CN103816787A - Gas purifier - Google Patents
Gas purifier Download PDFInfo
- Publication number
- CN103816787A CN103816787A CN201210465889.1A CN201210465889A CN103816787A CN 103816787 A CN103816787 A CN 103816787A CN 201210465889 A CN201210465889 A CN 201210465889A CN 103816787 A CN103816787 A CN 103816787A
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- CN
- China
- Prior art keywords
- gas
- liquid alloy
- purifier
- sodium
- potassium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims abstract description 81
- 239000007788 liquid Substances 0.000 claims abstract description 30
- 239000000956 alloy Substances 0.000 claims abstract description 29
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 27
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 14
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000001257 hydrogen Substances 0.000 claims abstract description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 12
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 12
- 239000001301 oxygen Substances 0.000 claims abstract description 12
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 7
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052786 argon Inorganic materials 0.000 claims abstract description 6
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910000070 arsenic hydride Inorganic materials 0.000 claims abstract description 6
- 239000001307 helium Substances 0.000 claims abstract description 6
- 229910052734 helium Inorganic materials 0.000 claims abstract description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052743 krypton Inorganic materials 0.000 claims abstract description 6
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052754 neon Inorganic materials 0.000 claims abstract description 6
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910052724 xenon Inorganic materials 0.000 claims abstract description 6
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000000463 material Substances 0.000 claims abstract description 4
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical group [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 claims description 15
- 230000005496 eutectics Effects 0.000 claims description 14
- 229910000831 Steel Inorganic materials 0.000 claims description 13
- 239000010959 steel Substances 0.000 claims description 13
- 229910052700 potassium Inorganic materials 0.000 claims description 11
- 239000011591 potassium Substances 0.000 claims description 11
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 claims description 10
- 229910052708 sodium Inorganic materials 0.000 claims description 10
- 239000011734 sodium Substances 0.000 claims description 10
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000010521 absorption reaction Methods 0.000 claims description 7
- 239000011261 inert gas Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- 150000002431 hydrogen Chemical class 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 230000002411 adverse Effects 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims 1
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract description 10
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 abstract description 5
- 239000001569 carbon dioxide Substances 0.000 abstract description 5
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract description 5
- 229910002091 carbon monoxide Inorganic materials 0.000 abstract description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 5
- 229910001868 water Inorganic materials 0.000 abstract description 5
- 229910000574 NaK Inorganic materials 0.000 abstract description 3
- 238000010992 reflux Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 abstract 1
- 150000002739 metals Chemical class 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-M hydroxide Chemical compound [OH-] XLYOFNOQVPJJNP-UHFFFAOYSA-M 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
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- Food Preservation Except Freezing, Refrigeration, And Drying (AREA)
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Gas Separation By Absorption (AREA)
Abstract
The invention discloses a gas purifier. The purifier comprises a liquid alloy (potassium-sodium alloy) material which is placed in a stainless steel container, wherein the stainless steel container comprises a gas inlet and a gas outlet; the gas inlet is formed in the liquid alloy; the gas outlet is kept in the liquid alloy; when a gas passes through the liquid alloy, oxygen, water and oxygen-containing gases such as carbon dioxide and carbon monoxide in the gas are absorbed by the potassium-sodium alloy. The gas passing through the purifier has the oxygen content of a PPB (Part per Billion) order. A liquid alloy reflux-proof device is arranged at the gas inlet to prevent the liquid alloy reflux from jetting out from the gas inlet in a reverse manner. The purifier can be used for purifying hydrogen, nitrogen, inertia gases (helium, neon, argon, krypton and xenon), and reducing gases (arsenic hydride, hydrogen phosphide and ammonia gas etc.), and is suitable for being applied to gases in the semiconductor industry.
Description
Technical field
The present invention relates to the impurity that contains oxygen element in a kind of gas purifier, particularly purifying hydrogen, nitrogen, inert gas, reducibility gas etc.
Background technology
In semi-conductor industry, often need hydrogen, nitrogen, inert gas (helium, neon, argon, krypton, xenon), reducibility gas (arsenic hydride, hydrogen phosphide, ammonia, silication hydrogen etc.), and need these gases to there is " ultra-high purity ", especially need to have the impurity such as the oxygen, water, carbon dioxide, carbon monoxide of extremely rudimentary content.
Gas purifier on market, normally uses " active metals " such as aluminium, magnesium, zirconiums to take on getter.In the time that hydrogen, nitrogen, inert gas (helium, neon, argon, krypton, xenon), reducibility gas (arsenic hydride, hydrogen phosphide, ammonia, silication hydrogen etc.) pass through these active metals, oxygen wherein, water, carbon dioxide, carbon monoxide are absorbed by these active metals, and gas obtains purifying.But these active metals are all solids, when the Surface absorption of solid contains after oxygen element, become metal oxide, form one deck " shell " in metal surface, the metal that this one deck " shell " has hindered solid interior further absorbs.
The fusing point of sodium metal is 98 ℃, and the fusing point of metallic potassium is 64 ℃, and when both form sodium-potassium eutectic according to 1: 1 proportioning, its fusing point is roughly 25 ℃ (fusing point of the different alloy of ratio of proportioning is also different).Sodium-potassium eutectic is at room temperature a kind of liquid.When the gas that needs purifying is during by sodium-potassium eutectic, in gas, oxygenate impurity is absorbed by sodium-potassium eutectic, generates oxide and floats over potassium-sodium alloy surface, can not resemble solid material and form one deck " shell " on surface.
Summary of the invention
A kind of gas purifier, this purifier comprises a kind of liquid alloy (sodium-potassium eutectic) material (1), and this material is placed in a rustless steel container (2).On rustless steel container (2), contain gas access (3) and gas vent (4), insert in liquid alloy (1) gas access (3), and gas vent (4) is on liquid alloy (1).When gas is by liquid alloy, the gas that oxygen in gas, water, carbon dioxide, carbon monoxide etc. contain oxygen element is all absorbed by sodium-potassium eutectic (1), generates oxide (or hydroxide) and float over the surface of sodium-potassium eutectic (1).On gas access (3), contain an anti-liquid alloy backflow device (5), prevent (3) ejection from gas access of liquid alloy adverse current.This purifier can purifying hydrogen, nitrogen, inert gas (helium, neon, argon, krypton, xenon), reducibility gas (arsenic hydride, hydrogen phosphide, ammonia, silication hydrogen etc.).
Sodium-potassium eutectic (1), is by high pure metal potassium and sodium, according to certain ratio, puts together and melts rear generation.Wherein potassium/sodium proportion is 0～100%.Generally, potassium/sodium ratio is 1: 1, and its fusing point～25 ℃ are liquid under room temperature.
Sodium-potassium eutectic (1) is placed in rustless steel container (2).The shell of rustless steel container (2) can be room temperature, also can be with heater (6) heated constant temperature (being generally controlled at 50 ℃).
On rustless steel container (2), contain gas access (3) and gas vent (4), wherein gas vent (4) can directly outwards be supplied gas, also can be by outwards supplying gas again after an active carbon absorption plant (7), in gas, contain micro-potassium, sodium steam to absorb.In order to reduce as far as possible potassium, sodium steam, active carbon absorption plant is placed in a household freezer (8), and household freezer control temperature is at-10 ℃～-20 ℃.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.Wherein: the 1st, sodium-potassium eutectic (liquid alloy).The 2nd, rustless steel container.The 3rd, gas access.The 4th, gas vent.The 5th, anti-liquid alloy backflow device.In the time of gas reflux, all liq flows in this device, can not spray from gas access.The 6th, heater (containing radiator valve).The 7th, active carbon absorption plant.The 8th, household freezer.
The specific embodiment
Fig. 1 is the specific embodiment of the present invention schematic diagram.Sodium-potassium eutectic in this purifier (1) (potassium sodium ratio is pressed 1:1 configuration), is placed in a rustless steel container (2).On rustless steel container (2), contain gas access (3) and gas vent (4), insert in liquid alloy (1) gas access (3), and gas vent (4) is on liquid alloy (1).When gas is by liquid alloy (1), oxygen in gas, water, carbon dioxide, carbon monoxide etc. are all absorbed by sodium-potassium eutectic (1) containing the foreign gas of oxygen element, generate oxide (or hydroxide) and float over the surface of sodium-potassium eutectic (1).On gas access (3), contain an anti-liquid alloy backflow device (5), prevent that (3) oppositely spray liquid alloy (1) adverse current from gas access.This purifier can purifying hydrogen, nitrogen, inert gas (helium, neon, argon, krypton, xenon), reducibility gas (arsenic hydride, hydrogen phosphide, ammonia, silication hydrogen etc.).Heater for shell (6) heated constant temperature to 50 ℃ of rustless steel container (2).On rustless steel container, contain gas access (3) and gas vent (4), wherein gas vent (4) is outwards supplied gas after by an active carbon absorption plant (7) again, contains micro-potassium, sodium steam to absorb in gas.In order to reduce as far as possible potassium, sodium steam, active carbon absorption plant (7) is placed in a household freezer (8), and household freezer (8) is controlled temperature at-10 ℃～-20 ℃.
Claims (5)
1. a gas purifier, it is characterized in that: this purifier comprises a kind of liquid alloy material (1), this liquid alloy material is placed in a rustless steel container (2), on rustless steel container, contain gas access (3) and gas vent (4), insert in liquid alloy (1) gas access (3), and gas vent (4) is on liquid alloy (1); When gas is by liquid alloy (1), the foreign gas containing oxygen element in gas is all absorbed by described liquid alloy (1); On gas access (3), contain an anti-liquid alloy backflow device (5), prevent that liquid alloy (1) adverse current from oppositely spraying from gas access.
2. gas purifier as claimed in claim 1, described liquid alloy is sodium-potassium eutectic material (1), it is characterized in that: be by high pure metal potassium and sodium, according to certain ratio, put together and melt rear generation, wherein potassium/sodium proportion is 0～100%.
3. gas purifier as claimed in claim 1, the shell of described rustless steel container (2) is room temperature or heated constant temperature.
4. gas purifier as claimed in claim 1, described gas vent (4) is directly outwards supplied gas, or by backward outer the supplying gas of an active carbon absorption plant (7), contains micro-potassium, sodium steam to absorb in gas.
5. gas purifier as claimed in claim 1, this purifier is for purifying hydrogen, nitrogen, inert gas, reducibility gas; Wherein, described inert gas comprises: helium, neon, argon gas, Krypton, xenon; Described reducibility gas comprises: arsenic hydride, hydrogen phosphide, ammonia, silication hydrogen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210465889.1A CN103816787B (en) | 2012-11-19 | 2012-11-19 | A kind of gas purifier |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210465889.1A CN103816787B (en) | 2012-11-19 | 2012-11-19 | A kind of gas purifier |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103816787A true CN103816787A (en) | 2014-05-28 |
| CN103816787B CN103816787B (en) | 2016-08-03 |
Family
ID=50752249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210465889.1A Active CN103816787B (en) | 2012-11-19 | 2012-11-19 | A kind of gas purifier |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103816787B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103816770A (en) * | 2012-11-19 | 2014-05-28 | 刘祥林 | Gas purifier |
| CN108211542A (en) * | 2018-02-11 | 2018-06-29 | 浙江博瑞电子科技有限公司 | A kind of novel separated type gas purifier |
| CN111422839A (en) * | 2020-04-24 | 2020-07-17 | 苏州星烁纳米科技有限公司 | Inert gas treatment device and manufacturing method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2074202U (en) * | 1990-06-20 | 1991-04-03 | 麦松泉 | Filtering device for exhaust fume |
| CN2140800Y (en) * | 1992-07-25 | 1993-08-25 | 长沙铰链厂 | Oxyhydrogen cutting and welding machine |
| CN202237658U (en) * | 2011-09-14 | 2012-05-30 | 上海蓝火焰节能科技有限公司 | Oil smoke purification device |
| CN203155053U (en) * | 2012-11-19 | 2013-08-28 | 刘祥林 | Gas purifier |
-
2012
- 2012-11-19 CN CN201210465889.1A patent/CN103816787B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2074202U (en) * | 1990-06-20 | 1991-04-03 | 麦松泉 | Filtering device for exhaust fume |
| CN2140800Y (en) * | 1992-07-25 | 1993-08-25 | 长沙铰链厂 | Oxyhydrogen cutting and welding machine |
| CN202237658U (en) * | 2011-09-14 | 2012-05-30 | 上海蓝火焰节能科技有限公司 | Oil smoke purification device |
| CN203155053U (en) * | 2012-11-19 | 2013-08-28 | 刘祥林 | Gas purifier |
Non-Patent Citations (1)
| Title |
|---|
| 彭新华: "《大学化学实验2 合成实验与技术》", 31 August 2012, article "大学化学实验2 合成实验与技术", pages: 37-38 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103816770A (en) * | 2012-11-19 | 2014-05-28 | 刘祥林 | Gas purifier |
| CN108211542A (en) * | 2018-02-11 | 2018-06-29 | 浙江博瑞电子科技有限公司 | A kind of novel separated type gas purifier |
| CN111422839A (en) * | 2020-04-24 | 2020-07-17 | 苏州星烁纳米科技有限公司 | Inert gas treatment device and manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103816787B (en) | 2016-08-03 |
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Legal Events
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| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| ASS | Succession or assignment of patent right |
Owner name: HU'NAN HIEND PRODUCTS CO., LTD. Free format text: FORMER OWNER: LIU XIANGLIN Effective date: 20141020 |
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| C41 | Transfer of patent application or patent right or utility model | ||
| COR | Change of bibliographic data |
Free format text: CORRECT: ADDRESS; FROM: 100083 HAIDIAN, BEIJING TO: 414009 YUEYANG, HUNAN PROVINCE |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20141020 Address after: 414009 Yunxi Industrial Park, Hunan, Yueyang Applicant after: HUNAN HIEND PRODUCTS CO.,LTD. Address before: 100083, room 11, building 35, No. 352, Qinghua East Road, Beijing, Haidian District Applicant before: Liu Xianglin |
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Effective date of registration: 20240408 Address after: 201210 Shanghai Pudong New Area China (Shanghai) Free Trade Pilot Zone No. 665, Zhangjiang Road, 3 Floors Patentee after: Lanhe Technology (Shanghai) Co.,Ltd. Country or region after: China Address before: 414009 Yunxi Industrial Park, Yueyang, Hunan Patentee before: HUNAN HIEND PRODUCTS CO.,LTD. Country or region before: China |