CN103803787A - 基板分断装置 - Google Patents

基板分断装置 Download PDF

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Publication number
CN103803787A
CN103803787A CN201310437088.9A CN201310437088A CN103803787A CN 103803787 A CN103803787 A CN 103803787A CN 201310437088 A CN201310437088 A CN 201310437088A CN 103803787 A CN103803787 A CN 103803787A
Authority
CN
China
Prior art keywords
substrate
platform
brisement
adsorption plate
absorption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310437088.9A
Other languages
English (en)
Chinese (zh)
Inventor
成尾彻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN103803787A publication Critical patent/CN103803787A/zh
Pending legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/037Controlling or regulating
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
CN201310437088.9A 2012-11-05 2013-09-17 基板分断装置 Pending CN103803787A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012243232A JP2014091652A (ja) 2012-11-05 2012-11-05 基板分断装置
JP2012-243232 2012-11-05

Publications (1)

Publication Number Publication Date
CN103803787A true CN103803787A (zh) 2014-05-21

Family

ID=50701235

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310437088.9A Pending CN103803787A (zh) 2012-11-05 2013-09-17 基板分断装置

Country Status (4)

Country Link
JP (1) JP2014091652A (ko)
KR (1) KR20140058328A (ko)
CN (1) CN103803787A (ko)
TW (1) TW201418533A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105439436A (zh) * 2014-09-22 2016-03-30 发那科株式会社 牵连解除装置、机器人以及机器人系统
CN107265839A (zh) * 2016-04-07 2017-10-20 塔工程有限公司 划片设备
CN108147062A (zh) * 2016-12-05 2018-06-12 三星钻石工业股份有限公司 输送体、输送装置以及划线系统
CN110405962A (zh) * 2019-07-23 2019-11-05 上海理工大学 自动翻转式半导体解理装置及加工方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6435669B2 (ja) * 2014-07-04 2018-12-12 三星ダイヤモンド工業株式会社 基板加工装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105439436A (zh) * 2014-09-22 2016-03-30 发那科株式会社 牵连解除装置、机器人以及机器人系统
CN105439436B (zh) * 2014-09-22 2020-05-15 发那科株式会社 牵连解除装置、机器人以及机器人系统
CN107265839A (zh) * 2016-04-07 2017-10-20 塔工程有限公司 划片设备
CN107265839B (zh) * 2016-04-07 2021-07-06 塔工程有限公司 划片设备
CN108147062A (zh) * 2016-12-05 2018-06-12 三星钻石工业股份有限公司 输送体、输送装置以及划线系统
CN108147062B (zh) * 2016-12-05 2021-11-30 三星钻石工业股份有限公司 输送体、输送装置以及划线系统
CN110405962A (zh) * 2019-07-23 2019-11-05 上海理工大学 自动翻转式半导体解理装置及加工方法
CN110405962B (zh) * 2019-07-23 2021-11-19 上海理工大学 自动翻转式半导体解理装置及加工方法

Also Published As

Publication number Publication date
TW201418533A (zh) 2014-05-16
KR20140058328A (ko) 2014-05-14
JP2014091652A (ja) 2014-05-19

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20140521