CN103884465B - A kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device - Google Patents
A kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device Download PDFInfo
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- CN103884465B CN103884465B CN201410151943.4A CN201410151943A CN103884465B CN 103884465 B CN103884465 B CN 103884465B CN 201410151943 A CN201410151943 A CN 201410151943A CN 103884465 B CN103884465 B CN 103884465B
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- perforated membrane
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Abstract
The invention discloses a kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device.In the present invention, the duct inwall of perforated membrane is coated with metal level, electrolytic solution is under pressure driving when flowing through duct, ion in electrolytic solution produces electrostatic double layer effect in duct, electric current is formed, by calculating the value that can obtain pressure differential pressure after the curtage signal in circuit is collected in the closed circuit that duct and signal pickup assembly are formed.Device of the present invention is without any mechanical component, and structure is simple, reliable and stable, does not need to provide external power supply to drive, pollution-free noiselessness, very friendly to environment; The present invention is applicable to the fluids such as liquids and gases, even can contain solid suspended particle in fluid; The present invention is according to different pore size and the measurement that can realize different range containing the liquid of different ions, and sensitivity is high, measures range large.
Description
Technical field
The invention belongs to detection field, relate to a kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device.
Background technology
Pressure and pressure reduction are parameters common in industrial practice, and it is measured and the collection of data is widely used in various apparatus, relates to numerous industries such as water conservancy and hydropower, production automatic control, Aero-Space, military project, petrochemical industry, medical treatment.In addition, people can obtain the physical parameters such as temperature, flow, liquid level indirectly by measuring gained pressure.Make for the demand of pressure and differential pressure measurement in different fluid electrolyte that measuring method is different to have their own characteristics each.
The measuring principle of current pressure transducer has pressure resistance type, condenser type, piezoelectric type etc., and these tonometric principles are different, and the applicable elements according to them is applied in various field with measurement range.Progress along with material technology, science and technology makes commercial Application demand development, requires to improve tonometric response speed, measuring accuracy and contract measurement device volume.Especially, the size of the device and equipment self of MEMS (micro electro mechanical system) (MEMS), system level chip (SystemonChip) fabrication techniques is minimum, and its bulk measured is micro-nano rank, proposes higher requirement to measurement component; And because the very little requirement to measuring error, precision of size wants high compared to the measurement under large scale and data acquisition time is short, matching requirements is intelligent, the pressure measurement method making some traditional is inapplicable or precision is inadequate.In addition, due to the restriction of measuring principle, some traditional measurement methods are difficult to be suitable under micro/nano-scale, and some pressure measurement methods with mechanical component can greatly reduce in reliability, precision.
Summary of the invention
The shortcoming and defect that the present invention exists to overcome prior art, provides a kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device.
Technical scheme provided by the invention is as follows:
A kind of pressure and differential pressure measurement device, comprise perforated membrane, be looped around the resilient material around perforated membrane, two the pressure-sensitive air bags be made up of toughness film, the metal wires being enclosed with insulating material and be placed in the signal pickup assembly of pressure-sensitive air bag outside; Wherein, the aperture of described perforated membrane is micron order or nano-grade size, and the duct inwall of perforated membrane is coated with metal level, and soldered on metal level have metal wire, and metal wire is drawn pressure-sensitive air bag and is connected with signal pickup assembly; Respectively there is a pressure-sensitive air bag both sides of perforated membrane, by being looped around the elastomer seal around perforated membrane between perforated membrane and pressure-sensitive air bag; Fill the electrolytic solution of variable concentrations in two pressure-sensitive air bags, electrolytic solution by during the micro-nano duct of perforated membrane because electrostatic double layer effect produces electric signal, electric signal is sent in signal pickup assembly by metal wire; Transform electrical signals is that pressure differential pressure numerical value exports by signal pickup assembly.
Described perforated membrane is aluminium oxide nano perforated membrane, fritted glass fiber or monox nanometer perforated membrane.
The method of the duct inwall metal cladding of described perforated membrane, comprise the following steps: first adopt the method for magnetron sputtering to make the metal level of nano thickness in perforated membrane side, then at the soldered metal wire being enclosed with insulating material of layer on surface of metal, the method for electro-deposition is then adopted to plate the metal halide of one deck nano thickness at layer on surface of metal; Repeat the opposite side of above-mentioned steps to perforated membrane to process.
The present invention is based on the principle of electrostatic double layer effect generating: electrolyte solution is by between two metal covering electrodes, and near metal covering, the excess charges that symbol is contrary appears in liquid level, thus makes alternate generation potential difference (PD); Between metal covering, connect external circuit, electrolyte solution continues through between two metal covering electrodes, and in electrolytic solution, positive and negative ion is rapidly to two polar motions under the electric field, and forms charge layer closely on the surface of two electrodes respectively, i.e. electrostatic double layer; External circuit and metal electrode, electrolytic solution form complete circuit, thus generation current voltage.
In the present invention, the duct inwall of perforated membrane is coated with metal level, electrolytic solution is under pressure driving when flowing through duct, ion in electrolytic solution produces electrostatic double layer effect in duct, electric current is formed, by calculating the value obtaining pressure/pressure reduction after the curtage signal in circuit is collected in the closed circuit formed by duct and outside line.
The present invention compared with prior art has the following advantages and beneficial effect:
1. device of the present invention is without any mechanical component, and structure is simple, and reliable and stable, pollution-free noiselessness, does not need to provide external power supply to drive, very friendly to environment;
2. the present invention is applicable as the fluid such as liquid or gas, even can contain solid suspended particle in fluid;
3. sensitivity of the present invention is high, measures range large, according to different pore size and the measurement that can realize different range containing the liquid of different ions;
4. the present invention can make stationary installation or plug-and-play apparatus.
Accompanying drawing explanation
Fig. 1 is electrostatic double layer effect principle schematic diagram.
Fig. 2 is aluminium oxide nano perforated membrane magnetron sputtering processing flow chart.
Fig. 3 is pressure of the present invention and differential pressure measurement device schematic diagram.Wherein, 1 is electrolytic solution; 2 is toughness film, and toughness film forms pressure-sensitive air bag 5 and pressure-sensitive air bag 6; 3 is perforated membrane; 4 is resilient material; 5 and 6 is pressure-sensitive air bag; 7 is metal wire; 8 is signal pickup assembly; 9 are coated with the duct of metal level for inwall.
Fig. 4 is pressure reduction and the voltage relationship figure of both sides pressure-sensitive air bag.
Embodiment
Below in conjunction with specific embodiment and accompanying drawing, further detailed description is done to the present invention, but embodiments of the present invention are not limited thereto.
The aluminium oxide nano perforated membrane adopted in embodiment is purchased from Shanghai NTI Co., Ltd.; Film is purchased from Hong Mei film company limited of Shenzhen.
Based on pressure and the differential pressure measurement device of duct electrostatic double layer effect, comprise perforated membrane, be looped around the resilient material around perforated membrane, two the pressure-sensitive air bags be made up of toughness film, the metal wires being enclosed with insulating material and be placed in the signal pickup assembly of pressure-sensitive air bag outside; Wherein, the aperture of described perforated membrane is micron order or nano-grade size, and the duct inwall of perforated membrane is coated with metal level, and soldered on metal level have metal wire, and metal wire is drawn pressure-sensitive air bag and is connected with signal pickup assembly; Respectively there is a pressure-sensitive air bag both sides of perforated membrane, by being looped around the elastomer seal around perforated membrane between perforated membrane and pressure-sensitive air bag; Fill electrolytic solution in described pressure-sensitive air bag, electrolytic solution by during the micro-nano duct of perforated membrane because electrostatic double layer effect produces electric signal, electric signal is sent in signal pickup assembly by metal wire; Transform electrical signals is that pressure differential pressure numerical value exports by described signal pickup assembly.
Embodiment
(1) magnetron sputtering process is carried out to aluminium oxide nano perforated membrane, process is as shown in Figure 2: first adopt the method for magnetron sputtering to sputter the thick chromium of one deck 15nm and the thick silver of one deck 100nm successively in aluminium oxide nano perforated membrane side, then at the soldered silver-colored line being enclosed with insulating material of silver layer surface, the method for electro-deposition is then adopted to deposit the thick silver chloride of one deck 100nm at silver layer surface; The method of magnetron sputtering is adopted to sputter the thick chromium of one deck 15nm and the thick silver of one deck 100nm successively at aluminium oxide nano perforated membrane opposite side, then at the soldered silver-colored line being enclosed with insulating material of silver layer surface, the magnetron sputtering process to aluminium oxide nano perforated membrane is namely completed.
(2) as shown in Figure 3, the aluminium oxide nano perforated membrane 3 through magnetron sputtering process is bumped into and has in the annular elastic material 4 of certain physical strength, silver-colored line 7 is drawn dividing plate 4, seals between aluminium oxide nano perforated membrane 3 and resilient material 4; The pressure-sensitive air bag 5 that aluminium oxide nano perforated membrane 3 both sides respectively have one to be made up of toughness film 2 and pressure-sensitive air bag 6; The edge of pressure-sensitive air bag 5 and pressure-sensitive air bag 6 is sealed in resilient material 4.Be 10 by electrolytic solution 1(concentration
-6the NaCl solution of mol/L) load in pressure-sensitive air bag 5, aluminium oxide nano perforated membrane 3 is wrapped up completely by pressure-sensitive air bag 5 and pressure-sensitive air bag 6, silver line 7 is enclosed with insulating material to isolate with electrolytic solution 1, silver-colored line is drawn from pressure-sensitive air bag 5 and 6, silver-colored line 7 is connected with signal pickup assembly 8, forms closed circuit.
(3) measure pressure: if the pressure of pressure-sensitive air bag 5 is known, pressure-sensitive air bag 6 be communicated with detected fluid or immerse in detected fluid, the fluid in pressure-sensitive air bag 6 can reflect the pressure of detected fluid.The pressure reduction that perforated membrane 3 both sides are formed makes ionic liquid with the duct 9 of certain flow velocity by nano-scale, and produce obvious electrostatic double layer effect, the electric current that electrostatic double layer effect is formed spreads out of by the metal level of duct inwall and silver-colored line, in data collector, demonstrate electric signal.The data such as the material behavior in foundation electric signal (curtage), environmental pressure, duct and geometrical property calculate and make transform electrical signals be pressure difference data, thus record the pressure of fluid.
(4) pressure reduction is measured: pressure-sensitive air bag 5 is communicated with the detected fluid of unknown pressure respectively with 6, can obtain electric signal and be converted into pressure difference data as the signal production process in step (4).During plant running:
Ag electrode reacts: Ag+Cl
-→ AgCl+e
-,
AgCl electrode reacts: AgCl+e
--→ Ag+Cl
-.
Xsect when duct 9 is rectangle, high for 55nm, wide be 100 μm, long for 1cm time, the pressure reduction of pressure-sensitive air bag 5 and 6 both sides and produce voltage relation as shown in Figure 4.
In embodiments of the invention, the effective dimensions in duct can be micron order or nanoscale, determines according to design requirement; The present invention can make stationary installation, also can make probe apparatus; In device, NaCl solution can substitute with other electrolytic solution; The electrode pair of device except Ag and AgCl electrode pair, also can be with other electrolytic solution with the use of electrode pair.For example use the liquid with certain carbonate concentration as electrolyte, can Ag and Ag be adopted
2cO
3as electrode pair, during plant running:
Ag electrode reacts: Ag+CO
3 2-→ Ag
2cO
3+ 2e
-,
Ag
2cO
3electrode reacts: Ag
2cO
3+ 2e
-→ Ag+CO
3 2-.
With specific embodiments and the drawings is explained in detail technical scheme of the present invention above, but the present invention is not limited to above-mentioned embodiment, in the ken that one skilled in the relevant art possesses, can also make a variety of changes under the prerequisite not departing from present inventive concept.
Claims (2)
1. pressure and a differential pressure measurement device, comprises perforated membrane, is looped around the resilient material around perforated membrane, two the pressure-sensitive air bags be made up of toughness film, the metal wires being enclosed with insulating material and is placed in the signal pickup assembly of pressure-sensitive air bag outside; It is characterized in that: the aperture of described perforated membrane is micron order or nano-grade size, and the duct inwall of perforated membrane is coated with metal level, and soldered on metal level have metal wire, and metal wire is drawn pressure-sensitive air bag and is connected with signal pickup assembly; Respectively there is a pressure-sensitive air bag both sides of perforated membrane, by being looped around the elastomer seal around perforated membrane between perforated membrane and pressure-sensitive air bag; Fill the electrolytic solution of variable concentrations in two pressure-sensitive air bags, electrolytic solution by during the micro-nano duct of perforated membrane because electrostatic double layer effect produces electric signal, electric signal is sent in signal pickup assembly by metal wire; Transform electrical signals is that pressure differential pressure numerical value exports by signal pickup assembly; The method of the duct inwall metal cladding of described perforated membrane, comprise the following steps: first adopt the method for magnetron sputtering to make the metal level of nano thickness in perforated membrane side, then at the soldered metal wire being enclosed with insulating material of layer on surface of metal, the method for electro-deposition is then adopted to plate the metal halide of one deck nano thickness at layer on surface of metal; Repeat the opposite side of above-mentioned steps to perforated membrane to process.
2. pressure according to claim 1 and differential pressure measurement device, is characterized in that: described perforated membrane is aluminium oxide nano perforated membrane, fritted glass fiber or monox nanometer perforated membrane.
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| CN201410151943.4A CN103884465B (en) | 2014-04-16 | 2014-04-16 | A kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device |
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| CN201410151943.4A CN103884465B (en) | 2014-04-16 | 2014-04-16 | A kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device |
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| CN103884465B true CN103884465B (en) | 2016-03-30 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103973170A (en) * | 2014-04-28 | 2014-08-06 | 国家电网公司 | Mechanical energy and electric energy conversion device |
| CN105698982B (en) * | 2016-01-31 | 2018-03-06 | 河海大学 | The sensor and its method of testing of Intelligent adjustment susceptibility |
| CN108383075B (en) * | 2018-01-19 | 2019-08-23 | 上海交通大学 | A kind of MEMS electric double layer capacitance pressure sensor flexible and preparation method thereof |
| CN109921686B (en) * | 2019-03-26 | 2020-06-02 | 中国科学院理化技术研究所 | Fluid power generation method and device based on funnel-shaped nanometer pore channel film |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0508517A2 (en) * | 1991-03-29 | 1992-10-14 | ENVEC Mess- und Regeltechnik GmbH + Co. | Compensated differential pressure transducer |
| CN101034026A (en) * | 2006-02-14 | 2007-09-12 | Abb专利有限公司 | Pressure measuring transducer |
| CN102384886A (en) * | 2010-09-01 | 2012-03-21 | 中国石油天然气集团公司 | Rock electrokinetic permeability measurement method |
-
2014
- 2014-04-16 CN CN201410151943.4A patent/CN103884465B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0508517A2 (en) * | 1991-03-29 | 1992-10-14 | ENVEC Mess- und Regeltechnik GmbH + Co. | Compensated differential pressure transducer |
| CN101034026A (en) * | 2006-02-14 | 2007-09-12 | Abb专利有限公司 | Pressure measuring transducer |
| CN102384886A (en) * | 2010-09-01 | 2012-03-21 | 中国石油天然气集团公司 | Rock electrokinetic permeability measurement method |
Non-Patent Citations (1)
| Title |
|---|
| 平行板微通道内压力驱动流的流动机理;刘凯辉等;《机械设计与研究》;20101031;第26卷(第5期);第84-88页 * |
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