CN104062755A - 光扫描仪、致动器、图像显示装置以及头戴式显示器 - Google Patents

光扫描仪、致动器、图像显示装置以及头戴式显示器 Download PDF

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Publication number
CN104062755A
CN104062755A CN201410092963.9A CN201410092963A CN104062755A CN 104062755 A CN104062755 A CN 104062755A CN 201410092963 A CN201410092963 A CN 201410092963A CN 104062755 A CN104062755 A CN 104062755A
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CN
China
Prior art keywords
axis
signal
around
frame
axial region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410092963.9A
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English (en)
Chinese (zh)
Inventor
清水武士
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of CN104062755A publication Critical patent/CN104062755A/zh
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/101Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K11/00Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/24Devices for sensing torque, or actuated thereby
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0101Head-up displays characterised by optical features
    • G02B2027/014Head-up displays characterised by optical features comprising information/image processing systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/01Head-up displays
    • G02B27/0149Head-up displays characterised by mechanical features
    • G02B2027/0154Head-up displays characterised by mechanical features with movable elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CN201410092963.9A 2013-03-18 2014-03-13 光扫描仪、致动器、图像显示装置以及头戴式显示器 Pending CN104062755A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013-055729 2013-03-18
JP2013055729A JP2014182226A (ja) 2013-03-18 2013-03-18 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ

Publications (1)

Publication Number Publication Date
CN104062755A true CN104062755A (zh) 2014-09-24

Family

ID=50389802

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410092963.9A Pending CN104062755A (zh) 2013-03-18 2014-03-13 光扫描仪、致动器、图像显示装置以及头戴式显示器

Country Status (4)

Country Link
US (1) US9448403B2 (https=)
EP (1) EP2781951A3 (https=)
JP (1) JP2014182226A (https=)
CN (1) CN104062755A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105403997A (zh) * 2015-11-19 2016-03-16 苏州工业园区纳米产业技术研究院有限公司 一种压电驱动二维扫描微镜
CN105572863A (zh) * 2014-10-31 2016-05-11 精工爱普生株式会社 光学器件及图像显示装置
CN107305288A (zh) * 2016-04-18 2017-10-31 株式会社村田制作所 扫描反射镜装置及其制造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014182225A (ja) * 2013-03-18 2014-09-29 Seiko Epson Corp 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ
JP2014182226A (ja) 2013-03-18 2014-09-29 Seiko Epson Corp 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ
EP3012678A1 (en) * 2014-10-24 2016-04-27 Ricoh Company, Ltd. Light-deflection element, light-deflector, two-dimensional imaging display, optical scanning device, and image forming device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020044327A1 (en) * 2000-10-10 2002-04-18 Hiroyuki Fujita Optical scanner
JP3733383B2 (ja) * 2002-01-15 2006-01-11 日産自動車株式会社 2次元光スキャナ
CN1828358A (zh) * 2005-03-02 2006-09-06 佳能株式会社 光偏转器
CN101149475A (zh) * 2006-09-20 2008-03-26 精工爱普生株式会社 执行器件、光扫描仪以及图像形成装置
DE102007033000A1 (de) * 2007-07-16 2009-01-22 Robert Bosch Gmbh Mikromechanisches Bauteil mit einem Positionserkennungsbauteil zur Positionsbestimmung und Amplitudenbestimmung eines schwingfähigen Elements
JP2011138046A (ja) * 2009-12-28 2011-07-14 Nikon Corp 空間光変調器、露光装置およびそれらの製造方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3102320B2 (ja) * 1995-09-29 2000-10-23 オムロン株式会社 センサ装置
US6278538B1 (en) * 1997-05-16 2001-08-21 U.S. Philips Corporation Optical scanner
JP4233202B2 (ja) 2000-07-31 2009-03-04 日立ビアメカニクス株式会社 光学スキャナ装置の制御装置
EP1365270B1 (en) 2001-01-30 2012-01-18 Panasonic Corporation Variable mirror and information apparatus comprising variable mirror
JP4104306B2 (ja) 2001-08-13 2008-06-18 日立ビアメカニクス株式会社 スキャナ装置
US7088492B2 (en) 2001-10-11 2006-08-08 Denso Corporation Micro movable mechanism system and control method for the same
JP3800161B2 (ja) 2001-10-11 2006-07-26 株式会社デンソー 微小可動機構システムと微小可動機構部の制御方法
JP4147947B2 (ja) 2003-01-21 2008-09-10 日産自動車株式会社 光走査装置及びこれを用いた物体検出装置、描画装置
JP2005181576A (ja) * 2003-12-18 2005-07-07 Nissan Motor Co Ltd 2次元光スキャナー
US20050280879A1 (en) 2004-02-09 2005-12-22 Gibson Gregory T Method and apparatus for scanning a beam of light
US7442918B2 (en) 2004-05-14 2008-10-28 Microvision, Inc. MEMS device having simplified drive
US8411343B2 (en) * 2006-09-27 2013-04-02 National Institute Of Advanced Industrial Science And Technology Optical scanning device
DE102006051197A1 (de) 2006-10-30 2008-05-08 Robert Bosch Gmbh Mikromechanisches Bauelement mit einer Mikroschwingvorrichtung und Verwendung eines Bauelements
JP2008116678A (ja) 2006-11-02 2008-05-22 Sony Corp 表示装置及び表示方法
KR100868758B1 (ko) * 2007-01-15 2008-11-13 삼성전기주식회사 압저항 센서를 구비한 회전형 mems 디바이스
JPWO2010021215A1 (ja) * 2008-08-18 2012-01-26 コニカミノルタオプト株式会社 画像投影装置
JP2010097092A (ja) 2008-10-20 2010-04-30 Canon Inc 揺動体装置、揺動体装置を用いた偏向装置、及び揺動体装置の制御方法
JP5585064B2 (ja) 2008-12-15 2014-09-10 株式会社リコー 2次元光走査装置及び光走査型画像表示装置
JP5300624B2 (ja) * 2009-06-30 2013-09-25 日本信号株式会社 プレーナ型アクチュエータ及び光走査装置
JP5397184B2 (ja) * 2009-11-19 2014-01-22 コニカミノルタ株式会社 2次元光スキャナ駆動装置
US8559086B2 (en) 2010-02-17 2013-10-15 Microvision, Inc. Piezoresistive sensors for MEMS device having rejection of undesired motion
JP2012053269A (ja) 2010-09-01 2012-03-15 Denso Corp 2次元光走査装置
JP2012237788A (ja) * 2011-05-10 2012-12-06 Konica Minolta Advanced Layers Inc 光走査装置およびそれを備えた画像投影装置
JP2014182226A (ja) 2013-03-18 2014-09-29 Seiko Epson Corp 光スキャナー、アクチュエーター、画像表示装置およびヘッドマウントディスプレイ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020044327A1 (en) * 2000-10-10 2002-04-18 Hiroyuki Fujita Optical scanner
JP3733383B2 (ja) * 2002-01-15 2006-01-11 日産自動車株式会社 2次元光スキャナ
CN1828358A (zh) * 2005-03-02 2006-09-06 佳能株式会社 光偏转器
CN101149475A (zh) * 2006-09-20 2008-03-26 精工爱普生株式会社 执行器件、光扫描仪以及图像形成装置
DE102007033000A1 (de) * 2007-07-16 2009-01-22 Robert Bosch Gmbh Mikromechanisches Bauteil mit einem Positionserkennungsbauteil zur Positionsbestimmung und Amplitudenbestimmung eines schwingfähigen Elements
JP2011138046A (ja) * 2009-12-28 2011-07-14 Nikon Corp 空間光変調器、露光装置およびそれらの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105572863A (zh) * 2014-10-31 2016-05-11 精工爱普生株式会社 光学器件及图像显示装置
CN105572863B (zh) * 2014-10-31 2020-04-14 精工爱普生株式会社 光学器件及图像显示装置
CN105403997A (zh) * 2015-11-19 2016-03-16 苏州工业园区纳米产业技术研究院有限公司 一种压电驱动二维扫描微镜
CN107305288A (zh) * 2016-04-18 2017-10-31 株式会社村田制作所 扫描反射镜装置及其制造方法

Also Published As

Publication number Publication date
JP2014182226A (ja) 2014-09-29
US9448403B2 (en) 2016-09-20
EP2781951A3 (en) 2015-04-22
US20140268267A1 (en) 2014-09-18
EP2781951A2 (en) 2014-09-24

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Application publication date: 20140924

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