CN108074837B - A kind of semiconductor technology water heat-insulation system - Google Patents
A kind of semiconductor technology water heat-insulation system Download PDFInfo
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- CN108074837B CN108074837B CN201611026565.2A CN201611026565A CN108074837B CN 108074837 B CN108074837 B CN 108074837B CN 201611026565 A CN201611026565 A CN 201611026565A CN 108074837 B CN108074837 B CN 108074837B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Heat-Exchange Devices With Radiators And Conduit Assemblies (AREA)
Abstract
The present invention relates to semiconductor production fields, specifically a kind of semiconductor technology water heat-insulation system, wherein heat-exchanger rig, heat transfer block, heat preservation aquaporin and technique aquaporin are equipped on medicine valve module and output end block, and the heat preservation aquaporin in each component is sequentially communicated, technique aquaporin in each component is sequentially communicated, in addition heat transfer block, double-layer heat insulation casing is passed sequentially through between medicine valve module and output end block to be connected, double-layer heat insulation inside pipe casing is equipped with internal layer runner and outer layer runner, heat transfer block, technique aquaporin in medicine valve module and output end block is sequentially communicated by the internal layer runner, heat transfer block, heat preservation aquaporin in medicine valve module and output end block is sequentially communicated by the outer layer runner, heat preservation water water outlet port on heat exchanger is connected with the heat preservation aquaporin entrance in heat-exchanger rig, it exports in end block The outlet of heat preservation aquaporin is connected with the heat preservation water return water port on heat exchanger.The present invention can guarantee the temperature uniformity of process water.
Description
Technical field
The present invention relates to semiconductor production field, specifically a kind of semiconductor technology water heat-insulation system.
Background technique
The temperature of process water is most important in semicon industry, influences on the production capacity of product, consistency, qualification rate etc.
It is very big, in the actual production of semicon industry, can often because the technique coolant-temperature gage of equipment it is uneven due to cause production capacity to drop
Low, the product of production is unable to satisfy Eligibility requirements, and in the prior art, in order to make process water during flowing to working region
Temperature is kept constant, and needs multiple adjusting process coolant-temperature gage, this seriously affects operating efficiency, while product qualification rate can not yet
It is completely secured.
Summary of the invention
The purpose of the present invention is to provide a kind of semiconductor technology water heat-insulation systems, are meeting technique coolant-temperature gage substantially constant
Complete stroke thermal insulating during, keep distance of the process water without heat preservation most short, process water be effectively ensured in the temperature in production operation region
Uniformity reduces equipment and adjusts the period, effectively improves operating efficiency and product qualification rate.
The purpose of the present invention is achieved through the following technical solutions:
A kind of semiconductor technology water heat-insulation system, including heat exchanger, heat-exchanger rig, heat transfer block, medicine valve module, output end
Block and double-layer heat insulation casing, wherein being equipped on the heat-exchanger rig, heat transfer block, medicine valve module and output end block mutually indepedent
Heat preservation aquaporin and technique aquaporin, and the heat preservation aquaporin in each component is sequentially communicated, the work in each component
Skill aquaporin is sequentially communicated, wherein passing sequentially through double-layer heat insulation casing between the heat transfer block, medicine valve module and output end block
It is connected, the double-layer heat insulation inside pipe casing is equipped with mutually independent internal layer runner and outer layer runner, the heat transfer block, medicine valve module
It is sequentially communicated with the technique aquaporin in output end block by the internal layer runner of double-layer heat insulation casing, the heat transfer block, medicine valve group
Heat preservation aquaporin in part and output end block is sequentially communicated by the outer layer runner of double-layer heat insulation casing, on the heat exchanger
Heat preservation water water outlet port is connected by pipeline with the heat preservation aquaporin entrance in the heat-exchanger rig, and process water is by the output end
Technique aquaporin outflow in block, the heat preservation aquaporin outlet exported in end block is then by pipeline and the heat exchanger
Heat preservation water return water port be connected.
The medicine valve module includes water inlet block, medicine valve, water outlet block and mounting base, wherein the water inlet block, medicine valve and water outlet
Block is all set in above mounting base, is equipped with mutually indepedent heat preservation water flow passage and technique water flow in the water inlet block and water outlet block
Road, and the technique water flow passage in technique water flow passage, medicine valve and the water outlet block in the water inlet block is sequentially communicated to form the medicine
The technique aquaporin of valve module, the mounting base is interior to be equipped with heat preservation water flow passage, and in the water inlet block, mounting base and water outlet block
Heat preservation water flow passage is sequentially communicated the heat preservation aquaporin to form the medicine valve module.
Technique water flow passage in the water inlet block is communicated by connector A with the process water input terminal of medicine valve, the medicine valve
Process water output end is communicated by connector B with the technique water flow passage in the water outlet block.
Technique aquaporin in output end block (10) is equipped with one and singly enters water swivel, the internal layer of double-layer heat insulation casing
Runner by it is described singly enter water swivel with export end block on technique water out communicate.
Heat preservation aquaporin in the output end block is equipped with a heat preservation water return water space, the outer layer of double-layer heat insulation casing
Runner is communicated by the heat preservation water return water space with the heat preservation water backwater joint being set on the output end block, the heat preservation
Water backwater joint is connected by keeping the temperature water water return pipeline with the heat preservation water return water port on the heat exchanger.
System water intake end mouth on the heat exchanger is connected with system water inlet pipe road, and the system on the heat exchanger goes out
Water end (W.E.) mouth is connected with system outlet pipeline.
Stream is equipped on the pipeline that the technique aquaporin of the heat-exchanger rig is connected with the technique aquaporin of the heat transfer block
Meter.
Process water water intake end mouth on the heat-exchanger rig is connected with process water water inlet pipe road.
Advantages of the present invention and good effect are as follows:
1, the present invention keeps the temperature the protection that water carries out temperature in double-layer heat insulation casing to process water always in whole process, effectively
Guarantee process water in the temperature uniformity in production operation region and improves operating efficiency and product qualification rate.
2, the present invention realizes that circulating-heating utilizes to heat preservation water by heat exchanger, saves water resource.
3, overall structure of the present invention is simple, easy for installation and cheap.
Detailed description of the invention
Fig. 1 is schematic diagram of the invention,
Fig. 2 is the medicine valve module schematic diagram in Fig. 1,
Fig. 3 is the output end block schematic diagram in Fig. 1,
Wherein, 1 is system water inlet pipe road, and 2 be system outlet pipeline, and 3 be heat exchanger, and 4 be to keep the temperature water water inlet pipe road, 5
It is heat-exchanger rig for process water water inlet pipe road, 6,7 be flowmeter, and 8 be heat transfer block, and 9 be medicine valve module, and 10 be to export end block, 11
To keep the temperature water water return pipeline, 12 be mounting base, and 13 be water inlet block, and 14 be connector A, and 15 be medicine valve, and 16 be connector B, and 17 be water outlet
Block, 18 be double-layer heat insulation casing, and 19 be technique water out, and 20 is singly enter water swivel, and 21 be heat preservation water return water space, and 22 be heat preservation
Water backwater joint.
Specific embodiment
The invention will be further described with reference to the accompanying drawing.
As shown in Figure 1, the present invention includes heat exchanger 3, heat-exchanger rig 6, heat transfer block 8, medicine valve module 9, output end block 10
With double-layer heat insulation casing 18, wherein the heat-exchanger rig 6, heat transfer block 8, medicine valve module 9 and output end block 10 on be equipped with phase
Mutual independent heat preservation aquaporin and technique aquaporin, and the heat preservation aquaporin in each component is sequentially communicated, each component
Interior technique aquaporin is sequentially communicated, and the heat preservation water water outlet port on the heat exchanger 3 passes through heat preservation water water inlet pipe road 4 and institute
It states heat preservation aquaporin entrance in heat-exchanger rig 6 to be connected, between the heat transfer block 8 and medicine valve module 9 and the medicine valve module 9
It is connected by double-layer heat insulation casing 18 between output end block 10, is equipped with inside the double-layer heat insulation casing 18 mutually independent
Internal layer runner and outer layer runner, the heat transfer block 8, medicine valve module 9 and the technique aquaporin exported in end block 10 are protected by double-deck
The internal layer runner of warm sleeve 18 is sequentially communicated, and the heat preservation aquaporin in the heat transfer block 8, medicine valve module 9 and output end block 10 is logical
The outer layer runner for crossing double-layer heat insulation casing 18 is sequentially communicated, and process water is flowed out by the technique aquaporin in the output end block 10,
Heat preservation aquaporin outlet in the output end block 10 then passes through the heat preservation on heat preservation water water return pipeline 11 and the heat exchanger 3
Water return water port is connected.
As shown in Fig. 2, the medicine valve module 9 includes water inlet block 13, medicine valve 15, water outlet block 17 and mounting base 12, wherein institute
It states into water block 13, medicine valve 15 and water outlet block 17 and is all set in 12 top of mounting base, in the water inlet block 13 and water outlet block 17
Equipped with mutually indepedent heat preservation water flow passage and technique water flow passage, and the technique water flow passage in the water inlet block 13 by connector A14 with
The process water input terminal of medicine valve 15 communicates, and the process water output end of the medicine valve 15 passes through in connector B16 and the water outlet block 17
Technique water flow passage communicate, to form the technique aquaporin of medicine valve module 9, heat preservation water flow passage is equipped in the mounting base 12,
Heat preservation water flow passage in the water inlet block 13 passes through the guarantor in the heat preservation water flow passage and the water outlet block 17 in the mounting base 12
Warm water runner communicates, to form the heat preservation aquaporin of medicine valve module 9.
As shown in figure 3, the technique aquaporin in the output end block 10 is equipped with one and singly enters water swivel 20, double-layer heat insulation
The internal layer runner of casing 18 by it is described singly enter water swivel 20 with export end block 10 on technique water out 19 communicate, the output
Heat preservation aquaporin in end block 10 is equipped with a heat preservation water return water space 21, and the outer layer runner of double-layer heat insulation casing 18 passes through institute
It states heat preservation water return water space 21 and is communicated with the heat preservation water backwater joint 22 being set on the output end block 10, the heat preservation water returns
Water swivel 22 is connected by keeping the temperature water water return pipeline 11 with the heat preservation water return water port on the heat exchanger 3.
As shown in Figure 1, the system water intake end mouth on the heat exchanger 3 is connected with a system water inlet pipe road 1, the heat
System water outlet port on exchanger 3 is connected with a system outlet pipeline 2.
As shown in Figure 1, the technique aquaporin phase in technique aquaporin and the heat transfer block 8 in the heat-exchanger rig 6
Pipeline even is equipped with flowmeter 7, process water water intake end mouth and 5 phase of process water water inlet pipe road on the heat-exchanger rig 6
Even.
In the present embodiment, the model HRS of the heat exchanger 3, manufacturer SMC, the model of the heat-exchanger rig 6
For HPX, manufacturer Ying Tege.
The operation principle of the present invention is that:
It keeps the temperature water to be exported in inflow heat-exchanger rig 6 by heat exchanger 3, and to the process water flowed into the heat-exchanger rig 6
It is kept the temperature, process water enters double-layer heat insulation casing by heat transfer block 8 after the metering of flowmeter after being exported by heat-exchanger rig 6
In 18 internal layer runner, and keeps the temperature and enter the outer of double-layer heat insulation casing 18 through the heat transfer block 8 after water is exported by heat-exchanger rig 6
In laminar flow road, the length of double-layer heat insulation set 18 can be set as needed between the heat transfer block 8 and medicine valve module 9, to realize
The leap of the shortest distance, and double-layer heat insulation casing 18 keeps the temperature heat preservation water to process water again, it is ensured that and process water is whole
Temperature difference it is minimum, process water through in medicine valve module 9 water inlet block 13 and connector A14 flow into medicine valve 15, and technique water flow
Successively enter in the internal layer runner of another section of double-layer heat insulation casing 18 by connector B16 and the water outlet outflow of block 17 after drug valve 15,
Heat preservation water then passes through the heat preservation water flow passage in 15 downside mounting base 12 of medicine valve, and water is kept the temperature during complete stroke thermal insulating always in bilayer
The protection of temperature is carried out in thermal insulation casing 18 to process water, process water is flowed out eventually by output end block 10, and heat preservation water passes through defeated
End block 10 flows back to heat exchanger 3 out, realizes the automatic cycle heating of heat preservation water.
Claims (7)
1. a kind of semiconductor technology water heat-insulation system, it is characterised in that: including heat exchanger (3), heat-exchanger rig (6), heat transfer block
(8), medicine valve module (9), output end block (10) and double-layer heat insulation casing (18), wherein the heat-exchanger rig (6), heat transfer block (8),
Mutually independent heat preservation aquaporin and technique aquaporin, and each component are equipped in medicine valve module (9) and output end block (10)
Interior heat preservation aquaporin is sequentially communicated, the technique aquaporin in each component is sequentially communicated, wherein the heat transfer block (8), medicine valve group
It passes sequentially through double-layer heat insulation casing (18) between part (9) and output end block (10) to be connected, in the double-layer heat insulation casing (18)
Portion is equipped with mutually independent internal layer runner and outer layer runner, and the heat transfer block (8), medicine valve module (9) and output end block (10) are interior
Technique aquaporin be sequentially communicated by the internal layer runner of double-layer heat insulation casing (18), the heat transfer block (8), medicine valve module (9)
It is sequentially communicated with the heat preservation aquaporin in output end block (10) by the outer layer runner of double-layer heat insulation casing (18), the heat exchange
Heat preservation water water outlet port on device (3) is connected by pipeline with the heat preservation aquaporin entrance in the heat-exchanger rig (6), described to change
Technique aquaporin in thermal (6) is connected with a process water water inlet pipe road (5), and process water is by the output end block (10)
Interior technique aquaporin outflow, the heat preservation aquaporin outlet exported in end block (10) is then by pipeline and the heat exchanger
(3) the heat preservation water return water port on is connected；
The medicine valve module (9) includes water inlet block (13), medicine valve (15), water outlet block (17) and mounting base (12), wherein described in into
Water block (13), medicine valve (15) and water outlet block (17) are all set in above mounting base (12), in the water inlet block (13) and water outlet block
(17) mutually indepedent heat preservation water flow passage and technique water flow passage, and the technique water flow passage in water inlet block (13), medicine are equipped in
Technique water flow passage in valve (15) and water outlet block (17) is sequentially communicated the technique aquaporin to form the medicine valve module (9), institute
It states and is equipped with heat preservation water flow passage in mounting base (12), and the heat preservation in water inlet block (13), mounting base (12) and water outlet block (17)
Water flow passage is sequentially communicated the heat preservation aquaporin to form the medicine valve module (9).
2. semiconductor technology water heat-insulation system according to claim 1, it is characterised in that: the work in water inlet block (13)
Skill water flow passage is communicated by connector A (14) with the process water input terminal of medicine valve (15), the process water output end of the medicine valve (15)
It is communicated by connector B (16) with the technique water flow passage in water outlet block (17).
3. semiconductor technology water heat-insulation system according to claim 1, it is characterised in that: in the output end block (10)
Technique aquaporin is equipped with one and singly enters water swivel (20), and the internal layer runner of double-layer heat insulation casing (18) is singly entered water and connect by described
Head (20) is communicated with the technique water out (19) in output end block (10).
4. semiconductor technology water heat-insulation system according to claim 1 or 3, it is characterised in that: the output end block (10)
Interior heat preservation aquaporin is equipped with a heat preservation water return water space (21), and the outer layer runner of double-layer heat insulation casing (18) passes through described
Heat preservation water return water space (21) is communicated with the heat preservation water backwater joint (22) being set on output end block (10), the heat preservation
Water backwater joint (22) is connected by keeping the temperature water water return pipeline (11) with the heat preservation water return water port on the heat exchanger (3).
5. semiconductor technology water heat-insulation system according to claim 1, it is characterised in that: on the heat exchanger (3)
System water intake end mouth is connected with system water inlet pipe road (1), the system water outlet port on the heat exchanger (3) and system outlet pipe
Road (2) is connected.
6. semiconductor technology water heat-insulation system according to claim 1, it is characterised in that: in the heat-exchanger rig (6)
The pipeline that technique aquaporin is connected with the technique aquaporin of the heat transfer block (8) is equipped with flowmeter (7).
7. semiconductor technology water heat-insulation system according to claim 1 or 6, it is characterised in that: on the heat-exchanger rig (6)
Process water water intake end mouth be connected with process water water inlet pipe road (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611026565.2A CN108074837B (en) | 2016-11-15 | 2016-11-15 | A kind of semiconductor technology water heat-insulation system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611026565.2A CN108074837B (en) | 2016-11-15 | 2016-11-15 | A kind of semiconductor technology water heat-insulation system |
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| Publication Number | Publication Date |
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| CN108074837A CN108074837A (en) | 2018-05-25 |
| CN108074837B true CN108074837B (en) | 2019-11-12 |
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| CN201611026565.2A Active CN108074837B (en) | 2016-11-15 | 2016-11-15 | A kind of semiconductor technology water heat-insulation system |
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| CN114077169B (en) * | 2021-11-17 | 2023-07-21 | 沈阳芯达半导体设备有限公司 | Developer solution heat exchange system |
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| JPH10326736A (en) * | 1997-05-23 | 1998-12-08 | Tokyo Electron Ltd | Supplying equipment of treating solvent and solvent treating equipment using the same |
| JP2000122306A (en) * | 1998-10-13 | 2000-04-28 | Sony Corp | Production of color filter for solid image pickup element |
| CN1262889C (en) * | 2001-12-27 | 2006-07-05 | 东京応化工业株式会社 | Developing device and method |
| CN100552880C (en) * | 2004-11-15 | 2009-10-21 | Smc株式会社 | The method for regulating temperature of low flow rate liquid and system thereof |
| CN202758256U (en) * | 2012-07-05 | 2013-02-27 | 家登精密工业股份有限公司 | Gas pipeline constant temperature device |
| CN103176369A (en) * | 2013-03-13 | 2013-06-26 | 华中科技大学 | Immersion liquid temperature control device for immersion lithography |
| CN103792790A (en) * | 2012-10-30 | 2014-05-14 | 沈阳芯源微电子设备有限公司 | Thermostatic control system of photoresist and developing solvent |
| CN103807571B (en) * | 2012-11-06 | 2015-09-09 | 沈阳芯源微电子设备有限公司 | Optical resist pipeline sleeve pipe thermal insulation apparatus |
-
2016
- 2016-11-15 CN CN201611026565.2A patent/CN108074837B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10326736A (en) * | 1997-05-23 | 1998-12-08 | Tokyo Electron Ltd | Supplying equipment of treating solvent and solvent treating equipment using the same |
| JP2000122306A (en) * | 1998-10-13 | 2000-04-28 | Sony Corp | Production of color filter for solid image pickup element |
| CN1262889C (en) * | 2001-12-27 | 2006-07-05 | 东京応化工业株式会社 | Developing device and method |
| CN100552880C (en) * | 2004-11-15 | 2009-10-21 | Smc株式会社 | The method for regulating temperature of low flow rate liquid and system thereof |
| CN202758256U (en) * | 2012-07-05 | 2013-02-27 | 家登精密工业股份有限公司 | Gas pipeline constant temperature device |
| CN103792790A (en) * | 2012-10-30 | 2014-05-14 | 沈阳芯源微电子设备有限公司 | Thermostatic control system of photoresist and developing solvent |
| CN103807571B (en) * | 2012-11-06 | 2015-09-09 | 沈阳芯源微电子设备有限公司 | Optical resist pipeline sleeve pipe thermal insulation apparatus |
| CN103176369A (en) * | 2013-03-13 | 2013-06-26 | 华中科技大学 | Immersion liquid temperature control device for immersion lithography |
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| CN108074837A (en) | 2018-05-25 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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