CN103822587A - Interference measurement system for microstructural three-dimensional deformation and displacement tests - Google Patents
Interference measurement system for microstructural three-dimensional deformation and displacement tests Download PDFInfo
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Abstract
The invention discloses an interference measurement system for microstructural three-dimensional deformation and displacement tests, and particularly relates to a three-dimensional reliability measurement instrument based on Moire carrier interferometry and Tiemann-Green interferometry. The interference measurement system comprises a laser platform, a three-dimensional optical test platform and a six-direction-degree-of-freedom object platform, and can achieve in-place - out-of-plane deformation and displacement of microstructures such as an MEMS micro-beam, static three-dimensional shape tests, and the like. A Moire interference system integrates with grid making and measuring, displacement field total reflection mirrors have the function of freely rotating by 360 degrees, so that measurement of in-plane deformation and displacement in any direction can be achieved only by one set of total reflection mirrors, the structure of the entire device is greatly optimized, meanwhile, the function of an entire set of instrument is modularized, and the mobility and the portability of the system are increased. A piezoelectric ceramic phase shifting device is arranged in the system, and the measuring precision can achieve a nanometer level. Meanwhile, the advantages of being high in measuring precision and intelligent are achieved. The reliability tests of parameter determination, component deformation and displacement, static and dynamic shape variation and the like of MEMS device materials can be achieved.
Description
Technical field
The invention belongs to optical measurement mechanics, construction material, engineering mechanics technical field, be particularly related to a kind of optical 3-dimensional deformation of MEMS (micro electro mechanical system) and the interferometer measuration system of displacement measurement, this invention can realize the topography analyzer of the microstructures such as MEMS and the test of quiet dynamic perfromance.
Technical background
MEMS refers to what the sensor, signal that integrate miniature Execution driven device, microstructure were processed with the parts such as control circuit, there is collection, processing and transmission information or command information simultaneously, and can be according to the micro electro mechanical device information independence of obtaining or that take action according to external command, wherein micro-Execution driven device is the critical component of realizing MEMS motion, so the test of the dynamic mechanically characteristic of MEMS has important meaning to its design, manufacture and reliability.But MEMS microdrive is often very tiny, and conventional contact measurement method cannot be realized, thereby require to adopt the contactless measurement based on optics.Again because the maximum vibration amount of deflection of MEMS microdrive is often in micron order, so require corresponding Measurement Resolution to reach even nanoscale of micron order.
The measuring method that can reach at present nano-precision has: moiréinterferometry, ESPI method, holographic interferometry, White Light Interferometer, scanning tunnel microscope method etc., wherein moiréinterferometry is the test method of comparison main flow.But current measuring method and equipment are bulk structure or the complex structure heaviness of temporarily building on the shock insulation platform of laboratory mostly, are not easy to mobile and function singleness, is difficult to solve field engineering problem.
China Patent No. 200410000005.0[Multifunction tridimension displacement laser interference measuring system, Dai Fulong, the Xie Hui people, Fang Daiyu, Shang Haixia, Liu Zhanwei, 2004] a kind of multi-functional triple motion laser interferometry system proposed.This system has increased a Twyman-Green interference light path on the basis of conventional two-dimensional moire interferometer, although this system has realized three-dimensional measurement, but in the time measuring in-plane displacement, can only be for level meeting vertical displacement field fixing in perpendicular, cannot complete the measurement of general azimuthal displacement field, 45 ° of angle directions that such as u-v is long etc.This system architecture complexity simultaneously, components and parts have more than 40 and position dispersion, are unfavorable for mobile carrying.
China Patent No. 200910115552.6[mobile moire interferometer, Li He, Zhang Shaoqin, Deng Ying, Wang Yingming, 2009] a kind of mobile moire interferometer has been proposed, this system is on the basis of conventional two-dimensional moire interferometer, to have increased a u-v field tripping device, and realizes ± 90 ° of spinfunctions, can solve the non-displacement field vertical, non-horizontal direction of test specimen orthogonal grating and measure, but this system can only realize the measurement of plane displacement distribution, cannot realize three-dimensional whole field and measure.The amount of deflection of micro-beam of MEMS microdrive under bending with combined axial and lateral load effect is acoplanarity displacement, so this system has significant limitation for the test of the micro-beam of MEMS.
Summary of the invention
The present invention is to provide a kind of interferometer measuration system for micro-structural 3 D deformation and displacement measurement, not only can realize acoplanarity displacement and measure in real time, can also realize the panorama of in-plane displacement and measure, collect grid processed, test and one, and compact conformation, easy to use, can solve engineering site problem.
Technical scheme of the present invention is as follows:
For an interferometer measuration system for micro-structural 3 D deformation and displacement measurement, comprise laser instrument platform, three-dimensional light lining platform and six direction degree of freedom objective tables.It is characterized in that laser instrument platform comprises that the light for laser instrument is sent becomes the polaroid of linearly polarized light, fiber coupler; Measure laser by laser couplers after a total reflective mirror, beam-expanding collimation mirror in entering surface-from planar survey light-dividing device, while measuring in-plane displacement, two groups of in-plane displacement control shutter openings, acoplanarity displacement control shutter close simultaneously, stepper motor is by transport tape control turntable rotation, on its turntable, have two symmetrical light wells, and be equipped with and light well one group of fixing completely reflecting mirror one to one, can form the symmetrical incident of a pile ± 1 grade of incident light.Just can realize the displacement field of any direction in vertical guide is measured by rotary turnplate.While measuring acoplanarity displacement, two groups of in-plane displacement control shutter closes, acoplanarity displacement control shutter opening simultaneously, w field input path is divided into two-beam after an Amici prism, wherein light beam directly sees through on this point of prism to total reflective mirror, after reflection, arrive image acquisition camera system again through this Amici prism, another light beam arrives test specimen after this Amici prism, after the optical grating reflection on test specimen surface, arrives image capturing system through Amici prism.
A kind of interferometer measuration system for micro-structural 3 D deformation and displacement measurement of the present invention can realize the preparing grating on test specimen surface, open in-plane displacement control shutter, close acoplanarity displacement shutter, photoresist to test specimen surface exposes, just can realize simple grid function processed, by rotary turnplate, realize the orthogonal grating of any direction in face.
Laser instrument, polaroid and the fiber coupler of laser instrument platform of the present invention in described laser instrument platform is encapsulated in magazine, and magazine is fixed on worktable by trip bolt.
In face-be arranged on worktable by telescopic support struts and Rotatable base from face light-dividing device, in face-on the rotating disk of face light-dividing device, there are two light wells and a light hole, and be equipped with and enter light sky total reflective mirror and control shutter one to one, stepper motor by transport tape synchro control rotating disk around light hole axle center 360 ° rotate freely, just can realize traditional fixing u-v field tripping device function therefore only need one group of eyeglass that is all-trans, and can test the displacement field of any two orthogonal directionss in vertical plane, wherein logical light mouth end is fixed on worktable by telescopic support struts and rotatable magnetic bases, play in whole-from the effect of face light-dividing device bearing support.
One group of total reflective mirror injecting test specimen on plane and out-of-plane light-dividing device is equipped with respectively piezoelectric ceramics phase-shifter.Piezoelectric ceramics phase-shifter is equipped with at the total reflective mirror back side of measuring in acoplanarity displacement light path.
Laser instrument platform and three-dimensional light lining platform are encapsulated in respectively in a magazine and camera bellows, when increasing system stability, have limited injecting of parasitic light, have realized the test under normal illumination, can depart from traditional dark room operation completely.Also movability and the portability of system have been increased simultaneously.
The imaging device of native system adopts professional 105mm micro-lens, and image collecting device adopts the anti-video camera of professional list.
The present invention compared to the prior art, just can realize in-plane displacement measurement by rotary turnplate, only need one group of eyeglass that is all-trans just can realize the fixing u-v field tripping device of tradition (two groups), system architecture is optimized greatly, and can be tested the displacement field of any two orthogonal directionss in vertical plane.Native system can be realized grid processed, measure integrated function, by the measurement of realize in face-acoplanarity displacement of shutter control, greatly simplify operation steps, and measuring accuracy can reach nanoscale, in addition laser instrument platform and three-dimensional light lining platform are encapsulated in respectively in a magazine and camera bellows, make whole system mobility and Portability have higher lifting compared with prior device.
Accompanying drawing explanation
Fig. 1 is laser instrument platform schematic diagram;
Fig. 2 is three-dimensional light lining platform acoplanarity displacement index path;
Fig. 3 is three-dimensional light lining table top intrinsic displacement index path;
Fig. 4 is in face-from face light-dividing device left view;
Fig. 5 is in face-from face light-dividing device right view;
Fig. 6 is in face-is assemblied on earthquake table from face tripping device;
Fig. 7 is interferometer measuration system structural representation.
Embodiment
Below in conjunction with Fig. 1-7, couple the present invention is further elaborated:
As shown in Figure 1, Figure 2, Figure 3 shows, a kind of interferometer measuration system for micro-structural 3 D deformation and displacement measurement of the present invention, system is mainly by laser instrument platform (I), and three-dimensional test platform (II) and six direction degree of freedom objective tables (III) form.All be arranged on same worktable with upper mounting plate.Laser instrument platform and three-dimensional test platform are encapsulated in respectively in a magazine and camera bellows.Ccd video camera and computer control system are placed on the below of three-dimensional light lining platform; Six direction degree of freedom objective tables are placed on the right side of three-dimensional light lining platform.Wherein flash ranging center and the test specimen of three-dimensional light lining platform (II) are in same level.
Laser instrument platform of the present invention comprises that the light for laser instrument is sent becomes the polaroid of linearly polarized light (2), fiber coupler (3); Measure laser by laser couplers (4) entering surface through a total reflective mirror (5), beam-expanding collimation mirror (6) after interior-from planar survey light-dividing device (7).While measuring in-plane displacement, orthogonal holographic grating need be posted in test specimen (17) surface, two groups of in-plane displacement control shutters (7-8) and (7-9) unlatching, acoplanarity displacement control shutter (7-7) is closed simultaneously, stepper motor (7-14) by transport tape (7-15) respectively with two groups of total reflective mirrors (7-3), (7-4) and (7-5), the rotating disk (7-8) of (7-6) rotates, and makes u field or v field light path be mapped to test specimen (17) surface by total reflective mirror group (7-3) and being reflected into (7-4), while measuring acoplanarity displacement, two groups of in-plane displacement control shutters (7-8) and (7-9) close, acoplanarity displacement control shutter (7-7) is opened simultaneously, w field input path is divided into two-beam after an Amici prism, wherein light beam is through two-sided total reflective mirror group (8) and total reflective mirror group (9), (10) after reflection, directly see through this point of prism (11) to a total reflective mirror (12), after reflection, arrive image acquisition camera system (14) and (15) through this Amici prism (11) again, another light beam arrives test specimen (17) after this Amici prism (11), after the optical grating reflection on test specimen surface, arrive image capturing system (14) and (15) through Amici prism (12).
Laser instrument (1), polaroid (2) and the fiber coupler (3) of laser instrument platform of the present invention (I) in described laser instrument platform is encapsulated in magazine (I), and magazine (I) is fixed on worktable by trip bolt.
Laser instrument platform (I) is realized and the linking of three-dimensional light lining platform by optical fiber and laser couplers (4), laser is by after laser couplers (4), through total reflective mirror (5), beam-expanding collimation mirror (6) beam-expanding collimation after arrival face interior-from face light-dividing device (7).In face-support light hole (7-10) and be fixed on worktable (18) by rotatable magnetic bases (7-20) by telescopic support struts (7-19) from face light-dividing device (7), stepper motor (7-14) by travelling belt (7-15) make in face-realize total reflective mirror group (7-3) and (7-4) rotate freely around 360 °, light hole (7-17) axle from the rotating disk (7-18) on face light-dividing device, on its turntable, there are light hole (7-10) and the interior light hole (7-11) of first surface in two symmetrical first surfaces, its central authorities are from 45 ° of fixing total reflective mirrors (7-5) of two groups of symmetries and (7-6) are housed on the total reflective mirror brace table (7-16) of axial region position, corresponding one by one with light hole (7-11) in light hole in first surface (7-10) and first surface, with total reflective mirror (7-3) and total reflective mirror (7-4) the relative incident field that forms one by one.Can realize 360 ° of any direction incident fields by rotary turnplate (7-18) and penetrate the orthogonal grating on test specimen (17), thus realize in-plane displacement panorama measure.
The course of work of a kind of interferometer measuration system for micro-structural 3 D deformation and displacement measurement of the present invention is as follows:
First place each member position according to system shown in Figure 7 structural representation, close acoplanarity displacement shutter (7-7), open to control in first surface in shutter (7-8) and second and control shutter (7-9), two pairs of incident lights that separate can symmetry be incident to the surperficial orthogonal grating of test specimen (17), form wavefront interference fringe, this interference fringe can incide on imaging lens (14) by Amici prism (11) simultaneously, by adjusting piezoelectric ceramics phase-shifter (7-1), piezoelectric ceramics phase-shifter (7-2) makes ccd video camera (15) and computing machine (16) can collect image clearly with imaging lens (14).
Measure when in-plane displacement, now holographic orthogonal grating need be posted in test specimen surface, closes acoplanarity displacement shutter (7-7), opens in-plane displacement shutter (7-8) and (7-9).Laser is coupled into optical fiber (3) through fiber coupler after polariscope (2), upper by inciding completely reflecting mirror (5) after laser couplers (4), through beam-expanding collimation mirror (6) expands after entering surface interior-from face tripping device (7).While measuring u field, regulate stepper motor (7-14) to make the line of total reflective mirror (7-3) and total reflective mirror (7-4) on surface level, now symmetrical ± 1 grade of incident light is injected the orthogonal grating on test specimen (17) surface and interferes, interference fringe enters imaging len (14), finally imaging in ccd video camera (15) through Amici prism (11) back reflection simultaneously; While measuring v field, regulate stepper motor (7-14) to make the line of total reflective mirror (7-3) and total reflective mirror (7-4) in vertical plane, now symmetrical ± 1 grade of incident light is injected the orthogonal grating on test specimen (17) surface and interferes, interference fringe enters imaging len (14), finally imaging in ccd video camera (15) through Amici prism (11) back reflection simultaneously; If realize the displacement field of the 45 ° of directions in u-v field, only need adjusted in concert stepper motor (7-14) to make line and the surface level of total reflective mirror (7-3) and total reflective mirror (7-4) at 45 °.
While measuring acoplanarity displacement, open acoplanarity displacement shutter (7-7), closed intrinsic displacement shutter (7-8) and (7-9), light path incides double mirror (8) by light hole (7-9), after entering into Amici prism (11), total reflective mirror (9) total reflective mirror (10) is divided into two-beam, wherein light beam directly sees through Amici prism (11) and incides a total reflective mirror (12), arrives ccd video camera (15) after reflection after Amici prism (11), imaging lens (14) again; Another light beam arrives test specimen (17) after Amici prism (11) reflection, passes Amici prism (11), the rear ccd video camera (15) that arrives of imaging lens (14) after test specimen surface reflection.
Also the total reflective mirror (7-3) in three-dimensional light lining platform (II), total reflective mirror (7-4) and total reflective mirror (12) have configured piezoelectric phase-shifter (7-1), piezoelectric phase-shifter (7-2) and piezoelectric phase-shifter (13) respectively in the present invention.Wherein the interference fringe of u field and v field can regulate phase shifter (7-1) and input voltage (7-2) to control by the computing machine (16) of Control card is housed, and the interference fringe of w field can regulate the input voltage of phase shifter (13) to control by the computing machine (16) of Control card is housed.
The above, it is only preferred embodiment of the present invention, not the present invention is done to any pro forma restriction, although the present invention discloses as above with preferred embodiment, but not in order to limit the present invention, any those skilled in the art, do not departing within the scope of technical solution of the present invention, when can utilizing the method for above-mentioned announcement and technology contents to make a little change or being modified to the equivalent embodiment of equivalent variations, in every case be the content that does not depart from technical solution of the present invention, any simple modification of above embodiment being done according to technical spirit of the present invention, equivalent variations and modification, still belong in the scope of technical solution of the present invention.
Claims (10)
1. the interferometer measuration system for micro-structural 3 D deformation and displacement measurement, it is characterized in that: comprise laser instrument platform, three-dimensional light lining platform, six direction degree of freedom objective tables, ccd video camera and computer control system, laser instrument platform is encapsulated in a magazine, and three-dimensional test platform is encapsulated in a camera bellows; Six direction degree of freedom objective tables are placed on the right side of three-dimensional light lining platform, and ccd video camera and computer control system are placed on the below of three-dimensional light lining platform, and flash ranging center and the test specimen of three-dimensional light lining platform are positioned in same level.
2. interferometer measuration system as claimed in claim 1, it is characterized in that: described laser instrument platform (I) comprises that the light for laser instrument (1) is sent becomes the polaroid (2) of linearly polarized light, fiber coupler (3), measure laser by laser couplers (4) process total reflective mirror (5), after beam-expanding collimation mirror (6) beam-expanding collimation in entering surface-from face light-dividing device (7), while wherein measuring in-plane displacement, in-plane displacement control shutter (7-8) and in-plane displacement control shutter (7-9) are opened, close from face control shutter (7-7), stepper motor (7-14) is controlled total reflective mirror (7-3) is housed by transport tape (7-15), total reflective mirror (7-4), total reflective mirror (7-5), the rotating disk (7-18) of total reflective mirror (7-6) makes divided beams symmetry be incident to the orthogonal grating on test specimen (17) surface, while measuring acoplanarity displacement, shutter in-plane displacement control (7-8) and in-plane displacement control shutter (7-9) are closed, open from face control shutter (7-7), light path incides double mirror (8) by light hole (7-9), after entering into Amici prism (11), total reflective mirror (9) total reflective mirror (10) is divided into two-beam, light beam directly sees through Amici prism (11) and incides a total reflective mirror (12), arrives ccd video camera (15) after reflection after Amici prism (11), imaging lens (14) again, another light beam arrives test specimen (17) after Amici prism (11) reflection, passes Amici prism (11), the rear ccd video camera (15) that arrives of imaging lens (14) after test specimen surface reflection.
3. according to interferometer measuration system claimed in claim 2, it is characterized in that: laser instrument (1), polaroid (2) and fiber coupler (3) in described laser instrument platform (I) are encapsulated in magazine, and this magazine is fixed on earthquake table by trip bolt.
4. interferometer measuration system as claimed in claim 1, is characterized in that: described laser instrument platform (I) comprises laser instrument, polaroid and fiber coupler, and the light that polaroid and fiber coupler send laser instrument becomes linearly polarized light, described three-dimensional light lining platform comprises laser couplers (4), the first total reflective mirror (5), beam-expanding collimation mirror (6), in face-from face light-dividing device (7), double mirror (8), the second total reflective mirror (9), the 3rd total reflective mirror (10), Amici prism (11), the 4th total reflective mirror (12) and imaging lens (14), laser couplers (4) is arranged on directly over the first total reflective mirror (5), the first total reflective mirror (5) right side arranges beam-expanding collimation mirror (6), in the installation surface of beam-expanding collimation mirror (6) right side-from face light-dividing device (7), in face-from face light-dividing device (7) right side, double mirror (8) is set, double mirror (8) right side arranges Amici prism (11), the second total reflective mirror (9) is set directly over double mirror (8), imaging lens (14) is set under double mirror (8), the 3rd total reflective mirror (10) is set directly over Amici prism (11), the 4th total reflective mirror (12) is set under the 3rd total reflective mirror (10), on described six direction degree of freedom objective tables, test specimen (17) is set, test specimen (17) is placed in the right side of Amici prism (11), described imaging lens (14) below is provided with ccd video camera (15), is connected with computing machine (16) on ccd video camera (15).
5. interferometer measuration system as claimed in claim 2, it is characterized in that: described light-dividing device (7) comprises piezoelectric ceramics phase-shifter (7-1), piezoelectric ceramics phase-shifter (7-2), total reflective mirror (7-3), total reflective mirror (7-4), total reflective mirror (7-5), total reflective mirror (7-6), from face control shutter (7-7), in first surface, control shutter (7-8), in second, control shutter (7-9), light hole (7-10) in first surface, second interior light hole (7-11), first surface inside connecting rod (7-12), first surface inside connecting rod (7-13), stepper motor (7-14), travelling belt (7-15), total reflective mirror brace table (7-16), light hole (7-17), rotating disk (7-18), telescopic support struts (7-19), magnetic bases (7-20), wherein, piezoelectric ceramics phase-shifter (7-1), piezoelectric ceramics phase-shifter (7-2) is arranged on respectively total reflective mirror (7-3), the back side of total reflective mirror (7-4), total reflective mirror (7-3), total reflective mirror (7-4) is respectively by first surface inside connecting rod (7-12), first surface inside connecting rod (7-13) symmetry is arranged on the right side of rotating disk (7-18), total reflective mirror (7-5), the reflecting surface of total reflective mirror (7-6) respectively and total reflective mirror (7-3), the reflecting surface correspondence of total reflective mirror (7-4), total reflective mirror (7-5), total reflective mirror (7-6) back side symmetry is arranged on total reflective mirror brace table (7-16), be that total reflective mirror (7-3) and total reflective mirror (7-5) form one group of reflected light path, total reflective mirror (7-4) and total reflective mirror (7-6) form one group of reflected light path, be positioned at the left side of rotating disk (7-18) from face control shutter (7-7), corresponding with light hole (7-17), be used for controlling the input path of light hole (7-17), in first surface, control shutter (7-8), in second, controlling the left side that shutter (7-9) lays respectively at rotating disk (7-18) is symmetrically distributed, with light hole in first surface (7-10), second interior light hole (7-11) correspondence, wherein, light hole (7-10) in first surface, second interior light hole (7-11) respectively with total reflective mirror (7-5), total reflective mirror (7-6) correspondence, it is light hole (7-10) in first surface, 45 ° of fixing total reflective mirrors (7-5) of two groups of symmetries and (7-6) are equipped with respectively from (16) on the total reflective mirror brace table of axial region position in the central authorities of second interior light hole (7-11), wherein in first surface, control shutter (7-8), in second, control shutter (7-9) and be used for controlling light hole (7-10) in first surface, the input path of second interior light hole (7-11), stepper motor (7-14) is positioned at a side of total reflective mirror brace table (7-16), control the rotation of rotating disk (7-18) by travelling belt (7-15), rotating disk (7-18) is " windmill " structure, is installed on shockproof experiment porch by telescopic support struts (7-19), magnetic bases (7-20).
6. according to interferometer measuration system claimed in claim 1, it is characterized in that: in the face in described three-dimensional light lining platform (II)-computing machine (16) Based Intelligent Control from face light-dividing device (7) by Control card is housed controls shutter (7-9) from controlling in face control shutter (7-7), first surface in shutter (7-8) and second, when the interior deformation of measurement face, control in first surface in shutter (7-8) and second and control shutter (7-9) unlatching, acoplanarity displacement control shutter (7-7) is closed; Measure when acoplanarity displacement, in first surface, control and in shutter (7-8) and second, control shutter (7-9) and close, acoplanarity displacement control shutter (7-7) unlatching.
7. according to interferometer measuration system claimed in claim 1, it is characterized in that: in the face in described three-dimensional light lining platform (II)-piezoelectric ceramics phase-shifter (7-1) and (7-2) from the total reflective mirror (7-3) on face light-dividing device (7) and (7-4) is housed respectively; Piezoelectric ceramics phase-shifter (13) is equipped with at total reflective mirror (12) back side of measuring in acoplanarity displacement light path, and these three piezoelectricity phase shifters are all by being equipped with computing machine (16) Based Intelligent Control of Control card.
8. according to interferometer measuration system claimed in claim 1, it is characterized in that: in the face in described three-dimensional light lining platform (II)-rotating disk (7-18) on face light-dividing device (7) makes it rotate freely around 360 °, light hole (7-17) axle center by stepper motor (7-14), travelling belt (7-15), therefore only need one group of eyeglass that is all-trans (7-3) and (7-4) just can realize traditional fixing u-v field tripping device function.
9. according to the interferometer measuration system described in claim 1,2,3 or 4, it is characterized in that: be installed on a worktable with six direction degree of freedom objective tables at described laser instrument platform (I), three-dimensional light lining platform (II); Three-dimensional light lining platform (II) is connected by laser couplers (4) with laser instrument platform (I), and whole three-dimensional light lining platform (II) is encapsulated in a camera bellows; Ccd video camera (15) and computing machine (16) are placed on the below of three-dimensional light lining platform (II); Six direction degree of freedom objective tables (III) are placed on the right side of three-dimensional light lining platform (II); Wherein the flash ranging center of three-dimensional light lining platform (II) and test specimen (17) are located in the same horizontal line.
10. according to interferometer measuration system claimed in claim 1, it is characterized in that: the imaging lens (14) in described three-dimensional light lining platform (II) adopts professional microspur imaging lens, ccd video camera (15) adopts professional camera; All components and parts in described three-dimensional light lining platform (II) all adopt multiple degrees of freedom to adjust rotating base and telescopic support struts is fixed on earthquake table.
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|---|---|---|---|---|
| CN104359929A (en) * | 2014-11-21 | 2015-02-18 | 清华大学 | Binaryzation nano porous material characterization method |
| CN105136024A (en) * | 2015-05-11 | 2015-12-09 | 上海交通大学 | Light path switching device and micro-nano measurement system integrated with multiple probes |
| CN107076540A (en) * | 2014-10-30 | 2017-08-18 | 韩国生产技术研究院 | Multi-functional light-dividing device |
| CN109443230A (en) * | 2018-12-17 | 2019-03-08 | 东莞理工学院 | A kind of piezoelectric ceramics measuring system based on image procossing |
| CN110500966A (en) * | 2019-10-09 | 2019-11-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of six degree of freedom precision measurement system for the measurement of force structure miniature deformation |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003279333A (en) * | 2002-03-26 | 2003-10-02 | Toshiba Eng Co Ltd | Shape measuring apparatus, appearance examining apparatus, dimension examining apparatus, volume examining apparatus and displacement and deformation measuring apparatus |
| CN1304817C (en) * | 2004-01-02 | 2007-03-14 | 清华大学 | Multifunction tridimension displacement laser interference measuring system |
| JP2007113974A (en) * | 2005-10-19 | 2007-05-10 | Hitachi Zosen Corp | Method and apparatus for measuring distortion using phase-shift digital holographic method |
| CN101033947A (en) * | 2007-03-29 | 2007-09-12 | 上海大学 | Measurement system for three-dimensional deformation based on rotary Y-type optical fiber |
| CN102322807A (en) * | 2011-08-05 | 2012-01-18 | 北京交通大学 | Real-time measurement method for dynamic three-dimensional deformation of object |
| CN202281596U (en) * | 2011-10-24 | 2012-06-20 | 河南科技大学 | Laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement |
-
2014
- 2014-02-25 CN CN201410064678.6A patent/CN103822587B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003279333A (en) * | 2002-03-26 | 2003-10-02 | Toshiba Eng Co Ltd | Shape measuring apparatus, appearance examining apparatus, dimension examining apparatus, volume examining apparatus and displacement and deformation measuring apparatus |
| CN1304817C (en) * | 2004-01-02 | 2007-03-14 | 清华大学 | Multifunction tridimension displacement laser interference measuring system |
| JP2007113974A (en) * | 2005-10-19 | 2007-05-10 | Hitachi Zosen Corp | Method and apparatus for measuring distortion using phase-shift digital holographic method |
| CN101033947A (en) * | 2007-03-29 | 2007-09-12 | 上海大学 | Measurement system for three-dimensional deformation based on rotary Y-type optical fiber |
| CN102322807A (en) * | 2011-08-05 | 2012-01-18 | 北京交通大学 | Real-time measurement method for dynamic three-dimensional deformation of object |
| CN202281596U (en) * | 2011-10-24 | 2012-06-20 | 河南科技大学 | Laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement |
Non-Patent Citations (2)
| Title |
|---|
| 杨福俊 等: "ESPI技术测量静态和准动态面内位移", 《光电子.激光》 * |
| 田文超 等: "硅基大位移低驱动电压静电微驱动器变形分析", 《西安电子科技大学学报（自然科学版）》 * |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107076540A (en) * | 2014-10-30 | 2017-08-18 | 韩国生产技术研究院 | Multi-functional light-dividing device |
| CN107076540B (en) * | 2014-10-30 | 2019-06-18 | 韩国生产技术研究院 | Multi-functional light-dividing device |
| CN104359929A (en) * | 2014-11-21 | 2015-02-18 | 清华大学 | Binaryzation nano porous material characterization method |
| CN105136024A (en) * | 2015-05-11 | 2015-12-09 | 上海交通大学 | Light path switching device and micro-nano measurement system integrated with multiple probes |
| CN105136024B (en) * | 2015-05-11 | 2017-11-21 | 上海交通大学 | Light path switching device and the micro-nano measuring system for integrating multiple gauge heads |
| CN109443230A (en) * | 2018-12-17 | 2019-03-08 | 东莞理工学院 | A kind of piezoelectric ceramics measuring system based on image procossing |
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| CN110500966A (en) * | 2019-10-09 | 2019-11-26 | 中国航空工业集团公司北京长城计量测试技术研究所 | A kind of six degree of freedom precision measurement system for the measurement of force structure miniature deformation |
| CN115500582A (en) * | 2022-08-17 | 2022-12-23 | 上海科技大学 | Foot three-dimensional contour acquisition system |
| CN115500582B (en) * | 2022-08-17 | 2024-03-22 | 上海科技大学 | Foot three-dimensional contour acquisition system |
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