CN105444702A - Object flatness optical detection system - Google Patents
Object flatness optical detection system Download PDFInfo
- Publication number
- CN105444702A CN105444702A CN201510942510.5A CN201510942510A CN105444702A CN 105444702 A CN105444702 A CN 105444702A CN 201510942510 A CN201510942510 A CN 201510942510A CN 105444702 A CN105444702 A CN 105444702A
- Authority
- CN
- China
- Prior art keywords
- semi
- detecting device
- shell
- industrial camera
- process detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
Abstract
The invention discloses an object flatness optical detection system capable of combining the optical light interference principle and the industrial camera. The object flatness optical detection system has advantages of reasonable design and simple structure. The object flatness optical detection system comprises a laser transmission device (1), a light processing detection device (2), an industrial camera (3), and an image data processor. The laser transmission device is disposed on the outer part of the light inlet end of the light processing detection device (2), and the product to be detected is disposed on the outer part of the detection end of the light processing detection device (2). The industrial camera (3) is disposed on the lower part of the imaging end of the light processing detection device (2), and is connected with the image data processor. The object flatness optical detection system is suitable for the mini-sized electronic product screen surface flatness detection field.
Description
Technical field
The present invention relates to a kind of object flatness Systems for optical inspection.
Background technology
Interfere measurement technique is a special kind of skill carrying out measuring based on principle of optical interference, and interference technique and interferometer occupy critical role in optical measurement.Compared with general Optical imaging measurement technology, interferometry has the features such as wide range, high sensitivity, high precision.Along with the appearance of laser technology and apply in interferometry field, interfere measurement technique is had in range, resolution, anti-interference ability, measuring accuracy etc. and improves significantly.Image quality evaluation from the quality control of optical element to optical system, from the optical technology of classics to adaptive optics engineering, the application of modern interfere measurement technique is constantly expanded.
But current interfere measurement technique adopts visual or photographic means to carry out estimating of interference fringe to read, and estimates the face shape error on tested corrugated according to the distortion of interference fringe.Estimate the distortion of reading interference fringe with visual, generally estimate read precision be λ/, and estimate the striped distortion reality read and also comprise the systematic error of interferometer self, and non-fully is the actual face shape error on tested corrugated.Adopt photographic means recording interference fringe, be to visual estimate read larger improvement. interferogram is photographed on photo and can measure more accurately interference fringe by other instrument, such as adopt the technology such as ZYGO chi, the distortion of striped is assessed in center by finding every stripe on streak photograph, the interpretation precision of striped can be brought up to λ/10-λ/50, but during corresponding interference fringe film recording, reality still comprises the systematic error of interferometer and the distortion of photographic lens.Meanwhile, in measuring process, the dispersion of the Random Effect such as atmospheric disturbance, ambient vibration and exposure mediella also can introduce error.Although people once adopted microdensitometer or photoelectric scanning device to improve the interpretation precision of striped, above-mentioned additive error still cannot be eliminated, thus limited the raising of conventional interference detection technique precision.
Interference fringe estimates that to read efficiency low, the distortion equal error of the Random Effect such as atmospheric disturbance, ambient vibration and the exposure dispersion of mediella, the systematic error of interferometer and photographic lens is easily introduced in measuring process, and usually above-mentioned error is not effectively eliminated in data processing, so cause measuring result error comparatively large, precision is not high.
Summary of the invention
Technical matters to be solved by this invention overcomes the deficiencies in the prior art, provides a kind of reasonable in design, structure to combine again by the object flatness Systems for optical inspection of image data processor analyzing and processing with industrial camera simply by optical ray principle of interference.
The technical solution adopted in the present invention is: the present invention includes generating laser, light process detecting device, industrial camera and image data processor, described generating laser is arranged on outside the light inlet of described light process detecting device, product to be detected is placed in outside the test side of described light process detecting device, described industrial camera is arranged on the below of the imaging end of described light process detecting device, and described industrial camera is connected with described image data processor.
Described light process detecting device comprises shell, spectroscope, condenser, the first aperture, semi-permeable mirror, collimator objective and semi-transparent reference mirror perpendicular to the length direction of described shell is disposed with to described test side according to same level centre-height in described shell from described light inlet, described spectroscope is arranged on described light inlet, and described semi-transparent reference mirror is arranged on described test side.
The length direction of described spectroscopical minute surface and described shell is at an angle to each other.
Described light process detecting device also comprises and is arranged on second orifice diaphragm in described shell and eyepiece, described second orifice diaphragm is arranged on the below of described semi-permeable mirror and parallels with the length direction of described shell, described eyepiece is arranged on immediately below described second orifice diaphragm, and described eyepiece is arranged on described imaging end.
The periphery of described semi-transparent reference mirror is provided with piezoelectric crystal, and the periphery of described semi-transparent reference mirror and the inwall of described piezoelectric crystal are slidably connected, and described piezoelectric crystal is connected with external power source.
The invention has the beneficial effects as follows: in the present invention, owing to adding industrial camera and image data processor on the basis of traditional optical interference detector, so draw the interference image on test product surface in industrial camera and transfer to image data processor and carry out data analysis, thus artificial naked-eye observation image in the past can be replaced, greatly increase work efficiency and accuracy of detection.
Accompanying drawing explanation
Fig. 1 is structure of the present invention and light path principle schematic diagram.
Embodiment
As shown in Figure 1, the present invention includes generating laser 1, light process detecting device, industrial camera 3 and image data processor, described generating laser is arranged on outside the light inlet of described light process detecting device, product to be detected is placed in outside the test side of described light process detecting device, described industrial camera 3 is arranged on the below of the imaging end of described light process detecting device, and described industrial camera 3 is connected with described image data processor.
Described light process detecting device comprises shell, spectroscope 21, condenser 22, the first aperture 23, semi-permeable mirror 24, collimator objective 25 and semi-transparent reference mirror 26 perpendicular to the length direction of described shell is disposed with to described test side according to same level centre-height in described shell from described light inlet, described spectroscope 21 is arranged on described light inlet, and described semi-transparent reference mirror 26 is arranged on described test side.
The minute surface of described spectroscope 21 and the length direction of described shell at an angle to each other, in this specific embodiment, the angle ranging from 45 degree.
Described light process detecting device also comprises and is arranged on second orifice diaphragm 27 in described shell and eyepiece 28, described second orifice diaphragm 27 is arranged on the below of described semi-permeable mirror 24 and parallels with the length direction of described shell, described eyepiece 28 is arranged on immediately below described second orifice diaphragm 27, and described eyepiece 28 is arranged on described imaging end.
The periphery of described semi-transparent reference mirror 26 is provided with piezoelectric crystal 29, and the described periphery of semi-transparent reference mirror 26 and the inwall of described piezoelectric crystal 29 are slidably connected, and described piezoelectric crystal 29 is connected with external power source.
Principle of work:
Open described generating laser 1, detecting light is incident upon on described spectroscope 21, by described spectroscope 21 being divided into two-beam and after being incident upon the two ends up and down of described condenser 22, become the detection light that two bundles intersect, its intersection point is just on the hole of described first aperture 23, by described first aperture 23, this two bundle detects the two ends up and down that light is incident upon described collimator objective 25, two bundles described detection light ray parallel is made to be incident upon on described semi-transparent reference mirror 26 in the length direction of described shell by described collimator objective 25 again, parts for the described detection light of two bundles are incident upon product Shang Houbeiyuan road to be measured through described semi-transparent reference mirror 26 and are radiated to described semi-permeable mirror 24 and by the imaging on described eyepiece 28 of described two apertures 27, another part light of the described detection light of two bundles are just reflected at described semi-transparent reference mirror 26 place and former road is radiated to described semi-permeable mirror 24 and by the imaging on described eyepiece 28 of described two apertures 27, above-mentioned two pictures form the surperficial light interferogram of described product to be measured, described interferogram is caught by described industrial camera 3 and transfers to described image data processor.
Now start described piezoelectric crystal 29 and make described semi-transparent reference mirror 26 move minimum unit distance along the inwall of described piezoelectric crystal 29, movement at every turn, all can on described eyepiece 28, become a picture and be transferred to described image data processor.Described image data processor is by the multiple described interference image of analyzing and processing, and finally draw data, according to these data, staff judges that whether the surface smoothness of described product to be measured is up to standard.
The present invention is applicable to small-sized electronic product screen surface flatness and adds survey field.
Claims (5)
1. object flatness Systems for optical inspection, it is characterized in that: it comprises generating laser (1), light process detecting device, industrial camera (3) and image data processor, described generating laser is arranged on outside the light inlet of described light process detecting device, product to be detected is placed in outside the test side of described light process detecting device (2), described industrial camera (3) is arranged on the below of the imaging end of described light process detecting device, and described industrial camera (3) is connected with described image data processor.
2. object flatness Systems for optical inspection according to claim 1, it is characterized in that: described light process detecting device comprises shell, spectroscope (21), condenser (22), the first aperture (23), semi-permeable mirror (24), collimator objective (25) and semi-transparent reference mirror (26) perpendicular to the length direction of described shell is disposed with to described test side according to same level centre-height in described shell from described light inlet, described spectroscope (21) is arranged on described light inlet, and described semi-transparent reference mirror (26) is arranged on described test side.
3. object flatness Systems for optical inspection according to claim 2, is characterized in that: the minute surface of described spectroscope (21) and the length direction of described shell at an angle to each other.
4. object flatness Systems for optical inspection according to claim 2, it is characterized in that: described light process detecting device (2) also comprises and is arranged on second orifice diaphragm (27) in described shell and eyepiece (28), described second orifice diaphragm (27) is arranged on the below of described semi-permeable mirror (24) and parallels with the length direction of described shell, described eyepiece (28) is arranged on immediately below described second orifice diaphragm (27), and described eyepiece (28) is arranged on described imaging end.
5. object flatness Systems for optical inspection according to claim 2, it is characterized in that: the periphery of described semi-transparent reference mirror (26) is provided with piezoelectric crystal (29), the periphery of described semi-transparent reference mirror (26) and the inwall of described piezoelectric crystal (29) are slidably connected, and described piezoelectric crystal (29) is connected with external power source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510942510.5A CN105444702A (en) | 2015-12-16 | 2015-12-16 | Object flatness optical detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510942510.5A CN105444702A (en) | 2015-12-16 | 2015-12-16 | Object flatness optical detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105444702A true CN105444702A (en) | 2016-03-30 |
Family
ID=55555179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510942510.5A Pending CN105444702A (en) | 2015-12-16 | 2015-12-16 | Object flatness optical detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105444702A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106840615A (en) * | 2017-03-24 | 2017-06-13 | 中国工程物理研究院应用电子学研究所 | A kind of pupil on-line measurement device and calibration method based on imaging conjugate |
| CN110207625A (en) * | 2019-04-25 | 2019-09-06 | 三门三友科技股份有限公司 | A kind of cathode plate flatness dynamic detection system and method |
| CN111156932A (en) * | 2020-03-10 | 2020-05-15 | 凌云光技术集团有限责任公司 | Mirror surface material roughness detection device |
| CN111238419A (en) * | 2020-01-20 | 2020-06-05 | 中车齐齐哈尔车辆有限公司 | Detection device and detection method for flatness of sliding valve pair of brake valve |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1069804A (en) * | 1991-08-20 | 1993-03-10 | 华中理工大学 | A kind of noncontact hard disc surface roughness measuring method |
| CN1862313A (en) * | 2006-06-12 | 2006-11-15 | 霍尔国际有限公司 | Optical imaging system and optical detecting system with same |
| CN101650169A (en) * | 2009-07-17 | 2010-02-17 | 山东富美科技有限公司 | Scraper planeness detection system |
| CN101881607A (en) * | 2010-06-10 | 2010-11-10 | 上海理工大学 | Planar error detection system |
| CN102519405A (en) * | 2011-12-20 | 2012-06-27 | 昆明理工大学 | Detector for flatness of reflecting surface of plane mirror and service method of detector |
| CN203464912U (en) * | 2013-09-22 | 2014-03-05 | 浙江大学 | Surface morphology anti-vibration interference measurement system |
| CN205383999U (en) * | 2015-12-16 | 2016-07-13 | 珠海市运泰利自动化设备有限公司 | Object roughness optical detection system |
-
2015
- 2015-12-16 CN CN201510942510.5A patent/CN105444702A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1069804A (en) * | 1991-08-20 | 1993-03-10 | 华中理工大学 | A kind of noncontact hard disc surface roughness measuring method |
| CN1862313A (en) * | 2006-06-12 | 2006-11-15 | 霍尔国际有限公司 | Optical imaging system and optical detecting system with same |
| CN101650169A (en) * | 2009-07-17 | 2010-02-17 | 山东富美科技有限公司 | Scraper planeness detection system |
| CN101881607A (en) * | 2010-06-10 | 2010-11-10 | 上海理工大学 | Planar error detection system |
| CN102519405A (en) * | 2011-12-20 | 2012-06-27 | 昆明理工大学 | Detector for flatness of reflecting surface of plane mirror and service method of detector |
| CN203464912U (en) * | 2013-09-22 | 2014-03-05 | 浙江大学 | Surface morphology anti-vibration interference measurement system |
| CN205383999U (en) * | 2015-12-16 | 2016-07-13 | 珠海市运泰利自动化设备有限公司 | Object roughness optical detection system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106840615A (en) * | 2017-03-24 | 2017-06-13 | 中国工程物理研究院应用电子学研究所 | A kind of pupil on-line measurement device and calibration method based on imaging conjugate |
| CN110207625A (en) * | 2019-04-25 | 2019-09-06 | 三门三友科技股份有限公司 | A kind of cathode plate flatness dynamic detection system and method |
| CN111238419A (en) * | 2020-01-20 | 2020-06-05 | 中车齐齐哈尔车辆有限公司 | Detection device and detection method for flatness of sliding valve pair of brake valve |
| CN111238419B (en) * | 2020-01-20 | 2021-10-01 | 中车齐齐哈尔车辆有限公司 | Detection device and detection method for flatness of sliding valve pair of brake valve |
| CN111156932A (en) * | 2020-03-10 | 2020-05-15 | 凌云光技术集团有限责任公司 | Mirror surface material roughness detection device |
| CN111156932B (en) * | 2020-03-10 | 2021-08-27 | 凌云光技术股份有限公司 | Mirror surface material roughness detection device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102183214B (en) | Method for optically detecting large-aperture aspherical mirror structure | |
| CN103791860B (en) | The tiny angle measurement device and method of view-based access control model detection technique | |
| CN102494623B (en) | Measuring method of non-contact measuring device of center to center distance of lens optical surfaces | |
| CN104215176B (en) | High accuracy optical interval measurement device and method | |
| JPH02170033A (en) | Inspection method and apparatus for | |
| CN103592108A (en) | CCD chip modulation transfer function test device and method | |
| CN101561401B (en) | Real-time observation method of crystal growing surface microstructure | |
| CN105444702A (en) | Object flatness optical detection system | |
| CN107121079B (en) | A kind of curved surface elevation information measuring device and method based on monocular vision | |
| CN106931901B (en) | A kind of linear field dispersion template interferometer of off-axis illumination | |
| CN109238659A (en) | A kind of focal length of lens measurement technology and device based on experiment ray tracing principle | |
| Miks et al. | Dependence of camera lens induced radial distortion and circle of confusion on object position | |
| Wu et al. | An accurate method for shape retrieval and displacement measurement using bi-prism-based single lens 3D digital image correlation | |
| CN205383999U (en) | Object roughness optical detection system | |
| CN110806181A (en) | High-precision optical extensometer and measuring method based on color camera | |
| CN110132174A (en) | Angel type lobster eye x-ray imaging eyeglass face type test device based on streak reflex method | |
| CN101943631B (en) | Photoelectric platform sight line stabilization error tester | |
| CN106931900B (en) | A kind of linear field dispersion template interferometer of coaxial-illuminating | |
| CN108413893B (en) | Method and device for detecting surface shape of planar element by speckle deflection technique | |
| RU2531555C2 (en) | Autocollimation method of changing focal distance | |
| CN106403829B (en) | Coating thickness detector based on double light path infrared reflection method | |
| CN110186388A (en) | Synchronization phase shift measurement system and method based on white light interference spectrum | |
| Nakamura et al. | Speckle beam-oriented schlieren technique | |
| CN108151674A (en) | A kind of method and apparatus for improving optical detecting instrument precision | |
| KR102254322B1 (en) | Optical interferometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160330 |