限公司 | 一种磨削弧齿的磨具的制备方法 |
CN116619246B (zh) * | 2023-07-24 | 2023-11-10 | 北京寰宇晶科科技有限公司 | 一种具有金刚石柱状晶簇的cmp抛光垫修整器及其制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001038630A (ja) * | 1999-05-21 | 2001-02-13 | Osaka Diamond Ind Co Ltd | 超砥粒工具及びその製造方法 |
JP4132591B2 (ja) * | 2000-06-28 | 2008-08-13 | 株式会社アライドマテリアル | 超砥粒工具の製造方法 |
US20070060026A1 (en) * | 2005-09-09 | 2007-03-15 | Chien-Min Sung | Methods of bonding superabrasive particles in an organic matrix |
US7258708B2 (en) * | 2004-12-30 | 2007-08-21 | Chien-Min Sung | Chemical mechanical polishing pad dresser |
TW201116366A (en) * | 2009-11-13 | 2011-05-16 | Rong-Fang Chen | Grinding tool trimmer with protection film and its protection film formation method |
CN102092007B (zh) * | 2009-12-11 | 2012-11-28 | 林舜天 | 修整器的制备方法 |
TWM465659U (zh) * | 2013-04-08 | 2013-11-11 | jian-min Song | 化學機械硏磨修整器 |
-
2014
- 2014-07-03 CN CN201410313824.4A patent/CN104084884B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN104084884A (zh) | 2014-10-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Address after: 211124, Jiangning Road, Chunhua District, Jiangsu City, Nanjing Province, Ze Cheng Road, No. 77 Applicant after: NANJING SANCHAO ADVANCED MATERIALS Co.,Ltd. Address before: 211124 tea hillock, Tu Town, Jiangning District, Jiangsu, Nanjing Applicant before: NANJING SANCHAO DIAMOND TOOLS Co.,Ltd. |
|
COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: NANJING SANCHAO DIAMOND TOOLS CO., LTD. TO: NANJING SANCHAO ADVANCED MATERIALS CO., LTD. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20240222 Address after: Room 8011-8, 8th Floor, Cuiping Science and Technology Innovation Building, No. 7 Yingcui Road, Jiangning District, Nanjing City, Jiangsu Province, 211100 (Jiangning Development Zone) Patentee after: Jiangsu Sanjing semiconductor material Co.,Ltd. Country or region after: China Address before: 211124 No. 77, Zecheng Road, Chunhua street, Jiangning District, Nanjing, Jiangsu Province Patentee before: NANJING SANCHAO ADVANCED MATERIALS Co.,Ltd. Country or region before: China |