CN103899920A - Water leakage detection method for furnace pipe - Google Patents
Water leakage detection method for furnace pipe Download PDFInfo
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- CN103899920A CN103899920A CN201410106628.XA CN201410106628A CN103899920A CN 103899920 A CN103899920 A CN 103899920A CN 201410106628 A CN201410106628 A CN 201410106628A CN 103899920 A CN103899920 A CN 103899920A
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- manifold
- loading area
- boiler tube
- leaking
- water leakage
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Abstract
The invention discloses a water leakage detection method for a furnace pipe, and relates to the field of manufacturing of semiconductor integrated circuits. The furnace pipe comprises a loading area and a manifold which are communicated with each other, wherein an air exchange baffle is arranged between the loading area and the manifold so that the loading area can be sealed. The method is characterized in that a water leakage detection thread is arranged on the upper surface of the air exchange baffle, and the water leakage detection thread is used for detecting whether the furnace pipe leaks or not. According to the method, whether a cooling water pipe or a fast connector leaks or seeps or not is detected through the water leakage detection thread. Whether the PCW pipe and the fast connector on the manifold leak or seep or not can be fast detected, the water leakage condition is known at the first time, repeated maintenance work is avoided, and maintaining time is greatly saved on the premise that the quality is guaranteed.
Description
Technical field
The present invention relates to semiconductor integrated circuit and manufacture field, relate in particular to a kind of detecting method of leaking of boiler tube.
Background technique
Existing and cooling unit (PCW) boiler tube board is connected on manifold (manifold) by rapid pipe joint, therefore, in the time that PCW water pipe or rapid pipe joint are leaked, can leak above the baffle plate of taking a breath (scavenger cover).A large amount of leaking can affect the operation of whole board, and a small amount of time of leaking one length will produce aqueous vapor and particle, and whole loading area (loading area) and reaction chamber (tube) region are had to pollution, therefore affects the yield of wafer.
Chinese patent (CN102191484A) discloses reacting gas source injection pipe, boiler tube and semiconductor-fabricating device, according in reacting gas source injection pipe, on at least a portion tube wall of reacting gas source injection pipe, arranged multiple areoles, wherein said at least a portion tube wall is stretched in boiler tube in the time spraying reacting gas source.By arranging areole, make except injection pipe opening, gas can also flow out from these areoles, can shunt like this gas pressure, utilizes gas boundary layer, and incipient wink is sent out to pressure decreased; The distribution of air-flow is more even, more steady thereby gas passes into, thereby the film of deposition is also more even.
This patent has been alleviated the impulse force of sending out generation gas wink effectively, has avoided the interior accumulation film before of polysilicon injection pipe to come off, thereby has prevented particulate in film.But do not solve the problem that detection cold water pipes and rapid pipe joint are leaked.
Chinese patent (CN101368289A) discloses a kind of deposition boiler tube, comprise outer tube, inner tube, gas reaction chamber, air injector and for carrying the brilliant boat of wafer, described gas reaction chamber is formed in inner tube, brilliant boat is inserted in gas reaction chamber, described air injector comprises menifold and is installed in the plural nozzle on menifold, is formed with plural number through hole is installed on menifold, through hole is installed and is provided with a short slot; The position of the corresponding described short slot of described nozzle is formed with a boss, and described boss is contained in described short slot.
The air injector of this Patent design makes the position of nozzle in menifold relatively fixing, and the gas of input reaction chamber distributes according to preset concentration, is deposited on thin layer thickness distribution on wafer even after chemical reaction, has improved the yield of product.But do not solve the problem that detection cold water pipes and rapid pipe joint are leaked.
Summary of the invention
The present invention is the problem that the existing cold water pipes of solution and rapid pipe joint are leaked, thereby a kind of technological scheme of the detecting method of leaking of boiler tube is provided.
The detecting method of leaking of a kind of boiler tube of the present invention, described boiler tube comprises: loading area and manifold, described loading area is communicated with described manifold, between described loading area and described manifold, be provided with ventilation baffle plate, in order to seal described loading area, whether will leak detects line and is arranged at described ventilation baffle plate upper surface, leak described in employing to detect line and detect described boiler tube and leak.
Preferably, described in, leak and detect line and be arranged at the fringe region of described ventilation baffle plate.
Preferably, described boiler tube also comprises: cooling unit, and described cooling unit is communicated with described manifold by water-cooling tube port, and described water-cooling tube port is fixed on described manifold by rapid pipe joint.
Preferably, described boiler tube also comprises: reaction chamber, described reaction chamber is communicated with described loading area by described manifold.
Preferably, described boiler tube also comprises: brilliant boat, described brilliant boat, in order to load wafer, rises to described wafer reaction chamber from loading area.
Beneficial effect of the present invention:
The detecting method of leaking of a kind of boiler tube of the present invention detects line detection water-cooling tube by leaking and whether rapid pipe joint leaks or seep water phenomenon.Can detect rapidly the PCW water pipe on manifold and whether rapid pipe joint leaks or the phenomenon that seeps water, the very first time is known the situation of leaking, and avoids repeatedly carrying out maintenance work, greatly saves maintenance time under the prerequisite of ensuring the quality of products.
Accompanying drawing explanation
Fig. 1 is furnace tube structure schematic diagram of the present invention;
In accompanying drawing: 1. reaction chamber; 2. manifold; 3. cold water pipes; 4. ventilation baffle plate; 5. loading area; 6. leak and detect line.
Embodiment
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but not as limiting to the invention.
As shown in Figure 1, the invention provides a kind of detecting method of leaking of boiler tube, boiler tube comprises: loading area 5, manifold 2, cooling unit, reaction chamber 1 and brilliant boat (boat);
Loading area 5 is communicated with manifold 2, between loading area 5 and manifold 2, be provided with ventilation baffle plate 4, in order to seal whole loading area 5, corresponding technique also needs the oxygen concentration in loading area 5 (lower than 30ppm) up to standard, the whole process that guarantees that with this brilliant boat rises to reaction chamber 1 is carried out in desirable environment, to leak detects line 6 and is arranged at ventilation baffle plate 4 upper surfaces, and whether adopting leaks detects line 6 and detect boiler tube and leak, and leaks and detects line 6 and be arranged at the fringe region of ventilation baffle plate 4;
Cooling unit comprises multichannel cold water pipes 3, and each cooling pipe is communicated with manifold 2 by water-cooling tube port, and water-cooling tube port is fixed on manifold 2 by rapid pipe joint, and cooling unit is for cooling whole region;
Reaction chamber 1 is communicated with loading area 5 by manifold 2; Manifold 2 is arranged at the bottom of reaction chamber 1, in order to carry reaction chamber 1;
Brilliant boat, in order to load wafer, rises to wafer reaction chamber 1 from loading area 5.
The present invention detects line 6 after board routine maintenance and while normally operation by leaking, whether the cold water pipes 3 on confirmation ventilation baffle plate 4 top manifolds 2 and rapid pipe joint use when leaking or seeping water phenomenon, reach following purpose:
A. at board without remove ventilation baffle plate 4 and loading area 5 interior all devices by long-time cooling in the situation that, whether cooling unit and the rapid pipe joint understood rapidly on ventilation baffle plate 4 top manifolds 2 leak or seep water phenomenon;
B. in the time of routine maintenance, detect in time line 6 by leaking and find, and suspend follow-up maintenance work, dismounting cooling unit rapid pipe joint or change cold water pipes 3 again, to be confirmed leaking after detecting sensor alarm free continued maintenance work.The very first time is known the situation of leaking, and avoids repeatedly carrying out maintenance work, greatly saves maintenance time under the prerequisite of ensuring the quality of products.
The foregoing is only preferred embodiment of the present invention; not thereby limit embodiments of the present invention and protection domain; to those skilled in the art; the scheme that being equal to of should recognizing that all utilizations specification of the present invention and diagramatic content done replaces and apparent variation obtains, all should be included in protection scope of the present invention.
Claims (5)
1. the detecting method of leaking of a boiler tube, described boiler tube comprises: loading area and manifold, described loading area is communicated with described manifold, between described loading area and described manifold, be provided with ventilation baffle plate, in order to seal described loading area, whether it is characterized in that, will leak detects line and is arranged at described ventilation baffle plate upper surface, leak described in employing to detect line and detect described boiler tube and leak.
2. a kind of detecting method of leaking of boiler tube as claimed in claim 1, is characterized in that, described in leak and detect line and be arranged at the fringe region of described ventilation baffle plate.
3. a kind of detecting method of leaking of boiler tube as claimed in claim 1, it is characterized in that, described boiler tube also comprises: cooling unit, and described cooling unit is communicated with described manifold by water-cooling tube port, and described water-cooling tube port is fixed on described manifold by rapid pipe joint.
4. a kind of detecting method of leaking of boiler tube as claimed in claim 1, is characterized in that, described boiler tube also comprises: reaction chamber, described reaction chamber is communicated with described loading area by described manifold.
5. a kind of detecting method of leaking of boiler tube as claimed in claim 4, is characterized in that, described boiler tube also comprises: brilliant boat, described brilliant boat, in order to load wafer, rises to described wafer reaction chamber from loading area.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410106628.XA CN103899920A (en) | 2014-03-20 | 2014-03-20 | Water leakage detection method for furnace pipe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410106628.XA CN103899920A (en) | 2014-03-20 | 2014-03-20 | Water leakage detection method for furnace pipe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103899920A true CN103899920A (en) | 2014-07-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410106628.XA Pending CN103899920A (en) | 2014-03-20 | 2014-03-20 | Water leakage detection method for furnace pipe |
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| CN (1) | CN103899920A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002208623A (en) * | 2001-01-12 | 2002-07-26 | Tokyo Electron Ltd | Vertical heat treatment equipment and its control method |
| CN2600455Y (en) * | 2002-04-12 | 2004-01-21 | 东京毅力科创株式会社 | Vertical heat treatment device |
| CN1528948A (en) * | 2003-09-30 | 2004-09-15 | 张国华 | Gallium nitride base film epitaxial growth apparatus by metal organic chemical vapor deposition |
| CN201689872U (en) * | 2009-10-30 | 2010-12-29 | 中芯国际集成电路制造(上海)有限公司 | Heating furnace with gas detection equipment |
| CN102736433A (en) * | 2011-04-08 | 2012-10-17 | 上海微电子装备有限公司 | Protection device for leak of workpiece platform |
| TW201350777A (en) * | 2010-12-03 | 2013-12-16 | Tangteck Equipment Inc | Diffsion furnace device |
-
2014
- 2014-03-20 CN CN201410106628.XA patent/CN103899920A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002208623A (en) * | 2001-01-12 | 2002-07-26 | Tokyo Electron Ltd | Vertical heat treatment equipment and its control method |
| CN2600455Y (en) * | 2002-04-12 | 2004-01-21 | 东京毅力科创株式会社 | Vertical heat treatment device |
| CN1528948A (en) * | 2003-09-30 | 2004-09-15 | 张国华 | Gallium nitride base film epitaxial growth apparatus by metal organic chemical vapor deposition |
| CN201689872U (en) * | 2009-10-30 | 2010-12-29 | 中芯国际集成电路制造(上海)有限公司 | Heating furnace with gas detection equipment |
| TW201350777A (en) * | 2010-12-03 | 2013-12-16 | Tangteck Equipment Inc | Diffsion furnace device |
| CN102736433A (en) * | 2011-04-08 | 2012-10-17 | 上海微电子装备有限公司 | Protection device for leak of workpiece platform |
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Application publication date: 20140702 |
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| RJ01 | Rejection of invention patent application after publication |