CN103900495A - Large-diameter mirror plane shape detecting method and device based on stripe reflection - Google Patents

Large-diameter mirror plane shape detecting method and device based on stripe reflection Download PDF

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CN103900495A
CN103900495A CN201410164635.5A CN201410164635A CN103900495A CN 103900495 A CN103900495 A CN 103900495A CN 201410164635 A CN201410164635 A CN 201410164635A CN 103900495 A CN103900495 A CN 103900495A
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flat board
video camera
dull
longitudinal
stereotyped
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CN103900495B (en
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李博
徐晨
季波
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Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
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Nanjing Institute of Astronomical Optics and Technology NIAOT of CAS
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Abstract

The invention discloses a large-diameter mirror plane shape detecting method based on stripe reflection. According to the method, a projector projects standard stripes on a panel, imaging of the panel is conducted by a first camera, and the phase position of a standard stripe image is calibrated; meanwhile, the standard stripe image on the panel is reflected by a mirror plane to be detected to form a deformed stripe image which is then shot by a second camera, the phase position of the deformed stripe image is calculated, then the graded distribution of the mirror plane to be detected can be obtained according to the calibration result of the phase position of the standard stripe image, and then the shape of the mirror plane to be detected can be obtained through integration. The invention further discloses a detection device based on the detection method. The large-diameter mirror plane shape detecting method and device are suitable for detecting large-diameter mirror planes, the problem that the measurement diameter is limited due to the fact that a display for projection is limited in size when an existing stripe reflection mirror plane measurement device is used is solved, oblique shooting is avoided, and the measurement resolution ratio of a system is increased.

Description

A kind of heavy caliber mirror shape detection method and device based on streak reflex
Technical field
The invention belongs to optical measurement field, particularly a kind of heavy caliber mirror shape detection method and device based on streak reflex.
Background technology
Often use the more than 0.5 meter minute surface of bore at astronomical sight, space exploration and energy field, these heavy caliber minute surfaces are required to be processed into special face shape, comprise sphere, quadric surface and more complicated free form surface.Minute surface is in process, and constantly detection faces shape, to ensure correctly carrying out of processing.And for free form surface, cannot use traditional interference detection method.
Industrial circle, for the detection of free form surface minute surface, adopts three coordinate machine, contourgraph or calculation holographic interferometry conventionally now.Wherein contourgraph measurement range is limited, can not be used for the detection of heavy caliber minute surface; The measuring speed of three coordinate machine is extremely slow, affects working (machining) efficiency, and it is little to measure sampled point quantity; Although calculation holographic method precision is high, minute surface of every test all will be processed separately a hologram sheet, causes its dirigibility deficiency, cost high.
Streak reflex method has very high efficiency and dirigibility in the time detecting mirror shape, is applicable to detect all kinds minute surface.But existing streak reflex method detection technique is generally used LCD display projection standing striation, is subject to the restriction of display sizes, is difficult to measure heavy caliber minute surface.Meanwhile, display and video camera must be positioned at the both sides of minute surface normal, adopt oblique projection, and the stripe pattern that therefore video camera catches is compressed in a direction, have reduced the Measurement Resolution of this direction.
Summary of the invention
The object of the invention is the deficiency existing for prior art, a kind of heavy caliber mirror shape detection method and device based on streak reflex of measuring bore finiteness problem and having improved systematic survey resolution of having solved is provided.
For achieving the above object, the technical solution used in the present invention is a kind of heavy caliber mirror shape detection method based on streak reflex, comprises the following steps:
Step 1: use projector to flat board projection standing striation image, comprise horizontal standing striation image and longitudinal standing striation image, its middle plateform center is provided with dull and stereotyped mesopore, and the size of dull and stereotyped mesopore just in time can be held camera lens, sets up dull and stereotyped coordinate system taking the dull and stereotyped lower left corner as initial point;
Step 2: projector projects horizontal standing striation image to flat board, is taken by the first video camera, uses phase-shifting method to calculate the horizontal phase place on flat board to stripe pattern
Figure BDA0000494838570000011
Step 3: place in the x-direction standard length thing on flat board, by the first video camera, it is taken, can obtain the grid scale factor by the length of standard length thing:
Figure BDA0000494838570000012
Wherein x prepresent the grid scale factor,
Figure BDA0000494838570000021
represent respectively the phase value of this step Plays length thing one end and the other end, image Plays length thing one end and the directly horizontal phase place from flat board of the residing position of the other end that the two is taken according to the first video camera
Figure BDA0000494838570000022
correspondence position read, L is the length of standard length thing;
Step 4: the horizontal standing striation image on flat board becomes transversely deforming stripe pattern after tested mirror-reflection, is taken by the second video camera, obtains the phase theta of transversely deforming stripe pattern by phase-shifting method x, the horizontal phase place on the flat board obtaining according to step 2
Figure BDA0000494838570000023
the grid scale factor x obtaining with step 3 p, the horizontal direction gradient that obtains tested minute surface is:
Figure BDA0000494838570000024
Wherein ω xrepresent the horizontal direction gradient of tested minute surface, D is the dull and stereotyped distance to tested minute surface;
Step 5: projector projects longitudinal standing striation image to flat board, takes the longitudinal standing striation image on flat board by the first video camera, uses phase-shifting method to calculate the longitudinal phase place on flat board to stripe pattern
Step 6: place in the y-direction standard length thing on flat board, by the first video camera, it is taken, obtain longitudinal scale factor:
Figure BDA0000494838570000026
Wherein y prepresent longitudinal scale factor, represent respectively the phase value of this step Plays length thing one end and the other end, image Plays length thing one end and the directly longitudinal phase place from flat board of the residing position of the other end that the two is taken according to the first video camera correspondence position read;
Step 7: projector projects longitudinal standing striation image to flat board, after tested mirror-reflection, become linear deformation stripe pattern, taken by the second video camera, obtain the phase theta y of linear deformation stripe pattern by phase-shifting method, the longitudinal phase place on the flat board obtaining according to step 5
Figure BDA0000494838570000029
with longitudinal scale factor yp that step 6 obtains, the vertical direction gradient that obtains tested minute surface is:
Figure BDA00004948385700000210
Wherein ω y represents the vertical direction gradient of tested minute surface;
Step 8: the horizontal direction gradient ω x to tested minute surface and the vertical direction gradient ω to tested minute surface ycarry out the face shape that numerical integration obtains tested minute surface.
The invention also discloses the pick-up unit based on this detection method, comprise projector, the first video camera, flat board, the second video camera; Described flat board is provided with places the mesopore of the second video camera, and described projector and the first position for video camera be in dull and stereotyped below, and lays respectively at the both sides of mesopore, and the axis of the two becomes 40 ° of-50 ° of angles with flat board.
Preferably, the axis of described projector and the first video camera with dull and stereotyped at 45 ° ± 5 ° of angles.
Most preferred scheme is: the axis of described projector and the first video camera and dull and stereotyped angle at 45 °.
Beneficial effect: the present invention is applicable to detect heavy caliber minute surface, solve existing streak reflex minute surface measurement mechanism and caused measuring the limited problem of bore because projection display sizes is limited, can avoid oblique photography, promoted the Measurement Resolution of system simultaneously.
Brief description of the drawings
Fig. 1 is detection light path schematic diagram of the present invention;
Fig. 2 is horizontal standing striation image and longitudinal standing striation image;
Fig. 3 uses sounding rod to demarcate the schematic diagram of the grid scale factor;
Fig. 4 uses sounding rod to demarcate the schematic diagram of longitudinal scale factor;
Fig. 5 is the longitudinal phase place on horizontal phase place and the flat board on flat board;
Fig. 6 is horizontal direction deforming stripe image and vertical direction deforming stripe image;
Fig. 7 is the horizontal direction gradient of tested minute surface and the vertical direction gradient of tested minute surface;
Fig. 8 is the face shape of tested minute surface.
Embodiment
Below in conjunction with the drawings and specific embodiments, further illustrate the present invention, the present embodiment is implemented under taking technical solution of the present invention as prerequisite, should understand these embodiment and only be not used in and limit the scope of the invention for the present invention is described.
As shown in Figure 1, a kind of heavy caliber mirror shape pick-up unit based on streak reflex, comprises projector 1, the first video camera 2, flat board 3, the second video camera 4; Described dull and stereotyped 3 are provided with the mesopore 5 of placing the second video camera 4, and described projector 1 and the first video camera 2 are positioned at dull and stereotyped 3 belows, and lay respectively at the both sides of mesopore 5, the axis of the two and dull and stereotyped angle at 45 °.
Its detection method, arrange in the following order light path: standing striation image (comprising horizontal standing striation image and longitudinal standing striation image) is projected to planar surface by projector, the standing striation image of planar surface is taken by the first video camera, and the deforming stripe image obtaining after tested mirror-reflection is taken by the second video camera simultaneously.Standing striation image is sinusoidal straight parallel striped, wherein writing of horizontal standing striation image:
Figure BDA0000494838570000031
And longitudinally standing striation image can be write:
Figure BDA0000494838570000032
Wherein I represents the gray scale of stripe pattern, x and y are respectively the ordinates in horizontal ordinate and the stripe pattern in stripe pattern, M and N are respectively the striped frequency of x direction and the striped frequency of y direction, for the striped density of control criterion stripe pattern, value in general measure is advisable with 10 to 20, is decided to be 10 in this example;
Figure BDA0000494838570000049
for striped initial phase, according to phase-shifting method need to be set to 0, pi/2, π, four numerical value of 3 pi/2, mistake! Do not find Reference source.In shown M and N equal 10,
Figure BDA0000494838570000041
be 0 horizontal standing striation image and longitudinal standing striation image; Set up coordinate system taking the dull and stereotyped lower left corner as initial point.
According to the content of claims step 2, projector projects horizontal standing striation image to flat board, according to phase-shifting method, sets striped initial phase
Figure BDA00004948385700000410
value be respectively 0, in the situation of pi/2, π, 3 pi/2s, photograph the horizontal standing striation image of four width on flat board by the first video camera respectively, its gray scale is followed successively by I 1, I 2, I 3, I 4, the horizontal phase place that can obtain on dull and stereotyped is:
Horizontal phase place on flat board
Figure BDA0000494838570000043
result of calculation as mistake! Do not find Reference source.Shown in.
According to the content of claims step 3, in conjunction with mistake! Do not find Reference source., on flat board, place in the x-direction standard length thing, the standard length thing using in the present embodiment is sounding rod, by the first video camera, it is taken, and due to sounding rod and dull and stereotyped in same plane, therefore can obtain the grid scale factor by sounding rod length:
Figure BDA0000494838570000044
Wherein x prepresent the grid scale factor,
Figure BDA0000494838570000045
represent respectively the phase value of sounding rod one end and the other end, sounding rod left end and the directly horizontal phase place from flat board of the residing position of right-hand member in the two image of taking according to the first video camera correspondence position read, be respectively in this example-7.5rad and 7.5rad; Sounding rod length L is measured in advance by measurer (vernier caliper etc.), and its value is 1 meter; Therefore grid scale factor x pvalue be-1/15.
The horizontal standing striation image on flat board becomes transversely deforming stripe pattern after tested mirror-reflection, is taken, as mistake by the second video camera according to the content of claims step 4! Do not find Reference source.Shown in, obtain the phase theta of transversely deforming stripe pattern by the phase-shifting method identical with above-mentioned steps 2 x, the horizontal phase place on the flat board obtaining according to step 2
Figure BDA0000494838570000047
the grid scale factor x obtaining with step 3 p, the horizontal direction gradient that obtains tested minute surface is:
Figure BDA0000494838570000048
Wherein ω xrepresent the horizontal direction gradient of tested minute surface, D is the dull and stereotyped distance to tested minute surface, can obtain by various measurers or laser range finder, and the measurement result in this example is 0.5 meter, the horizontal direction gradient ω of the tested minute surface therefore calculating xas mistake! Do not find Reference source.Shown in.
According to the content of claims step 5, projector projects longitudinal standing striation image to flat board, take the longitudinal standing striation image on flat board by the first video camera, use the phase-shifting method identical with above-mentioned steps 2 to calculate the longitudinal phase place on flat board to image
Figure BDA0000494838570000051
According to the content of claims step 6, in conjunction with mistake! Do not find Reference source., on flat board, place in the y-direction sounding rod, by the first video camera, it is taken, obtain longitudinal scale factor:
Figure BDA0000494838570000052
Wherein y prepresent longitudinal scale factor, represent respectively the phase value of sounding rod one end and the other end in this step, the directly longitudinal phase place from flat board of residing position, sounding rod top and bottom in the two image of taking according to the first video camera
Figure BDA0000494838570000054
correspondence position read, be respectively in this example-9rad and 9rad, therefore longitudinal scale factor y pvalue be-1/18.
Projector projects longitudinal standing striation image to flat board, becomes linear deformation stripe pattern after tested mirror-reflection, is taken, as mistake by the second video camera according to the content of claims step 7! Do not find Reference source.Shown in, obtain the phase theta of linear deformation stripe pattern by phase-shifting method y, the longitudinal phase place on the flat board obtaining according to step 5
Figure BDA0000494838570000055
the longitudinal scale factor y obtaining with step 6 p, the vertical direction gradient that obtains tested minute surface is:
Figure BDA0000494838570000056
Wherein ω ythe vertical direction gradient that represents tested minute surface, result of calculation is as mistake! Do not find Reference source.Shown in.
According to the content of claims step 8, to the horizontal direction gradient ω of tested minute surface xvertical direction gradient ω with tested minute surface ycarry out the face shape that numerical integration obtains tested minute surface, result of calculation is as mistake! Do not find Reference source.Shown in.

Claims (4)

1. the heavy caliber mirror shape detection method based on streak reflex, its feature comprises the following steps:
Step 1: use projector to flat board projection standing striation image, comprise horizontal standing striation image and longitudinal standing striation image, its middle plateform center is provided with dull and stereotyped mesopore, and the size of dull and stereotyped mesopore just in time can be held camera lens, sets up dull and stereotyped coordinate system taking the dull and stereotyped lower left corner as initial point;
Step 2: projector projects horizontal standing striation image to flat board, is taken by the first video camera, uses phase-shifting method to calculate the horizontal phase place on flat board to stripe pattern
Figure FDA0000494838560000011
Step 3: place in the x-direction standard length thing on flat board, by the first video camera, it is taken, can obtain the grid scale factor by the length of standard length thing:
Figure FDA0000494838560000012
Wherein x prepresent the grid scale factor,
Figure FDA0000494838560000013
represent respectively the phase value of this step Plays length thing one end and the other end, image Plays length thing one end and the directly horizontal phase place from flat board of the residing position of the other end that the two is taken according to the first video camera
Figure FDA0000494838560000014
correspondence position read, L is the length of standard length thing;
Step 4: the horizontal standing striation image on flat board becomes transversely deforming stripe pattern after tested mirror-reflection, is taken by the second video camera, obtains the phase theta of transversely deforming stripe pattern by phase-shifting method x, the horizontal phase place on the flat board obtaining according to step 2
Figure FDA00004948385600000111
the grid scale factor x obtaining with step 3 p, the horizontal direction gradient that obtains tested minute surface is:
Figure FDA0000494838560000015
Wherein ω xrepresent the horizontal direction gradient of tested minute surface, D is the dull and stereotyped distance to tested minute surface;
Step 5: projector projects longitudinal standing striation image to flat board, takes the longitudinal standing striation image on flat board by the first video camera, uses phase-shifting method to calculate the longitudinal phase place on flat board to stripe pattern
Figure FDA0000494838560000016
Step 6: place in the y-direction standard length thing on flat board, by the first video camera, it is taken, obtain longitudinal scale factor:
Figure FDA0000494838560000017
Wherein y prepresent longitudinal scale factor,
Figure FDA0000494838560000018
represent respectively the phase value of this step Plays length thing one end and the other end, image Plays length thing one end and the directly longitudinal phase place from flat board of the residing position of the other end that the two is taken according to the first video camera
Figure FDA0000494838560000019
correspondence position read;
Step 7: projector projects longitudinal standing striation image to flat board, becomes linear deformation stripe pattern after tested mirror-reflection, is taken by the second video camera, obtains the phase theta of linear deformation stripe pattern by phase-shifting method y, the longitudinal phase place on the flat board obtaining according to step 5 the longitudinal scale factor y obtaining with step 6 p, the vertical direction gradient that obtains tested minute surface is:
Figure FDA0000494838560000021
Wherein ω yrepresent the vertical direction gradient of tested minute surface;
Step 8: to the horizontal direction gradient ω of tested minute surface xwith the vertical direction gradient ω to tested minute surface ycarry out the face shape that numerical integration obtains tested minute surface.
2. the heavy caliber mirror shape pick-up unit based on streak reflex, is characterized in that: comprise projector (1), the first video camera (2), dull and stereotyped (3), the second video camera (4); Described flat board (3) is provided with the mesopore (5) of placing the second video camera (4), described projector (1) and the first video camera (2) are positioned at flat board (3) below, and lay respectively at the both sides of mesopore (5), the axis of the two becomes 40 ° of-50 ° of angles with dull and stereotyped (3).
3. a kind of heavy caliber mirror shape pick-up unit based on streak reflex according to claim 2, is characterized in that: the axis of described projector (1) and the first video camera (2) and dull and stereotyped (3) are at 45 ° ± and 5 ° of angles.
4. according to a kind of heavy caliber mirror shape pick-up unit based on streak reflex described in claim 2 or 3, it is characterized in that: the axis of described projector (1) and the first video camera (2) and dull and stereotyped (3) angle at 45 °.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104458764A (en) * 2014-12-14 2015-03-25 中国科学技术大学 Curved uneven surface defect identification method based on large-field-depth stripped image projection
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CN108627121A (en) * 2018-05-15 2018-10-09 浙江中控太阳能技术有限公司 A kind of mirror shape detection device and its detection method
CN109855573A (en) * 2018-12-29 2019-06-07 中国科学院长春光学精密机械与物理研究所 A kind of multiple dimensioned surface appearance feature detection system of class mirror surface and its detection method

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