CN103792790B - Photoresist and the thermostatic control system of developer solution - Google Patents
Photoresist and the thermostatic control system of developer solution Download PDFInfo
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- CN103792790B CN103792790B CN201210424510.2A CN201210424510A CN103792790B CN 103792790 B CN103792790 B CN 103792790B CN 201210424510 A CN201210424510 A CN 201210424510A CN 103792790 B CN103792790 B CN 103792790B
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- sleeve pipe
- thermostatted water
- casing joints
- inner tube
- photoresist
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Abstract
The present invention relates to the thermostatic control system of IC and LED industry, a kind of photoresist and developer solution.Including constant temperature water controller, bilayer sleeve assembly and nozzle, wherein bilayer sleeve assembly is provided with two Double layer pipelines, internal layer pipeline one end of each Double layer pipeline is equipped with nozzle, the other end is medicinal liquid entrance, the outer layer pipeline of each Double layer pipeline is interconnected with one end of nozzle homonymy, the other end of two outer layer pipelines and medicinal liquid import homonymy is respectively equipped with thermostatted water entrance II and thermostatted water outlet II, the thermostatted water entrance I of described constant temperature water controller and thermostatted water outlet I exports II and thermostatted water entrance II with the thermostatted water of bilayer sleeve assembly respectively by pipeline and is connected, form thermostatted water loop, internal layer pipeline is immersed in thermostatted water, photoresist and the temperature of developer solution in internal layer pipeline is controlled by heat exchange.The present invention installs simply, and temperature-controlled precision is high, is quick on the draw, can be widely used at IC and LED industry.
Description
Technical field
The present invention relates to the thermostatic control of IC and LED industry, a kind of photoresist and developer solution
System.
Background technology
In IC (integrated circuit) and LED (light emitting diode) industry, need to carry out substantial amounts of photoresist
Coating and development operation, and coating and the development effect of photoresist are had directly by the temperature of photoresist and developer solution
Connect impact.In IC and LED industry, in order to improve product yield, the thickness to photoresist, uniformity and
The uniformity of development has higher requirement.In order to reach this requirement, it is necessary to carrying out photoresist painting
Cover and develop operation time, it is ensured that photoresist and the temperature of developer solution.
Summary of the invention
For the problems referred to above, it is an object of the invention to provide the thermostatic control of a kind of photoresist and developer solution
System.This photoresist makes photoresist and developer solution temperature when shower nozzle sprays with the thermostatic control system of developer solution
Spend constant, and temperature can be adjusted according to technological requirement, thus reduce temperature and to photoresist coating and show
The impact of shadow, reaches to improve the purpose of product yield.
To achieve these goals, the present invention is by the following technical solutions:
A kind of photoresist and the thermostatic control system of developer solution, including constant temperature water controller, bilayer sleeve
Assembly and nozzle, wherein bilayer sleeve assembly is provided with two Double layer pipelines, the inner tube of each Double layer pipeline
One end, road is equipped with nozzle, and the other end is medicinal liquid entrance, the outer layer pipeline of each Double layer pipeline and nozzle
One end of homonymy is interconnected, and the other end of two outer layer pipelines and medicinal liquid import homonymy is respectively equipped with constant temperature
Water inlet II and thermostatted water outlet II, thermostatted water entrance I and the thermostatted water of described constant temperature water controller go out
Mouth I is connected with thermostatted water outlet II and the thermostatted water entrance II of bilayer sleeve assembly respectively by pipeline, shape
Becoming thermostatted water loop, internal layer pipeline is immersed in thermostatted water, controls photoetching in internal layer pipeline by heat exchange
Glue and the temperature of developer solution.
Described bilayer sleeve assembly include casing joints I, casing joints II, casing joints III and
Two sleeve pipe inner tubes and sleeve pipe outer tube, two of which sleeve pipe inner tube is respectively arranged in two sleeve pipe outer tubes,
Leave gap between described sleeve pipe outer wall of inner tube and the inwall of sleeve pipe outer tube, form two described Double layer pipelines,
Casing joints I and casing joints II are passed through respectively by sleeve pipe inner tube and set in one end of each Double layer pipeline
Pipe outer tube connects, and the other end of two Double layer pipelines is connected by casing joints III, described telescopic joint
Part III is provided with the through hole of through two sleeve pipe outer tubes, on described casing joints I and casing joints II
It is respectively equipped with the thermostatted water entrance II connected with sleeve pipe outer tube and thermostatted water outlet II；Each sleeve pipe inner tube
One end all passes casing joints III and is connected with nozzle, and the other end passes casing joints I respectively
It is medicinal liquid arrival end with casing joints II and this end.
Described casing joints I is identical with casing joints II structure, and it is equipped with shoulder hole, described
Sleeve pipe inner tube is through this shoulder hole and is tightly connected with small diameter bore, the end of the larger diameter end of shoulder hole
Extending axially outwardly formation joint, the internal diameter of described joint is more than the diameter of sleeve pipe inner tube, outside joint
Wall is connected with the inner wall sealing of sleeve pipe outer tube, on the sidewall of described casing joints I and casing joints II
It is respectively equipped with thermostatted water entrance II and thermostatted water outlet II that the larger diameter end with shoulder hole connects.
The small diameter bore end of described shoulder hole is provided with the counterbore of accommodating sealing mechanism, described sealing mechanism bag
Including sealed briquette and sealing ring II, wherein sealing ring II is sheathed in sleeve pipe inner tube and is arranged at counterbore
Bottom, described sealing ring II is compressed by sealed briquette.
Described casing joints III is provided with two shoulder holes, both passes through sleeve pipe inner tube in each shoulder hole,
Each sleeve pipe inner tube all seals with the small diameter bore of shoulder hole and coordinates, bottom the large diameter hole of two shoulder holes
Being mutually communicated and port part extends axially outwardly two joints of formation respectively, the internal diameter of each joint is big
Diameter outer wall in sleeve pipe inner tube are connected with the inner wall sealing of sleeve pipe outer tube.
The smaller diameter end of two shoulder holes on described casing joints III is equipped with counterbore, and described nozzle holds
In being placed in this counterbore and it is connected with sleeve pipe inner tube, is provided with between nozzle and the bottom of counterbore and is sheathed on sleeve pipe
Sealing ring I in inner tube.Described each medicinal liquid entrance point is equipped with valve.
Advantages of the present invention and providing the benefit that:
1. the present invention produces thermostatted water by radiator valve, and thermostatted water circulates in outer layer pipeline, internal layer
Pipeline is photoresist or developer solution, reaches control by carrying out heat exchange between internal layer pipeline and outer layer pipeline
Photoresist processed and the purpose of developer temperatur.
2. the present invention has simple in construction, easy for installation, response time fast, temperature-controlled precision high.
3. the present invention can be by changing photoresist and developer solution outlet temperature to the setting of radiator valve temperature
Degree.
4. the present invention carries out temperature control in photoresist with developer solution flow process, is not take up equipment task time.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the present invention；
Fig. 2 is sleeve pipe and the sealed structure chart of the present invention.
Wherein: 1 is cooling water inlet, 2 is coolant outlet, and 3 is valve I, and 4 is valve II, and 5 are
Casing joints I, 6 is casing joints III, and 7 is casing joints II, and 8 is thermostatted water entrance I, 9
Exporting I for thermostatted water, 10 is constant temperature water controller, and 11 fix seat for shower nozzle, and 12 is sealing ring I,
13 is nozzle, and 14 is thermostatted water entrance II, and 15 is inlet seal seat, and 16 is medicinal liquid entrance I, and 17 are
Exit seal seat, 18 is sealed briquette, and 19 is medicinal liquid entrance II, and 20 is sealing ring II, and 21 is constant temperature
Water out II, 22 is sleeve pipe inner tube, and 23 is sleeve pipe outer tube.
Detailed description of the invention
The present invention is described in detail below in conjunction with the accompanying drawings.
As shown in Figure 1 and Figure 2, the present invention includes constant temperature water controller 10, bilayer sleeve assembly and spray
Mouth 13, wherein said bilayer sleeve assembly includes that casing joints I 5, casing joints II 7, sleeve pipe are even
Fitting III 6 and two sleeve pipe inner tubes 22 and sleeve pipe outer tube 23, two of which sleeve pipe inner tube 22 is respectively provided with
In two sleeve pipe outer tubes 23, between the inwall of sleeve pipe inner tube 22 outer wall and sleeve pipe outer tube 23, leave gap,
Form two Double layer pipelines.One end of each Double layer pipeline is respectively by casing joints I 5 and telescopic joint
Sleeve pipe inner tube 22 and sleeve pipe outer tube 23 are connected by part II 7, and the other end of two Double layer pipelines is by sleeve pipe even
Fitting III 6 connects, and casing joints III 6 is provided with the through hole of through two sleeve pipe outer tubes 23, and sleeve pipe is even
Fitting I 5 be respectively equipped with the thermostatted water entrance II 14 connected with sleeve pipe outer tube 23 on casing joints II 7
II 21 are exported with thermostatted water.The thermostatted water entrance I 8 of constant temperature water controller 10 and thermostatted water outlet I 9
It is connected with thermostatted water outlet II 21 and the thermostatted water entrance II 14 of bilayer sleeve assembly respectively by pipeline, shape
Become thermostatted water loop.One end of each sleeve pipe inner tube 22 all pass casing joints III 6 and respectively with
One nozzle 13 connects, and the other end passes casing joints I 5 and casing joints II 7 and this end respectively
It is respectively medicinal liquid entrance I 16 and medicinal liquid entrance II 19, at medicinal liquid entrance I 16 and medicinal liquid entrance II 19 respectively
It is provided with valve I 3 and valve II 4.Internal layer pipeline is immersed in thermostatted water, controls inner tube by heat exchange
Photoresist and the temperature of developer solution in road.
Described casing joints I 5 is inlet seal seat 15, and casing joints II 7 is exit seal seat 17.
Inlet seal seat 15 is identical with exit seal seat 17 structure, and it is equipped with shoulder hole, sleeve pipe inner tube 22
Through this shoulder hole and being tightly connected with small diameter bore, the end of large diameter hole extends axially outwardly shape
Becoming joint, the internal diameter of described joint is more than the diameter of sleeve pipe inner tube 22, the outer wall of joint and sleeve pipe outer tube 23
Inner wall sealing connect.It is respectively equipped with and ladder on the sidewall of casing joints I 5 and casing joints II 7
The thermostatted water entrance II 14 of the larger diameter end connection in hole and thermostatted water outlet II 21.The minor diameter of each shoulder hole
Bore ends is equipped with the counterbore of accommodating sealing mechanism, and described sealing mechanism includes sealed briquette 18 and sealing ring
II 20, wherein sealing ring II 20 is sheathed in sleeve pipe inner tube 22 and is arranged at the bottom of counterbore, sealing ring
II 20 realize sealing, so by holding the outer wall of sleeve pipe inner tube 22 after sealed briquette 18 compression deformation tightly
Thermostatted water in sleeve pipe inner tube 22 and sleeve pipe outer tube 23 would not spill from the junction with sleeve pipe inner tube 22
Come.
Described casing joints III 6 fixes seat 11 for shower nozzle, which is provided with two shoulder holes, each ladder
Both passing through sleeve pipe inner tube 22 in hole, each sleeve pipe inner tube 22 all seals with the small diameter bore of shoulder hole and coordinates.
The end of two small diameter bore is equipped with counterbore, nozzle 13 be placed in this counterbore and with sleeve pipe inner tube 22
Connect.Sealing ring I 12 is sheathed in sleeve pipe inner tube 22 and is placed in counterbore base, sealing ring I 12
Compressed by nozzle 13.The port part of the larger diameter end of two shoulder holes extends axially outwardly formation respectively
Two joints, the internal diameter of each joint more than the diameter of sleeve pipe inner tube 22 outer wall respectively with two sleeve pipes
The inner wall sealing of outer tube 23 connects.It is mutually communicated bottom the large diameter hole of two shoulder holes, by two sleeve pipes
Outer tube 23 connects, and forms loop.
The work process of the present invention is:
When carrying out certain PROCESS FOR TREATMENT, open constant temperature water controller 10, through constant temperature water controller
10 control the thermostatted water produced, and from thermostatted water outlet I 9 through pipeline, are entered by thermostatted water entrance II 14
Entering casing joints I 5, thermostatted water enters in the gap of sleeve pipe inner tube 22 and sleeve pipe outer tube 23 formation, i.e.
Enter outer layer pipeline.Enter loop by the through hole on casing joints III 6, export II by thermostatted water
21 enter pipeline returns to thermostatted water entrance I 8, enters constant temperature water controller 10, forms closed circuit.
Adjusted by constant temperature water controller 10PID, keep the water temperature in whole circulation to keep constant.Cooling water
Enter from cooling water inlet 1, take away after the heat that heat exchange in constant temperature water controller 10 produces from cooling
Water out 2 is out.When technique needs, open valve I 3, valve II 4, photoresist or developer solution and enter pipe
Road, is entered in sleeve pipe inner tube 22 by medicinal liquid entrance I 16 and medicinal liquid entrance II 19 from pipeline, is immersed in
In thermostatted water, sleeve pipe inner tube 22 separates from casing joints III 6, arrives nozzle 13, according to technique needs
Respective volume the photoresist meeting temperature requirement or developer solution is discharged from nozzle 13.
System work whole during, in thermostatted water in sleeve pipe outer tube 23 and sleeve pipe inner tube 22
Photoresist or developer solution are completely isolated, prevent cross-contamination.This system is in whole photoresist or development
Can carry out heat exchange on the flow path of liquid, the temperature of outlet is consistent with the temperature of thermostatted water, logical
Cross setting change exit photoresist or the temperature of developer solution adjusting thermostatted water control device 10, meet work
Skill requirement.The present invention installs simply, and temperature-controlled precision is high, is quick on the draw, can be extensive at IC and LED industry
Use.
Claims (6)
1. a photoresist and the thermostatic control system of developer solution, it is characterised in that: include thermostatted water control
Device (10), bilayer sleeve assembly and nozzle (13), wherein bilayer sleeve assembly is provided with two bimetallic tubes
Road, internal layer pipeline one end of each Double layer pipeline is equipped with nozzle (13), and the other end is medicinal liquid entrance,
The outer layer pipeline of each Double layer pipeline is interconnected with one end of nozzle (13) homonymy, two outer layer pipelines
It is respectively equipped with thermostatted water entrance II (14) and thermostatted water outlet II (21) with the other end of medicinal liquid import homonymy,
The thermostatted water entrance I (8) of described constant temperature water controller (10) and thermostatted water outlet I (9) are passed through
Pipeline is connected with thermostatted water outlet II (21) and the thermostatted water entrance II (14) of bilayer sleeve assembly respectively,
Forming thermostatted water loop, internal layer pipeline is immersed in thermostatted water, controls light in internal layer pipeline by heat exchange
Photoresist and the temperature of developer solution；
Described bilayer sleeve assembly includes that casing joints I (5), casing joints II (7), sleeve pipe are even
Fitting III (6) and two sleeve pipe inner tubes (22) and sleeve pipe outer tube (23), two of which sleeve pipe inner tube (22)
It is respectively arranged in two sleeve pipe outer tubes (23), described sleeve pipe inner tube (22) outer wall and sleeve pipe outer tube (23)
Inwall between leave gap, form two described Double layer pipelines, one end of each Double layer pipeline leads to respectively
Cross casing joints I (5) and casing joints II (7) by sleeve pipe inner tube (22) and sleeve pipe outer tube (23)
Connecting, the other end of two Double layer pipelines is connected by casing joints III (6), described casing joints
III (6) through hole being provided with through two sleeve pipe outer tubes (23), described casing joints I (5) and
The thermostatted water entrance II (14) connected with sleeve pipe outer tube (23) it is respectively equipped with on casing joints II (7)
II (21) is exported with thermostatted water；One end of each sleeve pipe inner tube (22) all pass casing joints III (6),
And being connected with nozzle (13), the other end passes casing joints I (5) and casing joints II respectively
And this end is medicinal liquid arrival end (7).
2. the photoresist as described in claim 1 and the thermostatic control system of developer solution, it is characterised in that:
Described casing joints I (5) is identical with casing joints II (7) structure, and it is equipped with shoulder hole,
Described sleeve pipe inner tube (22) through this shoulder hole being tightly connected with small diameter bore, shoulder hole big straight
The end of footpath end extends axially outwardly formation joint, and the internal diameter of described joint is more than sleeve pipe inner tube (22)
Diameter, the outer wall of joint is connected with the inner wall sealing of sleeve pipe outer tube (23), described casing joints I
(5) it is respectively equipped with, with on the sidewall of casing joints II (7), the perseverance that the larger diameter end with shoulder hole connects
Warm water entrance II (14) and thermostatted water outlet II (21).
3. the photoresist as described in claim 2 and the thermostatic control system of developer solution, it is characterised in that:
The small diameter bore end of described shoulder hole is provided with the counterbore of accommodating sealing mechanism, and described sealing mechanism includes close
Envelope briquetting (18) and sealing ring II (20), wherein sealing ring II (20) is sheathed on sleeve pipe inner tube (22)
Going up and be arranged at the bottom of counterbore, described sealing ring II (20) is compressed by sealed briquette (18).
4. the photoresist as described in claim 1 and the thermostatic control system of developer solution, it is characterised in that:
Described casing joints III (6) is provided with two shoulder holes, both passes through sleeve pipe inner tube in each shoulder hole
(22), each sleeve pipe inner tube (22) all seals with the small diameter bore of shoulder hole and coordinates, two shoulder holes
It is mutually communicated bottom large diameter hole and port part extends axially outwardly two joints of formation respectively, each
The internal diameter of joint is close with the inwall of sleeve pipe outer tube (23) more than the diameter of sleeve pipe inner tube (22) outer wall
Envelope connects.
5. the photoresist as described in claim 4 and the thermostatic control system of developer solution, it is characterised in that:
The smaller diameter end of two shoulder holes on described casing joints III (6) is equipped with counterbore, described nozzle (13)
It is placed in this counterbore and is connected with sleeve pipe inner tube (22), between nozzle (13) and the bottom of counterbore
It is provided with the sealing ring I (12) being sheathed in sleeve pipe inner tube (22).
6. the photoresist as described in claim 1 and the thermostatic control system of developer solution, it is characterised in that:
Described each medicinal liquid entrance point is equipped with valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210424510.2A CN103792790B (en) | 2012-10-30 | 2012-10-30 | Photoresist and the thermostatic control system of developer solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210424510.2A CN103792790B (en) | 2012-10-30 | 2012-10-30 | Photoresist and the thermostatic control system of developer solution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103792790A CN103792790A (en) | 2014-05-14 |
| CN103792790B true CN103792790B (en) | 2016-09-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210424510.2A Active CN103792790B (en) | 2012-10-30 | 2012-10-30 | Photoresist and the thermostatic control system of developer solution |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108057573B (en) * | 2016-11-07 | 2021-06-22 | 沈阳芯源微电子设备股份有限公司 | Photoresist moisturizing system and moisturizing method thereof |
| CN108062004B (en) * | 2016-11-09 | 2020-10-23 | 沈阳芯源微电子设备股份有限公司 | Multipath photoresist heat preservation device |
| CN108074837B (en) * | 2016-11-15 | 2019-11-12 | 沈阳芯源微电子设备股份有限公司 | A kind of semiconductor technology water heat-insulation system |
| US11131931B2 (en) * | 2018-06-29 | 2021-09-28 | Taiwan Semiconductor Manufacturing Co., Ltd. | Fluidic leakage handling for semiconductor apparatus |
| CN114253311A (en) * | 2020-09-24 | 2022-03-29 | 中国科学院微电子研究所 | Constant temperature control system and coating and developing device with same |
| CN112241112A (en) * | 2020-11-18 | 2021-01-19 | 江苏晋誉达半导体股份有限公司 | Temperature control device and temperature control method for developing solution |
| CN114077169B (en) * | 2021-11-17 | 2023-07-21 | 沈阳芯达半导体设备有限公司 | Developer solution heat exchange system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3356964B2 (en) * | 1997-05-23 | 2002-12-16 | 東京エレクトロン株式会社 | Processing liquid supply apparatus and liquid processing apparatus using the same |
| JP3300636B2 (en) * | 1997-07-04 | 2002-07-08 | 東京エレクトロン株式会社 | Temperature control mechanism and fluid supply mechanism using the same |
| JP4326461B2 (en) * | 2004-11-15 | 2009-09-09 | Ｓｍｃ株式会社 | Temperature control system for small flow rate liquid |
| CN101609262B (en) * | 2009-07-14 | 2011-08-10 | 上海微电子装备有限公司 | Temperature control device of projection object lens of lithography machine |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |