CN103884465A - Pressure and differential pressure measuring device based on pore passage double electric layer effect - Google Patents
Pressure and differential pressure measuring device based on pore passage double electric layer effect Download PDFInfo
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- CN103884465A CN103884465A CN201410151943.4A CN201410151943A CN103884465A CN 103884465 A CN103884465 A CN 103884465A CN 201410151943 A CN201410151943 A CN 201410151943A CN 103884465 A CN103884465 A CN 103884465A
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Abstract
The invention discloses a pressure and differential pressure measuring device based on a pore passage double electric layer effect. A metal layer is plated on the inner wall of a pore passage of a porous membrane, ions in an electrolyte generate the double electric layer effect in the pore passage when the electrolyte is driven by pressure to flow through the pore passage, current is generated in a closed circuit formed by the pore passage and a signal collection device, current or voltage signals in the circuit are collected, and then a pressure or differential pressure value can be obtained through calculation. The pressure and differential pressure measuring device is provided with no mechanical rotating components, is simple in structure, stable and reliable, does not need to be driven by an external power supply device, and is free from pollution and noise, and environmentally friendly. The pressure and differential pressure measuring device can be applicable to liquid, gas and the like, and even the fluid contains solid suspended particles. According to the pressure and differential pressure measuring device based on the pore passage double electric layer effect, measurement of different ranges can be achieved based on different pore passage sizes and liquid containing different ions, sensitivity is extremely high, and the measurement span is large.
Description
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Technical field
The invention belongs to detection field, relate to a kind of pressure and differential pressure measurement device based on duct electrostatic double layer effect.
Background technology
Pressure and pressure reduction are parameters common in industrial practice, and the collection of its measurement and data is widely used in various device device, relate to numerous industries such as water conservancy and hydropower, production automatic control, Aero-Space, military project, petrochemical industry, medical treatment.In addition, people can obtain the physical parameters such as temperature, flow, liquid level indirectly by measuring gained pressure.Make for the demand of pressure and differential pressure measurement in different fluid electrolyte that measuring method is different to have their own characteristics each.
The measuring principle of pressure transducer has pressure resistance type, condenser type, piezoelectric type etc. at present, and these tonometric principles are different, is applied in various fields according to their applicable elements and measurement range.Along with the progress of material technology, science and technology makes commercial Application demand development, require to improve tonometric response speed, measuring accuracy and contract measurement device volume.Especially, the size of the device and equipment self of MEMS (micro electro mechanical system) (MEMS), system level chip (System on Chip) fabrication techniques is minimum, and the bulk of its measurement is micro-nano rank, and measurement component is proposed to higher requirement; And because size is very little, the requirement of measuring error, precision is wanted to height and data acquisition time is short, matching requirements is intelligent than the measurement under large scale, make that some traditional pressure measurement methods are inapplicable or precision is inadequate.In addition, due to the restriction of measuring principle, some traditional measurement methods are difficult to be suitable under micro/nano-scale, and some pressure measurement methods with mechanical component can reduce aspect reliability, precision greatly.
Summary of the invention
The shortcoming and defect that the present invention exists in order to overcome prior art, provides a kind of pressure and differential pressure measurement device based on duct electrostatic double layer effect.
Technical scheme provided by the invention is as follows:
A kind of pressure and differential pressure measurement device, the pressure-sensitive air bag of comprise perforated membrane, be looped around resilient material around of perforated membrane, two being made up of toughness film, be enclosed with the metal wire of insulating material and be placed in the signal pickup assembly of pressure-sensitive air bag outside; Wherein, the aperture of described perforated membrane is micron order or nano-grade size, and the duct inwall of perforated membrane is coated with metal level, and soldered on metal level have a metal wire, and metal wire is drawn pressure-sensitive air bag and is connected with signal pickup assembly; Respectively there is a pressure-sensitive air bag both sides of perforated membrane, between perforated membrane and pressure-sensitive air bag, seal by being looped around perforated membrane resilient material around; In two pressure-sensitive air bags, fill the electrolytic solution of variable concentrations,, because electrostatic double layer effect produces electric signal, electric signal is sent in signal pickup assembly by metal wire when in the micro-nano duct of electrolytic solution by perforated membrane the; Electric signal is converted into the output of pressure differential pressure numerical value by signal pickup assembly.
Described perforated membrane is aluminium oxide nano perforated membrane, fritted glass fiber or monox nanometer perforated membrane.
The method of the duct inwall metal cladding of described perforated membrane, comprise the following steps: first adopt the method for magnetron sputtering to make the metal level of nano thickness in perforated membrane one side, then at the soldered metal wire that is enclosed with insulating material of layer on surface of metal, then adopt the method for electro-deposition at the metal halide of layer on surface of metal plating one deck nano thickness; Repeating above-mentioned steps processes the opposite side of perforated membrane.
The present invention is based on the principle of electrostatic double layer effect generating: electrolyte solution is by between two metal covering electrodes, and near metal covering, the excess charges that symbol is contrary appears in liquid level, thereby makes alternate generation potential difference (PD); Between metal covering, connect external circuit, electrolyte solution is continuously by between two metal covering electrodes, and in electrolytic solution, positive and negative ion, rapidly to two polar motions under electric field, and forms charge layer closely, i.e. electrostatic double layer on the surface of two electrodes respectively; External circuit and metal electrode, electrolytic solution form complete circuit, thus generation current voltage.
In the present invention, the duct inwall of perforated membrane is coated with metal level, electrolytic solution is under pressure and drives while flowing through duct, ion in electrolytic solution produces electrostatic double layer effect in duct, in the closed circuit being formed by duct and outside line, form electric current, after curtage signal in circuit is collected, obtain the value of pressure/pressure reduction by reckoning.
The present invention compared with prior art has the following advantages and beneficial effect:
1. device of the present invention is without any mechanical component, simple in structure, reliable and stable, pollution-free noiselessness, and not needing provides external power supply to drive, very friendly to environment;
2. the present invention is applicable as the fluid such as liquid or gas, even in fluid, can contain solid suspended particle;
3. sensitivity of the present invention is high, measures range large, and the different pore sizes of foundation and the liquid containing different ions can be realized the measurement of different range;
4. the present invention can make stationary installation or plug-and-play apparatus.
Accompanying drawing explanation
Fig. 1 is electrostatic double layer effect principle schematic diagram.
Fig. 2 is aluminium oxide nano perforated membrane magnetron sputtering processing flow chart.
Fig. 3 is pressure of the present invention and differential pressure measurement device schematic diagram.Wherein, 1 is electrolytic solution; 2 is toughness film, and toughness film forms pressure-sensitive air bag 5 and pressure-sensitive air bag 6; 3 is perforated membrane; 4 is resilient material; 5 and 6 is pressure-sensitive air bag; 7 is metal wire; 8 is signal pickup assembly; 9 are coated with the duct of metal level for inwall.
Fig. 4 is pressure reduction and the voltage relationship figure of both sides pressure-sensitive air bag.
Embodiment
Below in conjunction with specific embodiment and accompanying drawing, the present invention is done to further detailed description, but embodiments of the present invention are not limited to this.
The aluminium oxide nano perforated membrane adopting in embodiment is purchased from Shang Haina and rises Instrument Ltd.; Film is purchased from Hong Mei film company limited of Shenzhen.
Pressure based on duct electrostatic double layer effect and a differential pressure measurement device, the pressure-sensitive air bag of comprise perforated membrane, be looped around resilient material around of perforated membrane, two being made up of toughness film, be enclosed with the metal wire of insulating material and be placed in the signal pickup assembly of pressure-sensitive air bag outside; Wherein, the aperture of described perforated membrane is micron order or nano-grade size, and the duct inwall of perforated membrane is coated with metal level, and soldered on metal level have a metal wire, and metal wire is drawn pressure-sensitive air bag and is connected with signal pickup assembly; Respectively there is a pressure-sensitive air bag both sides of perforated membrane, between perforated membrane and pressure-sensitive air bag, seal by being looped around perforated membrane resilient material around; In described pressure-sensitive air bag, fill electrolytic solution,, because electrostatic double layer effect produces electric signal, electric signal is sent in signal pickup assembly by metal wire when in the micro-nano duct of electrolytic solution by perforated membrane the; Described signal pickup assembly, is converted into the output of pressure differential pressure numerical value by electric signal.
Embodiment
(1) aluminium oxide nano perforated membrane is carried out to magnetron sputtering processing, process is as shown in Figure 2: first adopt the method for magnetron sputtering at the aluminium oxide nano perforated membrane one side chromium that sputter one deck 15 nm are thick successively and the thick silver of one deck 100 nm, then at the soldered silver-colored line that is enclosed with insulating material of silver layer surface, then adopt the method for electro-deposition at the thick silver chloride of silver layer surface deposition one deck 100nm; Adopt the method chromium that sputter one deck 15 nm are thick successively and the thick silver of one deck 100 nm of magnetron sputtering at aluminium oxide nano perforated membrane opposite side, then at the soldered silver-colored line that is enclosed with insulating material of silver layer surface, complete the magnetron sputtering processing to aluminium oxide nano perforated membrane.
(2) as shown in Figure 3, by being bumped in the annular elastic material 4 with certain physical strength through the aluminium oxide nano perforated membrane 3 of magnetron sputtering processing, silver-colored line 7 is drawn to dividing plate 4, sealing between aluminium oxide nano perforated membrane 3 and resilient material 4; Respectively there are a pressure-sensitive air bag 5 being made up of toughness film 2 and pressure-sensitive air bag 6 in aluminium oxide nano perforated membrane 3 both sides; The edge of pressure-sensitive air bag 5 and pressure-sensitive air bag 6 is sealed in resilient material 4.Be 10 by electrolytic solution 1(concentration
-6the NaCl solution of mol/L) pack in pressure-sensitive air bag 5, aluminium oxide nano perforated membrane 3 is wrapped up completely by pressure-sensitive air bag 5 and pressure-sensitive air bag 6, on silver line 7, being enclosed with insulating material can isolate with electrolytic solution 1, from pressure- sensitive air bag 5 and 6, draw silver-colored line, silver-colored line 7 is connected with signal pickup assembly 8, forms closed circuit.
(3) gaging pressure: if the pressure of pressure-sensitive air bag 5 is known, pressure-sensitive air bag 6 is communicated with to detected fluid or immerses in detected fluid, the fluid in pressure-sensitive air bag 6 can reflect the pressure of detected fluid.The pressure reduction that perforated membrane 3 both sides form makes ionic liquid pass through the duct 9 of nano-scale with certain flow velocity, and produce obvious electrostatic double layer effect, the electric current that electrostatic double layer effect forms can passing hole channel inwall metal level and silver-colored line spread out of, in data collector, demonstrate electric signal.Calculate and make electric signal be converted into pressure difference data according to the data such as material behavior and geometrical property in electric signal (curtage), environmental pressure, duct, thereby recording the pressure of fluid.
(4) measure pressure reduction: pressure- sensitive air bag 5 and 6 is communicated with respectively the detected fluid of unknown pressure, can obtain electric signal and be converted into pressure difference data as the signal production process in step (4).When device operation:
On Ag electrode, react: Ag+Cl
-→ AgCl+e
-,
On AgCl electrode, react: AgCl+ e
--→ Ag+ Cl
-.
When the xsect in duct 9 is rectangle, height be 55 nm, wide be 100 μ m, long during for 1cm, the pressure reduction of pressure- sensitive air bag 5 and 6 both sides and the relation that produces voltage are as shown in Figure 4.
In embodiments of the invention, the effective dimensions in duct can be micron order or nanoscale, determines according to design requirement; The present invention can make stationary installation, also can make probe apparatus; In device, NaCl solution can substitute with other electrolytic solution; The electrode pair of device, except Ag and AgCl electrode pair, can be also the electrode pair being used in conjunction with other electrolytic solution.For example use the liquid with certain carbonate concentration as electrolyte, can adopt Ag and Ag
2cO
3as electrode pair, when device operation:
On Ag electrode, react: Ag+CO
3 2-→ Ag
2cO
3+ 2e
-,
Ag
2cO
3on electrode, react: Ag
2cO
3+ 2e
-→ Ag+CO
3 2-.
With specific embodiments and the drawings is explained in detail technical scheme of the present invention above, but the present invention is not limited to above-mentioned embodiment, in the ken that one skilled in the relevant art possesses, can also under the prerequisite that does not depart from aim of the present invention, make a variety of changes.
Claims (3)
1. pressure and a differential pressure measurement device, is characterized in that: the pressure-sensitive air bag of comprise perforated membrane, be looped around resilient material around of perforated membrane, two being made up of toughness film, be enclosed with the metal wire of insulating material and be placed in the signal pickup assembly of pressure-sensitive air bag outside; Wherein, the aperture of described perforated membrane is micron order or nano-grade size, and the duct inwall of perforated membrane is coated with metal level, and soldered on metal level have a metal wire, and metal wire is drawn pressure-sensitive air bag and is connected with signal pickup assembly; Respectively there is a pressure-sensitive air bag both sides of perforated membrane, between perforated membrane and pressure-sensitive air bag, seal by being looped around perforated membrane resilient material around; In two pressure-sensitive air bags, fill the electrolytic solution of variable concentrations,, because electrostatic double layer effect produces electric signal, electric signal is sent in signal pickup assembly by metal wire when in the micro-nano duct of electrolytic solution by perforated membrane the; Electric signal is converted into the output of pressure differential pressure numerical value by signal pickup assembly.
2. device according to claim 1, is characterized in that: described perforated membrane is aluminium oxide nano perforated membrane, fritted glass fiber or monox nanometer perforated membrane.
3. device according to claim 1 and 2, it is characterized in that: the method for the duct inwall metal cladding of described perforated membrane, comprise the following steps: first adopt the method for magnetron sputtering to make the metal level of nano thickness in perforated membrane one side, then at the soldered metal wire that is enclosed with insulating material of layer on surface of metal, then adopt the method for electro-deposition at the metal halide of layer on surface of metal plating one deck nano thickness; Repeating above-mentioned steps processes the opposite side of perforated membrane.
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| CN201410151943.4A CN103884465B (en) | 2014-04-16 | 2014-04-16 | A kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device |
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| CN201410151943.4A CN103884465B (en) | 2014-04-16 | 2014-04-16 | A kind of pressure based on duct electrostatic double layer effect and differential pressure measurement device |
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| CN103884465B CN103884465B (en) | 2016-03-30 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103973170A (en) * | 2014-04-28 | 2014-08-06 | 国家电网公司 | Mechanical energy and electric energy conversion device |
| CN105698982A (en) * | 2016-01-31 | 2016-06-22 | 河海大学 | Intelligent sensitivity regulation sensor and test method thereof |
| CN108383075A (en) * | 2018-01-19 | 2018-08-10 | 上海交通大学 | A kind of MEMS electric double layer capacitances pressure sensor flexible and preparation method thereof |
| CN109921686A (en) * | 2019-03-26 | 2019-06-21 | 中国科学院理化技术研究所 | A kind of fluid-powered generation methods and its device based on infundibulate nano pore film |
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| EP0508517A2 (en) * | 1991-03-29 | 1992-10-14 | ENVEC Mess- und Regeltechnik GmbH + Co. | Compensated differential pressure transducer |
| CN101034026A (en) * | 2006-02-14 | 2007-09-12 | Abb专利有限公司 | Pressure measuring transducer |
| CN102384886A (en) * | 2010-09-01 | 2012-03-21 | 中国石油天然气集团公司 | Rock electrokinetic permeability measurement method |
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2014
- 2014-04-16 CN CN201410151943.4A patent/CN103884465B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0508517A2 (en) * | 1991-03-29 | 1992-10-14 | ENVEC Mess- und Regeltechnik GmbH + Co. | Compensated differential pressure transducer |
| CN101034026A (en) * | 2006-02-14 | 2007-09-12 | Abb专利有限公司 | Pressure measuring transducer |
| CN102384886A (en) * | 2010-09-01 | 2012-03-21 | 中国石油天然气集团公司 | Rock electrokinetic permeability measurement method |
Non-Patent Citations (1)
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|---|
| 刘凯辉等: "平行板微通道内压力驱动流的流动机理", 《机械设计与研究》 * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103973170A (en) * | 2014-04-28 | 2014-08-06 | 国家电网公司 | Mechanical energy and electric energy conversion device |
| CN105698982A (en) * | 2016-01-31 | 2016-06-22 | 河海大学 | Intelligent sensitivity regulation sensor and test method thereof |
| CN105698982B (en) * | 2016-01-31 | 2018-03-06 | 河海大学 | The sensor and its method of testing of Intelligent adjustment susceptibility |
| CN108383075A (en) * | 2018-01-19 | 2018-08-10 | 上海交通大学 | A kind of MEMS electric double layer capacitances pressure sensor flexible and preparation method thereof |
| CN109921686A (en) * | 2019-03-26 | 2019-06-21 | 中国科学院理化技术研究所 | A kind of fluid-powered generation methods and its device based on infundibulate nano pore film |
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| CN103884465B (en) | 2016-03-30 |
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