CN103973170A - Mechanical energy and electric energy conversion device - Google Patents
Mechanical energy and electric energy conversion device Download PDFInfo
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- CN103973170A CN103973170A CN201410175304.1A CN201410175304A CN103973170A CN 103973170 A CN103973170 A CN 103973170A CN 201410175304 A CN201410175304 A CN 201410175304A CN 103973170 A CN103973170 A CN 103973170A
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- semiconductor substrate
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
Abstract
The invention relates to a mechanical energy and electric energy conversion device, and belongs to the technical field of energy. The device comprises a semiconductor substrate provided with a nanoscale fluid passage, wherein the semiconductor substrate is installed in a cavity full of electrolytes, and the cavity is provided with a first surface and a second surface which are opposite to the two sides of the semiconductor substrate respectively and can move relative to the semiconductor substrate after being pressed; the first surface and the second surface, divided by the semiconductor substrate, of the cavity are fixedly connected with a positive external electrode plate and a negative external electrode plate connected with a positive electrode and a negative electrode of a power source respectively. The mechanical energy and electric energy conversion device has the advantages of being simple in structure and high in conversion efficiency, clean resources can be converted into electric energy, and it is hopeful that an emerging energy conversion approach can be provided for electric power supply shortage which is more and more serious. Meanwhile, due to conversion from electric energy to mechanical energy, solutions and the like containing toxic polluting charged particles can be effectively removed and filtered, and a new idea is provided for water source purification and other sewage disposal technologies.
Description
Technical field
The present invention relates to a kind of mechanical energy and device for converting electric energy, especially a kind of mechanical energy and mutual conversion equipment of electric energy based on solid nano hole, belongs to energy technologies field.
Background technology
According to the applicant understood, for a long time, the conversion equipment of mechanical energy and electric energy is mainly by cutting magnetic line movement.
Under the supply of electric power contradiction being becoming tight day, explore the exploitation field of new forms of energy, seek new energy supply power mode, method and be subject to the broad research of domestic and international expert, research team.The conversion that realizes mechanical energy and electric energy by voltage and pressure modulation is one of emerging in the last few years research field, but owing to lacking direct conversion equipment design, engineering application, it is main that correlative study mostly is theoretical simulation, and energy conversion efficiency is on the low side.
Summary of the invention
The object of the invention is to: a kind of device that can directly realize mechanical energy and electric energy conversion by voltage and pressure modulation is proposed, thus the practical application of raising energy conversion efficiency, engineering.
In order to reach above object, mechanical energy of the present invention and device for converting electric energy basic technical scheme are: comprise the flaky semiconductor substrate that is shaped with nanoscale fluid passage (nano-pore or nano-channel), described Semiconductor substrate is placed in and is full of in the cavity of electrolyte, described cavity have respectively with Semiconductor substrate two sides relative to and pressurized after first surface and the second surface that can move relative to Semiconductor substrate; Cavity is separated on the two sides of described Semiconductor substrate, and described first surface is connected with the positive and negative dispatch from foreign news agency pole plate that is connected power supply positive and negative electrode respectively with second surface.
The method of prior art processing nanoscale fluid passage is ripe, and application number is that 010101381212.4,200910010025.9 and 201110233453.5 Chinese patent discloses respectively nano-channel processing method, polymer plane nano-channel production method and nanometer fluid passage based on AFM and preparation method thereof.These nanoscale (yardstick) fluid passages based on solid material, especially Semiconductor substrate, as nano-channel (nanochannel), nano-pore (nanopore), the electric charge existing on vias inner walls surface is understood the electric charge (or ion) of suction phase reversed polarity and is repelled the electric charge (or ion) of polarity of the same race, thereby the electric charge of suction phase reversed polarity (or ion) is assembled.
Principle of the present invention is: in the time that exterior mechanical pressure applies pressure to first surface or passage second surface, will order about electrolyte stream through nano level fluid bore.The electric charge (or ion) of the gathering causing due to the shielding action to same sex electric charge of inherent surface charge in nanoscale fluid passage certainly will optionally only allow the ion of opposite polarity in electrolyte to pass through, thereby make the electrolyte of Semiconductor substrate both sides cavity produce ion concentration gradient, the external loop of result between positive and negative dispatch from foreign news agency pole plate produces charge transport, form electric current, realize the conversion of mechanical energy to electric energy.Otherwise, in the time applying voltage between positive and negative dispatch from foreign news agency pole plate, equally due to the selectivity of nanoscale (yardstick) fluid passage to ion, cause the ion of opposite polarity by nanoscale (yardstick) fluid passage, these ion guide cause electrolyte flow and bear extra both electrical force, thereby generation flow tendency, has realized the conversion of electric energy to mechanical energy.
The present invention further improves
Described Semiconductor substrate is the silicon-based substrate that thickness 0.5-0.7mm sheet silicon-based wafer is made.
The miniature cavity of the column type of distribution radius 0.05-0.30mm in described silicon-based substrate, the thickness at the bottom of described cavity chamber is 40nm-1um, is intervally distributed with nanoscale fluid passage.
Described nanoscale fluid passage is that radius is the nano-pore of 5 ± 2nm.
Described electrolyte is KCL or NaCL solution.
The concentration of described electrolyte is 0.5-1.3mol/L, and Ph value is 7.5-8.1.
The present invention not only has remarkable advantage simple in structure, conversion efficiency is high, and has realized the conversion of clean resource to electric energy, and the supply of electric power being expected to for being becoming tight day provides a kind of emerging energy conversion approach.Simultaneously electric energy is to the conversion of mechanical energy, can effectively remove, the toxic contaminative charged particle such as filtering solution, and for the sewage disposal technologies such as purified water source provide a kind of new approaches, the nano-pore Blast Furnace Top Gas Recovery Turbine Unit (TRT) of making thus can provide emergent charging.
Brief description of the drawings
Below in conjunction with accompanying drawing, the present invention is further illustrated.
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is the silicon wafer structural representation of construction drawing 1 silicon-based substrate.
Fig. 3 is the local structure for amplifying schematic diagram of Fig. 2.
Wherein, 1 is silicon-based substrate; 2 is nano-pore; 3 is electrolyte; 4 is upper surface; 5 is upper outside battery lead plate; 6 is lower surface; 7 is lower outside battery lead plate; 8 is mechanical pressure applies position and direction; 9 is weak current measuring equipment; 10 is power supply.
Embodiment
The present embodiment is a kind of mechanical energy based on nano-pore and the conversion equipment of electric energy, and its basic cellular construction as shown in Figure 1, comprises and be shaped with nanoscale fluid passage---the semiconductor silicon based substrate 1 of nano-pore 2.This silicon-based substrate 1 is placed in the cavity that is full of electrolyte 3.Cavity 3 have respectively with silicon-based substrate 1 two sides relative to and pressurized after first surface---lower surface 6 and second surface---upper surface 4 that can move relative to silicon-based substrate 1.Cavity is separated upper and lower two chambeies by the two sides of silicon-based substrate 1.Lower surface 6 is connected with the positive and negative dispatch from foreign news agency pole plate 7,5 that is connected power supply 10 positive and negative electrodes respectively with upper surface 4.
Silicon-based substrate 1 adopts the sheet silicon-based wafer of thickness 0.5-0.7mm to make, as shown in Figure 2, the miniature cavity 1-1 of column type of the surface distributed radius 0.05-0.30mm of silicon-based wafer, the THICKNESS CONTROL at the bottom of chamber is at 40nm-1um, as shown in Figure 3, at the bottom of chamber, be shaped with respectively nano-pore spaced apart 2.
Its main manufacturing process steps is:
Step 1: clean silicon-based wafer, adopt Microelectronic etching technique to be etched into the miniature cavity of proper alignment, and chamber base thickness degree is controlled to 40nm-1um, adopting microelectronic technique etching or the semiconductor silicon based substrate 1 of high-energy heavy ion irradiation, columned nano-pore 2 arrays make to distribute at the bottom of the chamber of miniature cavity; Nano-pore 2 radiuses are 5nm(diameter 10nm), axial length is that the chamber base thickness degree of silicon-based substrate 1 is 40nm-1um;
Step 2: the silicon-based substrate of making cylindric nano-pore 2 is carried out after clean, be placed in the cavity that holds electrolyte 3;
Step 3: the lower surface 6 that fixes cavity;
Step 4: inject electrolyte 3 to cavity, as the solution such as KCL, NaCL, its concentration is 0.5-1.3mol/L, and Ph value is 7.5-8.1, silicon-based substrate 1 and nano-pore 2 are by upper and lower electrolyte stratification two cavitys;
Step 5: prepare upper and lower dispatch from foreign news agency pole plate 5,7;
Step 6: install weak current measuring equipment 9, power supply 10 additional between the upper outside battery lead plate 5 of cavity, the lower outside battery lead plate 7 of cavity.
Because electric charge has the feature of " two like magnetic poles repel each other, there is a natural attraction between the sexes ", can be ostracised away from nano-pore region with the electric charge (or ion) of silicon-based substrate 1 surperficial identical polar, can be attracted at nano-pore 2 inner surfaces etc. and locate and accumulate with the electric charge (or ion) of the silicon-based substrate 1 surface charge opposite sex.When applying exterior mechanical pressure (10bar-200bar) at cavity upper surface 4 or lower surface 7, can be because of electrolyte flow time, same sex electric charge (or ion) cannot form by nano-pore 2 ion concentration gradient in silicon-based substrate 1 upper and lower chamber, both sides, generation current, realizes the conversion of mechanical energy to electric energy; When applied voltage between upper and lower dispatch from foreign news agency pole plate 5,7 (conventionally 0.21-0.5V), the ion concentration gradient that silicon-based substrate 1 upper and lower chamber, both sides forms gradually makes electrolyte towards making ion concentration gradient reduce the mobile trend of direction generation, thereby cause the displacement of upper surface 4 or lower surface 7 relative silicon-based substrate 1, realize the conversion of electric energy to fluid mechanical energy.
Theoretical and test all proves, the device of the present embodiment can pass through the cavity border on nano-pore both sides, by applying exterior mechanical pressure, realizes the conversion of mechanical energy to electric energy; Or by applying certain voltage in outside, cavity border, realize the conversion of electric energy to mechanical energy.Because outside pressure just can fast be realized the simple and easy conversion to electric energy, therefore the device of the present embodiment can be used for charging in the unintended emergency situation of the novel intelligent equipment such as mobile phone, mini mobile equipment, solves the charging difficulty of non-transformer occasion.
Claims (6)
1. a mechanical energy and device for converting electric energy, comprise the flaky semiconductor substrate that is shaped with nanoscale fluid passage, it is characterized in that: described Semiconductor substrate is placed in and is full of in the cavity of electrolyte, described cavity have respectively with Semiconductor substrate two sides relative to and pressurized after first surface and the second surface that can move relative to Semiconductor substrate; Cavity is separated on the two sides of described Semiconductor substrate, and described first surface is connected with the positive and negative dispatch from foreign news agency pole plate that is connected power supply positive and negative electrode respectively with second surface.
2. mechanical energy according to claim 1 and device for converting electric energy, is characterized in that: described Semiconductor substrate is the silicon-based substrate that thickness 0.5-0.7mm sheet silicon-based wafer is made.
3. mechanical energy according to claim 2 and device for converting electric energy, is characterized in that: the miniature cavity of the column type of distribution radius 0.05-0.30mm in described silicon-based substrate, the thickness at the bottom of described cavity chamber is 40nm-1um, is intervally distributed with nanoscale fluid passage.
4. mechanical energy according to claim 3 and device for converting electric energy, is characterized in that: described nanoscale fluid passage is that radius is the nano-pore of 5 ± 2nm.
5. mechanical energy according to claim 4 and device for converting electric energy, is characterized in that: described electrolyte is KCL or NaCL solution.
6. mechanical energy according to claim 5 and device for converting electric energy, is characterized in that: the concentration of described electrolyte is 0.5-1.3mol/L, and Ph value is 7.5-8.1.
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CN201410175304.1A CN103973170A (en) | 2014-04-28 | 2014-04-28 | Mechanical energy and electric energy conversion device |
PCT/CN2015/070748 WO2015165288A1 (en) | 2014-04-28 | 2015-01-15 | Mechanical energy and electric energy conversion device |
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WO2015165288A1 (en) * | 2014-04-28 | 2015-11-05 | 国家电网公司 | Mechanical energy and electric energy conversion device |
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CN101635532A (en) * | 2009-08-25 | 2010-01-27 | 北京大学 | Method for converting free energy stored in ion concentration gradient form into electric energy |
CN101715610A (en) * | 2007-06-17 | 2010-05-26 | 物理逻辑公司 | Carbon nano-tube power cell |
CN102611353A (en) * | 2012-04-11 | 2012-07-25 | 武汉大学 | Device for generating electricity by collecting environmental low-grade energy source |
CN103884465A (en) * | 2014-04-16 | 2014-06-25 | 武汉大学 | Pressure and differential pressure measuring device based on pore passage double electric layer effect |
CN203827222U (en) * | 2014-04-28 | 2014-09-10 | 国家电网公司 | Mechanical-to-electrical energy conversion device |
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CN101694816B (en) * | 2009-10-16 | 2011-05-11 | 清华大学 | Heterojunction and photoelectrochemistry mixed solar cell |
CN101719426B (en) * | 2009-11-26 | 2011-11-23 | 上海大学 | Flexible dye-sensitized solar cell and preparation method thereof |
JP2011147228A (en) * | 2010-01-13 | 2011-07-28 | Fujikura Rubber Ltd | Polymer actuator |
CN102303843B (en) * | 2011-08-15 | 2014-07-16 | 中国科学技术大学 | Nano fluid channel and manufacturing method thereof |
CN102899243B (en) * | 2012-09-21 | 2014-08-20 | 清华大学 | Graphene nanopore-microcavity-solid-state nanopore structure based DNA sequencing device and method |
CN103973170A (en) * | 2014-04-28 | 2014-08-06 | 国家电网公司 | Mechanical energy and electric energy conversion device |
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CN101715610A (en) * | 2007-06-17 | 2010-05-26 | 物理逻辑公司 | Carbon nano-tube power cell |
CN101635532A (en) * | 2009-08-25 | 2010-01-27 | 北京大学 | Method for converting free energy stored in ion concentration gradient form into electric energy |
CN102611353A (en) * | 2012-04-11 | 2012-07-25 | 武汉大学 | Device for generating electricity by collecting environmental low-grade energy source |
CN103884465A (en) * | 2014-04-16 | 2014-06-25 | 武汉大学 | Pressure and differential pressure measuring device based on pore passage double electric layer effect |
CN203827222U (en) * | 2014-04-28 | 2014-09-10 | 国家电网公司 | Mechanical-to-electrical energy conversion device |
Cited By (1)
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WO2015165288A1 (en) * | 2014-04-28 | 2015-11-05 | 国家电网公司 | Mechanical energy and electric energy conversion device |
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Application publication date: 20140806 |