CN104016153B - Substrate distribution device - Google Patents
Substrate distribution device Download PDFInfo
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- CN104016153B CN104016153B CN201410274571.4A CN201410274571A CN104016153B CN 104016153 B CN104016153 B CN 104016153B CN 201410274571 A CN201410274571 A CN 201410274571A CN 104016153 B CN104016153 B CN 104016153B
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Abstract
The invention discloses a substrate distribution device comprising a feeding unit, an adsorbing unit and a sensing unit, wherein the feeding unit is arranged inside a water tank; the sensing unit comprises a sensing stop dog, a motion bar and a sensing switch; the sensing stop dog is located in the water tank; the sensing switch is located above the water surface; the sensing stop dog transmits actions to the sensing switch through the motion bar. A substrate stack is pushed by the feeding unit, so that the adsorbing unit adsorbs substrates and conveys the substrates one by one, substrate distribution is achieved, the movable sensing stop dog is arranged at the position where the substrates are initially adsorbed on a conveyor belt, the movable sensing stop dog triggers the sensing switch above the water surface through the motion bar, the sensing switch is triggered every time when one substrate is adsorbed, the signals of the sensing switch are utilized for controlling the substrates or counting the substrates, the sensing switch is arranged above the water surface, the situation that the sensing switch fails when getting wet is avoided, working efficiency is ensured, using cost is saved, and the substrate distribution device has extremely high advantages on the condition of substrate distribution in water.
Description
Technical field
The present invention relates to a kind of slicing apparatus.
Background technology
Silicon chip burst is the front and continued operation of inserted sheet, and for smooth burst, general selection carries out burst, that is, in water in water
In carry out burst, then transmit out again from water, so, monitor in real time of burst etc. can only be carried out under water, and general
Sensor is unsuitable for underwater operation, so needing a kind of scheme that can solve the problem that this technical problem badly.
Content of the invention
For above-mentioned technical deficiency, it is an object of the invention to provide a kind of slicing apparatus, it passes through feed unit
Push stack of substrates, adsorbed one by one by suction unit and convey substrate, be transferred to feel by the action sensing block by motion bar
Inductive switch simultaneously triggers its unlatching, is monitored or counts, and inductive switch is located on the water surface, can sensitive, efficiently work.
For solving above-mentioned technical problem, the present invention adopts the following technical scheme that
A kind of slicing apparatus, including feed unit, suction unit, sensing unit, described feed unit is arranged on a water
In groove, in described feed unit, it is placed with stack of substrates, described stack of substrates includes the multiple substrates stacking in the horizontal direction, often
Individual described substrate is arranged along general vertical face；Described suction unit includes conveyer belt, if being provided with described conveyer belt
The dry vacuum absorption holes being connected with a vacuum source, described conveying is arranged in described tank and this part with part
Extend to described feed unit, when described stack of substrates feeds along direction of feed, the substrate in described stack of substrates can
Adsorbed by the vacuum absorption holes on described conveyer belt one by one and with conveying Tape movement；Described sensing unit is used for described
Suction unit is often adsorbed a substrate and is once sensed, and described sensing unit includes sensing block, motion bar, inductive switch,
Described sensing block along described stack of substrates direction of feed can reciprocatingly be arranged in described suction unit with institute
The relative position of the stack of substrates stated, described sensing block has primary importance and the second position, at described sensing block
When primary importance, described sensing block at least partly protrudes from outside described conveyor belt surface；When described sensing gear
When block is in the second position, described sensing block indentation is within described conveyor belt surface；Described motion bar has
One end and the second end, the described first end of motion bar is fixed with described sensing block phase or is in transmission connection, second
End is adjacent with described inductive switch, and the described the second end of motion bar and inductive switch are respectively positioned on described tank
The top in high level face, when described sensing block is in primary importance, described the second end and described inductive switch
Mutually do not contact；When described sensing block is in the second position, described the second end is pushed against on described inductive switch
And triggered unlatching.
Preferably, described motion bar is a lever, the described first end of motion bar and described sensing block phase
Fixing.
Preferably, described feed unit includes one for supporting the described substrate basket of stack of substrates, driving described base
Along the delivery device of direction of feed movement, described substrate basket is being opening end near one end of suction unit to piece basket.
Preferably, described delivery device is screw-nut body.
Preferably, the bottom of described suction unit is arranged in described tank.
The beneficial effects of the present invention is: stack of substrates is pushed by the feed unit being arranged in water, so that absorbing unit
Adsorb one by one and convey, realize burst, the sensing block that the position setting of initial adsorption substrate can be moved on the conveyor belt, its
The inductive switch being located on the water surface by motion bar triggering, and, when often adsorbing a piece of substrate, inductive switch is triggered once,
Can be carried out using the signal of this inductive switch some control or substrate is counted, inductive switch be arranged on the water surface with
On, it is to avoid meet the situation of water failure it is ensured that while work efficiency, saving use cost, carrying out burst in water this
In the case of, the design of this device has high advantage.
Brief description
Accompanying drawing 1 is the structural representation of the slicing apparatus of the present invention.
In accompanying drawing:
10th, feed unit；101st, tank；102nd, stack of substrates；103rd, substrate basket；104th, delivery device；
20th, suction unit；201st, conveyer belt；
30th, sensing unit；301st, sense block；302nd, motion bar；3021st, first end；3022nd, the second end；303、
Inductive switch.
Specific embodiment
Shown embodiment is described in detail below to the present invention below in conjunction with the accompanying drawings:
As shown in Figure 1, a kind of slicing apparatus, including feed unit 10, suction unit 20 and sensing unit 30, enter material list
Unit 10 is arranged in a tank 101, is placed with including the stack of substrates being stacked with multiple substrates in the horizontal direction in feed unit 10
102, each substrate is arranged along general vertical face, and substrate is fully located at below the water surface in tank 101；Suction unit 20 includes defeated
Send band 201, conveyer belt 201 is provided with some vacuum absorption holes being connected with a vacuum source, conveyer belt 201 has part to arrange
In tank 101 and this extends partially into feed unit 10, it is typically chosen mode of movement from bottom to top, so suction unit
20 bottom is arranged in tank 101, and that is, substrate is delivered to opposite upper from the opposing lower end of conveyer belt 201, works as stack of substrates
102 along direction of feed feed when, the substrate in stack of substrates 102 can one by one by conveyer belt 201 vacuum absorption holes adsorb simultaneously
Mobile with conveyer belt 201；Sensing unit 30 once senses for often adsorbing a substrate to suction unit 20, sensing unit 30
Including sensing block 301, motion bar 302, inductive switch 303, sensing block 301 can be reciprocal along stack of substrates 102 direction of feed
It is movably arranged at relative with stack of substrates 102 position in suction unit 20, sensing block 301 has primary importance and second
Put, when sensing block 301 is in primary importance, sensing block 301 at least partly protrudes from outside conveyer belt 201 surface；When
When sensing block 301 is in the second position, sensing block 301 indentation is within conveyer belt 201 surface；When current substrate is removed
Afterwards, sensing block 301 automatically resets to primary importance；Motion bar 302 has first end 3021 and the second end 3022, its with
Be hinged at the one of approximate mid-section in suction unit 20, the first end 3021 of motion bar 302 and sensing block 301 mutually fixing or
Be in transmission connection, the second end 3022 adjacent with inductive switch 303, the second end 3022 of motion bar 302 and inductive switch 303
It is respectively positioned on the top in the highest liquid level face of described tank 101, when sensing block 301 is in primary importance, the second end 3022
Mutually do not contact with inductive switch 303；When sensing block 301 is in the second position, the second end 3022 is pushed against inductive switch
Unlatching is triggered on 303.
As for above-mentioned suction unit 20 concrete structure referring to the principle of Chinese patent 2012204184566 and structure,
The design difference therewith is that negative pressure cavity is in arc-shaped, but those skilled in the art can tie according to the contents of this patent
Close the concrete knot that common knowledge obtains the absorbing unit (corresponding to " the negative-pressure adsorption system " in above-mentioned patent) needed for the design
Structure, here is omitted.
More specifically, motion bar 302 is a lever, and the first end 3021 of motion bar 302 is mutually solid with sensing block 301
Fixed, feed unit 10 includes one for supporting the substrate basket 103 of stack of substrates 102, driving substrate basket 103 along direction of feed movement
Delivery device 104, substrate basket 103 is being opening end near one end of suction unit 20, and delivery device 104 is screw-nut body
Or other are capable of the structure commonly used in the art of this function, because there are much related routine techniquess means this area, herein
Repeat no more.
Above-mentioned stack of substrates 102 is silicon rod or silicon ingot obtains through degumming after dicing, and these substrates are parallelly along water
Square to being arranged in above-mentioned substrate basket 103, and every substrate is approximately along vertical EDS maps, and that is, side is inhaled towards having vacuum
The conveyer belt 201 in attached hole.
Delivery device 104 drives substrate basket 103 to move to the direction of suction unit 20 and feed, and current substrate is adsorbed
Afterwards, in order to avoid the substrate adjacent with current substrate is pulled away simultaneously, substrate basket 103 is controlled to retreat a setpoint distance, and base
While piece is adsorbed, inductive switch 303 can accordingly be triggered, and this is to be by the controller being connected with inductive switch 303 signal
The controllable part driving delivery device 104 reversely drives substrate basket 103, have left behind adsorbed position after current substrate,
After i.e. this control signal disappears, more positive drive substrate basket 103 feeds, and carries out absorption and the conveying of next piece substrate, follows according to this
Ring；Meanwhile, if desired adsorbed, conveying substrate is counted it is also possible to carry out reality by the output signal of inductive switch 303
Existing, due to a piece of substrate of every absorption, inductive switch 303 is triggered once, therefore what the correspondence in inductive switch 303 output signal was opened
Signal repeat number is the quantity of substrate.
Work process: each several part of opening device, delivery device 104 action makes substrate basket 103 near suction unit 20
Direction move, until current substrate adsorbs by vacuum absorption holes in the presence of vacuum source, now sensing block 301 occurs
Displacement, makes the second segment of motion bar 302 be pushed against the unlatching that is triggered on inductive switch 303, with this inductive switch 303 signal even
The correlation control unit connecing or enumerator can receive this signal, thus carrying out the action of correlation, when this substrate is with conveyer belt 201
When removing, sensing block 301 is reset to primary importance therewith, and the second end 3022 of motion bar 302 and inductive switch 303 mutually take off
From action makes substrate basket 103 move near the direction of suction unit 20 to delivery device 104 again, repeats above-mentioned mistake according to this
Journey.
The slicing apparatus of the design push stack of substrates 102 by the feed unit 10 being arranged in water, so that absorbing unit
Adsorb one by one and convey, realize burst, the sensing block that the position setting of initial adsorption substrate can be moved on conveyer belt 201
301, it passes through the inductive switch 303 that motion bar 302 triggering is located on the water surface, and, when often adsorbing a piece of substrate, inductive switch
303 are triggered once, it is possible to use the signal of this inductive switch 303 is carrying out some and control or substrate to be counted, sensing
Switch 303 is arranged on more than the water surface, it is to avoid meet the situation of water failure it is ensured that while work efficiency, saving use cost,
This carry out burst in water in the case of, the design of this device has high advantage.
Above-described embodiment only technology design to illustrate the invention and feature, its object is to allow person skilled in the art
Scholar will appreciate that present disclosure and implements according to this, can not be limited the scope of the invention with this.All according to the present invention
Equivalence changes or modification that spirit is made, all should be included within the scope of the present invention.
Claims (5)
1. a kind of slicing apparatus it is characterised in that: this device includes:
Feed unit, it is arranged in a tank, is placed with stack of substrates in described feed unit, and described stack of substrates includes edge
Multiple substrates that horizontal direction stacks, each described substrate is arranged along general vertical face；
Suction unit, it includes conveyer belt, and described conveyer belt is provided with some vac sorbs being connected with a vacuum source
Hole, described conveying is arranged in described tank with part and this extends partially into described feed unit, when described
Stack of substrates along direction of feed feed when, the substrate in described stack of substrates can be inhaled by the vacuum on described conveyer belt one by one
Attached hole is adsorbed and with conveying Tape movement；
Sensing unit, it is used for often adsorbing a substrate to described suction unit and once sensing, described sensing unit bag
Include sensing block, motion bar, inductive switch, described sensing block can be reciprocatingly along described stack of substrates direction of feed
It is arranged on relative with described stack of substrates position in described suction unit, described sensing block has primary importance and the
Two positions, when described sensing block is in primary importance, described sensing block at least partly protrudes from described conveying
Outside belt surface；When described sensing block is in the second position, described sensing block indentation is in described conveyer belt table
Within face；Described motion bar has first end and the second end, the described first end of motion bar and described sensing
Block phase is fixed or is in transmission connection, the second end is adjacent with described inductive switch, the described the second end of motion bar and
Inductive switch is respectively positioned on the top in the highest liquid level face of described tank, when described sensing block is in primary importance, described
The second end and described inductive switch mutually do not contact；When described sensing block is in the second position, described second
End is pushed against on described inductive switch and is triggered unlatching.
2. slicing apparatus according to claim 1 it is characterised in that: described motion bar is a lever, described activity
The first end of bar is fixed with described sensing block phase.
3. slicing apparatus according to claim 1 it is characterised in that: described feed unit include one be used for supporting described
The substrate basket of stack of substrates, drive described substrate basket along the delivery device of direction of feed movement, described substrate basket is close
One end of suction unit is opening end.
4. slicing apparatus according to claim 3 it is characterised in that: described delivery device be screw-nut body.
5. slicing apparatus according to claim 1 it is characterised in that: the bottom of described suction unit is arranged on described
Tank in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410274571.4A CN104016153B (en) | 2014-06-19 | 2014-06-19 | Substrate distribution device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410274571.4A CN104016153B (en) | 2014-06-19 | 2014-06-19 | Substrate distribution device |
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| Publication Number | Publication Date |
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| CN104016153A CN104016153A (en) | 2014-09-03 |
| CN104016153B true CN104016153B (en) | 2017-01-18 |
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| CN201410274571.4A Active CN104016153B (en) | 2014-06-19 | 2014-06-19 | Substrate distribution device |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104609146B (en) * | 2015-02-02 | 2017-05-17 | 无锡市南亚科技有限公司 | Separated silicon wafer conveying device and silicon wafer conveying method |
| CN105428287B (en) * | 2015-11-03 | 2018-07-24 | 中国电子科技集团公司第四十八研究所 | A kind of silicon wafer loading device |
| CN105460612A (en) * | 2015-12-31 | 2016-04-06 | 苏州博阳能源设备有限公司 | Silicon wafer separation mechanism |
| CN109537062A (en) * | 2018-10-25 | 2019-03-29 | 浙江理工大学 | One kind plus cocoon transmit sensing device and operating method |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1016919A (en) * | 1996-06-28 | 1998-01-20 | Tokyo Autom Mach Works Ltd | Sheet material supplier |
| JP4270434B2 (en) * | 2002-11-29 | 2009-06-03 | シャープ株式会社 | Substrate transfer device, substrate removal method, and substrate storage method |
| CN2914340Y (en) * | 2006-04-18 | 2007-06-20 | 曾登熙 | Lead-acid storage battery plate full-automatic wafer separator |
| CN202213984U (en) * | 2011-08-26 | 2012-05-09 | 武汉钢铁(集团)公司 | Wireless detecting device for funnel of belt conveyor |
| CN202784932U (en) * | 2012-08-22 | 2013-03-13 | 张家港市超声电气有限公司 | Negative-pressure automatic wafer separator |
| CN202967428U (en) * | 2012-11-01 | 2013-06-05 | 柳州钢铁股份有限公司 | Funnel plugging automatic stop device for belt conveyor |
| CN202948963U (en) * | 2012-12-07 | 2013-05-22 | 上海釜川超声波科技有限公司 | Elevating mechanism of silicon wafer separator |
| CN203959394U (en) * | 2014-06-19 | 2014-11-26 | 张家港市超声电气有限公司 | Slicing apparatus |
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