CN102736433A - Protection device for leak of workpiece platform - Google Patents
Protection device for leak of workpiece platform Download PDFInfo
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- CN102736433A CN102736433A CN2011100879621A CN201110087962A CN102736433A CN 102736433 A CN102736433 A CN 102736433A CN 2011100879621 A CN2011100879621 A CN 2011100879621A CN 201110087962 A CN201110087962 A CN 201110087962A CN 102736433 A CN102736433 A CN 102736433A
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- leaks
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Abstract
The invention provides a protection device for leak of workpiece platforms comprising: a bottom plate, a cooling water pipe arranged on the bottom plate, a joint of cooling water and an electric assembly. The protection device for leak includes a leak protective groove mounted on one side of the bottom plate, wherein the cooling water pipe, the joint of cooling water and the electric assembly which needs to perform leak protection are mounted on the side of the bottom plate. Waterproof materials are pasted on the bottom and the side of the leak protection groove. The protection device for leak of workpiece platforms in the invention can design the distribution of the leak protection groove in the bottom plate of a micropositioner based on the needs and realize full-range protection to the bottom plate of the micropositioner. Leak is collected at a position of the leak protection groove for detection and the protection device has a simple structure and few used sensors. The device is convenient for detection and control and saves the cost.
Description
Technical field
The present invention relates to the semiconductor manufacturing facility technical field, particularly a kind of work stage protective device that leaks.
Background technology
Particularly in the litho machine, various device integrated levels are arranged comprising pipelines such as water, electricity, especially in the litho machine micropositioner than higher at the large scale integrated circuit production equipment.Please referring to Fig. 1, Fig. 1 is the structural representation of the litho machine micropositioner of prior art.As shown in Figure 1, be distributed with motor mount 11, cooling water pipe 12, warter connection 13, electrical connector 14, electric cable 15 on the micropositioner base plate 10.Because the raising of litho machine efficient, micropositioner acceleration of motion, speed increase, and cause water pipe head to become flexible and take place drainage easily, and in addition, wearing out of water pipe head and SLD also can cause drainage.In micropositioner, water pipe head and electrical connector integrated level are very high, and leaking to cause the electrical equipment cisco unity malfunction, cause the litho machine paralysis.Solution at present prevents that one of practices well that micropositioner leaks from being pressure boost sensor in pipeline, leaks but this method can only detect big flow, can't detect the phenomenon of a small amount of infiltration, and a small amount of infiltration also can bring same harm to litho machine; Two of practices well is that humidity sensor is installed near joint; This method can only detect the infiltration of subrange; And be distributed with tens water pipe heads in the litho machine micropositioner; Around each water pipe head, arrange that all humidity sensor obviously is difficult to accomplish, and bring a large amount of work to signal Processing and control, very unreasonable.
Summary of the invention
The technical matters that the present invention will solve provides a kind of work stage protective device that leaks, and can't go out micropositioner in Sensitive Detection with the work stage that solves prior art and leak and prevent effectively to leak to the hurtful problem of micropositioner in the situation.
For solving the problems of the technologies described above; The present invention provides a kind of work stage protective device that leaks; Said work stage comprises: base plate, be installed on cooling water pipe, warter connection and electric component on the said base plate; The said protective device that leaks comprises the protection groove that leaks, and the said protection groove that leaks is arranged in the said base plate; The said protection groove that leaks is distributed in the above cooling water pipe of said base plate, warter connection and a side of the electric component of the protection of need leaking; All post the water proof material on the bottom surface of the said protection groove that leaks and the side.
Optional; The protection groove that leaks that distributes on the said base plate is many and connects each other; Each bar of said mutual perforation leaks and protects the bottom surface of groove all to have certain degree of tilt; Have the darkest lowest point of place's degree of depth in the bottom surface of the protection groove that leaks that all connect each other, make the current that flow in all protection grooves that leak that connect each other all can be pooled to said lowest point, the place is equipped with detecting sensor at said lowest point.
Optional; Also be provided with the protection groove that independently leaks that can not connect in the said base plate with the protection groove that leaks of said mutual perforation; Every the said bottom surface that independently leaks the protection groove all has certain degree of tilt; Have the darkest lowest point of place's degree of depth in the bottom surface of every said protection groove that independently leaks, make the current that flow in the said protection groove that independently leaks all can be pooled to said lowest point, the place is equipped with detecting sensor at said lowest point.
Optional; The protection groove that leaks that distributes on the said base plate is many and separate; The bottom surface of said every the protection groove that independently leaks all has certain degree of tilt; Have the darkest lowest point of place's degree of depth in the bottom surface of said every the protection groove that independently leaks, make the current that flow into wherein all can be pooled to said lowest point, the place is equipped with detecting sensor at said lowest point.
Optional, all be filled with absorbent material in the space in the said protection groove that leaks on the said water proof material.
Optional, the surface of said absorbent material flushes with said base plate.
Optional, said water proof material is that polyurethane water-proof paint or third coagulates waterproof material.
Optional, said absorbent material is super absorbent resin or high-hydroscopicity plastics or sponge.
Work stage provided by the invention leak protective device through be provided with on the micropositioner base plate protection groove that leaks with the bottom on institute's might leak or possibly leaked parts enclosure of damage protect; With the collection of leaking that occurs on the micropositioner base plate, making leaks can not influence the operation of electric component on the micropositioner base plate through the protection groove that leaks.Leak on a small quantity by the absorbent material absorption in the protection groove that leaks, can not influence other electric components, leaking in a large number then to be pooled to the lowest point of the protection groove that leaks very soon, sends the signal that leaks through the detecting sensor that is installed on lowest point.Work stage of the present invention leak protective device can design as required leak in the micropositioner base plate protection groove distribution; Realization is to protecting in the micropositioner base plate gamut; Do not influence the normal function and the performance of fine motion base plate; Can guarantee each parts normal mounting, and can guarantee its precision, satisfy rigidity and requirement of strength simultaneously.Leaking, being concentrated on leaks protects the position, a place in the groove to detect, and simple in structure, the sensor of use is few, is convenient to detect and control, practices thrift cost.
Description of drawings
Fig. 1 is the structural representation of the litho machine micropositioner of prior art;
Fig. 2 is the leak structural representation of protective device of work stage of the present invention;
Fig. 3 is the leak cross-sectional view of the protection groove that leaks on the protective device of work stage of the present invention;
Fig. 4 is the leak distributed architecture synoptic diagram of the protection groove that leaks on the protective device of work stage of the present invention.
Embodiment
For make above-mentioned purpose of the present invention, feature and advantage can be more obviously understandable, below specific embodiments of the invention do detailed explanation.
The work stage of the present invention protective device multiple substitute mode capable of using of leaking realizes; Be to explain below through preferred embodiment; Certainly the present invention is not limited to this specific embodiment, and the general replacement that the one of ordinary skilled in the art knew is encompassed in protection scope of the present invention undoubtedly.
Please referring to Fig. 2; Fig. 2 is the leak structural representation of protective device of work stage of the present invention; As shown in Figure 2; Work stage of the present invention is leaked in the protective device, and said work stage comprises: motor mount 11, cooling water pipe 12, warter connection 13, electrical connector 14 and electric cable 15 are installed on base plate 10, the said base plate 10.The said protective device that leaks comprises the protection groove 16 that leaks, and the said protection groove 16 that leaks is arranged in the said base plate 10.
Please referring to Fig. 3, Fig. 3 is the leak cross-sectional view of the protection groove that leaks on the protective device of work stage of the present invention.As shown in Figure 3; The protection groove 16 that leaks that work stage of the present invention is leaked on the protective device is arranged in the said micropositioner base plate 10; The said bottom shape that leaks protection groove 16 is rectangle, arc or V-type etc., all posts water proof material 162 on the V-type bottom surface of the said protection groove 16 that leaks and the side, all fills absorbent material 161 in the space in the said protection groove 16 that leaks on the water proof material 162; Preferably, the surface of the absorbent material 161 of filling flushes with said micropositioner base plate 10.Said water proof material 162 can coagulate waterproof material for polyurethane water-proof paint or third.Said absorbent material 161 is super absorbent resin or high-hydroscopicity plastics or sponge.
Please referring to Fig. 4, Fig. 4 is the leak distributed architecture synoptic diagram of the protection groove that leaks on the protective device of work stage of the present invention.As shown in Figure 4, leak the protection groove 16 that leaks on the protective device of work stage of the present invention is distributed in and said cooling water pipe 12 and warter connection 13 is installed and a side of the electric component of the protection of need leaking on the said micropositioner base plate 10.The protection groove 16 that leaks that distributes on the said micropositioner base plate 10 is for many; And preferably it connects each other; Each bar of said mutual perforation leaks and protects the bottommost of groove 16V type bottom surface all to have certain degree of tilt; Has the darkest lowest point of place's degree of depth in the bottommost of the protection groove 16V type bottom surface that leaks that all connect each other; Make the current that flow in all protection grooves 16 that leak that connect each other all can be pooled to said lowest point, the place is equipped with detecting sensor 163 at said lowest point.
In order to simplify the installation quantity of detecting sensor 163 as much as possible, so that, also can simplify apparatus structure simultaneously and practice thrift cost to the control of detecting sensor.
In case leaking, work stage of the present invention drainage occurs on the protective device base plate then leaks promptly can being penetrated in the protection groove 16 that leaks.When leaking on a small quantity; Water can be absorbed by the absorbent material 161 of filling in the protection groove 16 that leaks very soon; The bottom surface and the side of protection groove 16 all are pasted with water proof material 162 owing to leak; Protection groove 16 interior the leaking of infiltrating of leaking can not be penetrated in other zones of micropositioner base plate 10, can effectively protect the electrical equipment on the micropositioner base plate 10; When leaking in a large number; Leaking flows into the protection groove 16 and flow along the pitch angle of protection groove 16 bottoms that leak and finally to be pooled to the lowest point of the protection groove 16 that leaks of leaking, and detects via the detecting sensor that is installed in the lowest point place 163 and leaks and send the signal that leaks.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.
Claims (8)
1. work stage protective device that leaks; Said work stage comprises: base plate, be installed on cooling water pipe, warter connection and electric component on the said base plate; It is characterized in that the said protective device that leaks comprises the protection groove that leaks, the said protection groove that leaks is arranged in the said base plate; The said protection groove that leaks is distributed in the above cooling water pipe of said base plate, warter connection and a side of the electric component of the protection of need leaking; All post the water proof material on the bottom surface of the said protection groove that leaks and the side.
2. the work stage as claimed in claim 1 protective device that leaks; It is characterized in that; The protection groove that leaks that distributes on the said base plate is many and connects each other; Each bar of said mutual perforation leaks and protects the bottom surface of groove all to have certain degree of tilt; Have the darkest lowest point of place's degree of depth in the bottom surface of the protection groove that leaks that all connect each other, make the current that flow in all protection grooves that leak that connect each other all can be pooled to said lowest point, the place is equipped with detecting sensor at said lowest point.
3. the work stage as claimed in claim 2 protective device that leaks; It is characterized in that; Also be provided with the protection groove that independently leaks that can not connect in the said base plate with the protection groove that leaks of said mutual perforation; Every the said bottom surface that independently leaks the protection groove all has certain degree of tilt; Have the darkest lowest point of place's degree of depth in the bottom surface of every said protection groove that independently leaks, make the current that flow in the said protection groove that independently leaks all can be pooled to said lowest point, the place is equipped with detecting sensor at said lowest point.
4. the work stage as claimed in claim 1 protective device that leaks; It is characterized in that; The protection groove that leaks that distributes on the said base plate is many and separate, and the bottom surface of said every the protection groove that independently leaks all has certain degree of tilt, has the darkest lowest point of place's degree of depth in the bottom surface of said every the protection groove that independently leaks; Feasible inflow current wherein all can be pooled to said lowest point, and the place is equipped with detecting sensor at said lowest point.
5. like the protective device that leaks of the described work stage of arbitrary claim in the claim 1 to 4, it is characterized in that, all be filled with absorbent material in the space in the said protection groove that leaks on the said water proof material.
6. the work stage as claimed in claim 5 protective device that leaks is characterized in that the surface of said absorbent material flushes with said base plate.
7. the work stage as claimed in claim 5 protective device that leaks is characterized in that said absorbent material is super absorbent resin or high-hydroscopicity plastics or sponge.
8. the work stage as claimed in claim 1 protective device that leaks is characterized in that, said water proof material is that polyurethane water-proof paint or third coagulates waterproof material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100879621A CN102736433A (en) | 2011-04-08 | 2011-04-08 | Protection device for leak of workpiece platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011100879621A CN102736433A (en) | 2011-04-08 | 2011-04-08 | Protection device for leak of workpiece platform |
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| Publication Number | Publication Date |
|---|---|
| CN102736433A true CN102736433A (en) | 2012-10-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011100879621A Pending CN102736433A (en) | 2011-04-08 | 2011-04-08 | Protection device for leak of workpiece platform |
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| CN (1) | CN102736433A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103899920A (en) * | 2014-03-20 | 2014-07-02 | 上海华力微电子有限公司 | Water leakage detection method for furnace pipe |
| CN103903685A (en) * | 2014-03-03 | 2014-07-02 | 安徽万博电缆材料有限公司 | Oil-resistant and waterproof multi-core coaxial cable |
| CN109199073A (en) * | 2017-06-30 | 2019-01-15 | 佛山市顺德区美的电热电器制造有限公司 | Leakage treatment device, cooking apparatus, leakage detection method and computer equipment |
| CN112161751A (en) * | 2020-09-15 | 2021-01-01 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine and water leakage detection method |
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| CN2743816Y (en) * | 2004-10-27 | 2005-11-30 | 于乔治 | Leakage water tester |
| JP2007160825A (en) * | 2005-12-16 | 2007-06-28 | Seiko Epson Corp | Ink leakage detection mechanism of printer |
| CN101520611A (en) * | 2004-04-14 | 2009-09-02 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN201527327U (en) * | 2009-07-10 | 2010-07-14 | 国网运行有限公司上海超高压管理处 | Water leakage detection warning system |
-
2011
- 2011-04-08 CN CN2011100879621A patent/CN102736433A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101520611A (en) * | 2004-04-14 | 2009-09-02 | Asml荷兰有限公司 | Lithographic apparatus and device manufacturing method |
| CN2743816Y (en) * | 2004-10-27 | 2005-11-30 | 于乔治 | Leakage water tester |
| JP2007160825A (en) * | 2005-12-16 | 2007-06-28 | Seiko Epson Corp | Ink leakage detection mechanism of printer |
| CN201527327U (en) * | 2009-07-10 | 2010-07-14 | 国网运行有限公司上海超高压管理处 | Water leakage detection warning system |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103903685A (en) * | 2014-03-03 | 2014-07-02 | 安徽万博电缆材料有限公司 | Oil-resistant and waterproof multi-core coaxial cable |
| CN103899920A (en) * | 2014-03-20 | 2014-07-02 | 上海华力微电子有限公司 | Water leakage detection method for furnace pipe |
| CN109199073A (en) * | 2017-06-30 | 2019-01-15 | 佛山市顺德区美的电热电器制造有限公司 | Leakage treatment device, cooking apparatus, leakage detection method and computer equipment |
| CN112161751A (en) * | 2020-09-15 | 2021-01-01 | 合肥芯碁微电子装备股份有限公司 | Direct-writing type photoetching machine and water leakage detection method |
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Application publication date: 20121017 |