JP2007113974A - Method and apparatus for measuring distortion using phase-shift digital holographic method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a distortion measuring method using a phase-shift digital holographic method capable of performing noncontact, wide-range, and highly accurate measurement on distortions of a part to be measured with high spatial resolution. <P>SOLUTION: When the phase-shift digital holographic method and two luminous fluxes of a laser beam R are used to measure in-plane displacements and out-of-plane displacements in the surface of an object to be measured, the laser beam R emitted from one laser irradiator 11 is divided into two measuring lights Ra and Rb. The measuring lights are irradiated to the object M to be measured mounted to a placing surface D in perpendicular in-plane directions which intersect with each other at right angles. Half of each measuring light is directly irradiated to the object to be measured on the placing surface, and the rest halves are reflected at reflecting mirrors 31 and 32 arranged at right angles to the placing surface and made incident at the same angle of incidence from both sides of the object to be measured to measure the amount of displacement in in-plane directions in axial directions of intersection between the placing surface and each perpendicular surface and in out-of-plane directions perpendicular to the placing surface. The amount of displacement in three-dimensional directions is differentiated to determine distortions of the surface of the object to be measured in this method. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a strain measuring method and a strain measuring apparatus for measuring strain on an object surface using a phase shift digital holography method.

In recent years, there has been an increasing trend to efficiently manage budgets by evaluating the soundness of structures such as bridges and implementing asset management.
By the way, an important matter for evaluating the soundness of a structure is fatigue fracture.

For example, in the case of a bridge, the fatigue failure occurs due to repeated running load of the vehicle, wind load, and other mechanical vibrations.
In order to prevent such fatigue failure, it is important to first grasp the location where the stress is concentrated by measuring the strain in the structure and obtaining the amount of displacement.

  Conventionally, there is a method of using a strain gauge to obtain the strain of a structure. However, according to this strain gauge, only a portion where the strain gauge is attached can be measured, and the structure is measured over a wide range. Not suitable for.

On the other hand, laser speckle interferometry is known as a method for measuring a relatively wide range of strain without contact (see, for example, Patent Document 1).
The basic principle of this laser speckle interferometry is that a measured part is irradiated with a laser beam, the scattered light is recorded as a speckle pattern by an imaging means, and the speckle pattern before and after deformation of the measured part is measured. Based on the amount of movement, the displacement and distortion of the object to be measured are measured.
JP-A-8-261730

  However, in the laser speckle interferometry, a laser beam is irradiated onto a measurement object, and when the generated scattered light is imaged as a speckle pattern, it is imaged after being focused by a condenser lens. In order to reduce the influence, it is necessary to apply filtering such as spatial smoothing, and thus there is a problem that the spatial resolution is lowered.

  In addition, due to the low spatial resolution, if the scattered light from the surface of the object to be measured is weak, sufficient measurement accuracy cannot be obtained. Was necessary.

  Accordingly, in order to solve the above-described problems, the present invention provides a strain measurement apparatus using a phase shift digital holography method that can accurately measure a distortion of a measurement target portion in a non-contact and wide range with high spatial resolution. For the purpose.

In order to solve the above-described problem, the strain measurement method using the phase shift digital holography method of the present invention applies a laser beam emitted from a laser irradiator to a measurement object placed on a predetermined placement surface as measurement light. The hologram obtained by irradiating and reflecting the reflected object beam and the reference beam which is split from the laser beam by the first beam splitter and whose phase is shifted by π / 2 by one period coaxially to the CCD camera The procedure for obtaining the phase distribution of the surface of the measured object from the image using the phase shift digital holography method is performed before and after the deformation of the measured object.
A displacement calculation step for obtaining a displacement on the surface of the object to be measured in the irradiation direction of the object light from the phase distribution difference that is the difference between both phase distributions before and after the deformation, and
This displacement calculation process is performed on the first vertical surface perpendicular to the placement surface of the object to be measured and on the second vertical surface perpendicular to the placement surface and perpendicular to the first vertical surface. By performing two first measurement lights and two second measurement lights (hereinafter, two measurement lights are referred to as two light beams) having the same incident angle from both sides of the measurement object, z perpendicular to the mounting surface is obtained. An axial direction and an x-axis direction that is an intersection axis between the placement surface and the first vertical surface, and a z-axis direction that is perpendicular to the placement surface and a y-axis direction that is an intersection axis between the placement surface and the second vertical surface. Calculating the displacement amount of
A strain measurement method for calculating a strain generated in an object to be measured from the obtained displacement amount in the three-dimensional direction,
The first measurement light and the second measurement light are obtained by dividing the measurement light divided by the first beam splitter by the second beam splitter, and each of the obtained measurement lights is divided into two light beams. When irradiating the object to be measured, the pair of shutter members arranged in the respective irradiation paths are opened and closed to directly irradiate the object to be measured with one of the two light beams. In this method, the measurement light is irradiated onto the object to be measured from the side opposite to the one measurement light through a reflection mirror arranged opposite to the irradiation direction.

Further, a strain measuring apparatus using the phase shift digital holography method of the present invention is a strain measuring apparatus using the above-described strain measuring method,
One laser irradiator;
A first beam splitter for dividing the laser light emitted from the laser irradiator into two to obtain measurement light and reference light;
Moving means for moving the first beam splitter along the irradiation direction of the reference light and shifting the phase of the reference light by π / 2 by one period;
A second beam splitter for further dividing the measurement light from the first beam splitter into two to obtain a first measurement light and a second measurement light;
A pair of first shutter members and a pair of second shutter members which are respectively arranged in the middle of the respective irradiation paths of the obtained first measurement light and second measurement light and which can open and close each of the measurement lights by half;
When one of the pair of first shutter members is opened and placed perpendicular to the placement surface on which the measurement object is placed, the first measurement light on one side is not reflected and is reflected. The measurement object is directly irradiated, and when the other is opened, the first measurement light on the other side is reflected to the measurement object from the side opposite to the first measurement light on the one side and A first reflecting mirror that irradiates with the same incident angle;
When one of the pair of second shutter members is opened perpendicularly to the placement surface and the first reflecting mirror, the second measurement light on one side is not reflected and the object to be measured is not reflected. When the other is opened, the second measurement light on the other side is reflected to irradiate the object to be measured on the opposite side of the measurement light and with the same incident angle. A second reflecting mirror;
A CCD camera for obtaining the hologram image of the surface of the object to be measured by causing the object light reflected on the surface of the object to be measured and the reference light to be incident coaxially;
A phase distribution calculation unit for obtaining a phase distribution of the surface of the object to be measured from a plurality of hologram images obtained by shifting the phase of the reference light by the moving means;
A phase difference calculation unit for obtaining a difference in phase distribution before and after the deformation of the measured object obtained by the phase distribution calculation unit;
Due to the phase distribution difference obtained by the phase difference calculation unit, the placement surface, the first vertical surface perpendicular to the placement surface, and the second vertical surface perpendicular to the placement surface and the first vertical surface. A displacement calculation unit for obtaining a displacement amount in the interior;
And a strain calculation unit that obtains a strain in a three-dimensional direction on the surface of the object to be measured from each displacement amount obtained by the displacement calculation unit.

  According to the strain measurement method and the strain measurement apparatus, the phase shift digital holography method is used when the displacement of the surface of the object to be measured is obtained from the phase distribution difference before and after the deformation. It is possible to accurately measure the distortion of the measured portion in a wide range with high spatial resolution.

  Further, according to the strain measurement method and the strain measurement apparatus, the laser light emitted from one laser irradiator is divided into measurement light and reference light, and the divided measurement light is further divided into two parts. A shutter member that can irradiate each measurement light in half is disposed in the middle of the two measurement light irradiation paths, and the measurement light on one side blocked by the shutter member in half is placed on the mounting surface. The measurement object on the other side is directly irradiated and the measurement light on the other side is reflected on the opposite side of the measurement light on the one side and at the same incident angle by the reflection mirror arranged perpendicular to the placement surface. Displacement in the three-dimensional direction, which is in-plane displacement and out-of-plane displacement on the surface of the object to be measured, is obtained by irradiating the measurement object, that is, using two measurement lights irradiated in directions of irradiation surfaces perpendicular to each other. Especially Ri. Thus to measure strain, with can the configuration itself be simplified, can be made compact.

[Embodiment]
Hereinafter, a strain measurement method and a strain measurement apparatus using a phase shift digital holography method according to an embodiment of the present invention will be described with reference to the drawings.

First, the principle of measuring the displacement of an object using the phase shift digital holography method will be briefly described.
In this phase shift digital holography method, an optical system is used in which object light (reflected light from an object) and reference light are incident on a CCD on the same axis (on-axis). The first-order and −1st-order diffraction images overlap and are reproduced, but when the complex amplitude on the CCD surface is obtained by phase analysis of the phase-shifted interference fringes, the first-order diffraction image is reproduced. Can only get.

  In this method, the complex amplitude distribution of light is obtained by calculation, the back propagation of the light is calculated and the image is reproduced, so that it can be focused on a computer, and the reproduced first-order diffraction image has an intensity. Not only the phase but also the phase can be obtained as digital information.

Here, when the complex amplitude of the object light is A _o (x, y) and the complex amplitude of the reference light is A _r (x, y), the following expressions (1) and (2) are given.

Here, a _o (x, y) and a _r (x, y) represent amplitude distributions of the object light and the reference light, respectively, and φ _o (x, y) and φ _r (x, y) represent the object light, respectively. And the phase distribution of the reference light. α is the phase shift amount of the reference light that is shifted by the reflection mirror provided on the PZT stage, and is 0, π / 2, π, and 3π / 2, respectively.

  Further, the interference fringes I (x, y, α) recorded by the CCD can be expressed by the following equation (3).

A phase shift method is used for phase analysis on the CCD surface.
In other words, since parallel light is used as the reference light, the amplitude on the recording surface is constant and the phase does not change, so that the amplitude a (x, y) of only the object light on the recording surface can be obtained by the following equation (4). Further, the phase φ (x, y) can be obtained from the relationship shown in the following equation (5).

  When the complex amplitude distribution g (x, y) on the recording surface is obtained from the phase and amplitude thus obtained, the following equation (6) is obtained.

Fresnel diffraction integration is used to obtain the complex amplitude distribution on the reproduction surface from the complex amplitude distribution on the CCD surface.
When the complex amplitude distribution of the original object is u (x, y), it is expressed as the following equation (7).

Here, F is an operator representing Fourier transform, R is the distance between the recording surface and the reproducing surface, and k is the wave number.
Based on the above description, the principle for obtaining the phase distribution difference of the measured object before and after deformation will be described.

Assuming that the complex amplitude distribution on the reproduction surface of the object light before the deformation is A _o (x, y) and the complex amplitude distribution on the reproduction surface of the object light after the deformation is A _o ′ (x, y), respectively, (8) It can be expressed as Equation (9) and Equation (9).

If the applied deformation is minute, it can be said that the amplitude distribution of the object light before and after the deformation does not change, and only the phase distribution changes. Therefore, the amplitude distribution a _o ′ (x, y) after the deformation and the phase distribution φ _o ′ (x, y) can be expressed by the following equations (10) and (11), respectively.

Here, the phase change Δφ (x, y), which is the phase distribution difference caused by the deformation, is obtained by taking the phase difference of the reproduced image before and after the deformation.
The gist of the present invention is that the strain in the three-dimensional direction on the surface of the measurement object placed on the placement surface (xy plane), that is, the displacement can be measured. For this reason, xz Displacement measurement using two light beams is performed in each of the plane and the yz plane, and in each plane, the respective coordinate axis directions (the x-axis direction and the z-axis direction in the xz plane; the y-axis in the yz plane) Direction and z-axis direction).

Next, the principle of displacement measurement using two light beams will be described.
FIG. 1 shows the positional relationship among the light source, the object to be measured, and the observation point in order to measure the displacement using two light beams.

In FIG. 1, parallel light is irradiated from the light sources L ₁ and L ₂ to the measured object M, and the point Q on the measured object M and the point Q ′ after the displacement are observed from the observation point O. . Here, the xz plane is considered.

Here, since the displacement vector d of the point Q is sufficiently smaller than the distances L ₁ Q and L ₂ Q from the light sources L ₁ and L ₂ to the measured object M, the line segments L ₁ Q and L ₁ Q ′, L ₂ Q and L ₂ Q ′ can be regarded as being parallel to each other. Similarly, the line segments QO and Q′O can be regarded as parallel.

Assuming that unit vectors from the measured object M to the light source L ₁ , the measured object M to the light source L ₂ , and the measured object M to the observation point O are i ₁ , i ₂ , i ₃ , two optical paths L ₁ QO and L ₁ Q′O difference Δl ₁ and optical path L ₂ QO and L ₂ Q′O difference Δl ₂ can be expressed as the following equations (12) and (13), respectively.

Since parallel light is used as the object light, the x-axis direction component of the unit vector i ₀ from the measured object M to the observation point O is 0 (zero) and the z-axis direction component is 1.
Further, assuming that the incident angles from the light sources L ₁ and L ₂ to the measured object M are θ and −θ, respectively, each unit vector i ₁ from the measured object M to the light source L ₁ and from the measured object M to the light source L _2. , I ₂ can be expressed by the following equations (14) to (16).

The relationship between the optical path differences Δl ₁ and Δl ₂ and the phase changes Δφ ₁ and Δφ ₂ caused by the light sources L ₁ and L ₂ can be expressed by the following formulas (17) and (18) using the wavelength λ. .

Assuming that the x-axis direction component of the displacement vector d is d _x and the z-axis direction component is d _z , the following equations (19) and (20) are obtained according to the equations (12) to (18). .

Taking the difference and sum of the above equations (19) and (20), d _x and d _z are obtained from the following equations (21) and (22). That is, the in-plane displacement d _x and the out-of-plane displacement d _z can be obtained respectively.

  In brief, the phase shift digital holography method is a method for measuring the displacement of a measurement object placed on a predetermined placement surface (xy plane) in a three-dimensional direction with high accuracy. Normally, the displacement in the out-of-plane direction is measured by irradiating light from one direction, but in this embodiment, the reflected object is incident using the two light beams and entering from the left and right directions at the same incident angle. The light and the reference light are photographed with a CCD camera, the phase distribution is obtained from the photographed hologram image, and the in-plane displacement (x is determined based on the difference between both phase changes (phase distribution difference) due to the object light reflected from the left and right. (Displacement in the axial direction or x-axis direction) and out-of-plane displacement (displacement in the z-axis direction) based on the sum of both phase changes.

  Then, by applying the above procedure to measurement light from two irradiation surface directions (meaning surface directions through which two light beams pass), a three-dimensional direction (x-axis direction, y-axis direction, The amount of displacement in the z-axis direction) is obtained.

  Next, FIG. 2 shows a strain measuring apparatus that measures the displacement in the three-dimensional direction using the above-described phase shift digital holography method and obtains the strain by differentiating the measured displacement. Description will be made with reference to FIG.

  As shown in FIG. 2, the strain measuring device is roughly divided into three-dimensional displacement amounts (in-plane direction and out-of-plane direction) based on the phase distribution of object light that is irradiated onto the object to be measured and is reflected. And a strain calculation unit 2 for obtaining a strain by differentiating the amount of displacement measured by the displacement measurement unit 1, and a gist of the present invention. Since there is in the displacement measuring unit 1, the schematic configuration of the displacement measuring unit 1 will be described first.

  That is, as shown in FIG. 3, the displacement measuring unit 1 mainly includes a laser irradiator 11 that emits He-Ne laser light (laser light from a semiconductor laser) R, and the laser irradiator 11. A first beam splitter (a polarization beam splitter is used) 12 for dividing the laser beam emitted from the laser beam into two to obtain the measurement beam Rm and the reference beam Rr, and the measurement beam from the first beam splitter 12 Further divided into two, a second beam splitter (a non-polarized beam splitter is used) 13 for obtaining two first and second measurement lights Ra and Rb, and the second beam splitter 13 The two first and second measurement lights Ra and Rb are placed on both sides of the measurement object M placed on the placement surface D that is a horizontal plane (xy plane), to be precise, along the xz plane. Irradiation A first reflection mirror 14 and a second reflection mirror 15 for irradiating from a direction (hereinafter referred to as an xz plane direction) and an irradiation surface direction along the yz plane (hereinafter referred to as a yz plane direction); A CCD camera 17 that is an imaging device for guiding the object light Ro reflected by the measurement object M through the third reflection mirror 16 to image the measurement object M, and the third reflection mirror 16 and the CCD camera 17. A half mirror 18 arranged between the first beam splitter 12 for guiding the reference light Rr from the first beam splitter 12 to the CCD camera 17 coaxially with the object light Ro, and a hologram image (in luminance data) taken by the CCD camera 17 And a computer device 19 for calculating a displacement amount in the three-dimensional direction of the surface of the object M to be measured. By a control signal from the device 19, together with the phase shift of the reference light is performed, the shutter member to be described later is operated.

  Then, the first beam splitter 12 is moved in the irradiation direction of the reference light Rr, and the phase of the reference light becomes four stages, that is, the phase becomes 0 (zero), π / 2, π, 3π / 2). Thus, it is provided in a PZT stage (which is a piezo stage) 20 which is a moving means for shifting the phase. The first beam splitter 12 does not change the distance to the measurement object on the measurement light side even when it is moved in the reference light irradiation direction.

  Between the laser irradiator 11 and the first beam splitter 12, a spatial filter 21, an optical isolator 22, a spatial filter 23, an optical fiber 24, a spatial filter 25, a polarizing beam splitter 26, and a half wavelength are provided. A plate 27 is disposed so that the laser beam R is incident on the first beam splitter 12 as parallel light. The optical isolator 22 is for blocking the reflected light from the optical fiber 24, the polarization beam splitter 26 is for adjusting the light ellipticalized by the optical fiber 24 to linearly polarized light, and the half-wave plate 27 is This is for adjusting the light quantity ratio between the reference light and the measurement light branched by the first beam splitter 12 by rotating the polarized light.

  Then, as described above, the first measurement light Ra divided by the second beam splitter 13 is irradiated to the measurement object M so as to face the yz plane, and the other second measurement light Rb is irradiated. A configuration (accurate) in which the measurement object M is irradiated so as to face the xz plane direction, and each measurement light Ra, Rb can be irradiated in half vertically by a pair of shutter members (described later). In other words, each measurement light is configured to obtain two light beams.

  That is, as shown in FIGS. 3 to 6, the second vertical plane (yz plane) perpendicular to the horizontal plane (xy plane) that is the placement surface D on which the measurement object M is placed. The fourth reflection mirror 31 is arranged in parallel with the first reflection plane, and the fifth reflection mirror 32 is arranged in parallel with the first vertical plane (xz plane) perpendicular to both the placement surface D and the second vertical plane. In addition, the first measurement light Ra is irradiated so as to straddle both the placement surface D and the fourth reflection mirror 31, and the second measurement light Rb also includes the placement surface D and the fifth reflection mirror 32. And a pair of first shutter members 33 (33a, 33b) and a pair of second shutter members 34 (34a, 34b) arranged in the middle of the respective irradiation paths, It is configured to irradiate with upper and lower halves. In short, the fourth reflection mirror 31 is arranged to face the irradiation surface direction of the first measurement light Ra, and the fifth reflection mirror 32 is arranged to face the irradiation surface direction of the second measurement light Rb. Yes.

  Specifically, when the upper half of the irradiation path is blocked by one first shutter member 33a, the lower half of the first measurement light Ra is directly directed to the measurement object M on the placement surface D in a predetermined direction (x -Z plane direction), and when the lower half of the opposite side of the irradiation path is blocked by the other first shutter member 33b, the first measurement light Ra in the upper half is second vertical plane (yz plane). The object to be measured M is irradiated on the side opposite to the predetermined direction and at the same incident angle. As shown in FIG. 4, the incident angle of the first measurement light Ra with respect to the measured object M is in the range of 50 to 70 degrees, preferably 60 degrees. The overlapping range of the one measuring light Ra and Ra is widened. If the angle exceeds 70 degrees, the overlapping range increases, but the resolution becomes coarse. Conversely, if the angle is smaller than 50 degrees, the overlapping range (measurement range) becomes narrow. Further, as each of the shutter members 33a, 33b, 34a, and 34b, for example, a rectangular plate (so-called slide type) or an arc-like plate (so-called rotational type) is used.

  In this way, using the first measurement light Ra, the two first measurement lights irradiated on the measurement object M with the incident angle of 60 degrees from both sides in the xz plane direction of the measurement object M. (So-called two light beams) Ra and Ra are obtained.

Similarly, the irradiation direction of the second measurement light Rb only differs by 90 degrees, so that two second measurement lights Rb and Rb are obtained in the yz plane direction.
In addition, each measurement light Ra and Rb whose irradiation direction has been changed toward the measurement object M by the first and second reflection mirrors 14 and 15 are beam expanders 41 and 32 arranged in the middle of the respective irradiation paths. 42 expands the light beam to a predetermined size.

  The computer device 19 is provided with a calculation unit (for example, configured by a program) for executing each calculation formula described in the above-described measurement principle, and a predetermined time interval (for example, The shutter members 33 and 34 are opened and closed at intervals of 0.5 seconds), the phase of the reference light is shifted by π / 2 by moving the PZT stage 20, and the object light Ro and the reference light Rr Is provided with a control function for photographing a hologram image obtained by making the light incident on the same axis at a predetermined timing. A third shutter member 35 for blocking the reference light Rr is also arranged in the middle of the irradiation path of the reference light Rr.

  Further, at least the displacement measuring unit 1 of this strain measuring device is compactly made by accommodating a side view with a narrow width in a rectangular case, like a vertical computer in which each component is small. Yes. For example, the laser irradiator 11 is disposed in the upper part of the case, the beam splitters 12 and 13 and the shutter members 33 and 34 are disposed in the middle part, the mounting surface D of the measurement object M, the fourth and the fourth. The five reflecting mirrors 31 and 32 are arranged at the lower corner portion, and the beam expanders 41 and 42 for expanding the two measurement lights are arranged along the side wall surfaces along the two orthogonal sides of the mounting surface D. Further, the CCD camera 17 is arranged near the upper center in the case.

Next, a method for measuring the displacement on the surface of the object to be measured by the displacement measuring unit 1 of the strain measuring apparatus described above will be described.
The measurement light R, which is the laser light emitted from the laser irradiator 11, is first divided into two by the first beam splitter 12, and the two divided first and second measurement lights Ra and Rb are respectively first. The object to be measured M is irradiated through the reflection mirror 14, the beam expander 41, the second reflection mirror 15, and the beam expander 42, but separately by the shutter members 33 and 34 arranged in the middle of the irradiation path. Irradiated.

  The first measurement light Ra will be described. As shown in FIG. 5, the first shutter members 33a and 33b are operated and the same incident angle (for example, 60 degrees) from both sides of the measurement object M in the xz plane direction. Moreover, it is irradiated alternately. For example, the object light Ro irradiated from the first measurement light Ra in the lower half and reflected by the surface of the measurement object M is incident on the CCD camera 17 via the third reflection mirror 16 and the half mirror 18.

  At this time, the reference light Rr from the first beam splitter 12 is incident on the CCD camera 17 coaxially with the object light Ro through the half mirror 18 to obtain a hologram image. Further, with respect to the reference light Rr, the PZT stage 20 is driven, and as described above, phase shift is performed by π / 2 by one period, and in addition to the case where the phase is zero, four hologram images are obtained. can get.

By applying the above-described equations (4) to (7) to these four image data, the phase distribution of the surface of the measurement object M can be obtained.
Further, the other first shutter member 33b is operated, and the measurement object M is irradiated with the same incident angle from the opposite side through the fourth reflecting mirror 31 with the first measurement light Ro in the upper half, which is the same as above. According to the procedure, the phase distribution of the surface of the measurement object M by the first measurement light Ra from the opposite side is obtained.

That is, two phase distributions φ ₁ and φ ₂ are obtained by the two-beam method.
Next, as shown in FIG. 6, the second shutter members 34a and 34b are driven to irradiate the lower half of the second reference light Rb directly onto the measurement object M, and the upper half is reflected to the fifth. The object to be measured M is irradiated from the opposite side via the mirror 32, and phase distributions φ ₃ and φ ₄ by two light beams are obtained by the same procedure as described above.

Next, the phase distribution (φ ′ ₁ , φ ′ ₂ , φ ′ ₃ , φ ′ ₄ ) by two light fluxes is obtained by the same procedure as described above in a state where the external force is applied to the object to be measured M. The phase change before and after the deformation, that is, the phase distribution difference [Δφ ₁ (φ ₁ −φ ′ ₁ ), Δφ ₂ (φ ₂ −φ ′ ₂ ), Δφ ₃ ( φ ₃ −φ ′ ₃ ), Δφ ₄ (φ ₄ −φ ′ ₄ )].

Then, using the above-described equations (21) and (22), the displacement in the x-axis direction and the z-axis direction, that is, the in-plane displacement d _x , from both phase distribution differences Δφ ₁ and Δφ ₂ before and after the deformation. it may be obtained out-of-plane displacement _{d z.} Similarly, both the phase distribution difference [Delta] [phi ₃ after deformation prior to _deformation, displacement from [Delta] [phi ₄ in the y-axis direction and the z-axis direction, that may be obtained in-plane displacement d _y and out-of-plane displacement d _z. As for the displacement d _z in the z-axis direction obtained by both measurement lights Ra and Rb (also for Δφ ₂ and Δφ ₄ ), the same thing can be obtained from both measurement lights Ra and Rb.

  In this way, the displacement in the three-dimensional direction (x-axis direction, y-axis direction, z-axis direction) on the surface of the object M to be measured using only the laser light emitted from one (one) laser irradiator 11. The quantity can be determined together.

In addition, about the order which calculates | requires each phase distribution (phi) ₁ , (phi) ₂ , (phi) ₃ , (phi) ₄ , it can be changed arbitrarily.
Then, the displacement amount in the three-dimensional direction (x-axis direction, y-axis direction, z-axis direction) on the surface of the measurement object M obtained by the displacement measurement unit 1 is input to the strain calculation unit 2 to be measured. A strain distribution on the surface of the measurement object M is obtained.

Next, the main configuration of the calculation unit provided in the computer device 19 will be briefly described.
That is, as shown in FIG. 7, the computer device 19 includes, as an arithmetic processing unit, at least an object to be measured from a plurality of hologram images obtained by shifting the phase of the reference light by the PZT stage 20 that is a moving unit. A phase distribution calculation unit 51 for obtaining a phase distribution of the M surface, a phase difference calculation unit 52 for obtaining a difference in phase distribution before and after the deformation of the measured object M obtained by the phase distribution calculation unit 51, and Due to the phase distribution difference obtained by the phase difference calculation unit 52, the irradiation surface direction parallel to the first vertical surface perpendicular to the placement surface D and the placement surface D, and the placement surface D and the first vertical surface. And a displacement calculating unit 53 for determining the amount of displacement in the direction of the irradiation surface parallel to the second vertical surface perpendicular to both.

Here, it is as follows when the main part of the distortion measuring method mentioned above is put together.
That is, in this strain measurement method, laser light emitted from a laser irradiator is irradiated as a measurement light onto a measured object placed on a predetermined placement surface, and the first object is obtained from the reflected object light and the laser light. Phase shift digital holography method for phase distribution of the surface of the object to be measured from a hologram image obtained by making the reference beam split by the beam splitter and shifted in phase by π / 2 by one period on the same axis. The procedure to obtain using is performed before and after deformation of the measured object,
A displacement calculation step for obtaining a displacement on the surface of the object to be measured in the irradiation direction of the object light from the phase distribution difference that is the difference between both phase distributions before and after the deformation, and
This displacement calculation process is performed on the first vertical surface perpendicular to the placement surface of the object to be measured and on the second vertical surface perpendicular to the placement surface and perpendicular to the first vertical surface. By performing two first measurement lights and two second measurement lights (hereinafter, two measurement lights are referred to as two light beams) having the same incident angle from both sides of the measurement object, z perpendicular to the mounting surface is obtained. An axial direction and an x-axis direction that is an intersection axis between the placement surface and the first vertical surface, and a z-axis direction that is perpendicular to the placement surface and a y-axis direction that is an intersection axis between the placement surface and the second vertical surface. Calculating the displacement amount of
A strain measurement method for calculating a strain generated in an object to be measured from the obtained displacement amount in the three-dimensional direction,
The first measurement light and the second measurement light are obtained by dividing the measurement light divided by the first beam splitter by the second beam splitter, and each of the obtained measurement lights is divided into two light beams. When irradiating the object to be measured, the pair of shutter members arranged in the respective irradiation paths are opened and closed to directly irradiate the object to be measured with one of the two light beams. In this method, the measurement light is irradiated onto the object to be measured from the side opposite to the one measurement light through a reflection mirror arranged opposite to the irradiation direction.

  By the way, in the displacement measuring unit 1 described above, the two first and second measurement lights Ra and Rb are irradiated to the measurement object M from the irradiation surface directions different from each other by 90 degrees. Since the internal displacement (x-axis direction displacement or y-axis direction displacement) and the out-of-plane displacement (z-axis direction displacement) are measured, there is a convex portion Ma on the surface of the measurement object M as shown in FIG. The first measurement light Ra on one side can be irradiated, but the measurement light S reflected by the fourth reflection mirror 31 of the first measurement light Rb on the other side is blocked by the convex portion Ma. Originally, the displacement in the measurement portion S cannot be measured, but in-plane displacement (y-axis direction displacement) and out-of-plane displacement (z-axis direction) in the irradiation surface direction by the two-beam method using the second measurement light Rb. (Displacement) can be measured, the first meter It can be determined plane displacement at the irradiation surface direction of the light Ra and (x-axis direction displacement).

That is, phase distribution differences (Δφ ₃ , Δφ ₄ ) from two directions are obtained by the two light beams of the second measurement light Rb, and displacements _dy and d _{z in} the y-axis direction and the z-axis direction are obtained.

Since only one light beam can be used for the first measurement light Ra, a phase distribution difference (Δφ ₁ ) from one direction is obtained by this light beam, while a phase distribution difference (Δφ ₁ ) due to the light beam on the opposite side is obtained. _{If 2} ) is an unknown, Δφ ₁ and d _z are known, and therefore Δφ ₁ can be obtained from the above-described equation (22).

That is, since Δφ ₁ and Δφ ₂ are obtained, the displacement d _{x in the} x-axis direction is obtained from the above-described equation (21).
Further, the computer device 19 of the displacement measuring unit 1 is irradiated with only one other measurement light based on the phase distribution difference obtained from the one measurement light and the in-plane displacement and the out-of-plane displacement. If this is not possible, an in-plane displacement calculation unit 61 for determining the remaining in-plane displacement amount is provided.

  That is, by irradiating the object to be measured from two directions different from each other by 90 degrees, it is not possible to irradiate the measurement light from one direction. The displacement amount in the three-dimensional direction can be measured using the measurement result of the measurement light from the direction.

  In the displacement measuring unit 1, a part of the hologram image is cut out, and the above-described calculation process is performed on the cut-out image data so as to obtain the phase distribution difference and the displacement amount. Compared with the case where the object is the entire hologram image, the object can be obtained quickly, and therefore the displacement can be measured almost in real time. In addition, the measurement range can be confirmed from the obtained image. That is, the measurement object M can be aligned.

  In addition, mask processing is performed in the above-described displacement measurement, and portions other than the measurement range are removed. In this mask process, a threshold is provided for the intensity (luminance value) in the complex amplitude distribution of the measurement portion, and the portion below the threshold is masked. As the threshold value, a value slightly larger than the intensity in a dark portion other than the measurement range where the laser beam is not irradiated, or the average value of the intensity within the measurement range is used.

  According to the strain measurement method and the strain measurement device described above, the phase shift digital holography method is used in a non-contact manner when the displacement of the surface of the object to be measured is obtained from the phase distribution difference before and after the deformation. In addition, it is possible to accurately measure the distortion of the measured portion in a wide range with high spatial resolution.

  Further, according to the strain measurement method and the strain measurement apparatus, the laser light emitted from one laser irradiator is divided into measurement light and reference light, and the divided measurement light is further divided into two parts. A shutter member that can irradiate each measurement light in half is disposed in the middle of the two measurement light irradiation paths, and the measurement light on one side blocked by the shutter member in half is placed on the mounting surface. The measurement object on the other side is directly irradiated and the measurement light on the other side is reflected on the opposite side of the measurement light on the one side and at the same incident angle by the reflection mirror arranged perpendicular to the placement surface. Displacement in the three-dimensional direction, which is in-plane displacement and out-of-plane displacement on the surface of the object to be measured, is obtained by irradiating the measurement object, that is, using two measurement lights irradiated in directions of irradiation surfaces perpendicular to each other. Especially Ri. Thus to measure strain, with can the configuration itself be simplified, can be made compact.

It is a figure for demonstrating the phase shift digital holography method used for the distortion measuring method which concerns on embodiment of this invention. It is a block diagram which shows schematic structure of the distortion measuring device which concerns on embodiment of this invention. It is a schematic block diagram which shows the path | route of the laser beam in the displacement measurement part of the distortion measuring device. It is a perspective view for demonstrating the irradiation direction of the measurement light to the to-be-measured object in the distortion measuring method. It is an AA arrow line view of FIG. It is a BB arrow line view of FIG. It is a block diagram which shows schematic structure of the main arithmetic processing part in the displacement measurement part of the distortion measuring device. It is a side view for demonstrating the measuring method when one of the measurement lights to the to-be-measured object in the distortion measuring method cannot be used.

Explanation of symbols

D Placement surface M Object to be measured R Laser light Rm Measurement light Ro Object light Rr Reference light Ra First measurement light Rb Second measurement light D Placement surface 1 Displacement measurement unit 2 Strain calculation unit 11 Laser irradiator 12 First beam Splitter 13 second beam splitter 14 first reflecting mirror 15 second reflecting mirror 16 third reflecting mirror 17 CCD camera 18 half mirror 19 computer device 20 PZT stage 31 fourth reflecting mirror 32 fifth reflecting mirror 33 first shutter member 34 first 2 shutter member 51 phase distribution calculation unit 52 phase difference calculation unit 53 displacement calculation unit 61 in-plane displacement calculation unit

Claims (2)

A laser beam emitted from a laser irradiator is irradiated as a measurement beam onto a measured object placed on a predetermined placement surface, and the reflected object beam and the laser beam are split by the first beam splitter and have a phase of The procedure for obtaining the phase distribution of the surface of the object to be measured from the hologram image obtained by coaxially entering the CCD camera with the reference beam shifted by π / 2 by one period using the phase shift digital holography method is as follows. Before and after deformation of the measurement object,
A displacement calculation step for obtaining a displacement on the surface of the object to be measured in the irradiation direction of the object light from the phase distribution difference that is the difference between both phase distributions before and after the deformation, and
This displacement calculation process is performed on the first vertical surface perpendicular to the placement surface of the object to be measured and on the second vertical surface perpendicular to the placement surface and perpendicular to the first vertical surface. By performing two first measurement lights and two second measurement lights (hereinafter, two measurement lights are referred to as two light beams) having the same incident angle from both sides of the measurement object, z perpendicular to the mounting surface is obtained. An axial direction and an x-axis direction that is an intersection axis between the placement surface and the first vertical surface, and a z-axis direction that is perpendicular to the placement surface and a y-axis direction that is an intersection axis between the placement surface and the second vertical surface. Calculating the displacement amount of
A strain measurement method for calculating a strain generated in an object to be measured from the obtained displacement amount in the three-dimensional direction,
The first measurement light and the second measurement light are obtained by dividing the measurement light divided by the first beam splitter by the second beam splitter, and each of the obtained measurement lights is divided into two light beams. When irradiating the object to be measured, the pair of shutter members arranged in the respective irradiation paths are opened and closed to directly irradiate the object to be measured with one of the two light beams. The phase-shift digital holography is characterized in that the other measurement light is irradiated to the object to be measured from the opposite side of the one measurement light via a reflection mirror arranged opposite to the irradiation direction. Strain measurement method using the method. A strain measurement apparatus using the strain measurement method according to claim 1,
One laser irradiator;
A first beam splitter for dividing the laser light emitted from the laser irradiator into two to obtain measurement light and reference light;
Moving means for moving the first beam splitter along the irradiation direction of the reference light and shifting the phase of the reference light by π / 2 by one period;
A second beam splitter for further dividing the measurement light from the first beam splitter into two to obtain a first measurement light and a second measurement light;
A pair of first shutter members and a pair of second shutter members which are respectively arranged in the middle of the respective irradiation paths of the obtained first measurement light and second measurement light and which can open and close each of the measurement lights by half;
When one of the pair of first shutter members is opened and placed perpendicular to the placement surface on which the measurement object is placed, the first measurement light on one side is not reflected and is reflected. The measurement object is directly irradiated, and when the other is opened, the first measurement light on the other side is reflected to the measurement object from the side opposite to the first measurement light on the one side and A first reflecting mirror that irradiates with the same incident angle;
When one of the pair of second shutter members is opened perpendicularly to the placement surface and the first reflecting mirror, the second measurement light on one side is not reflected and the object to be measured is not reflected. When the other is opened, the second measurement light on the other side is reflected to irradiate the object to be measured on the opposite side of the measurement light and with the same incident angle. A second reflecting mirror;
A CCD camera for obtaining the hologram image of the surface of the object to be measured by causing the object light reflected on the surface of the object to be measured and the reference light to be incident coaxially;
A phase distribution calculation unit for obtaining a phase distribution of the surface of the object to be measured from a plurality of hologram images obtained by shifting the phase of the reference light by the moving means;
A phase difference calculation unit for obtaining a difference in phase distribution before and after the deformation of the measured object obtained by the phase distribution calculation unit;
Due to the phase distribution difference obtained by the phase difference calculation unit, the placement surface, the first vertical surface perpendicular to the placement surface, and the second vertical surface perpendicular to the placement surface and the first vertical surface. A displacement calculation unit for obtaining a displacement amount in the interior;
A strain measurement device comprising: a strain calculation unit that calculates a strain in a three-dimensional direction on the surface of the object to be measured from each displacement amount obtained by the displacement calculation unit.

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