CN205383999U - Object roughness optical detection system - Google Patents
Object roughness optical detection system Download PDFInfo
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- CN205383999U CN205383999U CN201521051549.XU CN201521051549U CN205383999U CN 205383999 U CN205383999 U CN 205383999U CN 201521051549 U CN201521051549 U CN 201521051549U CN 205383999 U CN205383999 U CN 205383999U
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- 230000003287 optical effect Effects 0.000 title claims abstract description 17
- 238000001514 detection method Methods 0.000 title abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 22
- 238000012360 testing method Methods 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims description 8
- 238000013461 design Methods 0.000 abstract description 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000003746 surface roughness Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 9
- 238000005305 interferometry Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 3
- 230000009897 systematic effect Effects 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 238000013441 quality evaluation Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Abstract
The utility model provides a reasonable in design, simple structure pass through combine together rethread image data treater analysis processes's object roughness optical detection system of optics light principle of interference and industry camera. The utility model discloses a detector (2), industry camera (3) and image data treater are handled to laser emitter (1), light, laser emitter sets up light is waited the product that detects and is arranged in outside handling the smooth end of advancing of detector (2) light is handled outside the sense terminal of detector (2), industry camera (3) set up the below of the formation of image end of detector (2) is handled to light, industry camera (3) with the image data treater is connected. The utility model is suitable for a small -size electronic product screen surface roughness adds the survey field.
Description
Technical field
This utility model relates to a kind of object flatness Systems for optical inspection.
Background technology
Interferometry technology is a special kind of skill of measurement based on principle of optical interference, and interference technique and interferometer occupy critical role in optical measurement.Compared with general Optical imaging measurement technology, interferometry has the features such as wide range, high sensitivity, high accuracy.Apply along with the appearance of laser technology and in interferometry field, make interferometry technology have in range, resolution, anti-interference ability, certainty of measurement etc. and significantly increase.From the quality control of optical element to the image quality evaluation of optical system, from classical optical technology to adaptive optics engineering, the application of modern interferometry technology is constantly expanded.
But current interferometry technology is to adopt what visual or photographic means carried out interference fringe to estimate reading, estimates the face shape error on tested corrugated according to the deformation of interference fringe.With visually estimating the deformation reading interference fringe, generally estimate reading precision be λ/, and the striped of estimated reading deformation reality also includes the systematic error of interferometer self, is not the actual face shape error being entirely tested corrugated.Adopt photographic means recording interference fringe, be read bigger improvement to visually estimating.Interferogram is photographed interference fringe can be measured by other instrument by photo more accurately, such as adopt the technology such as ZYGO chi, streak photograph is assessed the deformation of striped by finding the center of every stripe, the interpretation precision of striped can be brought up to λ/10-λ/50, but during corresponding interference fringe film recording, reality still comprises the systematic error of interferometer and the distortion of photographic lens.Meanwhile, in measurement process, the dispersion of the Random Effect such as atmospheric perturbation, ambient vibration and exposure mediella also can introduce error.Although people once adopted microdensitometer or photoelectric scanning device to improve the interpretation precision of striped, but above-mentioned additive error still cannot eliminate, thus limiting the raising of conventional interference detection technique precision.
It is low that interference fringe estimates reading efficiency, measurement process is readily incorporated the Random Effect such as atmospheric perturbation, ambient vibration and the distortion equal error of the exposure dispersion of mediella, the systematic error of interferometer and photographic lens, and generally above-mentioned error is not effectively eliminated in data processing, so causing that measuring result error is relatively big, precision is not high.
Utility model content
Technical problem to be solved in the utility model is to overcome the deficiencies in the prior art, it is provided that the object flatness Systems for optical inspection combined again through image data processor analyzing and processing with industrial camera by optical ray principle of interference of a kind of reasonable in design, simple in construction.
The technical scheme is that this utility model of this utility model includes generating laser, light processes detector, industrial camera and image data processor, described generating laser is arranged on outside the light inlet that described light processes detector, product to be detected is placed in outside the test side that described light processes detector, described industrial camera is arranged on the lower section that described light processes the imaging end of detector, and described industrial camera is connected with described image data processor.
Described light processes detector and includes shell, it is disposed with spectroscope, condenser lens from described light inlet to described test side according to same level centre-height, is perpendicular to the first aperture of the length direction of described shell, pellicle mirror, collimator objective and semi-transparent reference mirror in described shell, described spectroscope is arranged on described light inlet, and described semi-transparent reference mirror is arranged on described test side.
Described spectroscopical minute surface is at an angle to each other with the length direction of described shell.
Described light processes second orifice diaphragm and the eyepiece that detector also includes being arranged in described shell, described second orifice diaphragm is arranged on the lower section of described pellicle mirror and parallels with the length direction of described shell, described eyepiece is arranged on the underface of described second orifice diaphragm, and described eyepiece is arranged on described imaging end.
Being provided with piezoquartz on the periphery of described semi-transparent reference mirror, the periphery of described semi-transparent reference mirror and the inwall of described piezoquartz are slidably connected, and described piezoquartz is connected with external power source.
The beneficial effects of the utility model are: in this utility model, owing to the basis at traditional optical interference detector adding industrial camera and image data processor, so showing that the interference image on test product surface transmission to image data processor carry out data analysis in industrial camera, it is thus possible to replace conventional artificial naked-eye observation image, greatly increase work efficiency and accuracy of detection.
Accompanying drawing explanation
Fig. 1 is structure of the present utility model and light path principle schematic diagram.
Detailed description of the invention
As shown in Figure 1, this utility model includes generating laser 1, light processes detector, industrial camera 3 and image data processor, described generating laser is arranged on outside the light inlet that described light processes detector, product to be detected is placed in outside the test side that described light processes detector, described industrial camera 3 is arranged on the lower section that described light processes the imaging end of detector, and described industrial camera 3 is connected with described image data processor.
Described light processes detector and includes shell, it is disposed with spectroscope 21, condenser lens 22 from described light inlet to described test side according to same level centre-height, is perpendicular to the first aperture 23 of the length direction of described shell, pellicle mirror 24, collimator objective 25 and semi-transparent reference mirror 26 in described shell, described spectroscope 21 is arranged on described light inlet, and described semi-transparent reference mirror 26 is arranged on described test side.
The minute surface of described spectroscope 21 is at an angle to each other with the length direction of described shell, in this specific embodiment, the angle ranging from 45 degree.
Described light processes second orifice diaphragm 27 and the eyepiece 28 that detector also includes being arranged in described shell, described second orifice diaphragm 27 is arranged on the lower section of described pellicle mirror 24 and parallels with the length direction of described shell, described eyepiece 28 is arranged on the underface of described second orifice diaphragm 27, and described eyepiece 28 is arranged on described imaging end.
Being provided with piezoquartz 29 on the periphery of described semi-transparent reference mirror 26, the periphery of described semi-transparent reference mirror 26 and the inwall of described piezoquartz 29 are slidably connected, and described piezoquartz 29 is connected with external power source.
Operation principle:
nullOpen described generating laser 1，Detection light is incident upon on described spectroscope 21，After described spectroscope 21 being divided into two-beam and is incident upon the two ends up and down of described condenser lens 22，Become the detection light that two bundles intersect，On its intersection point hole just at described first aperture 23，By described first aperture 23，This two bundles detection light is incident upon the two ends up and down of described collimator objective 25，Two bundles described detection light ray parallel is made to be incident upon on described semi-transparent reference mirror 26 in the length direction of described shell by described collimator objective 25 again，Two parts restrainting described detection light are incident upon product Shang Houbeiyuan road to be measured through described semi-transparent reference mirror 26 and are radiated to described pellicle mirror 24 and by described two apertures 27 imaging on described eyepiece 28，The two another part light restrainting described detection light are just reflected at described semi-transparent reference mirror 26 place and former road is radiated to described pellicle mirror 24 and by described two apertures 27 imaging on described eyepiece 28，Above-mentioned two picture forms the surface light interferogram of described product to be measured，Described interferogram is caught and transmits by described industrial camera 3 to described image data processor.
Now start described piezoquartz 29 and make described semi-transparent reference mirror 26 move minimum unit distance along the inwall of described piezoquartz 29, moving every time, all can become a picture on described eyepiece 28 and be transferred to described image data processor.Described image data processor, by analyzing and processing multiple described interference images, finally draws data, according to these data, staff judges that whether the surface smoothness of described product to be measured is up to standard.
This utility model is applicable to small-sized electronic product screen surface flatness and adds survey field.
Claims (5)
1. an object flatness Systems for optical inspection, it is characterized in that: it includes generating laser (1), light processes detector, industrial camera (3) and image data processor, described generating laser is arranged on outside the light inlet that described light processes detector, product to be detected is placed in outside the test side that described light processes detector (2), described industrial camera (3) is arranged on the lower section that described light processes the imaging end of detector, and described industrial camera (3) is connected with described image data processor.
2. object flatness Systems for optical inspection according to claim 1, it is characterized in that: described light processes detector and includes shell, it is disposed with spectroscope (21), condenser lens (22) from described light inlet to described test side according to same level centre-height, is perpendicular to first aperture (23) of the length direction of described shell, pellicle mirror (24), collimator objective (25) and semi-transparent reference mirror (26) in described shell, described spectroscope (21) is arranged on described light inlet, and described semi-transparent reference mirror (26) is arranged on described test side.
3. object flatness Systems for optical inspection according to claim 2, it is characterised in that: the minute surface of described spectroscope (21) is at an angle to each other with the length direction of described shell.
4. object flatness Systems for optical inspection according to claim 2, it is characterized in that: described light processes second orifice diaphragm (27) and the eyepiece (28) that detector (2) also includes being arranged in described shell, described second orifice diaphragm (27) is arranged on the lower section of described pellicle mirror (24) and parallels with the length direction of described shell, described eyepiece (28) is arranged on the underface of described second orifice diaphragm (27), and described eyepiece (28) is arranged on described imaging end.
5. object flatness Systems for optical inspection according to claim 2, it is characterized in that: the periphery of described semi-transparent reference mirror (26) is provided with piezoquartz (29), the periphery of described semi-transparent reference mirror (26) and the inwall of described piezoquartz (29) are slidably connected, and described piezoquartz (29) is connected with external power source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521051549.XU CN205383999U (en) | 2015-12-16 | 2015-12-16 | Object roughness optical detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521051549.XU CN205383999U (en) | 2015-12-16 | 2015-12-16 | Object roughness optical detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205383999U true CN205383999U (en) | 2016-07-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521051549.XU Expired - Fee Related CN205383999U (en) | 2015-12-16 | 2015-12-16 | Object roughness optical detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205383999U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444702A (en) * | 2015-12-16 | 2016-03-30 | 珠海市运泰利自动化设备有限公司 | Object flatness optical detection system |
| WO2019079984A1 (en) * | 2017-10-25 | 2019-05-02 | 深圳前海小有技术有限公司 | Sterilization control processing method and surface disinfection and sterilization device |
-
2015
- 2015-12-16 CN CN201521051549.XU patent/CN205383999U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105444702A (en) * | 2015-12-16 | 2016-03-30 | 珠海市运泰利自动化设备有限公司 | Object flatness optical detection system |
| WO2019079984A1 (en) * | 2017-10-25 | 2019-05-02 | 深圳前海小有技术有限公司 | Sterilization control processing method and surface disinfection and sterilization device |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160713 |
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| CF01 | Termination of patent right due to non-payment of annual fee |