CN202281596U - Laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement - Google Patents
Laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement Download PDFInfo
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Abstract
The utility model relates to a laser speckle measurement device for simultaneously measuring in-plane displacement and off-plane displacement. The laser speckle measurement device mainly comprises a continuous wave laser, a collimation beam expander, a polarization beam splitter I, a polarization beam splitter II, a polarization beam splitter III, a polarization beam splitter IV, a reflecting mirror I, a reflecting mirror II, a reflecting mirror III, a converging lens, a CCD (Charge Coupled Device) camera I, a CCD camera II and a computer. The laser speckle measurement device disclosed by the utility model is capable of realizing simultaneous measurement on distributed information of in-plane displacement and off-plane displacement of deformation of a tested object by means of once light path arrangement, has the measurement precision capable of reaching a subwavelength order, has the characteristics of simplicity, feasibility, rapidness and accuracy and can be widely applied to real-time, high-precision and reliable measurement on tiny displacement in the fields of photoelectric nondestructive testing and the like.
Description
Technical Field
The utility model relates to a measure the laser speckle measuring device of small displacement, specific saying so relates to an utilize laser speckle to measure the device of displacement in the face and displacement from the face simultaneously.
Background
Laser speckle refers to a spot with alternate light and shade formed by mutual interference of scattered light in an imaging space after laser is irradiated on a rough object. The laser speckle carries the information of the measured object, and the change information of the measured object can be obtained by analyzing the speckle field. The laser speckle measurement method has the advantages of simple light path, full-field measurement, non-contact and the like; therefore, the method is widely applied to the field of nondestructive testing. Through literature retrieval, the patent 'femtosecond laser speckle correlation method measuring device and method' (with the authorization number of ZL20061002662.1 and the authorization date of 2008.04.02) can realize the precision measurement of sub-pixel displacement through the correlation operation of two speckle intensity graphs before and after the object deformation, and has the disadvantages that the method needs a femtosecond laser system, and the system is expensive and not easy to maintain, so the practical application range of the system is limited; the patent 'X-ray speckle device and the application thereof in micro-displacement measurement' (with the authorization number of ZL200510023203.3 and the authorization date of 2008.07.02), the patent adopts X-rays as a speckle test light source, the accuracy is improved by 3-4 orders of magnitude compared with the accuracy of visible light measurement, but the X-rays are harmful to human health, and the method is not suitable for popularization and is only suitable for detection in specific occasions; the patent 'portable out-of-plane displacement measuring instrument' (with the authorization number of ZL200610024418.1, the authorization date of 2008.03.12), the device has the characteristics of compact structure and capability of measuring out-of-plane displacement; and in many times, the in-plane displacement and the out-of-plane displacement of the object occur simultaneously, so that the information of the in-plane displacement of the object is lost.
It can be known from analysis that in the prior published literature, in the aspects of laser speckle measurement method and application research thereof, a device and a method which have low requirements on test conditions and can simultaneously measure the in-plane displacement and the out-of-plane displacement of the deformation of an object are still lacking.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the technical problem not enough, provide a displacement in the face and from face displacement simultaneous measurement's laser speckle measuring device, through once arranging the light path, realize the measured object deformation simultaneously in the face displacement and from the measurement of face displacement distribution information to have simple and easy, quick, accurate advantage.
The utility model discloses a for solving above-mentioned technical problem not enough, the technical scheme who adopts is: a laser speckle measuring device for simultaneously measuring in-plane displacement and out-of-plane displacement is provided with a continuous wave laser, wherein a collimation beam expander and a polarization beam splitter I are sequentially arranged in the advancing direction of a light beam of the continuous wave laser; after passing through a polarization beam splitter I, a laser beam is divided into a transmission light I and a reflection light I, wherein the reflection light I and the transmission light I form an included angle of 90 degrees, and the reflection light I is used as an object beam I to directly irradiate on an object to be measured; the transmitted light I is irradiated on the polarization beam splitter II after advancing, and is divided into transmitted light II and reflected light II; the transmitted light II is irradiated on the reflector I after going forward, is irradiated on the reflector II after being deflected by 90 degrees, and then is irradiated on a measured object as an object beam II after being deflected by 90 degrees; the reflected light II irradiates on the reflecting mirror III, vertically irradiates on the polarization beam splitter IV after being reflected, and is divided into transmitted light V and reflected light V after passing through the polarization beam splitter IV, and the reflected light V is used as reference light;
the object beam I and the object beam II are symmetrically irradiated on a measured object at the same incident angle;
after the object beam I and the object beam II irradiated on the measured object are scattered by the measured object, scattered light is irradiated on a converging lens and is irradiated on a polarization beam splitter III after being converged, the scattered light is divided into transmitted light III and reflected light III through the polarization beam splitter III, and the reflected light III serving as an imaging beam I enters a CCD camera I for imaging and then is stored in a computer; the transmission light III irradiates on the polarization beam splitter IV and is divided into transmission light IV and reflected light IV after passing through the polarization beam splitter IV; the transmitted light IV and the reference light enter the CCD camera II together for imaging and then are stored in a computer.
The utility model discloses a use, its concrete step is as follows:
(1) arranging a continuous wave laser, a collimation beam expander, a polarization beam splitter I, a polarization beam splitter II, a polarization beam splitter III, a polarization beam splitter IV, a reflector I, a reflector II, a reflector III, a converging lens, a CCD camera I, a CCD camera II and a computer into a measuring light path according to the device;
(2) turning on the power supply of the continuous wave laser, emitting laser beams by the continuous wave laser, irradiating the object beam I and the object beam II on the object to be measured symmetrically at equal incidence angles, and recording the in-plane displacement speckle field of the object to be measured before deformation by using the CCD camera IⅠ 1Stored in the computer;
(3) simultaneously, a CCD camera II is used for recording an out-of-plane displacement speckle field formed by mutual interference of transmitted light IV and reference light before deformation of a measured object
Then storing the data into a computer;
(4) after the measured object is deformed, the CCD camera I is used for recording the in-plane displacement speckle field after the deformationⅠ 2Stored in the computer;
(5) simultaneously, the CCD camera II is used for recording the out-of-plane displacement speckle field of the deformed measured object
Stored in the computer;
(6) then, using the formula
Obtaining in-plane displacement speckle field before deformation of measured objectⅠ 1And the in-plane displacement speckle field after the measured object is deformedⅠ 2Processing to obtain an in-plane displacement fringe distribution diagram; wherein,Ⅰ 01andⅠ 02corresponding to the intensity distributions of the object beam i and the object beam ii,
is the initial phase between object beam I and object beam IIThe potential difference is measured by a potential difference measuring device,for the additional phase difference between the object beam I and the object beam II caused by the deformation of the measured object,
is the in-plane displacement component of the surface of the measured object along the measuring direction,λin order to test the wavelength of the laser light,θthe incident angles of an object beam I and an object beam II are shown;
(7) analyzing the distribution diagram of displacement fringes in the surface, and using the formula in the case of dark fringesWhen calculating and lighting the stripe, the formula is used
Performing a calculation in whichnThe number of the stripe stages is; obtaining the in-plane displacement distribution of the object to be measured after deformation
；
(8) At the same time, using the formula
Obtaining an out-of-plane displacement speckle field before deformation of the object to be measured
And the out-of-plane displacement speckle field after the measured object is deformed
Processing to obtain an off-plane displacement fringe distribution diagram; wherein,Ⅰ oandⅠ rcorresponding to the intensity distributions of the transmitted light iv and the reference light respectively,
is an initial phase difference between the transmitted light iv and the reference light,in order to add a phase difference between the transmitted light IV and the reference light due to the deformation of the object to be measured,
is the out-of-plane displacement component of the deformation of the measured object,λtesting the laser wavelength;
(9) analyzing the distribution diagram of the off-plane displacement fringes, and using the formula in the case of dark fringes
When calculating and lighting the stripe, the formula is used
Performing a calculation in whichnThe number of the stripe stages is; obtaining the distribution of the out-of-plane displacement of the object to be measured after deformation
；
(10) Finally, the in-plane displacement and out-of-plane displacement of the measured object are simultaneously realized by arranging the light path once (
，
) The measurement of (2).
The utility model discloses a theory of operation is:
when the laser speckle method is used for measuring the in-plane displacement, the intensity distribution recorded by the CCD camera I before the measured object is deformed is assumed to be expressed as,
in the formula,Ⅰ 01andⅠ 02respectively corresponding to the intensity distribution of the two object beams,
the initial phase difference of the two incident light waves.
The intensity distribution recorded by the CCD camera I after the measured object is deformed is,
in the formula,
the additional phase difference of the two incident light waves, which is caused by the deformation of the object to be measured, is shown as,
in the formula,
is the in-plane displacement component of the surface of the measured object along the measuring direction, lambda is the measuring laser wavelength,θthe incident angles of the two object beams.
The square of the difference between the recorded intensities before and after deformation of the measured object is expressed as
In the formula, the sine term is a high-frequency component and corresponds to speckle noise; the cosine term is a low frequency component corresponding to the deformation of the object to be measured. Therefore, when the condition is satisfied
When the brightness of the stripe is minimized, i.e. dark stripe will be generated
When the condition is satisfied
When the brightness of the stripe reaches the maximum, i.e., bright stripes are generated
Obtaining the measured object according to the formulas (6) and (8) and the distribution of the bright and dark stripesDeformed in-plane displacement distribution information
。
When the laser speckle is used for measuring the out-of-plane displacement of the deformation of the measured object, assuming that the light intensity distribution recorded by the CCD camera II before the deformation of the measured object is,
in the formula,Ⅰ oandⅠ rcorresponding to the intensity distributions of the object beam and the reference beam respectively,is the initial phase difference between the two optical waves.
The intensity distribution recorded by the CCD camera II after the measured object is deformed is,
in the formula,is an additional phase difference between the object beam and the reference beam, which is caused by the deformation of the object to be measured, expressed as,
in the formula,is the out-of-plane displacement component of the deformation of the measured object.
In the subtraction mode, the square of the difference obtained by subtracting two digital speckle images is expressed as
（12）
Therefore, when the condition is satisfied
When the stripe brightness is minimal, i.e. dark stripes occur
When the condition is satisfied
When the brightness of the stripe is maximum, i.e. bright stripe is generated
According to the formulas (14) and (16) and the distribution of the bright and dark stripes, the distribution information of the out-of-plane displacement of the deformed measured object can be obtained
. Finally, both in-plane and out-of-plane displacements are achieved，
) The measurement of (2).
Compared with the prior art, the utility model has the advantages that: the utility model can arrange the light path once, and simultaneously realize the measurement of the distribution information of the in-plane displacement and the out-of-plane displacement of the deformation of the measured object, and the measurement precision can reach the sub-wavelength level; and has the characteristics of simplicity, feasibility, rapidness and accuracy. The method can be widely applied to the fields of photoelectric nondestructive testing and the like, and is particularly suitable for real-time, high-precision and reliable measurement of micro displacement in the fields.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
The labels in the figure are: 100. the device comprises a continuous wave laser 110, a collimation beam expander 121, polarization beam splitters I and 122, polarization beam splitters II and 131, reflectors I and 132, reflectors II and 200, a measured object 140, a converging lens 123, polarization beam splitters III and 151, CCD cameras I and 133, reflectors III and 124, polarization beam splitters IV and 152, CCD cameras II and 300 and a computer.
Detailed Description
The present invention will be further described with reference to the following examples.
As shown in the figure, the laser speckle measuring device for simultaneously measuring in-plane displacement and out-of-plane displacement of the utility model is provided with a continuous wave laser 100, and a collimation beam expander 110 and a polarization beam splitter I121 are sequentially arranged in the advancing direction of the light beam of the continuous wave laser 100; after passing through a polarization beam splitter I121, a laser beam is divided into a transmission light I and a reflection light I, wherein the reflection light I and the transmission light I form an included angle of 90 degrees, and the reflection light I is used as an object beam I to be directly irradiated on an object to be measured 200; the transmitted light I is irradiated on the polarization beam splitter II 122 after advancing, and is divided into transmitted light II and reflected light II; the transmitted light II is irradiated on the reflector I131 after going forward, is irradiated on the reflector II 132 after being deflected by 90 degrees, and is irradiated on the object to be measured 200 as an object beam II after being deflected by 90 degrees; the reflected light II irradiates on the reflecting mirror III 133, vertically irradiates on the polarization beam splitter IV 124 after being reflected, and is divided into transmitted light V and reflected light V after passing through the polarization beam splitter IV 124, and the reflected light V is used as reference light;
the object beam I and the object beam II have the same incident angleθSymmetrically irradiating on the object to be measured 200;
after the object beam I and the object beam II irradiated on the measured object 200 are scattered by the measured object 200, the scattered light irradiates on the converging lens 140, and is converged and irradiated on the polarization beam splitter III 123, the scattered light is divided into a transmission light III and a reflection light III through the polarization beam splitter III 123, and the reflection light III is used as an imaging beam I, enters a CCD camera I151 for imaging and then is stored in a computer 300; the transmission light III irradiates on the polarization beam splitter IV 124 and is divided into transmission light IV and reflection light IV after passing through the polarization beam splitter IV 124; the transmitted light IV and the reference light enter the CCD camera II 152 together for imaging, that is, the transmitted light IV and the reflected light V enter the CCD camera II 152 together for imaging, and then are stored in the computer 300.
The utility model provides a polarizing beam splitter I121, speculum I131, speculum II 132 and the testee that sets up constitute a square, that is to say polarizing beam splitter I121, speculum I131, speculum II 132 and testee set up respectively on four square angular position points, shine object beam I and object beam II on testee 200 and loop through polarizing beam splitter III 123 and polarizing beam splitter IV 124 after converging through convergent lens 140 after testee 200 scatters, until formation of image input computer 300.
The measuring method using the device comprises the following specific steps:
(1) arranging a continuous wave laser 100, a collimation beam expander 110, a polarization beam splitter I121, a polarization beam splitter II 122, a polarization beam splitter III 123, a polarization beam splitter IV 124, a reflector I131, a reflector II 132, a reflector III 133, a converging lens 140, a CCD camera I151, a CCD camera II 152 and a computer 300 into a measuring light path according to the laser speckle measuring device;
(2) turning on the power supply of the continuous wave laser 100, the continuous wave laser 100 emits a laser beam, the object beam I and the object beam II are symmetrically irradiated on the object 200 to be measured at equal incident angles, and the CCD camera I151 is used for recording the in-plane displacement speckle field of the object 200 to be measured before deformationⅠ 1Stored in the computer 300;
(3) meanwhile, the CCD camera II 152 is used for recording an out-of-plane displacement speckle field formed by mutual interference of transmitted light IV and reference light before the measured object 200 is deformed
And then stored in the computer 300;
(4) after the measured object 200 is deformed, the CCD camera I151 is used for recording the in-plane displacement speckle field after the deformationⅠ 2Stored in the computer 300;
(5) simultaneously, the CCD camera II 152 is used for recording the out-of-plane displacement speckle field of the deformed measured object (200)Stored in the computer 300;
(6) then, using the formula
In-plane displacement speckle field obtained before deformation of the object 200Ⅰ 1And the in-plane displacement speckle field of the object 200 after deformationⅠ 2Processing to obtain an in-plane displacement fringe distribution diagram; wherein,Ⅰ 01andⅠ 02corresponding to the intensity distributions of the object beam i and the object beam ii,
is the initial phase difference between the object beam I and the object beam II,
for the additional phase difference between the object beam i and the object beam ii caused by the deformation of the object 200 to be measured,
is an in-plane displacement component of the surface of the object to be measured 200 in the measurement direction,λin order to test the wavelength of the laser light,θthe incident angles of an object beam I and an object beam II are shown;
(7) analyzing the distribution diagram of displacement fringes in the surface, and using the formula in the case of dark fringes
When calculating and lighting the stripe, the formula is used
Performing a calculation in whichnThe number of the stripe stages is; obtaining the in-plane displacement distribution of the object 200 after deformation
；
(8) At the same time, using the formula
Before deformation of the object 200Resulting out-of-plane displacement speckle field
And the out-of-plane displacement speckle field of the object 200 after deformation
Processing to obtain an off-plane displacement fringe distribution diagram; wherein,Ⅰ oandⅠ rcorresponding to the intensity distributions of the transmitted light iv and the reference light respectively,
is an initial phase difference between the transmitted light iv and the reference light,
in order to add a phase difference between the transmitted light iv and the reference light due to the deformation of the object to be measured 200,
is the out-of-plane displacement component of the deformation of the measured object 200, and lambda is the wavelength of the measuring laser;
(9) analyzing the distribution diagram of the off-plane displacement fringes, and using the formula in the case of dark fringesWhen calculating and lighting the stripe, the formula is used
Performing a calculation in whichnThe number of the stripe stages is; obtaining the distribution of the out-of-plane displacement of the object 200 after deformation；
Finally, by arranging the light path once, the in-plane displacement and the out-of-plane displacement of the measured object 200 are simultaneously realized (，
) The measurement of (2).
Claims (1)
1. The laser speckle measuring device for simultaneously measuring the in-plane displacement and the out-of-plane displacement is characterized in that: the device is provided with a continuous wave laser (100), and a collimation beam expander (110) and a polarization beam splitter I (121) are sequentially arranged in the advancing direction of a light beam of the continuous wave laser (100); after passing through a polarization beam splitter I (121), a laser beam is divided into a transmission light I and a reflection light I, wherein the reflection light I and the transmission light I form an included angle of 90 degrees, and the reflection light I is used as an object beam I to be directly irradiated on an object to be measured (200); the transmitted light I is irradiated on a polarization beam splitter II (122) after advancing, and is divided into transmitted light II and reflected light II; the transmitted light II is irradiated on the reflector I (131) after going forward, is irradiated on the reflector II (132) after being deflected by 90 degrees, and is irradiated on a measured object (200) as an object beam II after being deflected by 90 degrees; the reflected light II irradiates on a reflecting mirror III (133), vertically irradiates on a polarization beam splitter IV (124) after being reflected, and is divided into transmitted light V and reflected light V after passing through the polarization beam splitter IV (124), and the reflected light V is used as reference light;
the object beam I and the object beam II are symmetrically irradiated on a measured object (200) at the same incident angle;
after the object beam I and the object beam II irradiated on the object to be measured (200) are scattered by the object to be measured, scattered light is irradiated on the converging lens (140) and is converged and then irradiated on the polarization beam splitter III (123), the scattered light is divided into transmitted light III and reflected light III through the polarization beam splitter III (123), and the reflected light III is used as an imaging beam I, enters a CCD camera I (151) for imaging and is stored in a computer (300); the transmitted light III irradiates on a polarization beam splitter IV (124), and is divided into transmitted light IV and reflected light IV after passing through the polarization beam splitter IV (124); the transmitted light IV and the reference light enter a CCD camera II (152) together for imaging, and then are stored in a computer (300).
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506716A (en) * | 2011-10-24 | 2012-06-20 | 河南科技大学 | Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously |
| CN103822587A (en) * | 2014-02-25 | 2014-05-28 | 西安电子科技大学 | Interference measurement system for microstructural three-dimensional deformation and displacement tests |
| CN108106556A (en) * | 2018-02-02 | 2018-06-01 | 上海交通大学 | Based on the curved face object of digital speckle interference from face distortion measurement method and device |
| CN114136228A (en) * | 2021-11-29 | 2022-03-04 | 沈阳师范大学 | Thermal deformation detection system based on laser speckle method, detection method and application |
-
2011
- 2011-10-24 CN CN2011204068325U patent/CN202281596U/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506716A (en) * | 2011-10-24 | 2012-06-20 | 河南科技大学 | Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously |
| CN102506716B (en) * | 2011-10-24 | 2013-09-11 | 河南科技大学 | Laser speckle measuring device and method for measuring in-plane displacement and out-of-plane displacement simultaneously |
| CN103822587A (en) * | 2014-02-25 | 2014-05-28 | 西安电子科技大学 | Interference measurement system for microstructural three-dimensional deformation and displacement tests |
| CN103822587B (en) * | 2014-02-25 | 2017-05-17 | 西安电子科技大学 | Interference measurement system for microstructural three-dimensional deformation and displacement tests |
| CN108106556A (en) * | 2018-02-02 | 2018-06-01 | 上海交通大学 | Based on the curved face object of digital speckle interference from face distortion measurement method and device |
| CN108106556B (en) * | 2018-02-02 | 2020-01-21 | 上海交通大学 | Method and device for measuring out-of-plane deformation of curved surface object based on digital speckle interference |
| CN114136228A (en) * | 2021-11-29 | 2022-03-04 | 沈阳师范大学 | Thermal deformation detection system based on laser speckle method, detection method and application |
| CN114136228B (en) * | 2021-11-29 | 2023-06-02 | 沈阳师范大学 | Thermal deformation detection system, detection method and application based on laser speckle method |
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