CN103887318A - 包括一个或多个金属-电介质滤光器的传感器设备 - Google Patents
包括一个或多个金属-电介质滤光器的传感器设备 Download PDFInfo
- Publication number
- CN103887318A CN103887318A CN201310704361.XA CN201310704361A CN103887318A CN 103887318 A CN103887318 A CN 103887318A CN 201310704361 A CN201310704361 A CN 201310704361A CN 103887318 A CN103887318 A CN 103887318A
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- China
- Prior art keywords
- filter
- sensor
- filters
- dielectric
- sensor device
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 3
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- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 2
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- 229910045601 alloy Inorganic materials 0.000 description 2
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- 229910052581 Si3N4 Inorganic materials 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
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- 230000001105 regulatory effect Effects 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/208—Filters for use with infrared or ultraviolet radiation, e.g. for separating visible light from infrared and/or ultraviolet radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/20—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle
- G01J1/22—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle using a variable element in the light-path, e.g. filter, polarising means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0256—Compact construction
- G01J3/0259—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/14—Protective coatings, e.g. hard coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/283—Interference filters designed for the ultraviolet
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Optical Filters (AREA)
- Light Receiving Elements (AREA)
Abstract
Description
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202110184568.3A CN112951862A (zh) | 2012-12-19 | 2013-12-19 | 包括一个或多个金属-电介质滤光器的传感器设备 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/720,728 US9448346B2 (en) | 2012-12-19 | 2012-12-19 | Sensor device including one or more metal-dielectric optical filters |
US13/720,728 | 2012-12-19 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110184568.3A Division CN112951862A (zh) | 2012-12-19 | 2013-12-19 | 包括一个或多个金属-电介质滤光器的传感器设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103887318A true CN103887318A (zh) | 2014-06-25 |
CN103887318B CN103887318B (zh) | 2021-02-02 |
Family
ID=49753081
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310704361.XA Active CN103887318B (zh) | 2012-12-19 | 2013-12-19 | 包括一个或多个金属-电介质滤光器的传感器设备 |
CN202110184568.3A Pending CN112951862A (zh) | 2012-12-19 | 2013-12-19 | 包括一个或多个金属-电介质滤光器的传感器设备 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202110184568.3A Pending CN112951862A (zh) | 2012-12-19 | 2013-12-19 | 包括一个或多个金属-电介质滤光器的传感器设备 |
Country Status (7)
Country | Link |
---|---|
US (2) | US9448346B2 (zh) |
EP (1) | EP2746739A3 (zh) |
KR (2) | KR102027556B1 (zh) |
CN (2) | CN103887318B (zh) |
CA (1) | CA2835712C (zh) |
HK (1) | HK1199144A1 (zh) |
TW (1) | TWI654749B (zh) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106604676A (zh) * | 2014-07-15 | 2017-04-26 | 传感技术股份有限公司 | 用于分析物传感器的对于高入射角度的光具有低敏感度的集成滤光器系统 |
CN107086224A (zh) * | 2016-02-12 | 2017-08-22 | 唯亚威解决方案股份有限公司 | 制造传感器装置 |
KR20170095158A (ko) * | 2016-02-12 | 2017-08-22 | 비아비 솔루션즈 아이엔씨. | 광학 필터 어레이 |
CN115104043A (zh) * | 2020-03-11 | 2022-09-23 | 莱博创新公司 | 节能窗镀膜 |
Families Citing this family (20)
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US10197716B2 (en) | 2012-12-19 | 2019-02-05 | Viavi Solutions Inc. | Metal-dielectric optical filter, sensor device, and fabrication method |
US9568362B2 (en) | 2012-12-19 | 2017-02-14 | Viavi Solutions Inc. | Spectroscopic assembly and method |
US9448346B2 (en) | 2012-12-19 | 2016-09-20 | Viavi Solutions Inc. | Sensor device including one or more metal-dielectric optical filters |
CA3194688A1 (en) | 2014-06-18 | 2015-12-23 | Viavi Solutions, Inc. | Metal-dielectric optical filter, sensor device, and fabrication method |
EP3283908B1 (en) * | 2015-04-15 | 2019-12-25 | Ocean Optics, Inc. | Dual coating and lift-off method for depositing and protecting patterned dielectric-metal coatings |
WO2016168232A1 (en) | 2015-04-15 | 2016-10-20 | Pixelteq, Inc. | Dual coating and lift-off method for protecting patterned dielectric-metal coatings |
US9869590B2 (en) * | 2015-05-29 | 2018-01-16 | Xerox Corporation | Spatially-resolved FWA spectrophotometer using micropatterned optical filters |
US9702689B2 (en) | 2015-06-18 | 2017-07-11 | Xerox Corporation | Use of a full width array imaging sensor to measure real time film thicknesses on film manufacturing equipment |
US9923007B2 (en) | 2015-12-29 | 2018-03-20 | Viavi Solutions Inc. | Metal mirror based multispectral filter array |
US9960199B2 (en) | 2015-12-29 | 2018-05-01 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
JP2018116150A (ja) * | 2017-01-18 | 2018-07-26 | 株式会社ニコン | 分光素子、固体撮像素子および分光素子の製造方法 |
US10451783B2 (en) | 2017-05-22 | 2019-10-22 | Viavi Solutions Inc. | Induced transmission filter having plural groups of alternating layers of dielectric material for filtering light with less than a threshold angle shift |
CN111093967A (zh) | 2017-10-05 | 2020-05-01 | 伟福夫特科技公司 | 提供双色效应的光学结构 |
TWI637502B (zh) * | 2017-12-05 | 2018-10-01 | 義明科技股份有限公司 | 光學感測裝置以及光學感測模組 |
WO2020205053A1 (en) | 2019-04-04 | 2020-10-08 | Wavefront Technology, Inc. | Optical structures providing dichroic effects |
WO2020219030A1 (en) * | 2019-04-23 | 2020-10-29 | Coherent AI LLC | High dynamic range optical sensing device employing broadband optical filters integrated with light intensity detectors |
US11081600B2 (en) * | 2019-05-10 | 2021-08-03 | Visera Technologies Company Limited | Light filter structure |
GB202102706D0 (en) * | 2021-02-25 | 2021-04-14 | Ams Ag | Method of manufacturing an optical element |
US20240203748A1 (en) * | 2021-04-26 | 2024-06-20 | Nilt Switzerland Gmbh | Multi-level structure fabrication |
EP4230973A1 (en) | 2021-12-27 | 2023-08-23 | Shenzhen Goodix Technology Co., Ltd. | Ambient light sensor and electronic device |
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CA2835712C (en) | 2021-07-13 |
US20140168761A1 (en) | 2014-06-19 |
KR20140079726A (ko) | 2014-06-27 |
US10222523B2 (en) | 2019-03-05 |
TW201432893A (zh) | 2014-08-16 |
US20170068025A1 (en) | 2017-03-09 |
CN112951862A (zh) | 2021-06-11 |
CA2835712A1 (en) | 2014-06-19 |
HK1199144A1 (zh) | 2015-06-19 |
CN103887318B (zh) | 2021-02-02 |
KR20190112697A (ko) | 2019-10-07 |
KR102106624B1 (ko) | 2020-05-04 |
TWI654749B (zh) | 2019-03-21 |
EP2746739A3 (en) | 2014-08-20 |
KR102027556B1 (ko) | 2019-10-01 |
EP2746739A2 (en) | 2014-06-25 |
US9448346B2 (en) | 2016-09-20 |
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