CN103988279A - 质谱仪真空接口方法以及设备 - Google Patents

质谱仪真空接口方法以及设备 Download PDF

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Publication number
CN103988279A
CN103988279A CN201280061127.3A CN201280061127A CN103988279A CN 103988279 A CN103988279 A CN 103988279A CN 201280061127 A CN201280061127 A CN 201280061127A CN 103988279 A CN103988279 A CN 103988279A
Authority
CN
China
Prior art keywords
plasma
intercepting
intercepting device
getter
mass spectrometer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201280061127.3A
Other languages
English (en)
Chinese (zh)
Inventor
A·A·马卡洛夫
L·洛特曼恩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Thermo Fisher Scientific Bremen GmbH
Original Assignee
Thermo Fisher Scientific Bremen GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thermo Fisher Scientific Bremen GmbH filed Critical Thermo Fisher Scientific Bremen GmbH
Publication of CN103988279A publication Critical patent/CN103988279A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0495—Vacuum locks; Valves
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H01J49/067—Ion lenses, apertures, skimmers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN201280061127.3A 2011-12-12 2012-12-12 质谱仪真空接口方法以及设备 Pending CN103988279A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1121291.7 2011-12-12
GB1121291.7A GB2498174B (en) 2011-12-12 2011-12-12 Mass spectrometer vacuum interface method and apparatus
PCT/EP2012/075302 WO2013087732A1 (en) 2011-12-12 2012-12-12 Mass spectrometer vacuum interface method and apparatus

Publications (1)

Publication Number Publication Date
CN103988279A true CN103988279A (zh) 2014-08-13

Family

ID=45560286

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201280061127.3A Pending CN103988279A (zh) 2011-12-12 2012-12-12 质谱仪真空接口方法以及设备

Country Status (8)

Country Link
US (1) US9697999B2 (https=)
JP (1) JP6030662B2 (https=)
CN (1) CN103988279A (https=)
AU (1) AU2012351701B2 (https=)
CA (1) CA2858459C (https=)
DE (1) DE112012005182B4 (https=)
GB (1) GB2498174B (https=)
WO (1) WO2013087732A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104637773A (zh) * 2015-02-16 2015-05-20 江苏天瑞仪器股份有限公司 质谱仪一级真空结构

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2498173C (en) * 2011-12-12 2018-06-27 Thermo Fisher Scient Bremen Gmbh Mass spectrometer vacuum interface method and apparatus
WO2015040392A1 (en) * 2013-09-20 2015-03-26 Micromass Uk Limited Ion inlet assembly
JP6512718B2 (ja) 2014-05-01 2019-05-15 ペルキネルマー ヘルス サイエンシーズ， インコーポレイテッド 試料中のセレンおよびケイ素の検出および定量化のためのシステムおよび方法
US10692692B2 (en) * 2015-05-27 2020-06-23 Kla-Tencor Corporation System and method for providing a clean environment in an electron-optical system
JP6048552B1 (ja) * 2015-08-21 2016-12-21 株式会社 イアス オンライン移送した分析試料の分析システム
DE102015122155B4 (de) 2015-12-17 2018-03-08 Jan-Christoph Wolf Verwendung einer Ionisierungsvorrichtung
EP3639289A2 (de) 2017-06-16 2020-04-22 Plasmion Gmbh Vorrichtung und verfahren zur ionisation eines analyten sowie vorrichtung und verfahren zur analyse eines ionisierten analyten
EP3474311A1 (en) * 2017-10-20 2019-04-24 Tofwerk AG Ion molecule reactor
KR102133334B1 (ko) * 2020-02-25 2020-07-14 영인에이스 주식회사 질량분석기
KR102728997B1 (ko) * 2021-12-02 2024-11-13 영인에이스 주식회사 질량 분석기
CN114536480B (zh) * 2022-03-02 2023-05-23 重庆天荣日盛家居科技有限公司 多工位木质家居板材切割设备

Citations (4)

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Publication number Priority date Publication date Assignee Title
US5625185A (en) * 1994-09-22 1997-04-29 Finnigan Mat Gmbh Mass spectrometer, especially ICP-MS
US6703610B2 (en) * 2002-02-01 2004-03-09 Agilent Technologies, Inc. Skimmer for mass spectrometry
US7009176B2 (en) * 2004-03-08 2006-03-07 Thermo Finnigan Llc Titanium ion transfer components for use in mass spectrometry
US7741600B2 (en) * 2006-11-17 2010-06-22 Thermo Finnigan Llc Apparatus and method for providing ions to a mass analyzer

Family Cites Families (11)

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US4341662A (en) 1980-04-11 1982-07-27 Pfefferle William C Method of catalytically coating low porosity ceramic surfaces
JPS6420669A (en) 1987-07-16 1989-01-24 Fujitsu Ltd Field-effect semiconductor device
JPH0542611Y2 (https=) * 1987-07-29 1993-10-27
JPS6445049A (en) * 1987-08-14 1989-02-17 Nippon Telegraph & Telephone Mass spectrograph for secondary ion
GB9525507D0 (en) 1995-12-14 1996-02-14 Fisons Plc Electrospray and atmospheric pressure chemical ionization mass spectrometer and ion source
JP3521218B2 (ja) * 1997-07-04 2004-04-19 独立行政法人産業技術総合研究所 金属−絶縁性セラミック複合サンプラー及びスキマー
GB9820210D0 (en) * 1998-09-16 1998-11-11 Vg Elemental Limited Means for removing unwanted ions from an ion transport system and mass spectrometer
JP4636800B2 (ja) * 2002-03-08 2011-02-23 ヴァリアン オーストラリア ピーティーワイ．エルティーディー． プラズマ質量分析計
JP5308641B2 (ja) * 2007-08-09 2013-10-09 アジレント・テクノロジーズ・インク プラズマ質量分析装置
US7915580B2 (en) 2008-10-15 2011-03-29 Thermo Finnigan Llc Electro-dynamic or electro-static lens coupled to a stacked ring ion guide
GB0908252D0 (en) * 2009-05-13 2009-06-24 Micromass Ltd Surface coating on sampling cone of mass spectrometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5625185A (en) * 1994-09-22 1997-04-29 Finnigan Mat Gmbh Mass spectrometer, especially ICP-MS
US6703610B2 (en) * 2002-02-01 2004-03-09 Agilent Technologies, Inc. Skimmer for mass spectrometry
US7009176B2 (en) * 2004-03-08 2006-03-07 Thermo Finnigan Llc Titanium ion transfer components for use in mass spectrometry
US7741600B2 (en) * 2006-11-17 2010-06-22 Thermo Finnigan Llc Apparatus and method for providing ions to a mass analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104637773A (zh) * 2015-02-16 2015-05-20 江苏天瑞仪器股份有限公司 质谱仪一级真空结构

Also Published As

Publication number Publication date
JP6030662B2 (ja) 2016-11-24
GB201121291D0 (en) 2012-01-25
DE112012005182T5 (de) 2014-08-28
CA2858459A1 (en) 2013-06-20
US9697999B2 (en) 2017-07-04
US20140331861A1 (en) 2014-11-13
AU2012351701A1 (en) 2014-07-03
CA2858459C (en) 2020-03-31
DE112012005182B4 (de) 2021-01-21
JP2015502023A (ja) 2015-01-19
AU2012351701B2 (en) 2015-10-29
WO2013087732A1 (en) 2013-06-20
GB2498174A (en) 2013-07-10
GB2498174B (en) 2016-06-29

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Application publication date: 20140813

RJ01 Rejection of invention patent application after publication