JP4653023B2 - Ozone concentrator - Google Patents

Description

  The present invention relates to an ozone concentrator for concentrating ozone gas generated by an ozonizer.

For example, high-concentration ozone gas used for manufacturing semiconductors and the like is generated by concentrating ozone gas containing ozone with an ozone concentrator. As this ozone concentrator, ozone gas generated by an ozone generator based on air or oxygen is cooled in a tank-like ozone liquefaction chamber and separated into liquid ozone and oxygen at the boundary of the boundary, and the ozone liquefaction chamber Oxygen is exhausted from the top of the tank and liquid ozone is stored at the bottom of the ozone liquefaction chamber. The liquid ozone stored in the liquefaction chamber is tank-shaped via a communication pipe (U-shaped tube) sealed with the liquid ozone. There is known an apparatus for obtaining concentrated ozone (high-concentration ozone gas) by heating the liquid ozone in the ozone vaporizing chamber and evaporating the liquid ozone in the ozone vaporizing chamber (see, for example, Patent Document 1).
JP-A-1-257103

Here, high-concentration ozone gas (generally, the volume ratio of ozone is 10% or more) is, for example, when there are triggers such as catalytic action of metal fine particles, high temperature, impact force, and organic gas decomposed by ozone. Decomposes and generates heat (O ₃ → 1.5O ₂ +143 kJ / mol), and other ozone gas is heated and self-decomposed by the heat generated during the decomposition, or liquid ozone is heated and vaporized to self-decompose. There is a risk of causing.

  Therefore, in the concentrator, if ozone decomposition occurs in the ozone vaporization chamber due to the trigger or the like, the liquid ozone in the communication pipe and the liquid ozone stored in the liquefaction chamber are heated. As a result of vaporization and ozonolysis in a chained manner, the temperature rises rapidly, the volume rapidly expands, the pressure rises rapidly, and the apparatus may be damaged.

  The present invention has been made to solve such problems, and even if ozone decomposition occurs in the vaporization section, chain ozone decomposition due to vaporization of liquid ozone can be suppressed, and there is a risk of damage to the apparatus. An object of the present invention is to provide an ozone concentrator capable of eliminating the problem.

  Here, as a result of intensive research, the inventors of the present invention, in the ozone concentrator having the above-described configuration, the liquid ozone is present at the bottom of the liquefaction chamber and the communication pipe, and the amount of liquid ozone is large. In the unlikely event that ozonolysis occurs, it is difficult to suppress the damage of the equipment due to the chain ozonolysis caused by the large amount of liquid ozone, but the amount of liquid ozone is reduced and the liquid ozone is vaporized. It has been found that if the amount is reduced as much as possible, the influence of chain ozone decomposition due to vaporization of liquid ozone can be suppressed.

Therefore, the ozone concentrator according to the present invention is a cooling means for cooling the ozone gas generated by the ozonizer to a temperature below the boiling point of ozone and separating it into liquid ozone and non-condensable gas, and heating the liquid ozone separated by the cooling means. A vaporizing part that vaporizes and obtains concentrated ozone, and connects the separation boundary surface between the liquid ozone and the non-condensable gas to the vaporizing part only by a pipe that enables liquid sealing, and a capillary tube is provided in the pipe. Filling material that expresses force is filled, and the cooling means includes a refrigerator and a cooling unit that is attached to the refrigerator and cools ozone gas, and the cooling unit extends to the vaporization unit side to cover the piping, The piping is cooled by a cooling means .

  According to such an ozone concentrator, liquid ozone is present in the pipe and the separation boundary surface is located in the pipe. Therefore, the amount of liquid ozone is significantly reduced as compared with the conventional apparatus. For this reason, even if ozone decomposition occurs in the vaporization section, the vaporization amount of liquid ozone is greatly reduced, chained ozone decomposition is suppressed, and there is no possibility of damage to the apparatus.

  Here, it is preferable that the pipe is filled with a filler that develops capillary force. When such a configuration is adopted, liquid ozone is well guided to the vaporization part due to the capillary force of the filler in the pipe and vaporizes, but even if ozone decomposition occurs in the vaporization part, the generated heat is In the piping, it is absorbed by the heat capacity of the filler, and the amount of liquid ozone is further reduced by the filler, and the chain ozone decomposition due to the vaporization of liquid ozone is further suppressed, and the apparatus is damaged. The fear of this is further eliminated.

  In addition, the inlet of the vaporization section is at a height higher than the separation boundary surface, and when the upper end of the filler enters the inside through the inlet of the vaporization section, the liquid ozone does not enter the vaporization section. It enters into the vaporization part by the capillary force of the filler and vaporizes well. Thus, since the amount of liquid ozone in the vaporization section is extremely small, even if ozone decomposition occurs in the vaporization section, chained ozone decomposition due to vaporization of liquid ozone is further suppressed, and there is a risk of damage to the apparatus. More lost.

  In addition, if the vaporizer is filled with a filler that allows the passage of concentrated ozone, even if ozone decomposition occurs in the vaporizer, the generated heat is absorbed by the heat capacity of the filler in the vaporizer. Therefore, the chain ozonolysis of the concentrated ozone in the vaporization part is suppressed, and the possibility of damage to the apparatus is further eliminated.

  The piping is preferably cooled by a cooling means. When such a configuration is adopted, even if ozone decomposition occurs in the vaporization section, the generated heat is cooled by the cooling means in the piping, so that chain ozone decomposition due to vaporization of liquid ozone is further suppressed, The risk of damage to the device is further eliminated. In addition, when the pipe is filled with a filler that expresses a capillary force, the capillary action may be interrupted by bubbles generated by the vaporization of liquid ozone, but the pipe is cooled by the cooling means. Generation | occurrence | production is suppressed and a capillary action works reliably.

  In addition, the cooling unit, the piping, and the vaporizing unit of the cooling means are accommodated in a vacuum heat insulating container, and the pressure at which the pressure in the pipe is released into the vacuum heat insulating container according to the pressure increase in the pipe when ozone decomposition occurs. A release valve is preferably provided. When such a configuration is adopted, in the unlikely event that all of the liquid ozone is decomposed by ozone and the pressure release valve opens the pressure into the vacuum heat insulation container, the pressure in the pipe is equal to or lower than the supply pressure of the ozone gas. By setting the volume of the gap in the vacuum insulation container, the gas pressure at the time of ozonolysis is favorably released to the gap in the vacuum insulation container via the pressure release valve, further eliminating the possibility of damage to the device. . Moreover, the cooling by a cooling means and the heating in a vaporization part are efficiently achieved by a vacuum heat insulation state.

  Further, when the ozone flow path cooled by the cooling section of the cooling means and connected to the pipe is inclined downward toward the connection section with the pipe, liquid ozone is prevented from being stored in the flow path. This further eliminates the possibility of damage to the device.

  Here, it is necessary that the liquid level of the liquid ozone on the inlet side (separation boundary surface side) of the pipe should not exceed a specified level in consideration of ozone decomposition. Therefore, as such means, it is conceivable to carry out by adjusting the discharge voltage of the ozonizer or adjusting the flow rate of the source gas (mainly oxygen). However, the inventors have found that in such an adjustment method, since ozone gas already exists between the cooling part of the cooling means and the ozonizer at the time of adjusting the discharge voltage or flow rate, a time lag occurs in the adjustment. It was found that sufficient responsiveness cannot be ensured.

  Therefore, the ozone concentrator according to the present invention is characterized in that one or more discharge ports for taking out ozone gas are provided in an ozone flow path cooled by a cooling unit of a cooling means and connected to a pipe. When such a configuration is adopted, ozone gas in the ozone flow path can be taken out through the discharge port when it is necessary to reduce the amount of liquid ozone produced. For this reason, since the ozone gas in the ozone flow path from the ozonizer can be reduced, the adjustment time lag is reduced, and liquid ozone is reliably prevented from being stored more than a predetermined amount on the inlet side of the pipe.

  In addition, if the discharge port is provided in the latter half of the ozone flow path, the ozone gas is sufficiently cooled near the outlet of the flow path, and the ozone gas immediately before liquefaction can be directly taken out. As a result, the adjustment time lag is further reduced, and liquid ozone is more reliably prevented from being stored more than a predetermined amount on the inlet side of the pipe.

  As described above, according to the ozone concentrating device according to the present invention, even if ozone decomposition occurs in the vaporizing section, it is possible to suppress chain ozone decomposition due to vaporization of liquid ozone and to eliminate the possibility of damage to the device. Become.

  Hereinafter, a preferred embodiment of an ozone concentrator according to the present invention will be described with reference to the accompanying drawings. In the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted.

[First embodiment]
FIG. 1 is a schematic configuration diagram showing a high-concentration ozone gas generation apparatus equipped with an ozone concentrator according to the first embodiment of the present invention, and FIG. 2 is a cooling unit, a liquid seal pipe of the ozone concentrator in FIG. It is a schematic block diagram which shows a vaporization part, and the high concentration ozone gas production | generation apparatus of this embodiment is high concentration ozone gas (generally the volume ratio of ozone is about 10% or more) used for formation of the oxide film of a semiconductor manufacturing apparatus etc., for example It is an apparatus capable of continuously generating this high-concentration ozone gas.

  As shown in FIG. 1, the high-concentration ozone gas generation apparatus 200 includes an ozonizer 10 that generates ozone gas (a volume ratio of ozone is about 10%), a cooling unit 1, and a vaporization unit 2, and concentrates ozone gas from the ozonizer 10. And an ozone concentrator 100 that generates high-concentration ozone gas.

  The ozonizer 10 generates ozone gas (the volume ratio of ozone is about 10%) based on oxygen or air introduced through the pipe 27.

  The cooling means 1 cools the ozone gas from the ozonizer 10 and separates it into liquid ozone and non-condensed gas. The cooling means 1 includes a cryogenic refrigerator 4 that is connected to an ozonizer 10 and cools an introduction pipe 3 that introduces ozone gas from the ozonizer 10 to a cryogenic temperature.

  Here, a cryocooler is used as the cryogenic refrigerator 4, and the lower copper plate 4b and the upper copper plate 4c attached to the cryohead 4a of the cryocooler 4 are used as the cooling unit 4x to constitute the cooling unit 4x. The introduction pipe 3 is sandwiched between the copper plates 4b and 4c and cooled. As a result, the introduction pipe 3 between the copper plates 4b and 4c is cooled by the cooling pipe 3c for separating the ozone gas into liquid ozone and non-condensed gas, that is, the cooling section 4x, and connected to the liquid sealing pipe 6 described later. The cooling pipe 3c is a flow path for ozone. The cooling unit 4x cools the ozone gas in the cooling pipe 3c to a temperature lower than the boiling point of ozone (−111.9 ° C.) and higher than the boiling point of oxygen (−183 ° C.). It is separated into non-condensable gas mainly composed of Moreover, this cooling part 4x is provided with the extension part 4y extended to the vaporization part 2 side.

  The cooling pipe 3c is inclined downward from the inlet 3a to the outlet 3b in the cooling unit 4x, and liquid ozone is prevented from being stored in the cooling pipe 3c.

  A gas pipe 5 directed upward and a liquid seal pipe 6 directed downward are joined and connected to the outlet 3b of the cooling pipe 3c. The gas pipe 5 guides the non-condensed gas mainly composed of oxygen separated by the cooling pipe 3c upward from the outlet 3b. The gas pipe 5 has an outlet connected to the pipe 27 and returns the separated non-condensed gas to the ozonizer 10.

  On the other hand, as shown in FIG. 1 and FIG. 2, the liquid seal pipe 6 connects the outlet 3b of the cooling pipe 3c and the inlet 2a of the vaporizing section 2, and is separated by the cooling pipe 3c and falls down from the outlet 3b. Is guided to the vaporization section 2 and the introduction piping 3 and the gas piping 5 side and the vaporization section 2 side are liquid-sealed by the liquid ozone.

  Here, a U-shaped tube is used as the liquid sealing pipe 6, and the separation boundary surface 7 between the liquid ozone and the non-condensed gas is located slightly below the outlet 3 b of the introduction pipe 3 in the U-shaped pipe 6. It is supposed to be configured.

  The liquid sealing pipe 6 is filled with a filler 8 that develops a capillary force and guides liquid ozone in the liquid sealing pipe 6 into the vaporizing section 2. Here, the filler 8 is a wire mesh filler, and is configured to be densely configured to develop a capillary force and to enter the vaporizing unit 2 through the inlet 2a of the vaporizing unit 2.

  The filler 8 is not limited to a wire mesh filler, and may be, for example, a thin metal material or glass fiber that is densely arranged, for example, a fine silica gel or porous silica that is arranged in large numbers. Any filler may be used as long as it exhibits a capillary force. Then, the liquid seal pipe 6 is passed through the extension part 4y of the cooling part 4x, is sandwiched between the copper plates 4b and 4c, and is cooled by the extension part 4y.

  The vaporization unit 2 is for vaporizing liquid ozone from the liquid seal pipe 6 and has a cylindrical body, the lower part is closed in a narrow bowl shape, and an inlet 2a is provided at the lower end. In addition, the upper part is closed like a thin bowl, and an outlet 2b is provided at the upper end.

  The inlet 2a of the vaporizing section 2 is at a height higher than the separation boundary surface 7, and the wire mesh-like filler 8 entering the inside through the inlet 2a supplies liquid ozone into the bottom of the vaporizing section 2 by capillary force. Thus, it arrange | positions so that it may spread along the bottom part inner surface of the said vaporization part 2. FIG.

  An encircling wall 9 that encloses the lower portion is provided at the lower portion of the vaporizing unit 2. Room temperature air is passed through the surrounding wall 9 so as to heat and vaporize the liquid ozone provided to the bottom of the vaporizing unit 2. The heating method may be, for example, heating with a heater or the like.

  Above the lower part in the vaporization part 2, the filler 20 which enables passage of the high concentration concentrated ozone (high concentration ozone gas) produced | generated by vaporization is filled. Here, the filler 20 is a wire mesh filler, but may be, for example, a metal corrugated filler, silica gel, porous silica, or the like. Any filler may be used. In addition, the wire mesh filler 20 in the vaporization part 2 is comprised more roughly than the wire mesh filler 8 in the liquid seal piping 6. FIG. Incidentally, when many silica gels and porous silica are filled in both the liquid seal pipe 6 and the vaporization part 2, it is preferable to fill the vaporization part 2 with silica gel or porous silica larger than that in the liquid seal pipe 6. .

  As shown in FIG. 1, a high-concentration ozone gas pipe 11 having a valve V1 is connected to the outlet 2b of the vaporizing section 2, and a valve V2 and an ozone killer 13 are disposed upstream of the valve V1 of the high-concentration ozone gas pipe 11. Is connected. The high-concentration ozone gas pipe 11 is for supplying the high-concentration ozone gas generated in the vaporization unit 2 to the subsequent stage, and the exhaust pipe 12 is for decomposing the excessive high-concentration ozone gas into oxygen by the ozone killer 13 and releasing it to the atmosphere. belongs to.

  And from the cooling part 4x of the cooling means 1, the part on the cooling part 4x side in the introduction pipe 3, the part on the cooling part 4x side in the gas pipe 5, the liquid seal pipe 6, the vaporizing part 2, and the valve V1 in the high-concentration ozone gas pipe 11 The portion on the vaporization unit 2 side is housed in a container 14, and the container 14 is a vacuum heat insulating container whose inside is evacuated by driving a vacuum pump 15.

  The high-concentration ozone gas pipe 11 and the gas pipe 5 in the vacuum heat insulating container 14 are pressures that release the pressure in the pipe when the pressure becomes a set pressure or higher according to the pressure increase in the pipe when ozone decomposition occurs. Open valves 16 and 17 are respectively provided. Here, safety valves are used as the pressure release valves 16 and 17, but a release valve or the like that partially breaks and releases the pressure when the pressure becomes higher than the set pressure according to the pressure increase in the pipe may be used. . In the unlikely event that all of the liquid ozone is decomposed by ozone and the pressure release valves 16 and 17 release the pressure into the vacuum insulation container 14, the vacuum insulation container is set so that the pressure in the piping is equal to or lower than the supply pressure of the ozone gas. The volume of the gap in 14 is set.

  According to the high-concentration ozone gas generating apparatus 200 configured as described above, ozone gas is generated by the ozonizer 10 based on oxygen or air, and this ozone gas is introduced into the ozone concentrating apparatus 100 through the introduction pipe 3 to cool the cooling means 1. It is cooled to a very low temperature in the part 4x. This ozone gas is separated into liquid ozone and a non-condensable gas mainly composed of oxygen in the vicinity of the outlet 3b of the cooling pipe 3c, and the non-condensed gas is returned to the ozonizer 10 through the gas pipe 5 to be used for generating ozone gas. On the other hand, liquid ozone flows into the liquid seal pipe 6.

  The liquid ozone that has flowed into the liquid seal pipe 6 proceeds to the vaporization section 2 side by the capillary force of the filler 8 in the liquid seal pipe 6. Here, the separation boundary surface 7 between the liquid ozone and the non-condensable gas is located in the liquid seal pipe 6 and slightly below the outlet 3b of the introduction pipe 3, while the liquid surface on the vaporization part 2 side of the liquid ozone. Is at a position below the inlet 2a because the inlet 2a of the vaporizing section 2 is at a height higher than the separation boundary surface 7.

  The liquid ozone in the liquid seal pipe 6 further travels along the filler 8 by capillary force, and is well guided into the bottom of the vaporization section 2 through the inlet 2a. The liquid ozone that has entered the bottom of the vaporizing unit 2 through the filler 8 is vaporized before being accumulated in the bottom of the vaporizing unit 2 by heating with room temperature air to generate high-concentration ozone gas. Passes through the filler 20 and is discharged from the outlet 2b.

  And in this embodiment, the high concentration ozone gas whose volume ratio of ozone is near 100% is produced | generated. This high-concentration ozone gas is flowed to the high-concentration ozone gas pipe 11 when it is used in the latter stage, while the excess high-concentration ozone gas is flowed to the exhaust pipe 12 and decomposed into oxygen by the ozone killer 13 and then released to the atmosphere. The

  As described above, in the ozone concentrator 100 according to the present embodiment, the separation boundary surface 7 between the liquid ozone and the non-condensable gas and the vaporization unit 2 are connected only by the liquid sealing pipe 6 that enables liquid sealing. Liquid ozone is present in the liquid seal pipe 6 and the separation boundary surface 7 is located in the liquid seal pipe 6. For this reason, the amount of liquid ozone is greatly reduced as compared with the prior art. Therefore, even if ozone decomposition occurs in the vaporization section 2, the amount of liquid ozone vaporization is greatly reduced, chained ozone decomposition is suppressed, and there is no possibility of damage to the apparatus.

  Further, since the liquid sealing pipe 6 is filled with the filler 8 that develops the capillary force, the liquid ozone is well guided to the vaporization unit 2 by the capillary force of the filler 8 and is vaporized. Even if ozonolysis occurs in the part 2, the generated heat is absorbed by the heat capacity of the filler 8 in the liquid seal pipe 6 and the amount of liquid ozone is further reduced by the filler 8. Further, chain ozone decomposition due to vaporization of liquid ozone is further suppressed, and the possibility of damage to the apparatus is further eliminated.

  Further, since the inlet 2a of the vaporizing section 2 is at a height higher than the separation boundary surface 7 and the upper end of the filler 8 enters the inside through the inlet 2a of the vaporizing section 2, the liquid ozone vaporizes. Without entering the portion 2, it enters the vaporizing portion 2 by the capillary force of the filler 8 and vaporizes well. Thus, since the liquid ozone in the vaporizing portion 2 is extremely small, the vaporizing portion 2 Even if ozonolysis occurs, chain ozonolysis due to vaporization of liquid ozone is further suppressed, and the possibility of damage to the apparatus is further eliminated.

  In addition, since the vaporizing unit 2 is filled with the filler 20 that allows the passage of concentrated ozone, even if ozone decomposition occurs in the vaporizing unit 2, the generated heat is filled in the vaporizing unit 2. It is absorbed by the heat capacity of the material 20. For this reason, chain | strand ozonolysis of the concentrated ozone in the vaporization part 2 is suppressed, and the possibility of damage of an apparatus is further eliminated.

  In addition, since the liquid sealing pipe 6 is cooled by the cooling means 1, even if ozone decomposition occurs in the vaporization section 2, the generated heat is cooled by the cooling means 1 in the liquid sealing pipe 6. For this reason, the chain | strand ozonolysis by vaporization of liquid ozone is suppressed further, and the possibility of damage of an apparatus is further eliminated. In addition, if bubbles are generated due to the vaporization of liquid ozone in the liquid seal pipe 6, the capillary action of the filler 8 may be interrupted. However, since the liquid seal pipe 6 is cooled by the cooling means 1, the generation of bubbles is suppressed. Capillary action is supposed to work reliably.

  In addition, the cooling unit 4x, the liquid sealing pipe 6, the vaporization unit 2, and the pressure release valves 16 and 17 are accommodated in the vacuum heat insulating container 14, and all of the liquid ozone should be decomposed by ozone and the pressure release valves 16 and 17 are pressurized. Since the volume of the gap in the vacuum heat insulation container 14 is set so that the pressure in the pipe is equal to or lower than the supply pressure of the ozone gas when the gas is opened in the vacuum heat insulation container 14, the gas pressure during ozone decomposition is The pressure relief valves 16 and 17 are opened to the gaps in the vacuum heat insulating container 14 through the pressure relief valves 16 and 17, and the possibility of damage to the apparatus is further eliminated. Moreover, the cooling by the cooling means 1 and the heating in the vaporization part 2 are efficiently performed by the vacuum heat insulation state 14.

  Furthermore, the cooling pipe 3c, which is an ozone flow path that is cooled by the cooling section 4x of the cooling means 1 and connected to the liquid seal pipe 6, is inclined downward toward the connection section with the liquid seal pipe 6, that is, toward the outlet 3b. Therefore, liquid ozone is prevented from being stored in the flow path, and the possibility of damage to the apparatus is further eliminated.

  In the present embodiment, it goes without saying that ozonolysis by a trigger other than the ozonolysis in the vaporization unit 2 is also suppressed.

[Second Embodiment]
FIG. 3 is a schematic configuration diagram illustrating a high-concentration ozone gas generation apparatus including an ozone concentrator according to the second embodiment of the present invention. The second embodiment is different from the first embodiment in that a discharge pipe (discharge port) 21 for taking out ozone gas in the introduction pipe 3 is provided on the cooling pipe 3c. The discharge pipe 21 is provided in the latter half of the cooling pipe 3c, and is connected to the gas pipe 5 through a valve V5. The pressure chamber 22 is connected to the discharge pipe 21. Further, as the discharge pipe 21 is provided, a vacuum pump P is provided downstream from the connection destination of the gas pipe 5 with the discharge pipe 21, and a valve V4 is provided upstream from the connection destination. A valve V3 is provided upstream of the cooling pipe 3c of the introduction pipe 3.

  According to the second embodiment, in consideration of ozone decomposition, the liquid ozone liquid level on the inlet side (separation boundary surface 7 side) of the liquid seal pipe 6 is not more than a specified level (preventing abnormal storage). In this case, the normally closed valve V5 is opened, the vacuum pump P is driven, and the valve V3 is further closed. Then, the ozone gas in the introduction pipe 3 is directly taken out from the discharge pipe 21 and guided to the ozonizer 10, and the ozone gas in the cooling pipe 3 c decreases from the ozonizer 10. Therefore, compared with the case where the liquid level is adjusted by adjusting the discharge voltage of the ozonizer 10 or adjusting the flow rate of the raw material gas, the adjustment time lag is reduced, and liquid ozone is stored more than specified at the inlet side of the pipe 6 (abnormal storage). It is definitely prevented.

  The ozone gas in the vicinity of the outlet 3b is in the stage immediately before liquefaction because the cooling is sufficiently advanced. The ozone gas in the stage immediately before liquefaction is discharged by the discharge pipe 21 provided in the latter half of the cooling pipe 3c. The high-concentration ozone gas immediately before liquefaction is directly taken out. As a result, the adjustment time lag is further reduced, and liquid ozone is more reliably prevented from being stored more than a predetermined amount on the inlet side of the pipe 6.

  Further, since the inside of the introduction pipe 3 is depressurized by the suction of the vacuum pump P, the liquefied ozone is vaporized and discharged, the adjustment time lag is further reduced, and the liquid ozone at the inlet side of the pipe 6 exceeds the specified level. Accumulation is prevented more reliably.

  Further, in the present embodiment, the pressure chamber 22 is connected to the discharge pipe 21, and even when the volume of the discharge pipe 21 is small, the pressure chamber 22 secures a certain volume. Sudden pressure fluctuations are prevented. In normal times, if the cooling pipe 3c is cooled with the vacuum pump P driven, the oxygen gas density at the time of condensation decreases and the oxygen concentration dissolved in the liquid ozone decreases. Oxygen dissolution in liquid ozone is prevented, and ozonolysis triggered by bubble burst in liquid ozone is prevented.

  As described above, the present invention has been specifically described based on the embodiment. However, the present invention is not limited to the above embodiment. Although the liquid ozone is not stored, the present invention can be applied to a structure in which liquid ozone is stored somewhat.

  Moreover, although the discharge piping 21 is made into one, two or more may be sufficient.

It is a schematic block diagram which shows the high concentration ozone gas production | generation apparatus provided with the ozone concentration apparatus which concerns on the 1st Embodiment of this invention. It is a schematic block diagram which shows the cooling part, liquid sealing piping, and vaporization part of the ozone concentration apparatus in FIG. It is a schematic block diagram which shows the high concentration ozone gas production | generation apparatus provided with the ozone concentration apparatus which concerns on the 2nd Embodiment of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Cooling means, 2 ... Vaporization part, 2a ... Inlet of vaporization part, 3a ... Inlet, 3b ... Outlet, 3c ... Cooling pipe (ozone flow path), 4x ... Cooling part, 6 ... Liquid seal piping (pipe), DESCRIPTION OF SYMBOLS 7 ... Separation interface, 8 ... Filler in piping, 10 ... Ozonizer, 14 ... Vacuum insulation container, 16, 17 ... Safety valve (pressure release valve), 20 ... Filler in vaporization part, 21 ... Discharge piping (discharge port) ), 100 ... ozone concentrator, 200 ... high-concentration ozone gas generator.

Claims (7)

Cooling means for cooling the ozone gas generated by the ozonizer to a temperature below the boiling point of ozone and separating it into liquid ozone and non-condensable gas;
A vaporization unit that heats and vaporizes liquid ozone separated by the cooling means to obtain concentrated ozone, and
From the separation boundary surface between the liquid ozone and the non-condensable gas to the vaporization part, connected only by piping enabling liquid sealing ,
The piping is filled with a filler that develops capillary force,
The cooling means includes a refrigerator, and a cooling unit that is attached to the refrigerator and cools the ozone gas,
The ozone concentrating device according to claim 1, wherein the cooling unit extends to the vaporization unit side and covers the piping, whereby the piping is cooled by the cooling means . The inlet of the vaporization part is at a height higher than the separation boundary surface;
The ozone concentrator according to claim 1 , wherein an upper end of the filler enters the inside through the inlet of the vaporization unit. The ozone concentrating device according to claim 1 or 2 , wherein the vaporizing section is filled with a filler that allows passage of concentrated ozone. The cooling part of the cooling unit, the pipes, the vaporizing part is housed in the vacuum heat insulating vessel,
Any one of the preceding claims, characterized in that the ozonolysis is provided with a pressure release valve for releasing the pressure in the pipe in the vacuum adiabatic vessel in accordance with the pressure rise in said pipe when the resulting The ozone concentrator according to one item. Any wherein the flow path of the ozone is cooled is connected to the pipe by the cooling part of the cooling means, according to claim 1 to 4 that is characterized in that there is a downward slope toward the connecting portion between the pipe The ozone concentrator according to claim 1. The flow path of the ozone is cooled is connected to the pipe by the cooling part of the cooling means, to any one of claims 1 to 5, characterized by providing the outlet 1 or more for retrieving the ozone gas The ozone concentrator described. The ozone concentrator according to claim 6 , wherein the discharge port is provided in the latter half of the ozone flow path.

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