CN103822587B - Interference measurement system for microstructural three-dimensional deformation and displacement tests - Google Patents
Interference measurement system for microstructural three-dimensional deformation and displacement tests Download PDFInfo
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- CN103822587B CN103822587B CN201410064678.6A CN201410064678A CN103822587B CN 103822587 B CN103822587 B CN 103822587B CN 201410064678 A CN201410064678 A CN 201410064678A CN 103822587 B CN103822587 B CN 103822587B
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Abstract
The invention discloses an interference measurement system for microstructural three-dimensional deformation and displacement tests, and particularly relates to a three-dimensional reliability measurement instrument based on Moire carrier interferometry and Tiemann-Green interferometry. The interference measurement system comprises a laser platform, a three-dimensional optical test platform and a six-direction-degree-of-freedom object platform, and can achieve in-place - out-of-plane deformation and displacement of microstructures such as an MEMS micro-beam, static three-dimensional shape tests, and the like. A Moire interference system integrates with grid making and measuring, displacement field total reflection mirrors have the function of freely rotating by 360 degrees, so that measurement of in-plane deformation and displacement in any direction can be achieved only by one set of total reflection mirrors, the structure of the entire device is greatly optimized, meanwhile, the function of an entire set of instrument is modularized, and the mobility and the portability of the system are increased. A piezoelectric ceramic phase shifting device is arranged in the system, and the measuring precision can achieve a nanometer level. Meanwhile, the advantages of being high in measuring precision and intelligent are achieved. The reliability tests of parameter determination, component deformation and displacement, static and dynamic shape variation and the like of MEMS device materials can be achieved.
Description
Technical field
The invention belongs to optical measurement mechanics, engineering material, engineering mechanics technical field, more particularly to a kind of MEMS
Optical 3-dimensional deformation and the interferometer measuration system of displacement measurement, the invention be capable of achieving the topography analyzer of the micro-structural such as MEMS with
And the test of Static and dynamic performance.
Technical background
MEMS refer to collect miniature execution driver, the sensor of microstructure, signal transacting and control circuit etc. part in
One, at the same have collection, treatment with transmission information or command information, and can according to obtain it is information independence or
According to the micro electro mechanical device that external command is taken action, wherein micro- driver that performs is the critical component for realizing MEMS motions, institute
It is designed with the test of the dynamic mechanically characteristic of MEMS, is manufactured and reliability has important meaning.But MEMS micro-move devices
Device is often very tiny, and Regular contact measuring method cannot be realized, thus requires using based on optical non-contact measurement
Method.Again because the maximum vibration amount of deflection of MEMS microdrives is often in micron order, corresponding Measurement Resolution is it requires
Reach micron order even nanoscale.
The measuring method up to nano-precision has at present：Moiréinterferometry, ESPI methods, holographic interferometry, white light interference
Method, PSTM method etc., wherein moiréinterferometry are the test methods for comparing main flow.But current measuring method and
Equipment is mostly that the interim bulk structure built or complex structure are heavy on the shock insulation platform of laboratory, is not easy to mobile and function
It is single, it is difficult to solve the problems, such as field engineering.
China Patent No. 200410000005.0 [Multifunction tridimension displacement laser interference measuring system, Dai Fulong, Xie Hui
The people, Fang Daiyu, Shang Haixia, Liu Zhanwei, 2004] propose a kind of multi-functional triple motion laser interferometry system.The system exists
A Twyman-Green interference light path is increased on the basis of conventional two-dimensional moire interferometer, although the system realizes three-dimensional survey
Amount, but when in-plane displacement is measured, level meeting vertical displacement field fixed in perpendicular can only be directed to, it is impossible to complete
The measurement of general azimuthal displacement, such as 45 ° of angle directions u-v long etc..The system architecture is complicated simultaneously, and component has more than 40
Individual and position disperses, and is unfavorable for moving carrying.
China Patent No. 200910115552.6 [a kind of mobile moire interferometer, Li He, Zhang Shaoqin, Deng Ying, Wang Ying
It is bright, 2009] a kind of mobile moire interferometer is proposed, the system is increased on the basis of conventional two-dimensional moire interferometer
One u-v separator, and realize ± 90 ° of spinfunctions, it is possible to resolve test specimen orthogonal grating non-vertical, non-horizontal directions
Displacement field measurement, but the system can only realize the measurement of plane displacement distribution, it is impossible to realize three-dimensional whole field measure.The micro- drives of MEMS
Amount of deflection of the micro- beam of dynamic device under bending with combined axial and lateral load effect is acoplanarity displacement, so this system has very for the test of the micro- beams of MEMS
Big limitation.
The content of the invention
The present invention is to provide a kind of for micro-structural 3 D deformation and the interferometer measuration system of displacement measurement, not only can be real
Existing acoplanarity displacement is measured in real time, can also realize the panorama measurement of in-plane displacement, collects grid processed, test and one, and compact conformation,
It is easy to use, it is possible to resolve engineering site problem.
Technical scheme is as follows：
It is a kind of for micro-structural 3 D deformation and the interferometer measuration system of displacement measurement, including Laser platform, three-dimensional light
Survey platform and six direction free degree objective tables.It is characterized in that Laser platform includes becoming line for the light for sending laser
The polarizer of polarised light, fiber coupler；Measurement laser is laggard by a total reflective mirror, beam-expanding collimation mirror by laser couplers
Enter in face-from planar survey light-dividing device, during measurement in-plane displacement, two groups of in-plane displacements control shutter opening, while acoplanarity displacement
Control shutter close, stepper motor controls turntable rotation, has two symmetrical light wells on its turntable, and fill by transmission belt
There is one group of fixation completely reflecting mirror one-to-one with light well, symmetrical ± 1 grade of incident incident light of a pile can be formed.By rotation
Rotating disk just can realize the displacement field measurement to any direction in vertical guide.During measurement acoplanarity displacement, two groups of in-plane displacement controls are fast
Door is closed, while acoplanarity displacement control shutter opening, w input path is divided into two-beam after an Amici prism, wherein a branch of
Light is directed through the Amici prism to a total reflective mirror, and IMAQ camera system is reached through the Amici prism again after reflection,
Another light beam reaches test specimen after the Amici prism, and IMAQ is reached through Amici prism after the optical grating reflection of surface of test piece
System.
A kind of interferometer measuration system for micro-structural 3 D deformation and displacement measurement of the present invention can realize test specimen
The preparing grating on surface, opens in-plane displacement control shutter, closes acoplanarity displacement shutter, and the photoresist to surface of test piece exposes
Light, just can realize grid function simply processed, by rotary turnplate, realize the orthogonal grating of any direction in face.
Laser of the Laser platform of the present invention in described Laser platform, polarizer and fiber coupler
It is encapsulated in magazine, magazine is fixed on the table by trip bolt.
In face-installed on the table by telescopic support struts and Rotatable base from face light-dividing device, in face-from face point
Have two light wells and a light hole on the rotating disk of electro-optical device, and equipped with the empty one-to-one total reflective mirror of entering light and control
Shutter, stepper motor is rotated freely for 360 ° by transmission belt Synchronization Control rotating disk around light hole axle center, therefore only needs one group of total reflective mirror
Piece just can realize u-v separator function of traditional fixation, and can be to the position of any two orthogonal direction in vertical plane
Move field to be tested, wherein light admission port end is fixed on the table by telescopic support struts and rotatable magnetic bases, rises whole
In individual face-from face light-dividing device bearing support effect.
One group of total reflective mirror for injecting test specimen on plane and out-of-plane light-dividing device is respectively provided with piezoelectric ceramics phase-shifter.Measurement
The total reflective mirror back side in acoplanarity displacement light path is equipped with piezoelectric ceramics phase-shifter.
Laser platform and three-dimensional flash ranging platform are respectively encapsulated in a magazine and camera bellows, increase the stability of a system
Meanwhile, injecting for veiling glare is limited, the test under normal illumination is realized, traditional dark room operation can be departed from completely.
The mobility and portability of system are also increased simultaneously.
The 105mm micro-lens of the imaging device use specialty of the system, the list of image collecting device use specialty is counter to be taken the photograph
Camera.
Compared to the prior art the present invention, in-plane displacement measurement just can be realized by rotary turnplate, only need one group of total reflective mirror
Piece just can realize traditional (two groups) u-v separators of fixation, system architecture is optimized significantly, and can be in vertical plane
The displacement field of any two orthogonal direction is tested.The system can realize grid processed, the function of measurement integration, by fast gate
System realizes in face-the measurement of acoplanarity displacement, enormously simplify operating procedure, and certainty of measurement is up to nanoscale, in addition laser
Platform and three-dimensional flash ranging platform are individually enclosed in a magazine and camera bellows, make whole system mobility and Portability more traditional
Device has lifting higher.
Brief description of the drawings
Fig. 1 is Laser platform schematic diagram；
Fig. 2 is three-dimensional flash ranging platform acoplanarity displacement index path；
Fig. 3 is three-dimensional flash ranging flat surface intrinsic displacement index path；
Fig. 4 is in face-from face light-dividing device left view；
Fig. 5 is in face-from face light-dividing device right view；
Fig. 6 is in face-from face, separator is assemblied on earthquake table；
Fig. 7 is interferometer measuration system structural representation.
Specific embodiment
It is further elaborated with reference to Fig. 1-7 couples of present invention：
As shown in Figure 1, Figure 2, Figure 3 shows, it is of the present invention a kind of for micro-structural 3 D deformation and the interference of displacement measurement
Measuring system, system is mainly by Laser platform (I), three-dimensional test platform (II) and six direction the free degree objective table (III) structures
Into.With upper mounting plate all on same workbench.Laser platform and three-dimensional test platform are individually enclosed in one secretly
In box and camera bellows.Ccd video camera and computer control system are placed on the lower section of three-dimensional flash ranging platform；Six direction free degree loadings
Platform is placed on the right side of three-dimensional flash ranging platform.The light measured center of wherein three-dimensional flash ranging platform (II) is in same level with test specimen
On.
Laser platform of the present invention includes becoming for the light for sending laser the polarizer of linearly polarized light
(2), fiber coupler (3)；Measurement laser is by laser couplers (4) by after a total reflective mirror (5), beam-expanding collimation mirror (6)
In entering surface-from planar survey light-dividing device (7).During measurement in-plane displacement, test specimen (17) surface need to post orthogonal holographic grating, the
One in-plane displacement controls shutter (7-8), the second in-plane displacement to control shutter (7-9) to open, while acoplanarity displacement control shutter (7-
7) close, stepper motor (7-14) is respectively provided with two groups of total reflective mirrors (7-3), (7-4) and (7-5), (7- by transmission belt (7-15)
6) turntable rotation, makes u or v light path incides test specimen (17) surface by the reflection of the microscope group that is all-trans (7-3) and (7-4)；
During measurement acoplanarity displacement, two groups of in-plane displacements control shutter (7-8) and (7-9) to close, while acoplanarity displacement controls shutter (7-7)
Open, w input path is divided into two-beam after an Amici prism, and wherein light beam is by the two-sided microscope group that is all-trans (8) and is all-trans
The Amici prism (11) is directed through to a total reflective mirror (12) after microscope group (9), (10) reflection, again through the light splitting rib after reflection
Mirror (11) reaches IMAQ camera system (14) and (15), and another light beam reaches test specimen (17) after the Amici prism (11),
After the optical grating reflection of surface of test piece image capturing system (14) and (15) is reached through Amici prism (12).
Laser (1) of the Laser platform (I) of the present invention in described Laser platform, polarizer (2) and
Fiber coupler (3) is encapsulated in magazine (I), and magazine (I) is fixed on the table by trip bolt.
Laser platform (I) is realized being linked with three-dimensional flash ranging platform by optical fiber and laser couplers (4), and laser passes through
After laser couplers (4), by after total reflective mirror (5), beam-expanding collimation mirror (6) beam-expanding collimation reach face in-from face light-dividing device
(7).In face-support in the first face light hole (7-10) and by can by telescopic support struts (7-19) from face light-dividing device (7)
Spin magnetization base (7-20) is fixed on workbench (18), and stepper motor (7-14) made in face by conveyer belt (7-15)-from
Rotating disk (7-18) on the light-dividing device of face realizes the first small total reflective mirror (7-3) and the second small total reflective mirror (7-4) around threeway
360 ° of unthreaded hole (7-17) axle is rotated freely, and has light hole (7-10) and second in two the first symmetrical faces on its turntable
Light hole (7-11) in face, the is fixed in the total reflective mirror supporting table (7-16) at its off-axis position in center equipped with two groups of symmetrical 45 °
Light hole (7- in three small total reflective mirrors (7-5) and the 4th small total reflective mirror (7-6), with light hole (7-10) in the first face and the second face
11) correspond, it is relative one by one with the first small total reflective mirror (7-3) and the second small total reflective mirror (7-4) to form incident field.By rotation
Disk (7-18) of walking around is capable of achieving the orthogonal grating that 360 ° of any direction incident fields are penetrated on test specimen (17), so as to realize position in face
The panorama measurement of shifting.
It is of the present invention a kind of for micro-structural 3 D deformation and the course of work of the interferometer measuration system of displacement measurement
It is as follows：
It is first according to system shown in Figure 7 structural representation and places each member position, closes acoplanarity displacement shutter (7-7),
Opening the first in-plane displacement controls shutter (7-8) and the second in-plane displacement to control shutter (7-9), and the two pairs of incident lights for separating can
The symmetrical orthogonal grating for being incident to test specimen (17) surface, forms wavefront interference fringe, while the interference fringe can be by light splitting
Prism (11) is incided on imaging lens (14), by adjusting piezoelectric ceramics phase-shifter (7-1), piezoelectric ceramics phase-shifter (7-2)
Make ccd video camera (15) and computer (16) that clearly image can be collected with imaging lens (14).
During measurement in-plane displacement, now surface of test piece need to post holographic orthogonal grating, close acoplanarity displacement shutter (7-7),
Open in-plane displacement shutter (7-8) and (7-9).Laser by fiber coupler after polariscope (2) by being coupled into optical fiber
(3), by being incided on completely reflecting mirror (5) after laser couplers (4), after beam-expanding collimation mirror (6) is expanded in entering surface-from
Face separator (7).When measuring u, regulation stepper motor (7-14) makes the first small total reflective mirror (7-3) and the second small total reflective mirror
The line of (7-4) is on horizontal plane, and now symmetrically ± 1 grade of incident light is injected the orthogonal grating on test specimen (17) surface and occurred dry
Relate to, while interference fringe enters imaging len (14) by Amici prism (11) back reflection, finally in the ccd video camera (15) into
Picture；When measuring v, regulation stepper motor (7-14) makes the line of the first small total reflective mirror (7-3) and total reflective mirror (7-4) be in vertical
In plane, now symmetrically ± 1 grade of incident light is injected the orthogonal grating on test specimen (17) surface and is interfered, while interference fringe is passed through
Amici prism (11) back reflection into imaging len (14) is crossed, the finally imaging in ccd video camera (15)；To realize u-v
45 ° of displacement fields in direction, then need to only be adjusted in synchronism stepper motor (7-14) makes the line of total reflective mirror (7-3) and total reflective mirror (7-4)
With the horizontal 45 °.
Measurement acoplanarity displacement when, open acoplanarity displacement shutter (7-7), close the first in-plane displacement control shutter (7-8) and
Second in-plane displacement controls shutter (7-9), and light path incides double mirror (8) by light hole (7-10) in the first face, passes through
Cross after total reflective mirror (9) total reflective mirror (10) enter into Amici prism (11) and be divided into two-beam, wherein light beam is directed through light splitting rib
Mirror (11) incides the 4th total reflective mirror (12), and reaching CCD after Amici prism (11), imaging lens (14) again after reflection takes the photograph
Camera (15)；Another light beam reaches test specimen (17) after being reflected through Amici prism (11), and light splitting rib is passed through after surface of test piece reflection
Mirror (11), imaging lens (14) reach ccd video camera (15) afterwards.
First small total reflective mirror (7-3), second small total reflective mirror (7-4) of the present invention also respectively in three-dimensional flash ranging platform (II)
And the 4th total reflective mirror (12) be configured with the first piezoelectric phase-shifter (7-1), the second piezoelectric phase-shifter (7-2) and the 3rd
Piezoelectric phase-shifter (13).The interference fringe of wherein u and v can be adjusted by the computer (16) equipped with Control card and moved
The input voltage of phase device (7-1) and (7-2) is controlled, and the interference fringe of w can be by the computer (16) equipped with Control card
The input voltage of phase shifter (13) is adjusted to control.
The above, is only presently preferred embodiments of the present invention, and any formal limitation is not made to the present invention, though
So the present invention is disclosed above with preferred embodiment, but is not limited to the present invention, any to be familiar with this professional technology people
Member, without departing from the scope of the present invention, when using the method and technology contents of the disclosure above make it is a little more
Move or be modified to the Equivalent embodiments of equivalent variations, as long as being the content without departing from technical solution of the present invention, according to of the invention
Any simple modification, equivalent variations and modification that technical spirit is made to above example, still fall within technical solution of the present invention
In the range of.
Claims (8)
1. a kind of for micro-structural 3 D deformation and the interferometer measuration system of displacement measurement, it is characterised in that：It is flat including laser
Platform, three-dimensional flash ranging platform, six direction free degree objective tables, ccd video camera and computer control system, Laser platform are encapsulated in
In one magazine, three-dimensional flash ranging platform is encapsulated in a camera bellows；Six direction free degree objective tables are placed on three-dimensional flash ranging platform
Right side, ccd video camera and computer control system are placed on the lower section of three-dimensional flash ranging platform, in the flash ranging of three-dimensional flash ranging platform
The heart is located in same level with test specimen；The Laser platform (I) is including inclined for the light that laser (1) sends to be become into line
Shake the polarizer (2) of light, fiber coupler (3)；Measurement laser by laser couplers (4) by the first total reflective mirror (5), expand
After collimating mirror (6) beam-expanding collimation in entering surface-from face light-dividing device (7), wherein during measurement in-plane displacement, the first in-plane displacement control
Shutter (7-8) processed and the second in-plane displacement control shutter (7-9) to open, and control shutter (7-7) to close from face, stepper motor (7-
14) control that the first small total reflective mirror (7-3), the second small total reflective mirror (7-4), the 3rd small total reflective mirror are housed by transmission belt (7-15)
(7-5), the rotating disk (7-18) of the 4th small total reflective mirror (7-6) make divided beams symmetrically be incident to the orthogonal grating on test specimen (17) surface；
During measurement acoplanarity displacement, the first in-plane displacement controls shutter (7-8) and the second in-plane displacement to control shutter (7-9) to close, from face
Control shutter (7-7) is opened, and light path incides double mirror (8) by the first light hole (7-10), by the second total reflective mirror
(9), the 3rd total reflective mirror (10) is divided into two-beam after entering into Amici prism (11), and light beam is directed through Amici prism (11) and enters
The 4th total reflective mirror (12) is mapped to, ccd video camera is reached after (14) through Amici prism (11), imaging lens again after reflection
(15)；Another light beam reaches test specimen (17) after being reflected through Amici prism (11), and Amici prism is passed through after surface of test piece reflection
(11), imaging lens (14) reach ccd video camera (15) afterwards；In face in the three-dimensional flash ranging platform (II)-from face light splitting
Device (7) controls shutter (7-7), the first in-plane displacement to control by computer (16) Based Intelligent Control equipped with Control card from face
Shutter (7-8) and the second in-plane displacement control shutter (7-9), and in measuring surface during deformation, the first in-plane displacement controls shutter (7-8)
Control shutter (7-9) to open with the second in-plane displacement, control shutter (7-7) to close from face；During measurement acoplanarity displacement, in the first face
Bit andits control shutter (7-8) and the second in-plane displacement control shutter (7-9) to close, and control shutter (7-7) to open from face.
2. according to the interferometer measuration system described in claim 1, it is characterised in that：Laser in described Laser platform (I)
Device (1), polarizer (2) and fiber coupler (3) are encapsulated in magazine, and this magazine is fixed on shockproof by trip bolt
On workbench.
3. interferometer measuration system as claimed in claim 1, it is characterised in that：The Laser platform (I) including laser, partially
Shaken piece and fiber coupler, and the light that laser sends is become linearly polarized light by polarizer and fiber coupler；The three-dimensional flash ranging
Platform include laser couplers (4), the first total reflective mirror (5), beam-expanding collimation mirror (6), in face-from face light-dividing device (7), two-sided
Speculum (8), the second total reflective mirror (9), the 3rd total reflective mirror (10), Amici prism (11), the 4th total reflective mirror (12) and imaging lens
(14), laser couplers (4) are arranged on directly over the first total reflective mirror (5), and the first total reflective mirror (5) right side sets beam-expanding collimation mirror
(6), beam-expanding collimation mirror (6) right side setting face in-from face light-dividing device (7), in the face in-from face light-dividing device (7) right side set pair
Face speculum (8), double mirror (8) right side sets Amici prism (11), double mirror (8) to be arranged above second complete
Anti- mirror (9), the underface of double mirror (8) sets imaging lens (14), and Amici prism (11) is arranged above the 3rd and is all-trans
4th total reflective mirror (12) is set immediately below mirror (10), the 3rd total reflective mirror (10)；Examination is set on the six directions free degree objective table
Part (17), test specimen (17) is placed in the right side of Amici prism (11)；Imaging lens (14) lower section is provided with ccd video camera
(15), it is connected with computer (16) on ccd video camera (15).
4. interferometer measuration system as claimed in claim 2, it is characterised in that：The light-dividing device (7) is made pottery including the first piezoelectricity
Porcelain phase-shifter (7-1), the second piezoelectric ceramics phase-shifter (7-2), the first small total reflective mirror (7-3), the second small total reflective mirror (7-4),
Three small total reflective mirrors (7-5), the 4th small total reflective mirror (7-6), shutter (7-7), the first in-plane displacement control shutter (7- are controlled from face
8), the second in-plane displacement controls shutter (7-9), light hole (7-10) in the first face, light hole (7-11), the first face in the second face
Inside connecting rod (7-12), the second face inside connecting rod (7-13), stepper motor (7-14), conveyer belt (7-15), total reflective mirror supporting table
(7-16), the 3rd light hole (7-17), rotating disk (7-18), telescopic support struts (7-19), magnetic bases (7-20)；Wherein, first
Piezoelectric ceramics phase-shifter (7-1), the second piezoelectric ceramics phase-shifter (7-2) are separately mounted to the first small total reflective mirror (7-3), second small
The back side of total reflective mirror (7-4), the first small total reflective mirror (7-3), the second small total reflective mirror (7-4) pass through the first face inside connecting rod respectively
(7-12), the second face inside connecting rod (7-13) are symmetrically mounted on the right side of rotating disk (7-18), the 3rd small total reflective mirror (7-5), the 4th
Reflecting surface of the reflecting surface of small total reflective mirror (7-6) respectively with the first small total reflective mirror (7-3), the second small total reflective mirror (7-4) is corresponding, the
Three small total reflective mirrors (7-5), the 4th small total reflective mirror (7-6) back side are symmetrically mounted in total reflective mirror supporting table (7-16), i.e., first is small
Total reflective mirror (7-3) and the 3rd small total reflective mirror (7-5) constitute one group of reflected light path, and the second small total reflective mirror (7-4) and the 4th small is all-trans
Mirror (7-6) constitutes one group of reflected light path, controls shutter (7-7) to be located at the left side of rotating disk (7-18) from face, with the 3rd light hole (7-
17) correspondence, for controlling the input path of the 3rd light hole (7-17)；In first in-plane displacement control shutter (7-8), the second face
Bit andits control shutter (7-9) is located on the left of rotating disk (7-18) and is symmetrically distributed respectively, with light hole (7-10) in the first face, the
Light hole (7-11) correspondence in two faces, wherein, light hole (7-10) in the first face, in the second face light hole (7-11) respectively with the
Three small total reflective mirrors (7-5), the 4th small total reflective mirror (7-6) correspondence, i.e. light hole (7-10) in the first face, light hole in the second face
(7-16) is respectively provided with two groups of symmetrical 45 ° and fixes the 3rd and small be all-trans in the total reflective mirror supporting table at the off-axis position in center of (7-11)
Mirror (7-5) and the 4th small total reflective mirror (7-6), wherein controlling shutter (7-8), control shutter (7-9) use in the second face in the first face
Come control light hole (7-10) in the first face, in the second face light hole (7-11) input path；Stepper motor (7-14) is located at
The side of total reflective mirror supporting table (7-16), the rotation of rotating disk (7-18) is controlled by conveyer belt (7-15), and rotating disk (7-18) is in
" windmill " structure, is installed on shockproof experiment porch by telescopic support struts (7-19), magnetic bases (7-20).
5. according to the interferometer measuration system described in claim 1, it is characterised in that：Face in the three-dimensional flash ranging platform (II)
Interior-the first small total reflective mirror (7-3) on face light-dividing device (7) and the second small total reflective mirror (7-4) are respectively provided with the first piezoelectricity pottery
Porcelain phase-shifter (7-1) and the second piezoelectric ceramics phase-shifter (7-2)；The 4th total reflective mirror (12) back side in measurement acoplanarity displacement light path
Equipped with the 3rd piezoelectric ceramics phase-shifter (13), these three piezoelectricity phase shifters are by computer (16) intelligence equipped with Control card
Control.
6. according to the interferometer measuration system described in claim 1, it is characterised in that：Face in the three-dimensional flash ranging platform (II)
Interior-rotating disk (7-18) on face light-dividing device (7) makes it around the 3rd thang-kng by stepper motor (7-14), conveyer belt (7-15)
360 ° of hole (7-17) axle center rotates freely, therefore only needs one group first small total reflective mirror (7-3) and the second small total reflective mirror (7-4) just can be real
Existing fixed u-v traditional separator function.
7. according to the interferometer measuration system described in claim 1,2,3 or 4, it is characterised in that：In described Laser platform
(I), three-dimensional flash ranging platform (II) is installed on a workbench with six direction free degree objective tables；Three-dimensional flash ranging platform (II)
It is connected by laser couplers (4) with Laser platform (I), and whole three-dimensional flash ranging platform (II) is encapsulated in a camera bellows
In；Ccd video camera (15) and computer (16) are placed on the lower section of three-dimensional flash ranging platform (II)；Six direction free degree objective tables
(III) it is placed on the right side of three-dimensional flash ranging platform (II)；The light measured center of wherein three-dimensional flash ranging platform (II) is in test specimen (17)
In same horizontal line.
8. according to the interferometer measuration system described in claim 1, it is characterised in that：In described three-dimensional flash ranging platform (II) into
As camera lens (14) is using professional microspur imaging lens, ccd video camera (15) uses professional camera；Described three-dimensional flash ranging platform
(II) all components in are fixed on earthquake table using multiple degrees of freedom adjustment rotating base and telescopic support struts.
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| CN201410064678.6A CN103822587B (en) | 2014-02-25 | 2014-02-25 | Interference measurement system for microstructural three-dimensional deformation and displacement tests |
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| CN109443230B (en) * | 2018-12-17 | 2021-01-12 | 东莞理工学院 | Piezoelectric ceramic measuring system based on image processing |
| CN110500966A (en) * | 2019-10-09 | 2019-11-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of six degree of freedom precision measurement system for the measurement of force structure miniature deformation |
| CN115500582B (en) * | 2022-08-17 | 2024-03-22 | 上海科技大学 | Foot three-dimensional contour acquisition system |
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