CN108211542A - A kind of novel separated type gas purifier - Google Patents

A kind of novel separated type gas purifier Download PDF

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Publication number
CN108211542A
CN108211542A CN201810138786.1A CN201810138786A CN108211542A CN 108211542 A CN108211542 A CN 108211542A CN 201810138786 A CN201810138786 A CN 201810138786A CN 108211542 A CN108211542 A CN 108211542A
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China
Prior art keywords
filter element
gas
element shell
filter
filler
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CN201810138786.1A
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Inventor
叶向荣
陈刚
刘华平
张广第
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Zhejiang Britech Co Ltd
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Zhejiang Britech Co Ltd
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Priority to CN201810138786.1A priority Critical patent/CN108211542A/en
Publication of CN108211542A publication Critical patent/CN108211542A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/30—Particle separators, e.g. dust precipitators, using loose filtering material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/26—Drying gases or vapours
    • B01D53/28—Selection of materials for use as drying agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/864—Removing carbon monoxide or hydrocarbons
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/86—Catalytic processes
    • B01D53/8671—Removing components of defined structure not provided for in B01D53/8603 - B01D53/8668
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/102—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/104—Alumina
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B01D2253/108—Zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/116—Molecular sieves other than zeolites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B01D2255/102—Platinum group metals
    • B01D2255/1023—Palladium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/10—Noble metals or compounds thereof
    • B01D2255/102—Platinum group metals
    • B01D2255/1025—Rhodium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/202—Alkali metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20738—Iron
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/20—Metals or compounds thereof
    • B01D2255/207—Transition metals
    • B01D2255/20746—Cobalt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
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    • B01D2255/20753—Nickel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
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    • B01D2255/70—Non-metallic catalysts, additives or dopants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2255/00—Catalysts
    • B01D2255/70—Non-metallic catalysts, additives or dopants
    • B01D2255/702—Carbon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/502—Carbon monoxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/50—Carbon oxides
    • B01D2257/504—Carbon dioxide
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2

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  • Chemical & Material Sciences (AREA)
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  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Environmental & Geological Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

The present invention relates to a kind of novel separated type gas purifiers, and including filler housing and filter element shell, two housings are connected with connector.At least one filler is provided in the filler housing, the filler housing is provided at both ends with inlet and outlet, and the filler housing is provided with strainer close to the gas feed and the port of export；The filter element shell is provided at both ends with inlet and outlet；The filter element shell is provided with end socket and flange close to the gas outlet, it is fluted close to the gas outlet end setting in the filter element shell, gasket is provided in the groove, at least one mounting hole is provided on the gasket, filter core is provided in the mounting hole.

Description

A kind of novel separated type gas purifier
Technical field
The present invention relates to a kind of purifier, more particularly to a kind of novel separation that can remove trace impurity in electronic gas Formula gas purifier.
Background technology
For the hi-tech industries such as microelectronics, semiconductor, electronic gas is indispensable unstripped gas or technique Gas.Photovoltaic is fabricated onto from super large-scale integration, the micro-electromechanical industry of lighting LED industry again till now, All using semiconductor technology as the manufacturing process of product, including vapour phase epitaxy, oxidation uses a large amount of electronic gas.
The purity of electronic gas and the performance of photoelectron original paper device determine semiconductor to device performance, price or so half The cost of competition of conductor and photoelectron element.Trace impurity even in electronic gas（Such as O2、H2O、CO2, CO etc.） It can lead to product defects, seriously affect properties of product and yield rate.
In electronics industry, it is often necessary to chemical gas（Arsenic hydride, hydrogen, hydrogen phosphide, silane etc.）, inert gas (nitrogen, Neon, methane, argon gas etc.), corrosive gas (chlorine, fluorine gas, hydrogen chloride, ammonia, boron trifluoride, silicon tetrachloride etc.), and It needs these gases that there is " ultra-high purity ", especially needs that there is the oxygen gas and water of rudimentary content, carbon dioxide, carbon monoxide Wait impurity.
In recent years, developed country is in actively research and development electronic gas purification technique, use end to the electronic gas of 5N into Row site purifying not only effectively removes the trace impurity of electronic gas, and electronic gas purity is made to be increased to ppb, ppt by ppm grades Grade.
Carrea discloses a kind of dual stage process in U.S. Patent No. 5,902,561, is used in environment temperature (0 DEG C to 60 DEG C) under from inert gas remove the miscellaneous of such as carbon monoxide, carbon dioxide, oxygen gas and water, hydrogen and methane etc Matter.In the first phase, inert gas is made to be contacted with Raney nickel, and in second stage, inert gas is made to pass through gas collection agent Alloy.The purified gas of second stage contains the impurity less than part per billion (ppb) content.
However, current gas purifier is generally single material filling type, single filer element type or filler and cartridge combination formula.It is single One material filling type or filter cartridge type filter filter efficiency are relatively low.Filter core and filler are mounted on one by filler and cartridge combination formula filter In a housing, filter core can only be disposable, the filter core of blocking cannot take out at any time replace purifier service life it is relatively low；Separately Outside, there are one filter cores, not using composite filter element, filter efficiency substantially reduces.
Invention content
The present invention in view of the deficiencies of the prior art, provides a kind of structure higher, and purification efficiency higher is dismantled and can be grasped The property made is more convenient, can recycle, the filter of environmental protection.
In order to solve the above technical problems, the technical solution adopted by the present invention is：
A kind of novel separated type pneumatic filter, including filler housing and filter element shell, two housings are connected with connector.It is described to fill out Filler is provided in material shell body, the filler housing is provided at both ends with inlet and outlet, and the filler housing is close to the gas Body inlet and outlet is provided with strainer；The filter element shell is provided at both ends with inlet and outlet；The filter element shell is close to institute The gas outlet stated is provided with end socket and flange, is provided in the filter element shell close to the gas outlet end recessed Slot is provided with gasket in the groove, at least one mounting hole is provided on the gasket, is set in the mounting hole There is filter core.
The gas purifier of the present invention is characterized in that filler and filter core belong to different housings, has high temperature resistant, resistance to Burn into purification depth is high, service life is long, can regenerate, and has powerful adsorption capacity, can control and high-purity gas in Trace impurity, after purification, impurity in gas（Oxygen, carbon dioxide, water, carbon monoxide, methane etc.）Subitem content be less than 1ppb。
3.1 purifier housings（Including filler housing and filter element shell）
Seamless welding is used for the housing of the purifier of the present invention, inner wall passes through electrochemical polish.It can for different conditions Select stainless steel（316L、304L、347、430）, Hastelloy (c-276, c-22, X, N, B, B2) or nickel Lip river ferroalloy （600、625、690）Or titanium alloy 20 etc..The preferred 316L stainless steels of purifier material and Hastelloy of the present invention.
Electropolishing VCR gasket seals, threaded connection are used for the purifier inlet and outlet interface of the present invention.
For preferred 2-10 centimetres of the diameter of the housing of the novel purifier of the present invention.
For novel preferred 10-30 centimetres of the purifier shell length of the present invention.
For novel preferred 0.3175-2.54 centimetres of the purifier gas inlet and outlet size of the present invention.
3.2 strainer
For the present invention strainer for network, airtight and watertight padding.
For the preferred 316L stainless steels of strainer material of the present invention.
For the preferred 50-200 mesh of strainer of the present invention.
3.4 filler
For the micro big molecular impurity in the filling adsorption high-purity gas of the present invention.
Filler is various adsorbents and metal, nonmetal oxide class adsorbent using carbonaceous as raw material, preferably aluminium oxide, Activated carbon, molecular sieve, oxygen absorbent, carbon dioxide removal or carbon monoxide agent.
(1) aluminium oxide
It is a kind of adsorbent to minor amount of water depth drying, preferably gama-alumina for aluminium oxide of the present invention.
(2) activated carbon
There is flourishing effective apearture for the activated carbon of the present invention, in, macropore proportion it is few, it is high mechanical properties, high apparent Density, low ash.
For the preferred super-activated carbon of activated carbon of the present invention.
(3) molecular sieve
There is uniform micropore for the molecular sieve of the present invention, aperture is suitable with general molecular size, and there is selection to adsorb, is dry Dry degree height, high stability, power of regeneration is strong, intensity is high, the advantages that not losing powder.It is very severe in low partial pressure or low concentration, high temperature etc. Still there is very high adsorption capacity under conditions of quarter.
For the preferred 3A types of molecular sieve, 4A types, 13XAPG of the present invention.
(4) oxygen absorbent
It is absorption deoxygenation and chemical deoxidization to remove oxygen method in unstripped gas for the present invention.
It adsorbs deoxygenation and micro oxygen is removed to the suction-operated of oxygen using porous mass.Oxygen absorbent can select to improve Zeolite molecular sieve, nonpolar carbon molecular sieve, molecular sieve carried compound oxygen absorbent etc..Preferred molecular sieve loads compound oxygen absorbent.
Chemical deoxidization mainly using catalytic hydrogenation, using the oxide-based reducing agent that appraises at the current rate, oxidation catalyst filter technology, without hydrogen catalysis The methods of.This method of deoxidation adds H in inert gas or inert gas2In the environment of carry out.For the chemical oxygen uptake of the present invention The preferred metal oxygen absorbent of agent.
(5) carbon dioxide, absorbent for carbon monooxide
Carbon dioxide, absorbent for carbon monooxide for the present invention can select the oxide catalyst of Metal Supported.These are urged Carbon dioxide or carbon monoxide in agent absorption high-purity gas, rapid methanation reach purification purpose.This kind of catalyst is by living Property component and carrier composition, active component refer generally to VIII race's element of the generally periodic table of elements, such as iron, cobalt, rubidium, nickel, palladium, The metals such as rhodium；Carrier can make the dispersion of active component evenly so that and active component is maximumlly contacted with reactant, from And improve the catalytic effect of catalyst.The preferred Al of carrier2O3, carbon nanotube, TiO2、ZrO2, sepiolite etc..
3.5 filter core
There is the microcellular structure of medium retention for the filter core of the present invention, allow import high-purity gas in smaller pressure, relatively low Flow status under can pass through.The powder of the micro small molecular weight impurity and filler in gas is retained, finally obtains ultra-high purity Gas（The subitem content of various impurity gas<1ppb）.
The available filter core material of the present invention can select 304L, 310,316L, 347 and 430 stainless steels；Hastelloy； Inconel 600,625 and 690；Monel metal etc..Metal filtering core property is stablized, with preferable anti-friction performance, very Service life easy to clean is long, does not need to frequently replace.Filter core using 316L stainless steels as material can be 350- in temperature It is used under the conditions of 560 DEG C；Filter core using monel metal as material uses at being 560-1000 DEG C in temperature；With nickel, breathe out Family name's alloy, monel metal have preferable corrosion resistance for the filter core of material.The preferred 316L of filter core material of the present invention is not Become rusty steel, Hastelloy.
Filter core diameter can select 1/4 inch（0.635 centimetre）, 1/2 inch（1.27 centimetre）, 1 inch（2.54 centimetre）、 3/2 inch（3.81 centimetre）, 2 inches（5.08 centimetre）, 5/2 inch（6.35 centimetre）, 11/4 inch（6.985 centimetre）, 3 inches （7.62 centimetre）.More preferable 1/2 inch（1.27 centimetre）, 1 inch（2.54 centimetre）, 3/2 inch（3.81 centimetre）.
Entire filter element shell, preferred 10-30 centimetres of length are full of for the filter core of the present invention.
The filtering accuracy of filter core of the present invention is 0.001-0.008 microns preferred.
Filter core for the present invention can regenerate after using saturation.
The preferably single filter core of filter core combination and multiple filter core combined types.
3.6 gasket
Filter core is fixed for the gasket of the present invention, filter core is directly connected on gasket, increases the operability of filter.Gasket It is inserted into the groove of housing, strengthens its fastness.
The preferred 316L stainless steels of gasket material.
The combination preferred weld of gasket and filter core is threadedly coupled.
3.7 end sockets and flange
It works for the end socket and flange of the present invention as airtight and watertight padding and gasket easy to disassemble and filter core.End socket and flange material It is identical with purifier shell material.
3.8 operating condition
(1) gas flow rate
For the preferred 0.3-50 standard liter/mins of unstrpped gas inlet velocity of the present invention, when flow velocity is more than 100 standard liters per minutes Zhong Shi, the service life of purifier can reduce.
(2) operation temperature
Purifier for the present invention can use at normal temperatures, can also select to use in a heated condition, this purifier institute The maximum temperature that can be born is 450 DEG C.Excessively high temperature in use can reduce the service life of purifier.
(3) operating pressure
For the preferred 0.1MPa-10MPa of purifier import operation pressure of the present invention.
4 advantages of the present invention
Compared with prior art, the invention has the advantages that：
1st, simple in structure, easy to operate, filler and filter core are arranged in two housings, and two housings are connected using connector, are had very Good practicability and operability；
2nd, housing uses electropolishing, increases the cleanliness factor of entire filter.
3rd, in the gas feed of filler housing and port of export setting strainer, airtight and watertight padding.
4th, filter core is full of entire filter element shell, increases the purification efficiency of entire filter.
5th, filter core is connected on gasket, and gasket is fixed in the groove of housing, increases the operability of entire purifier.
6th, end socket and flange are set in filter element shell gas outlet end, the filter core and gasket of saturation can be convenient for changing, increase Add the service life of purifier.
7th, purification efficiency is high, the subitem content of impurity in gas after purification<1ppb.
8th, the filter core and filler replaced can recycle after regeneration treatment, save, environmental protection.
5 description of the drawings
Fig. 1 is gas purifier of the present invention（A kind of filler, a filter core）Structure diagram
Fig. 2 is purifier of the present invention（A variety of fillers, a filter core）Structure diagram.
Fig. 3 is purifier of the present invention（A kind of filler, multiple filter cores）Structure diagram.
Fig. 4 is purifier of the present invention（A variety of fillers, multiple filter cores）Structure diagram.
In figure, filler housing gas feed 1, strainer 2, filler housing 3, filler 4, filler housing gas vent 5, connector 6, Filter element shell gas feed 7, filter element shell 8, filter core 9, gasket 10, groove 11, mounting hole 12, flange 13, end socket 14, filter-core shell Body gas vent 15.
6 specific embodiments
A kind of novel separated type pneumatic filter, including filler housing 3 and filter element shell 8, two housing connectors 6 connect.Institute It states and filler 4 is provided in filler housing, the filler housing is provided at both ends with import 1 and outlet 5, and the filler housing is close to institute The gas feed 1 and 5 ends of outlet stated are provided with strainer 2；The filter element shell is provided at both ends with import 7 and outlet 15；The filter Core shell body is provided at both ends with end socket 14 and flange 13, is provided in the filter element shell close to the gas outlet end 15 recessed Slot 11 is provided with gasket 10 in the groove, at least one mounting hole 12, the mounting hole is provided on the gasket In be provided with filter core 9.
Workflow：Purified electronic gas passes through filler housing gas feed 1, into filler housing housing 3, into Row purifying, filler 4 adsorb the micro big molecular impurity contained in high-purity gas；Then gas is certain by having in filter element shell After the filter core 9 of precision, small molecule trace impurity and filler powder are blocked, and ultra-pure gas is flowed out by filter core 9, from And reach required ultra-pure gases.
Below in conjunction with attached drawing and specific example, the present invention is described in further detail, but the present invention be not limited in it is described Embodiment.
Embodiment 1
A kind of novel separated type pneumatic filter, including filler housing 3（3 centimetres of diameter, 10 centimetres of length, material electrochemistry are thrown Light 316L）With filter element shell 8（3 centimetres of diameter, 10 centimetres of length, material electrochemical polish 316L）, two housing connectors 6 (material electrochemical polish 316L) is connected.Filler 4 (3A molecular sieves compound adsorbent) is provided in the filler housing, it is described to fill out Material shell body is provided at both ends with import 1 and outlet 5, and the filler housing is provided with filter close to the gas feed 1 and 5 ends of outlet Net 2（Material electrochemical polish 316L, 300 mesh）；The filter element shell is provided at both ends with import 7 and outlet 15；The filter-core shell Body is provided with end socket 14 close to gas outlet end 15（Material electrochemical polish 316L）And flange 13（Material electrochemical polish 316L）, fluted 11 are set close to the gas outlet end 15 in the filter element shell, and pad is provided in the groove Piece 10（Material 316L）, on the gasket setting be provided with filter core 9 [saes] in the mounting hole there are one mounting hole 12 Company, material 316L stainless steels, 1/2 inch（1.27 centimetre）, 10 centimetres of length, 0.004 micron of filtering accuracy].The novel pure Change device for purification for gas, before gas treatment, impurity content is in more than 10ppm, after the gas purifier, impurity content drop To below 1ppb.
Embodiment 2
A kind of novel separated type pneumatic filter, including filler housing 3（4 centimetres of diameter, 15 centimetres of length, material electrochemistry are thrown Light 316L stainless steels）With filter element shell 8（4 centimetres of diameter, 15 centimetres of length, material electrochemical polish 304L stainless steels）, two Housing is connected with connector 6 (material electrochemical polish 316L stainless steels).A kind of filler 4 (activity is provided in the filler housing Charcoal compound adsorbent), the filler housing be provided at both ends with import 1 and outlet 5, the filler housing close to the gas into Mouth 1 and 5 ends of outlet are provided with strainer 2（Material 316L, 400 mesh）；The filter element shell is provided at both ends with import 7 and outlet 15； The filter element shell is provided with end socket 14 close to gas outlet end 15（Material electrochemical polish 316L stainless steels）And flange 13（Material Matter electrochemical polish 304L stainless steels）, fluted 11 are set close to the gas outlet end 15 in the filter element shell, institute Gasket 10 is provided in the groove stated（Material VCR）, 6 mounting holes 12 are provided on the gasket, in the mounting hole Be provided with filter core 9 [MOLL companies, material nickel, Hastelloy, 1/4 inch（0.635 centimetre）, 15 centimetres of length, filtering accuracy 0.003 micron].The novel purifier is used for purification for gas, and before gas treatment, impurity content is in more than 5ppm, by the gas After purifier, impurity content is down to below 1ppb.
Embodiment 3
A kind of novel separated type pneumatic filter, including filler housing 3（6 centimetres of diameter, 20 centimetres of length, material nickel, Kazakhstan are closed Golden c -276）With filter element shell 8（6 centimetres of diameter, 20 centimetres of length, material nickel, Hastelloy c -276）, two housings use Connector 6 (material nickel, Hastelloy c -276) connects.In the filler housing setting there are two types of filler 4 (molecular sieve 13XAPG, Active carbon compound adsorbent), the filler housing is provided at both ends with import 1 and outlet 5, and the filler housing is close to the gas Body import 1 and 5 ends of outlet are provided with strainer 2（Material 316L, 500 mesh）；The filter element shell is provided at both ends with import 7 and outlet 15；The filter element shell is provided with end socket 14 close to gas outlet end 15（Material nickel, Hastelloy c -276）And flange 13 （Material nickel, Hastelloy c -276）, fluted 11 are set close to the gas outlet end 15 in the filter element shell, Gasket 10 is provided in the groove（Material VCR）, there are one mounting hole 12, the mounting holes for setting on the gasket In be provided with filter core 9 [PALL companies, material monel metal, 2 inches diameter（5.08 centimetre）, 20 centimetres of length, filtering accuracy 0.002 micron].The novel purifier is used for purification for gas, and before gas treatment, impurity content is in more than 5ppm, by the gas After purifier, impurity content is down to below 1ppb.
Embodiment 4
A kind of novel separated type pneumatic filter, including filler housing 3（8 centimetres of diameter, 25 centimetres of length, material chromium ferronickel close Gold 600）With filter element shell 8（8 centimetres of diameter, 25 centimetres of length, material inconel 600）, two housing connectors 6 (material inconel 600) connects.There are three types of filler 5 (molecular sieve, graphene, activated carbons for setting in the filler housing Compound adsorbent), the filler housing is provided at both ends with import 1 and outlet 5, and the filler housing is close to the gas feed 1 is provided with strainer 2 with 5 ends of outlet（Material 316L, 600 mesh）；The filter element shell is provided at both ends with import 7 and outlet 15；Institute It states filter element shell and gas outlet end 15 is provided with end socket 14（Material inconel 600）And flange 13（Material chromium nickel Ferroalloy 600）, fluted 11 are set close to the gas outlet end 15 in the filter element shell, in the groove It is provided with gasket 10（Material VCR）, 6 mounting holes 12 are provided on the gasket, and filter core is provided in the mounting hole 11 [PALL companies, material titanium, 1/2 inch（1.37 centimetre）, 25 centimetres of length, 0.003 micron of filtering accuracy].The novel purifying Device is used for purification for gas, and before gas treatment, impurity content is in more than 5ppm, and after the gas purifier, impurity content is down to Below 1ppb.

Claims (10)

1. a kind of novel separated type pneumatic filter, it is characterised in that:Including filler housing 3 and filter element shell 8, two housings are used Connector 6 connects, and filler 4 is provided in the filler housing, the filler housing is provided at both ends with import 1 and outlet 5, described to fill out Material shell body is provided with strainer 2 close to the gas feed and the port of export；The filter element shell is provided at both ends with import 7 and outlet 15；The filter element shell is provided at both ends with end socket 14 and flange 13, close to the gas outlet end in the filter element shell Fluted 11 are set, gasket 10 is provided in the groove 11, at least one mounting hole 12, institute are provided on the gasket Filter core 9 is provided in the mounting hole 12 stated.
2. new gas purifier according to claim 1, it is characterised in that can control and reduce in electronic gas Micro O2、H2O、CO2、CO、CH4And the impurity such as minute solid particles, the side being combined using chemical reaction and physical absorption Method, after purification, the subitem content of the above-mentioned impurity in unstrpped gas<1ppb.
3. new gas purifier according to claim 1, it is characterised in that setting filler housing and filter element shell, two Housing is connected using connector.
4. new gas purifier according to claim 1, it is characterised in that filler housing and filter element shell air inlet and A diameter of 1/8 inch of gas outlet（0.3175 centimetre）~1/2 inch（1.27 centimetre）.
5. new gas purifier according to claim 1, it is characterised in that the filler housing and filter element shell it is straight Diameter is 2-10 centimetres, and length is 10-30 centimetres.
6. new gas purifier according to claim 1, it is characterised in that the filter core is full of entire filter element shell, filter Core diameter is 1/4 inch（0.635 centimetre）~10 centimetres, length is 10-30 centimetres.
7. new gas purifier according to claim 1, it is characterised in that the strainer of the filler housing is 50- 200 mesh.
8. new gas purifier according to claim 1, it is characterised in that the filler is using carbonaceous as raw material One or more of various adsorbents and metal, nonmetal oxide class adsorbent.
9. the filter required according to right 1, it is characterised in that the filtering accuracy of filter core selects 0.001-0.05 microns.
10. the filter required according to right 1, it is characterised in that the port of export of filter element shell is provided with end socket and flange.
CN201810138786.1A 2018-02-11 2018-02-11 A kind of novel separated type gas purifier Pending CN108211542A (en)

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Cited By (2)

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Publication number Priority date Publication date Assignee Title
CN110433586A (en) * 2019-08-29 2019-11-12 飞潮(上海)环境技术有限公司 A kind of capsule-type pneumatic filter
CN114307516A (en) * 2021-12-30 2022-04-12 老肯医疗科技股份有限公司 A processing apparatus that is arranged in scope to wash workstation disinfectant liquid volatile gas

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US7132007B1 (en) * 2003-04-17 2006-11-07 BLüCHER GMBH Air filter unit with several filter elements
CN103386238A (en) * 2012-05-11 2013-11-13 中国科学院理化技术研究所 Oil removing device for purifying gas
CN103816787A (en) * 2012-11-19 2014-05-28 刘祥林 Gas purifier
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CN105498373A (en) * 2015-11-25 2016-04-20 北京有色金属研究总院 A method of monitoring a service lifetime of a gas purifier and a device thereof
CN205323397U (en) * 2016-01-26 2016-06-22 浙江博瑞电子科技有限公司 Gas purifier

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Publication number Priority date Publication date Assignee Title
US7132007B1 (en) * 2003-04-17 2006-11-07 BLüCHER GMBH Air filter unit with several filter elements
CN103386238A (en) * 2012-05-11 2013-11-13 中国科学院理化技术研究所 Oil removing device for purifying gas
CN103816787A (en) * 2012-11-19 2014-05-28 刘祥林 Gas purifier
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CN105498373A (en) * 2015-11-25 2016-04-20 北京有色金属研究总院 A method of monitoring a service lifetime of a gas purifier and a device thereof
CN205323397U (en) * 2016-01-26 2016-06-22 浙江博瑞电子科技有限公司 Gas purifier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110433586A (en) * 2019-08-29 2019-11-12 飞潮(上海)环境技术有限公司 A kind of capsule-type pneumatic filter
CN114307516A (en) * 2021-12-30 2022-04-12 老肯医疗科技股份有限公司 A processing apparatus that is arranged in scope to wash workstation disinfectant liquid volatile gas

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