CN202281596U - Laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement - Google Patents

Laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement Download PDF

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CN202281596U
CN202281596U CN2011204068325U CN201120406832U CN202281596U CN 202281596 U CN202281596 U CN 202281596U CN 2011204068325 U CN2011204068325 U CN 2011204068325U CN 201120406832 U CN201120406832 U CN 201120406832U CN 202281596 U CN202281596 U CN 202281596U
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plane displacement
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李新忠
台玉萍
巩晓阳
王晓飞
吕世杰
杜锦屏
李立本
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Henan University of Science and Technology
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Abstract

一种面内位移和离面位移同时测量的激光散斑测量装置。主要由连续波激光器、准直扩束器、偏振分束器Ⅰ、偏振分束器Ⅱ、偏振分束器Ⅲ、偏振分束器Ⅳ、反射镜Ⅰ、反射镜Ⅱ、反射镜Ⅲ、会聚透镜、CCD相机Ⅰ、CCD相机Ⅱ和计算机构成，本实用新型能一次布置光路，同时实现被测物体形变的面内位移和离面位移分布信息的测量，测量精度能达到亚波长量级；并且具有简单易行、快速、准确的特点。可广泛应用于光电无损检测等领域的微小位移的实时、高精度可靠测量。

Figure 201120406832

A laser speckle measurement device for simultaneous measurement of in-plane displacement and out-of-plane displacement. It mainly consists of continuous wave laser, collimating beam expander, polarizing beam splitter Ⅰ, polarizing beam splitter Ⅱ, polarizing beam splitter Ⅲ, polarizing beam splitter Ⅳ, mirror Ⅰ, mirror Ⅱ, mirror Ⅲ, converging lens , CCD camera I, CCD camera II and a computer, the utility model can arrange the optical path at one time, and realize the measurement of the in-plane displacement and out-of-plane displacement distribution information of the deformation of the measured object at the same time, and the measurement accuracy can reach the sub-wavelength level; and has Simple, fast and accurate features. It can be widely used in real-time, high-precision and reliable measurement of small displacements in fields such as photoelectric non-destructive testing.

Figure 201120406832

Description

面内位移和离面位移同时测量的激光散斑测量装置Laser speckle measurement device for simultaneous measurement of in-plane displacement and out-of-plane displacement

技术领域 technical field

本实用新型涉及一种测量微小位移的激光散斑测量装置，具体的说是涉及一种利用激光散斑同时测量面内位移和离面位移的装置。 The utility model relates to a laser speckle measuring device for measuring tiny displacements, in particular to a device for simultaneously measuring in-plane displacement and out-of-plane displacement by using laser speckles.

背景技术 Background technique

激光散斑是指当激光照射在粗糙物体上后，散射的光线在成像空间相互干涉形成的明暗相间的斑点。激光散斑携带了被测物体的信息，通过对散斑场的分析可以得到被测物体的变化信息。激光散斑测量方法具有光路简单、全场测量、非接触等优点；因而，在无损检测领域得到了广泛的应用。经文献检索，专利“飞秒激光散斑相关法测量微小位移的装置和方法”(授权号为ZL20061002662.1，授权日为2008.04.02)，通过对物体变形前后两幅散斑光强图的相关运算能够实现亚像素位移的精度测量，不足之处是该方法需要飞秒激光系统，由于该系统昂贵且不易维护，限制了其实际应用范围；专利“X射线散斑装置及其在微位移测量中的应用”(授权号为ZL200510023203.3，授权日为2008.07.02)，该专利采用X射线作为散斑测试光源，比可见光测量精度提高了3-4个数量级，但X射线对人体健康有害，该方法不宜普及，仅适合特定场合下的检测；专利“便携式离面位移测量仪”(授权号为ZL200610024418.1，授权日为2008.03.12)，该装置具有结构紧凑、可测量离面位移的特点；而很多时候物体的面内位移与离面位移同时发生，这就丢失了物体面内位移的信息。 Laser speckle refers to the bright and dark spots formed by the interference of scattered light in the imaging space when the laser is irradiated on the rough object. Laser speckle carries the information of the measured object, and the change information of the measured object can be obtained by analyzing the speckle field. The laser speckle measurement method has the advantages of simple optical path, full-field measurement, and non-contact; therefore, it has been widely used in the field of nondestructive testing. After searching the literature, the patent "A device and method for measuring micro-displacement by femtosecond laser speckle correlation method" (authorization number is ZL20061002662.1, authorization date is 2008.04.02), through the two speckle intensity maps before and after the deformation of the object The correlation operation can realize the precision measurement of sub-pixel displacement, but the disadvantage is that this method requires a femtosecond laser system, which is expensive and difficult to maintain, which limits its practical application range; the patent "X-ray speckle device and its micro-displacement Application in measurement" (authorization number ZL200510023203.3, authorization date 2008.07.02), this patent uses X-rays as the light source for speckle testing, which improves the measurement accuracy by 3-4 orders of magnitude compared with visible light, but X-rays are harmful to human health. Harmful, this method is not suitable for popularization, and is only suitable for detection in specific occasions; the patent "portable out-of-plane displacement measuring instrument" (authorization number is ZL200610024418.1, authorization date is 2008.03.12), the device has a compact structure, can measure out-of-plane The characteristics of the displacement; in many cases, the in-plane displacement of the object and the out-of-plane displacement occur at the same time, which loses the information of the in-plane displacement of the object.

分析可知，在现有公开的文献资料中，在对激光散斑测量方法及其应用研究方面，尚缺少对测试条件要求低、能同时测量物体形变的面内位移与离面位移的装置与方法。 The analysis shows that in the existing public literature, in the research of laser speckle measurement method and its application, there is still a lack of devices and methods that have low requirements for test conditions and can simultaneously measure the in-plane displacement and out-of-plane displacement of object deformation. .

实用新型内容 Utility model content

本实用新型的目的是为解决上述技术问题的不足，提供一种面内位移和离面位移同时测量的激光散斑测量装置，通过一次布置光路，同时实现被测物体形变的面内位移和离面位移分布信息的测量，并且具有简单易行、快速、准确的优点。 The purpose of this utility model is to solve the deficiencies of the above-mentioned technical problems, to provide a laser speckle measurement device that simultaneously measures in-plane displacement and out-of-plane displacement. The measurement of surface displacement distribution information has the advantages of simplicity, speed and accuracy.

本实用新型的为解决上述技术问题的不足，所采用的技术方案是：一种面内位移和离面位移同时测量的激光散斑测量装置，设有连续波激光器，在该连续波激光器的光束前进方向依次设有准直扩束器、偏振分束器Ⅰ；经偏振分束器Ⅰ后，激光束分为透射光Ⅰ和反射光Ⅰ，反射光Ⅰ与透射光Ⅰ成90°夹角，反射光Ⅰ作为物光束Ⅰ直接照射在被测物体上；透射光Ⅰ前进后照射在偏振分束器Ⅱ上，透射光Ⅰ又被分为透射光Ⅱ和反射光Ⅱ；透射光Ⅱ前进后照射在反射镜Ⅰ上，偏折90°后照射在反射镜Ⅱ上，然后，再偏折90°后作为物光束Ⅱ照射在被测物体上；反射光Ⅱ照射在反射镜Ⅲ上，被反射后垂直照射在偏振分束器Ⅳ上，经偏振分束器Ⅳ后分为透射光Ⅴ和反射光Ⅴ，反射光Ⅴ作为参考光； In order to solve the deficiencies of the above technical problems, the technical solution adopted by the utility model is: a laser speckle measuring device for simultaneous measurement of in-plane displacement and out-of-plane displacement, which is provided with a continuous wave laser, and the beam of the continuous wave laser The forward direction is provided with a collimating beam expander and a polarizing beam splitter I in turn; after passing through the polarizing beam splitter I, the laser beam is divided into transmitted light I and reflected light I, and the reflected light I and the transmitted light I form an angle of 90°, The reflected light Ⅰ is directly irradiated on the measured object as the object beam Ⅰ; the transmitted light Ⅰ is irradiated on the polarizing beam splitter Ⅱ after advancing, and the transmitted light Ⅰ is divided into transmitted light Ⅱ and reflected light Ⅱ; the transmitted light Ⅱ is irradiated after advancing On the mirror Ⅰ, it is deflected by 90° and irradiates on the mirror Ⅱ, and then, after being deflected by 90°, it is irradiated on the object to be measured as the object beam Ⅱ; the reflected light Ⅱ is irradiated on the mirror Ⅲ, and after being reflected It is irradiated vertically on the polarizing beam splitter IV, and after passing through the polarizing beam splitter IV, it is divided into transmitted light V and reflected light V, and the reflected light V is used as a reference light;

所述的物光束Ⅰ和物光束Ⅱ以相同的入射角对称照射在被测物体上； The object beam I and the object beam II are symmetrically irradiated on the measured object at the same incident angle;

所述的照射在被测物体上的物光束Ⅰ和物光束Ⅱ经被测物体散射后，散射光照射在会聚透镜上，会聚后又照射在偏振分束器Ⅲ上，散射光经偏振分束器Ⅲ后分为透射光Ⅲ和反射光Ⅲ，反射光Ⅲ作为成像光束Ⅰ进入CCD相机Ⅰ成像，然后存储进计算机；透射光Ⅲ照射在偏振分束器Ⅳ上，经偏振分束器Ⅳ后分为透射光Ⅳ和反射光Ⅳ；透射光Ⅳ和参考光一起进入CCD相机Ⅱ成像，然后存储进计算机。 After the object beam I and object beam II irradiated on the measured object are scattered by the measured object, the scattered light is irradiated on the converging lens, and after converging, it is irradiated on the polarization beam splitter III, and the scattered light is polarized and split After being divided into transmitted light III and reflected light III, the reflected light III enters the CCD camera I as imaging beam I for imaging, and then stored in the computer; Divided into transmitted light IV and reflected light IV; transmitted light IV and reference light enter into CCD camera II for imaging, and then stored in the computer.

本实用新型的使用过程，其具体步骤如下： The use process of the present utility model, its concrete steps are as follows:

（1）将连续波激光器、准直扩束器、偏振分束器Ⅰ、偏振分束器Ⅱ、偏振分束器Ⅲ、偏振分束器Ⅳ、反射镜Ⅰ、反射镜Ⅱ、反射镜Ⅲ、会聚透镜、CCD相机Ⅰ、CCD相机Ⅱ和计算机按照上文装置所述布置好测量光路； (1) The continuous wave laser, collimating beam expander, polarizing beam splitter I, polarizing beam splitter II, polarizing beam splitter III, polarizing beam splitter IV, mirror I, mirror II, mirror III, Converging lens, CCD camera Ⅰ, CCD camera Ⅱ and computer arrange the measurement optical path according to the above device;

（2）打开连续波激光器电源，连续波激光器发出激光束，物光束Ⅰ和物光束Ⅱ以相等的入射角对称的照射在被测物体上，利用CCD相机Ⅰ记录下被测物体变形前的面内位移散斑场Ⅰ 1，存储进计算机； (2) Turn on the power of the continuous wave laser, the continuous wave laser emits laser beams, the object beam I and the object beam II are symmetrically irradiated on the measured object at equal incident angles, and the CCD camera I is used to record the surface of the measured object before deformation The inset speckle field Ⅰ 1 is stored in the computer;

（3）同时，利用CCD相机Ⅱ记录下被测物体变形前透射光Ⅳ和参考光相互干涉形成的离面位移散斑场                                                

Figure DEST_PATH_IMAGE001
，然后存储进计算机； (3) At the same time, use the CCD camera II to record the off-plane displacement speckle field formed by the mutual interference between the transmitted light IV and the reference light before the measured object deforms
Figure DEST_PATH_IMAGE001
, and then stored in the computer;

（4）被测物体变形后，利用CCD相机Ⅰ记录下变形后的面内位移散斑场Ⅰ 2，存储进计算机； (4) After the measured object is deformed, use the CCD camera Ⅰ to record the deformed in-plane displacement speckle field Ⅰ 2 and store it in the computer;

（5）同时，利用CCD相机Ⅱ记录下被测物体变形后的离面位移散斑场

Figure 2011204068325100002DEST_PATH_IMAGE002
，存储进计算机； (5) At the same time, use the CCD camera II to record the off-plane displacement speckle field of the measured object after deformation
Figure 2011204068325100002DEST_PATH_IMAGE002
, stored in the computer;

（6）然后，利用公式

Figure DEST_PATH_IMAGE003
，对被测物体变形前获得的面内位移散斑场Ⅰ 1和被测物体变形后的面内位移散斑场Ⅰ 2进行处理，得到面内位移条纹分布图；其中，Ⅰ 01和Ⅰ 02分别对应于物光束Ⅰ和物光束Ⅱ的强度分布，
Figure 2011204068325100002DEST_PATH_IMAGE004
为物光束Ⅰ和物光束Ⅱ间的初相位差，为因被测物体变形而引起的物光束Ⅰ和物光束Ⅱ间的附加相位差，
Figure 2011204068325100002DEST_PATH_IMAGE006
为被测物体表面沿测量方向的面内位移分量，λ为测试激光波长，θ为物光束Ⅰ和物光束Ⅱ的入射角；  (6) Then, using the formula
Figure DEST_PATH_IMAGE003
, process the in-plane displacement speckle field Ⅰ 1 obtained before the deformation of the measured object and the in-plane displacement speckle field Ⅰ 2 after the deformation of the measured object, and obtain the in-plane displacement fringe distribution diagram; among them, Ⅰ 01 and Ⅰ 02 Corresponding to the intensity distributions of object beam I and object beam II, respectively,
Figure 2011204068325100002DEST_PATH_IMAGE004
is the initial phase difference between object beam I and object beam II, is the additional phase difference between object beam I and object beam II caused by the deformation of the measured object,
Figure 2011204068325100002DEST_PATH_IMAGE006
is the in-plane displacement component of the surface of the measured object along the measurement direction, λ is the wavelength of the test laser, and θ is the incident angle of object beam I and object beam II;

（7）对面内位移条纹分布图进行分析，暗条纹时，利用式进行计算，亮条纹时，利用式

Figure 2011204068325100002DEST_PATH_IMAGE008
进行计算，其中n为条纹级数；获得被测物体变形后的面内位移分布
Figure 688946DEST_PATH_IMAGE006
； (7) Analyze the in-plane displacement fringe distribution map. When there are dark fringes, use the formula For calculation, when the stripes are bright, use the formula
Figure 2011204068325100002DEST_PATH_IMAGE008
Calculate, where n is the fringe series; obtain the in-plane displacement distribution of the measured object after deformation
Figure 688946DEST_PATH_IMAGE006
;

（8）同时，利用公式

Figure DEST_PATH_IMAGE009
，对被测物体变形前获得的离面位移散斑场
Figure 668403DEST_PATH_IMAGE001
和被测物体变形后的离面位移散斑场
Figure 258260DEST_PATH_IMAGE002
进行处理，得到离面位移条纹分布图；其中，Ⅰ o和Ⅰ r分别对应于透射光Ⅳ和参考光的强度分布，
Figure 2011204068325100002DEST_PATH_IMAGE010
为透射光Ⅳ和参考光间的初相位差，为因被测物体变形而引起的透射光Ⅳ和参考光间的附加相位差，
Figure 2011204068325100002DEST_PATH_IMAGE012
为被测物体变形的离面位移分量，λ为测试激光波长； (8) At the same time, using the formula
Figure DEST_PATH_IMAGE009
, the out-of-plane displacement speckle field obtained before the deformation of the measured object
Figure 668403DEST_PATH_IMAGE001
and the out-of-plane displacement speckle field of the measured object after deformation
Figure 258260DEST_PATH_IMAGE002
process to obtain the out-of-plane displacement fringe distribution diagram; where I o and I r correspond to the intensity distribution of the transmitted light IV and the reference light, respectively,
Figure 2011204068325100002DEST_PATH_IMAGE010
is the initial phase difference between the transmitted light IV and the reference light, is the additional phase difference between the transmitted light IV and the reference light caused by the deformation of the measured object,
Figure 2011204068325100002DEST_PATH_IMAGE012
is the out-of-plane displacement component of the deformation of the measured object, and λ is the wavelength of the test laser;

（9）对离面位移条纹分布图进行分析，暗条纹时，利用式

Figure DEST_PATH_IMAGE013
进行计算，亮条纹时，利用式
Figure 2011204068325100002DEST_PATH_IMAGE014
进行计算，其中n为条纹级数；获得被测物体变形后的离面位移分布
Figure 404202DEST_PATH_IMAGE012
； (9) Analyze the distribution of out-of-plane displacement fringes. When there are dark fringes, use the formula
Figure DEST_PATH_IMAGE013
For calculation, when the stripes are bright, use the formula
Figure 2011204068325100002DEST_PATH_IMAGE014
Calculate, where n is the fringe series; obtain the out-of-plane displacement distribution of the measured object after deformation
Figure 404202DEST_PATH_IMAGE012
;

（10）最终，通过一次布置光路，同时实现了对被测物体面内位移和离面位移（

Figure 280891DEST_PATH_IMAGE006
，
Figure 103353DEST_PATH_IMAGE012
）的测量。 (10) Finally, by arranging the optical path once, the in-plane displacement and out-of-plane displacement of the measured object are realized at the same time (
Figure 280891DEST_PATH_IMAGE006
,
Figure 103353DEST_PATH_IMAGE012
)Measurement.

本实用新型的工作原理是： The working principle of the utility model is:

当用激光散斑方法测量面内位移时，假设被测物体变形前CCD相机Ⅰ记录的强度分布表示为， When using the laser speckle method to measure the in-plane displacement, it is assumed that the intensity distribution recorded by the CCD camera I before the deformation of the measured object is expressed as,

Figure DEST_PATH_IMAGE015
                                 （1）
Figure DEST_PATH_IMAGE015
(1)

式中，Ⅰ 01和Ⅰ 02分别对应于两束物光束的强度分布，

Figure 183436DEST_PATH_IMAGE004
为两束入射光波的初相位差。 In the formula, I 01 and I 02 correspond to the intensity distributions of the two object beams respectively,
Figure 183436DEST_PATH_IMAGE004
is the initial phase difference of the two incident light waves.

被测物体变形后CCD相机Ⅰ记录的强度分布为， The intensity distribution recorded by CCD camera Ⅰ after the measured object is deformed is,

Figure 2011204068325100002DEST_PATH_IMAGE016
                            （2）
Figure 2011204068325100002DEST_PATH_IMAGE016
(2)

式中，

Figure DEST_PATH_IMAGE017
为因被测物体变形而引起的两束入射光波的附加相位差，表示为， In the formula,
Figure DEST_PATH_IMAGE017
is the additional phase difference of the two incident light waves caused by the deformation of the measured object, expressed as,

Figure 153576DEST_PATH_IMAGE005
                                           （3）
Figure 153576DEST_PATH_IMAGE005
(3)

式中，

Figure 2011204068325100002DEST_PATH_IMAGE018
Figure 884772DEST_PATH_IMAGE006
为被测物体表面沿测量方向的面内位移分量，λ为测试激光波长，θ为两物光束的入射角。 In the formula,
Figure 2011204068325100002DEST_PATH_IMAGE018
Figure 884772DEST_PATH_IMAGE006
is the in-plane displacement component of the surface of the measured object along the measurement direction, λ is the wavelength of the test laser, and θ is the incident angle of the two object beams.

被测物体变形前后所记录的强度相减所得差的平方表示为 The square of the difference obtained by subtracting the intensity recorded before and after the deformation of the measured object is expressed as

Figure 691185DEST_PATH_IMAGE003
                 （4）
Figure 691185DEST_PATH_IMAGE003
(4)

式中，正弦项为高频成分，对应于散斑噪声；余弦项为低频成分，对应于被测物体变形。因此当满足条件 In the formula, the sine term is a high-frequency component, which corresponds to speckle noise; the cosine term is a low-frequency component, which corresponds to the deformation of the measured object. Therefore when the condition

Figure DEST_PATH_IMAGE019
                                （5）
Figure DEST_PATH_IMAGE019
(5)

时，条纹亮度达到最小，即暗条纹将产生于 When , the fringe brightness reaches the minimum, that is, dark fringes will be generated at

Figure 507831DEST_PATH_IMAGE007
                             （6）
Figure 507831DEST_PATH_IMAGE007
(6)

当满足条件 when conditions are met

Figure 2011204068325100002DEST_PATH_IMAGE020
                            （7）
Figure 2011204068325100002DEST_PATH_IMAGE020
(7)

时，条纹亮度达到最大，即亮条纹将产生于 When , the fringe brightness reaches the maximum, that is, the bright fringe will be generated at

Figure 57893DEST_PATH_IMAGE008
                           （8）
Figure 57893DEST_PATH_IMAGE008
(8)

根据公式（6）和（8）及亮、暗条纹的分布，获得被测物体变形后的面内位移分布信息

Figure 643595DEST_PATH_IMAGE006
。 According to formulas (6) and (8) and the distribution of bright and dark stripes, the in-plane displacement distribution information of the measured object after deformation is obtained
Figure 643595DEST_PATH_IMAGE006
.

当利用激光散斑测量被测物体形变的离面位移时，假设被测物体变形前CCD相机Ⅱ记录的光强分布为， When the laser speckle is used to measure the out-of-plane displacement of the measured object deformation, it is assumed that the light intensity distribution recorded by the CCD camera II before the measured object deforms is,

Figure DEST_PATH_IMAGE021
                                  （9）
Figure DEST_PATH_IMAGE021
(9)

式中，Ⅰ o和Ⅰ r分别对应于物光束与参考光束的强度分布，为两光波之间的初相位差。 where I o and I r correspond to the intensity distributions of the object beam and the reference beam, respectively, is the initial phase difference between the two light waves.

被测物体变形后CCD相机Ⅱ记录的强度分布为， The intensity distribution recorded by the CCD camera II after the measured object is deformed is,

Figure DEST_PATH_IMAGE022
                            （10）
Figure DEST_PATH_IMAGE022
(10)

式中，为因被测物体变形而引起的物光束与参考光束间的附加相位差，表示为， In the formula, is the additional phase difference between the object beam and the reference beam caused by the deformation of the measured object, expressed as,

Figure 550DEST_PATH_IMAGE011
                                             （11）
Figure 550DEST_PATH_IMAGE011
(11)

式中，为被测物体形变的离面位移分量。 In the formula, is the out-of-plane displacement component of the measured object deformation.

采用相减模式，两幅数字散斑图像相减所得差的平方表示为 Using the subtraction mode, the square of the difference obtained by subtracting two digital speckle images is expressed as

                （12） (12)

因此当满足条件 Therefore when the condition

Figure DEST_PATH_IMAGE024
                              （13）
Figure DEST_PATH_IMAGE024
(13)

时，条纹亮度最小，即暗纹产生于 When , the brightness of the stripes is the smallest, that is, the dark stripes are generated at

Figure 129677DEST_PATH_IMAGE013
                              （14）
Figure 129677DEST_PATH_IMAGE013
(14)

当满足条件 when conditions are met

Figure DEST_PATH_IMAGE025
                          （15）
Figure DEST_PATH_IMAGE025
(15)

时，条纹亮度最大，即亮条纹产生于 When , the brightness of the fringe is maximum, that is, the bright fringe is generated at

Figure 920916DEST_PATH_IMAGE014
                         （16）
Figure 920916DEST_PATH_IMAGE014
(16)

根据公式（14）和（16）及亮、暗条纹的分布，即可获得被测物体变形后的离面位移分布信息

Figure 812780DEST_PATH_IMAGE012
。最终，同时实现了对面内位移和离面位移（，
Figure 144721DEST_PATH_IMAGE012
）的测量。 According to formulas (14) and (16) and the distribution of bright and dark stripes, the out-of-plane displacement distribution information of the measured object after deformation can be obtained
Figure 812780DEST_PATH_IMAGE012
. Finally, both in-plane and out-of-plane displacements ( ,
Figure 144721DEST_PATH_IMAGE012
)Measurement.

与以往技术相比，本实用新型的优点：本实用新型能一次布置光路，同时实现被测物体形变的面内位移和离面位移分布信息的测量，测量精度能达到亚波长量级；并且具有简单易行、快速、准确的特点。可广泛应用于光电无损检测等领域，尤其适合于这些领域的微小位移的实时、高精度可靠测量。 Compared with the previous technology, the utility model has the advantages: the utility model can arrange the optical path at one time, and at the same time realize the measurement of the in-plane displacement and out-of-plane displacement distribution information of the deformation of the measured object, and the measurement accuracy can reach the sub-wavelength level; and has Simple, fast and accurate features. It can be widely used in photoelectric non-destructive testing and other fields, and is especially suitable for real-time, high-precision and reliable measurement of small displacements in these fields.

附图说明 Description of drawings

图1是本实用新型的结构示意图。 Fig. 1 is the structural representation of the utility model.

图中标记：100、连续波激光器，110、准直扩束器，121、偏振分束器Ⅰ，122、偏振分束器Ⅱ，131、反射镜Ⅰ，132、反射镜Ⅱ，200、被测物体，140、会聚透镜，123、偏振分束器Ⅲ，151、CCD相机Ⅰ，133、反射镜Ⅲ，124、偏振分束器Ⅳ，152、CCD相机Ⅱ，300、计算机。 Marks in the figure: 100, continuous wave laser, 110, collimator beam expander, 121, polarizing beam splitter I, 122, polarizing beam splitter II, 131, reflector I, 132, reflector II, 200, tested Object, 140, converging lens, 123, polarizing beam splitter III, 151, CCD camera I, 133, mirror III, 124, polarizing beam splitter IV, 152, CCD camera II, 300, computer.

具体实施方式 Detailed ways

下面结合实施例对本实用新型作进一步说明。 Below in conjunction with embodiment the utility model is further described.

如图所示，本实用新型一种面内位移和离面位移同时测量的激光散斑测量装置，设有连续波激光器100，在该连续波激光器100的光束前进方向依次设有准直扩束器110、偏振分束器Ⅰ121；经偏振分束器Ⅰ121后，激光束分为透射光Ⅰ和反射光Ⅰ，反射光Ⅰ与透射光Ⅰ成90°夹角，反射光Ⅰ作为物光束Ⅰ直接照射在被测物体200上；透射光Ⅰ前进后照射在偏振分束器Ⅱ 122上，透射光Ｉ又被分为透射光Ⅱ和反射光Ⅱ；透射光Ⅱ前进后照射在反射镜Ⅰ131上，偏折90°后照射在反射镜Ⅱ 132上，然后，再偏折90°后作为物光束Ⅱ照射在被测物体200上；反射光Ⅱ照射在反射镜Ⅲ133上，被反射后垂直照射在偏振分束器Ⅳ124上，经偏振分束器Ⅳ124后分为透射光Ⅴ和反射光Ⅴ，反射光Ⅴ作为参考光； As shown in the figure, the utility model is a laser speckle measuring device for simultaneous measurement of in-plane displacement and out-of-plane displacement, which is provided with a continuous wave laser 100, and collimated beam expanders are arranged in sequence in the forward direction of the beam of the continuous wave laser 100 110, polarization beam splitter I 121; after the polarization beam splitter I 121, the laser beam is divided into transmitted light I and reflected light I, the reflected light I and the transmitted light I form an angle of 90°, and the reflected light I is directly used as the object beam I irradiated on the measured object 200; the transmitted light I is irradiated on the polarizing beam splitter II 122 after advancing, and the transmitted light I is divided into transmitted light II and reflected light II; After being deflected by 90°, it is irradiated on the reflector II 132, and then, after being deflected by 90°, it is irradiated on the measured object 200 as object beam II; On the beam splitter IV124, it is divided into the transmitted light V and the reflected light V after the polarization beam splitter IV124, and the reflected light V is used as the reference light;

所述的物光束Ⅰ和物光束Ⅱ以相同的入射角θ对称照射在被测物体200上； The object beam I and the object beam II are symmetrically irradiated on the measured object 200 at the same incident angle θ ;

所述的照射在被测物体200上的物光束Ⅰ和物光束Ⅱ经被测物体200散射后，散射光照射在会聚透镜140上，会聚后又照射在偏振分束器Ⅲ123上，散射光经偏振分束器Ⅲ 123后分为透射光Ⅲ和反射光Ⅲ，反射光Ⅲ作为成像光束Ⅰ，进入CCD相机Ⅰ151成像，然后存储进计算机300；透射光Ⅲ照射在偏振分束器Ⅳ124上，经偏振分束器Ⅳ124后分为透射光Ⅳ和反射光Ⅳ；透射光Ⅳ和参考光一起进入CCD相机Ⅱ152成像，也就是说透射光Ⅳ和反射光Ⅴ一起进入CCD相机Ⅱ152成像，然后存储进计算机300。 The object beam I and II irradiated on the measured object 200 are scattered by the measured object 200, and the scattered light is irradiated on the converging lens 140, and then irradiated on the polarizing beam splitter III 123 after converging, and the scattered light is passed through Polarizing beam splitter III 123 is divided into transmitted light III and reflected light III. Reflected light III is used as imaging beam I, enters CCD camera I 151 for imaging, and then stored in computer 300; transmitted light III is irradiated on polarizing beam splitter IV 124, then The polarizing beam splitter IV 124 is divided into transmitted light IV and reflected light IV; the transmitted light IV and the reference light enter the CCD camera II 152 for imaging, that is to say, the transmitted light IV and the reflected light V enter the CCD camera II 152 for imaging, and then store it in the computer 300.

本实用新型中的设置的偏振分束器Ⅰ121、反射镜Ⅰ131、反射镜Ⅱ132和被测物体构成一个方形，也就是说偏振分束器Ⅰ121、反射镜Ⅰ131、反射镜Ⅱ132和被测物体分别设置在方形的四个角位置点上，照射在被测物体200上的物光束Ⅰ和物光束Ⅱ经被测物体200散射后通过会聚透镜140会聚后依次通过偏振分束器Ⅲ123和偏振分束器Ⅳ124，直到成像输入计算机300。  The polarization beam splitter I121, reflection mirror I131, reflection mirror II132 and the object to be measured constitute a square shape in the utility model, that is to say, the polarization beam splitter I121, reflection mirror I131, reflection mirror II132 and the object to be measured are respectively arranged At the four corners of the square, the object beam I and the object beam II irradiated on the measured object 200 are scattered by the measured object 200, converged by the converging lens 140, and pass through the polarization beam splitter III 123 and the polarization beam splitter in turn. IV 124 until the imaging is entered into the computer 300. the

使用该装置的测量方法，其具体步骤如下： Using the measuring method of this device, its specific steps are as follows:

（1）将连续波激光器100、准直扩束器110、偏振分束器Ⅰ121、偏振分束器Ⅱ122、偏振分束器Ⅲ123、偏振分束器Ⅳ124、反射镜Ⅰ131、反射镜Ⅱ132、反射镜Ⅲ133、会聚透镜140、CCD相机Ⅰ151、CCD相机Ⅱ152和计算机300按照上文激光散斑测量装置所述布置好测量光路； (1) Combine continuous wave laser 100, collimating beam expander 110, polarization beam splitter I121, polarization beam splitter II122, polarization beam splitter III123, polarization beam splitter IV124, mirror I131, mirror II132, mirror III 133, converging lens 140, CCD camera I 151, CCD camera II 152 and computer 300 arrange the measurement optical path according to the laser speckle measurement device described above;

（2）打开连续波激光器100电源，连续波激光器100发出激光束，物光束Ⅰ和物光束Ⅱ以相等的入射角对称的照射在被测物体200上，利用CCD相机Ⅰ151记录下被测物体200变形前的面内位移散斑场Ⅰ 1，存储进计算机300； (2) Turn on the power of the continuous wave laser 100, the continuous wave laser 100 emits laser beams, the object beam I and the object beam II are symmetrically irradiated on the measured object 200 at equal incident angles, and the measured object 200 is recorded by the CCD camera I151 The in-plane displacement speckle field I 1 before deformation is stored in the computer 300;

（3）同时，利用CCD相机Ⅱ152记录下被测物体200变形前透射光Ⅳ和参考光相互干涉形成的离面位移散斑场

Figure 95359DEST_PATH_IMAGE001
，然后存储进计算机300； (3) At the same time, use the CCD camera II152 to record the out-of-plane displacement speckle field formed by the mutual interference between the transmitted light IV and the reference light before the measured object 200 deforms
Figure 95359DEST_PATH_IMAGE001
, and then stored in the computer 300;

（4）被测物体200变形后，利用CCD相机Ⅰ151记录下变形后的面内位移散斑场Ⅰ 2，存储进计算机300； (4) After the measured object 200 is deformed, use the CCD camera I151 to record the deformed in-plane displacement speckle field I 2 and store it in the computer 300;

（5）同时，利用CCD相机Ⅱ152记录下被测物体(200)变形后的离面位移散斑场，存储进计算机300； (5) At the same time, use the CCD camera II152 to record the out-of-plane displacement speckle field of the measured object (200) after deformation , stored in the computer 300;

（6）然后，利用公式

Figure 140468DEST_PATH_IMAGE003
，对被测物体200变形前获得的面内位移散斑场Ⅰ 1和被测物体200变形后的面内位移散斑场Ⅰ 2进行处理，得到面内位移条纹分布图；其中，Ⅰ 01和Ⅰ 02分别对应于物光束Ⅰ和物光束Ⅱ的强度分布，
Figure 145333DEST_PATH_IMAGE004
为物光束Ⅰ和物光束Ⅱ间的初相位差，
Figure 396317DEST_PATH_IMAGE005
为因被测物体200变形而引起的物光束Ⅰ和物光束Ⅱ间的附加相位差，
Figure DEST_PATH_IMAGE026
为被测物体200表面沿测量方向的面内位移分量，λ为测试激光波长，θ为物光束Ⅰ和物光束Ⅱ的入射角； (6) Then, using the formula
Figure 140468DEST_PATH_IMAGE003
, the in-plane displacement speckle field I 1 obtained before the deformation of the measured object 200 and the in-plane displacement speckle field I 2 obtained after the deformation of the measured object 200 are processed to obtain the in-plane displacement fringe distribution diagram; where, I 01 and Ⅰ 02 corresponds to the intensity distribution of object beam I and object beam II respectively,
Figure 145333DEST_PATH_IMAGE004
is the initial phase difference between object beam I and object beam II,
Figure 396317DEST_PATH_IMAGE005
is the additional phase difference between the object beam I and the object beam II caused by the deformation of the measured object 200,
Figure DEST_PATH_IMAGE026
is the in-plane displacement component of the surface of the measured object 200 along the measurement direction, λ is the wavelength of the test laser, and θ is the incident angle of object beam I and object beam II;

（7）对面内位移条纹分布图进行分析，暗条纹时，利用式

Figure 879251DEST_PATH_IMAGE007
进行计算，亮条纹时，利用式
Figure 164870DEST_PATH_IMAGE008
进行计算，其中n为条纹级数；获得被测物体200变形后的面内位移分布
Figure 278320DEST_PATH_IMAGE026
； (7) Analyze the in-plane displacement fringe distribution map. When there are dark fringes, use the formula
Figure 879251DEST_PATH_IMAGE007
For calculation, when the stripes are bright, use the formula
Figure 164870DEST_PATH_IMAGE008
Calculate, where n is the number of stripes; obtain the in-plane displacement distribution of the measured object 200 after deformation
Figure 278320DEST_PATH_IMAGE026
;

（8）同时，利用公式

Figure 265867DEST_PATH_IMAGE009
，对被测物体200变形前获得的离面位移散斑场
Figure 303225DEST_PATH_IMAGE001
和被测物体200变形后的离面位移散斑场
Figure 427038DEST_PATH_IMAGE002
进行处理，得到离面位移条纹分布图；其中，Ⅰ o和Ⅰ r分别对应于透射光Ⅳ和参考光的强度分布，
Figure 711389DEST_PATH_IMAGE010
为透射光Ⅳ和参考光间的初相位差，
Figure 934036DEST_PATH_IMAGE011
为因被测物体200变形而引起的透射光Ⅳ和参考光间的附加相位差，
Figure DEST_PATH_IMAGE027
为被测物体200形变的离面位移分量，λ为测试激光波长； (8) At the same time, using the formula
Figure 265867DEST_PATH_IMAGE009
, the out-of-plane displacement speckle field obtained before the deformation of the measured object 200
Figure 303225DEST_PATH_IMAGE001
and the out-of-plane displacement speckle field of the measured object 200 after deformation
Figure 427038DEST_PATH_IMAGE002
process to obtain the out-of-plane displacement fringe distribution diagram; where I o and I r correspond to the intensity distribution of the transmitted light IV and the reference light, respectively,
Figure 711389DEST_PATH_IMAGE010
is the initial phase difference between the transmitted light IV and the reference light,
Figure 934036DEST_PATH_IMAGE011
is the additional phase difference between the transmitted light IV and the reference light caused by the deformation of the measured object 200,
Figure DEST_PATH_IMAGE027
is the out-of-plane displacement component of the deformation of the measured object 200, and λ is the wavelength of the test laser;

（9）对离面位移条纹分布图进行分析，暗条纹时，利用式进行计算，亮条纹时，利用式

Figure 18983DEST_PATH_IMAGE014
进行计算，其中n为条纹级数；获得被测物体200变形后的离面位移分布； (9) Analyze the distribution of out-of-plane displacement fringes. When there are dark fringes, use the formula For calculation, when the stripes are bright, use the formula
Figure 18983DEST_PATH_IMAGE014
Calculate, where n is the number of stripes; obtain the out-of-plane displacement distribution of the measured object 200 after deformation ;

最终，通过一次布置光路，同时实现了对被测物体200面内位移和离面位移（，

Figure 736907DEST_PATH_IMAGE027
）的测量。 Finally, by arranging the optical path once, the 200 in-plane displacement and out-of-plane displacement of the measured object are simultaneously realized ( ,
Figure 736907DEST_PATH_IMAGE027
)Measurement.

Claims (1)

1. The laser speckle measuring device for simultaneously measuring the in-plane displacement and the out-of-plane displacement is characterized in that: the device is provided with a continuous wave laser (100), and a collimation beam expander (110) and a polarization beam splitter I (121) are sequentially arranged in the advancing direction of a light beam of the continuous wave laser (100); after passing through a polarization beam splitter I (121), a laser beam is divided into a transmission light I and a reflection light I, wherein the reflection light I and the transmission light I form an included angle of 90 degrees, and the reflection light I is used as an object beam I to be directly irradiated on an object to be measured (200); the transmitted light I is irradiated on a polarization beam splitter II (122) after advancing, and is divided into transmitted light II and reflected light II; the transmitted light II is irradiated on the reflector I (131) after going forward, is irradiated on the reflector II (132) after being deflected by 90 degrees, and is irradiated on a measured object (200) as an object beam II after being deflected by 90 degrees; the reflected light II irradiates on a reflecting mirror III (133), vertically irradiates on a polarization beam splitter IV (124) after being reflected, and is divided into transmitted light V and reflected light V after passing through the polarization beam splitter IV (124), and the reflected light V is used as reference light;
the object beam I and the object beam II are symmetrically irradiated on a measured object (200) at the same incident angle;
after the object beam I and the object beam II irradiated on the object to be measured (200) are scattered by the object to be measured, scattered light is irradiated on the converging lens (140) and is converged and then irradiated on the polarization beam splitter III (123), the scattered light is divided into transmitted light III and reflected light III through the polarization beam splitter III (123), and the reflected light III is used as an imaging beam I, enters a CCD camera I (151) for imaging and is stored in a computer (300); the transmitted light III irradiates on a polarization beam splitter IV (124), and is divided into transmitted light IV and reflected light IV after passing through the polarization beam splitter IV (124); the transmitted light IV and the reference light enter a CCD camera II (152) together for imaging, and then are stored in a computer (300).
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506716A (en) * 2011-10-24 2012-06-20 河南科技大学 Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously
CN103822587A (en) * 2014-02-25 2014-05-28 西安电子科技大学 Interference measurement system for microstructural three-dimensional deformation and displacement tests
CN108106556A (en) * 2018-02-02 2018-06-01 上海交通大学 Based on the curved face object of digital speckle interference from face distortion measurement method and device
CN114136228A (en) * 2021-11-29 2022-03-04 沈阳师范大学 Thermal deformation detection system based on laser speckle method, detection method and application

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102506716A (en) * 2011-10-24 2012-06-20 河南科技大学 Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously
CN102506716B (en) * 2011-10-24 2013-09-11 河南科技大学 Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously
CN103822587A (en) * 2014-02-25 2014-05-28 西安电子科技大学 Interference measurement system for microstructural three-dimensional deformation and displacement tests
CN103822587B (en) * 2014-02-25 2017-05-17 西安电子科技大学 Interference measurement system for microstructural three-dimensional deformation and displacement tests
CN108106556A (en) * 2018-02-02 2018-06-01 上海交通大学 Based on the curved face object of digital speckle interference from face distortion measurement method and device
CN108106556B (en) * 2018-02-02 2020-01-21 上海交通大学 Method and device for measuring out-of-plane deformation of curved surface object based on digital speckle interference
CN114136228A (en) * 2021-11-29 2022-03-04 沈阳师范大学 Thermal deformation detection system based on laser speckle method, detection method and application
CN114136228B (en) * 2021-11-29 2023-06-02 沈阳师范大学 Thermal deformation detection system, detection method and application based on laser speckle method

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