CN104030037B - A kind of MOCVD graphite plate automatic transfer machine structure - Google Patents
A kind of MOCVD graphite plate automatic transfer machine structure Download PDFInfo
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- CN104030037B CN104030037B CN201410274883.5A CN201410274883A CN104030037B CN 104030037 B CN104030037 B CN 104030037B CN 201410274883 A CN201410274883 A CN 201410274883A CN 104030037 B CN104030037 B CN 104030037B
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Abstract
A kind of MOCVD graphite plate automatic transfer machine structure, belongs to MOCVD equipment manufacturing technical field.Comprise the permanent seat be arranged on below catalyst chamber base plate, lifting line slideway is fixed in permanent seat middle and upper part; Adapter plate is fixed on lifting slider, is connected with two bearing block assemblies on a mounting board, and S. A. flush fit is arranged on the inner ring of two bearing block assembly inner sleeve bearings; Line handspike is fixed in the lower end of permanent seat, and the movable external part of line handspike and hinged seat are hinged, and hinged seat is fixed on the bearing seat that is fixed together with lifting slider; Stepping motor is fixed in adapter plate bottom; Flexible line slideway is fixed in the centre of stay bearing plate; Cushion block is fixed on flexible slide block, and the bottom of graphite plate transmission fork is fixed on cushion block, and Rodless cylinder is fixed in the rear portion of stay bearing plate, and flexible slide block is fixed on cushion block.Mechanism of the present invention is applied on MOCVD, provides that a kind of positional precision is high, structure is simple, cost is low, the MOCVD graphite plate automatic transfer machine structure of reliable operation.
Description
Technical field
The present invention relates to MOCVD equipment manufacturing technical field, especially relate to a kind of MOCVD graphite plate automatic transfer machine structure.
Background technology
Metal organic chemical vapor deposition system (MOCVD) is the major equipment that semi-conducting material is produced.Automatic transfer machine structure is widely used in MOCVD device, it achieving from fetching and delivering the transmission of loading substrate graphite plate specimen chamber to catalyst chamber, saving labor content, improves safety and production efficiency.But mechanism structure of the same type is in the market complicated, expensive, be unfavorable for reducing productive costs; And because position probing and position repeatability are not fine, reduce production efficiency on the contrary.
summary of the invention:
The object of the present invention is to provide that a kind of positional precision is high, reproducible, structure is simple, cost is low, work MOCVD graphite plate automatic transfer machine structure accurately and reliably.
The object of the present invention is achieved like this:
A kind of MOCVD graphite plate automatic transfer machine structure, comprise the permanent seat be arranged on below catalyst chamber base plate, feature is: lifting line slideway is vertically fixed on the middle and upper part of permanent seat, lifting line slideway is provided with the lifting slider that can move up and down on lifting line slideway, lifting slider is connected with adapter plate; Be connected with top chock assembly and step assembly that both inner sleeves have bearing respectively on the top of adapter plate and middle part, the middle part of S. A. and bottom respectively flush fit are arranged on the inner ring of top chock assembly and step assembly inner sleeve bearing; Line handspike is fixed in the lower end of permanent seat, the bottom of lifting line slideway by fixture block socket head cap screw, the movable external part of line handspike is hinged by hinge hole and hinged seat, and hinged seat is fixed on the bearing seat of the top chock assembly be fixed together with lifting slider; Motor supporting base is fixed in the middle and lower part of permanent seat, stepping motor is fixed in motor supporting base bottom, the output shaft of stepping motor is connected with the bottom of S. A. by coupler, and coupler adopts flexible structure, and position of rotation detects photoelectric switch and is fixed in motor supporting base top; Stay bearing plate is connected with on the top of S. A., centre is on the supporting plate connected with flexible line slideway, flexible line slideway is provided with the flexible slide block can making parallel motion on flexible line slideway, flexible slide block is connected with cushion block, and rear portion is on the supporting plate connected with Rodless cylinder; The bottom of graphite plate transmission fork is fixed on cushion block, and Rodless cylinder mobile piston seat is fixed on cushion block; Lifting position for detection and control graphite plate transmission fork adjustable height position detects the right flank that photoelectric switch is arranged on permanent seat, lifting line slideway, moving by line handspike drive installation strip the change in location feedback signal closed loop control that photoelectric switch check-out console occurs to be elevated together by detecting, ensureing that graphite transmission fork lifting position is accurately reliable.
S. A. above top chock assembly is connected with rotary stopper block, the rotary block assembly of two band slew buffer springs is installed at the leading flank of adapter plate, rotary stopper block can touch rotary block assembly in rotation, and rotary block assembly plays the effect of the restriction S. A. anglec of rotation.
Left end is on the supporting plate provided with the flexible stop component of the flexible recoil spring of band, for graphite transmission fork flexible put in place spacing, ensure that graphite transmission fork puts in place steadily.
The present invention is by permanent seat, line handspike, lifting line slideway, S. A., rotary block assembly, rotary stopper block, stepping motor, stay bearing plate, flexible line slideway, Rodless cylinder, the compositions such as graphite plate transmission fork, during work, stepping motor obtains electric, driving stepper motor S. A. rotates, realize 0 ~ 180 ° reciprocal circular movement of stay bearing plate around S. A., and utilize rotary block assembly and this mechanical position limitation of rotary stopper block, not only make the position of stay bearing plate after being rotated in place accurate, repeatable accuracy is high, and rotary stopper block is rotated in place the skew buffering capacity that rear axial well-distributed slew buffer spring can produce about 2mm, prevent from position of rotation from detecting photoelectric switch produce vibration because working long hours and cause S. A. occurrence positions to offset, effectively cushioned, guarantee puts in place steadily.The present invention realizes the fore and aft motion of whole mechanism at vertical surface and horizontal surface respectively by line handspike and Rodless cylinder flexible.
The invention has the beneficial effects as follows:
1, the invention provides that a kind of positional precision is high, reproducible, structure is simple, cost is low, work MOCVD graphite plate automatic transfer machine structure accurately and reliably.
2, the present invention have adopt mechanical position limitation to make that position in transmittance process is accurate, reproducible, structure is simple, cost is low, the work advantage such as accurately and reliably.
3, adopt this device can significantly improve the efficiency of MOCVD production semi-conducting material, the development of semicon industry can be promoted.
accompanying drawing illustrates:
Fig. 1 is structural representation of the present invention;
Fig. 2 is the front elevation of Fig. 1;
Fig. 3 is the enlarged drawing at A place in Fig. 2;
Fig. 4 is the view that the present invention is in working process.
detailed description of the invention:
Contrast accompanying drawing below in conjunction with example the present invention is further detailed.
A kind of MOCVD graphite plate automatic transfer machine structure, comprise the permanent seat 7 be arranged on below catalyst chamber base plate, lifting line slideway 6 is fixed in the middle and upper part of permanent seat 7 by socket head cap screw, lifting line slideway 6 is provided with two lifting sliders 4 that can move up and down on lifting line slideway 6, and adapter plate 3 is fixed on lifting slider 4 by socket head cap screw; Be connected with by socket head cap screw top chock assembly 19 and the step assembly 21 that both inner sleeves have bearing on the top of adapter plate 3 and middle part respectively, the middle part of S. A. 15 and bottom respectively flush fit are arranged on the inner ring of top chock assembly 19 and step assembly 21 inner sleeve bearing; Two fixture blocks 1 are fixed in the lower end of permanent seat 7, the bottom of lifting line slideway 6 by socket head cap screw line handspike 2, the movable external part 2-1 of line handspike 2 is hinged by hinge hole and hinged seat 5, and hinged seat 5 is fixed in the bottom of the bearing seat 19-1 of the top chock assembly 19 be fixed together with adapter plate 3 by socket head cap screw; Motor supporting base 24 is fixed in the middle and lower part of permanent seat 7, the right side of line handspike 2 by socket head cap screw, stepping motor 25 is fixed in the bottom of motor supporting base 24 by socket head cap screw, the output shaft 25-1 of stepping motor 25 is connected with the bottom of S. A. 15 by the coupler 22 being arranged on motor supporting base 24 top, coupler 22 adopts flexible structure, and position of rotation detects photoelectric switch 23 and is fixed in the top of motor supporting base 24, the bottom of coupler 22 by socket head cap screw; Be connected with stay bearing plate 8 on the top of S. A. 15, flexible line slideway 10 is fixed in the centre of stay bearing plate 8 by socket head cap screw, flexible line slideway 10 is provided with the flexible slide block 14 that can be made parallel motion on flexible line slideway 10; Cushion block 13 is fixed on flexible slide block 14 by socket head cap screw, and the bottom of graphite plate transmission fork 12 is fixed on cushion block 13 by socket head cap screw; Rodless cylinder 11 is fixed in the rear portion of stay bearing plate 8 by socket head cap screw, and the mobile piston seat 11-1 of Rodless cylinder 11 is fixed in graphite plate transmission by socket head cap screw and pitches on the cushion block 13 of 12 bottoms; Four lifting positions for detection and control line handspike 2 adjustable height position detect the right flank that photoelectric switch 26 is arranged on permanent seat 7, lifting line slideway 6, photoelectric switch check-out console 20 is arranged on adapter plate 3 right flank, together with adapter plate 3, dipping and heaving occurs, lifting position detects photoelectric switch 26 by detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensures that the accurately reliable of 12 lifting positions is pitched in graphite plate transmission.
S. A. 15 above top chock assembly 19 is connected with rotary stopper block 18 by socket head cap screw, axial location adapter plate 16 is fixed in the bearing seat 19-1 upper surface of top chock assembly 19 by socket head cap screw, the rotary block assembly 17 that same sagittal plane is in two band slew buffer springs of rotary stopper block 18 left and right sides is fixed in the bearing seat 19-1 upper surface of top chock assembly 19 by socket head cap screw, rotary stopper block 18 can touch rotary block assembly 17 in rotation, buffering and mechanical position limitation effect are played in the rotation of rotary block assembly 17 pairs of S. A.s 15, ensure that the position of stay bearing plate 8 after being rotated in place is accurate, repeatable accuracy is high, and rotary stopper block 18 is rotated in place the skew buffering capacity that rear axial well-distributed slew buffer spring can produce about 2mm, prevent from position of rotation from detecting photoelectric switch 23 produce vibration because working long hours and cause S. A. 15 occurrence positions to offset, effectively cushioned, ensure that graphite plate transmission fork 12 is rotated in place steadily.
Left end on stay bearing plate 8 is provided with the flexible stop component 9 of the flexible recoil spring of band, and flexible stop component 9 can play flexible buffering and mechanical position limitation effect to flexible slide block 14, ensures that graphite plate transmission fork 12 is flexible and puts in place steadily.
Composition graphs 1 is equipped with the working process of the MOCVD of this kind of graphite plate automatic transfer machine structure, and details are as follows to Fig. 4.
1, initial position: as shown in Figure 4 (1# position), the movable external part 2-1 of line handspike 2 drives lifting slider 4 to drive graphite plate transmission to pitch 12 declines and puts in place, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that 12 lowering positions are pitched in graphite plate transmission accurately reliable.
2, finished product is picked up: the mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 orientating reaction room levels of pitching to stretch out and puts in place, now the flexible stop component 9 of the flexible recoil spring of band plays flexible slide block 14 and stretches out buffering and mechanical position limitation effect, and the prong 12-1 of now graphite plate transmission fork 12 is in and pitches tight graphite plate state completely.
3, finished product is transmitted: first the movable external part 2-1 of line handspike 2 drives lifting slider 4 to drive graphite plate transmission to pitch 12 and rises to 3# position, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that graphite plate transmission fork 12 rises to 3# position accurately reliable; Then the mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 levels of pitching to retract to put in place, and now the flexible stop component 9 of the flexible recoil spring of band plays to flexible slide block 14 retract buffering and mechanical position limitation effect; The output shaft 25-1 left-hand revolution of stepping motor 25 drives S. A. 15 to drive graphite plate transmission to pitch 12 left-hand revolution 165 °, and buffering and mechanical position limitation effect are played in the rotation of the 17 pairs of graphite plate transmission forks 12 of the rotary block assembly now with recoil spring; The movable external part 2-1 of line handspike 2 drives lifting slider 4 to drive graphite plate transmission fork 12 to drop to 2# position, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that graphite plate transmission fork 12 drops to 2# position accurately reliable; The mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission to pitch 12 to stretch out put in place towards fetching and delivering specimen chamber level, and now the flexible stop component 9 of the flexible recoil spring of band plays flexible slide block 14 and stretches out buffering and mechanical position limitation effect; The movable external part 12-1 of line handspike 2 drives lifting slider 3 to drive graphite plate transmission fork 12 to drop to 1# position, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that graphite plate transmission fork 12 drops to 1# position accurately reliable; The mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 levels of pitching to retract and puts in place, and now the flexible stop component 9 of the flexible recoil spring of band plays to flexible slide block 14 retract buffering and mechanical position limitation effect; So far graphite plate automatic transfer machine structure just completes finished product and is delivered to the process fetching and delivering specimen chamber lower floor from catalyst chamber.
4, raw material is picked up: first the movable external part 2-1 of line handspike 2 drives lifting slider 4 to drive graphite plate transmission to pitch 12 and rises to 3# position, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that graphite plate transmission fork 12 rises to 3# position accurately reliable; Then the mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 levels of pitching to stretch out to put in place, now the flexible stop component 9 of the flexible recoil spring of band plays flexible slide block 14 and stretches out buffering and mechanical position limitation effect, and the prong 12-1 of now graphite plate transmission fork 12 is in and pitches tight graphite plate state completely.
5, raw material is transmitted: first the movable external part 2-1 of line handspike 2 drives lifting slider 4 to drive graphite plate transmission to pitch 12 and rises to 4# position, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that graphite plate transmission fork 12 rises to 4# position accurately reliable; Then the mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 levels of pitching to retract to put in place, and now the flexible stop component 9 of the flexible recoil spring of band plays to flexible slide block 14 retract buffering and mechanical position limitation effect; Stepping motor 25 output shaft 25-1 clickwise, drives S. A. 15 to drive graphite plate transmission to pitch 12 clickwise 165 °, and buffering and mechanical position limitation effect are played in the rotation of the 17 pairs of graphite plate transmission forks 12 of the rotary block assembly now with recoil spring; The mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 orientating reaction room levels of pitching to stretch out and puts in place, and now the flexible stop component 9 of the flexible recoil spring of band plays flexible slide block 14 and stretches out buffering and mechanical position limitation effect; The movable external part 2-1 of line handspike 2 drives lifting slider 4 to drive graphite plate transmission fork 12 to drop to 1# position, four lifting positions be now arranged on permanent seat 7 detect photoelectric switchs 26 and are used for detecting the change in location feedback signal closed loop control that drive photoelectric switch check-out console 20 to occur together to be elevated by line handspike 2 drive installation plate 3, ensure that graphite plate transmission fork 12 drops to 1# position accurately reliable; So far graphite plate automatic transfer machine structure just completes raw material from fetching and delivering the process of specimen chamber upper layer transfers to catalyst chamber.
6, reset: the mobile piston seat 11-1 of Rodless cylinder 11 drives flexible slide block 14 to drive graphite plate transmission 12 levels of pitching to be retracted into initial position, now the flexible stop component 9 of the flexible recoil spring of band plays to flexible slide block 14 retract buffering and mechanical position limitation effect, and closed shower nozzle 27 and the reactor chamber 28 after putting in place of resetting carries out the growth of MOCVD technique; After waiting for the generation of MOCVD finished product, separating spray nozzle 27 and reactor chamber 28 perform cyclic process next time.
Claims (5)
1. a MOCVD graphite plate automatic transfer machine structure, comprise the permanent seat be arranged on below catalyst chamber base plate, feature is: lifting line slideway is vertically fixed on the middle and upper part of permanent seat, lifting line slideway is provided with the lifting slider can making upper and lower shifting movement on lifting line slideway, lifting slider is connected with adapter plate; Be connected with top chock assembly and step assembly that two inner sleeves have bearing on the top of adapter plate and middle part, the middle part of S. A. and bottom respectively flush fit are arranged on the inner ring of top chock assembly and step assembly inner sleeve bearing; Line handspike is fixed in the lower end of permanent seat, the bottom of lifting line slideway by fixture block socket head cap screw, the movable external part of line handspike is hinged by hinge hole and hinged seat, and hinged seat is fixed on the bearing seat of the top chock assembly be fixed together with lifting slider; Motor supporting base is fixed in the middle and lower part of permanent seat, stepping motor is fixed in motor supporting base bottom, the output shaft of stepping motor is connected with the bottom of S. A. by coupler, and coupler adopts flexible structure, and position of rotation detects photoelectric switch and is fixed in motor supporting base top; Stay bearing plate is connected with on the top of S. A., centre is on the supporting plate connected with flexible line slideway, flexible line slideway is provided with the flexible slide block can making horizontal shifting movement on flexible line slideway, flexible slide block is connected with cushion block, and rear portion is on the supporting plate connected with Rodless cylinder; The bottom of graphite plate transmission fork is fixed on cushion block, and Rodless cylinder mobile piston seat is fixed on cushion block; Photoelectric switch for detection and control graphite plate transmission fork adjustable height position is arranged on after permanent seat, lifting line slideway, by detecting the change in location being arranged on the photoelectric switch check-out console of lifting slider adapter plate side, by feedback signal closed loop control, ensure that graphite transmission fork lifting position is accurately reliable.
2. MOCVD graphite plate automatic transfer machine structure according to claim 1, it is characterized in that: the S. A. above top chock assembly is connected with rotary stopper block, the rotary block assembly of band slew buffer spring is installed at the leading flank of adapter plate, rotary stopper block can touch rotary block assembly in rotation, and rotary block assembly plays the effect of the restriction S. A. anglec of rotation.
3. MOCVD graphite plate automatic transfer machine structure according to claim 1, it is characterized in that: left end is on the supporting plate provided with the flexible stop component of the flexible recoil spring of band, for graphite transmission fork flexible put in place spacing, ensure that graphite transmission fork puts in place steadily.
4. MOCVD graphite plate automatic transfer machine structure according to claim 1, is characterized in that: described line handspike drives MOCVD graphite plate automatic transfer machine structure to realize elevating function and also can select to drive MOCVD graphite plate automatic transfer machine structure to realize elevating function with cylinder or hydraulic ram.
5. MOCVD graphite plate automatic transfer machine structure according to claim 1, is characterized in that: described slew buffer spring and flexible recoil spring also can be selected to realize effectively buffering and mechanical position limitation function with air bellow or yielding rubber.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410274883.5A CN104030037B (en) | 2014-06-19 | 2014-06-19 | A kind of MOCVD graphite plate automatic transfer machine structure |
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| CN201410274883.5A CN104030037B (en) | 2014-06-19 | 2014-06-19 | A kind of MOCVD graphite plate automatic transfer machine structure |
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| CN104030037B true CN104030037B (en) | 2016-02-24 |
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| CN105171764B (en) * | 2015-09-25 | 2017-05-24 | 安徽三众智能装备有限公司 | Grasping device for automobile engine cylinder covers |
| CN108082920B (en) * | 2018-02-02 | 2023-07-21 | 珠海汉迪自动化设备有限公司 | Lifting and swinging device and control method thereof |
| CN109436452A (en) * | 2018-11-23 | 2019-03-08 | 福建（泉州）哈工大工程技术研究院 | A kind of automatic ice cream machine send cup device |
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| JPH0717627A (en) * | 1993-06-30 | 1995-01-20 | Kitou Kogyo Kk | Workpiece transfer device |
| JPH11176912A (en) * | 1997-12-08 | 1999-07-02 | Mitsubishi Electric Corp | Semiconductor substrate processor and its control |
| CN1291345A (en) * | 1998-02-18 | 2001-04-11 | 应用材料有限公司 | End effector for wafer handlier in processing system |
| US6244931B1 (en) * | 1999-04-02 | 2001-06-12 | Applied Materials, Inc. | Buffer station on CMP system |
| CN102785932B (en) * | 2012-07-13 | 2014-12-17 | 山东晶泰星光电科技有限公司 | Material loading mechanism of full automatic die bonder |
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Address after: 999 No. 330031 Jiangxi province Nanchang Honggutan University Avenue Co-patentee after: NANCHANG GUIJI SEMICONDUCTOR TECHNOLOGY Co.,Ltd. Patentee after: Nanchang University Address before: 330047 No. 235 East Nanjing Road, Jiangxi, Nanchang Co-patentee before: NANCHANG HUANGLYU LIGHTING Co.,Ltd. Patentee before: Nanchang University |
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