CN108062004B - Multipath photoresist heat preservation device - Google Patents
Multipath photoresist heat preservation device Download PDFInfo
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- CN108062004B CN108062004B CN201610983873.8A CN201610983873A CN108062004B CN 108062004 B CN108062004 B CN 108062004B CN 201610983873 A CN201610983873 A CN 201610983873A CN 108062004 B CN108062004 B CN 108062004B
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- heat preservation
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
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Abstract
The invention relates to the field of semiconductor photoetching gluing equipment, in particular to a multipath photoresist heat preservation device which comprises a glue path gathering block, a heat preservation water circulation block, a heat preservation sleeve pipe assembly, a heat preservation water connecting block, a heat preservation water reversing block and a glue path separating block which are connected in sequence, wherein the heat-insulating sleeve component is internally provided with an outer layer channel and an inner layer channel, the heat-insulating water circulating block is provided with a water inlet channel and a water outlet channel, the water inlet channel is communicated with the outer layer channel, the water outlet channel is communicated with the inner layer channel, the heat preservation water in the outer layer channel flows into the rubber path separation block through the heat preservation water connecting block and the water outlet holes on the heat preservation water reversing block, then flows into the inner layer channel through a water return hole on the heat preservation water reversing block, the photoresist tubes are collected by the glue path collecting block and enter the inner layer channel, and are separated in the glue path separating block and connected with different photoresist nozzles. The invention has simple structure and small occupied volume and can meet the heat preservation requirement of multi-path photoresist.
Description
Technical Field
The invention relates to the field of semiconductor photoetching glue coating equipment, in particular to a multipath photoresist heat preservation device.
Background
In recent years, with the continuous development of the semiconductor industry, the requirement of the gluing equipment in the photolithography process is increasingly increased in the industry, the first single photoresist gluing equipment is difficult to meet the gluing requirement of multiple photoresists required in the photolithography process, the gluing equipment compatible with multiple photoresists is gradually popularized and used at the present stage, but multiple photoresists still have problems to be solved in terms of heat preservation, because the constant temperature of the photoresists needs to be ensured in the gluing process, the currently common heat preservation method is that each path of photoresist pipe is independently preserved heat, under the condition of multiple paths of photoresist pipes, a plurality of sets of single photoresist heat preservation devices are required to be used, the occupied size is large, the number of pipeline connection points is large, leakage is easy, the cost of the plurality of sets of heat preservation devices is high, the product installation and later maintenance are not facilitated, and meanwhile, the single heat preservation circulation system cannot ensure the temperature consistency of each path of photoresist, the gluing process is also adversely affected.
Disclosure of Invention
The invention aims to provide a multipath photoresist heat preservation device which has a good heat preservation effect on multipath photoresist, is simple in structure and small in occupied volume, and can well meet the heat preservation requirement of the multipath photoresist.
The purpose of the invention is realized by the following technical scheme:
a multi-path photoresist heat preservation device comprises a glue path gathering block, a heat preservation water circulation block, a heat preservation sleeve pipe assembly, a heat preservation water connecting block, a heat preservation water reversing block and a glue path separating block which are sequentially connected, wherein an outer layer channel and an inner layer channel are arranged in the heat preservation sleeve pipe assembly, a water inlet channel and a water outlet channel are arranged on the heat preservation water circulation block, the water inlet channel is communicated with the outer layer channel in the heat preservation sleeve pipe assembly, the water outlet channel is communicated with the inner layer channel in the heat preservation sleeve pipe assembly, a water outlet hole and a water return hole are arranged on the heat preservation water reversing block, a water return space is arranged in the glue path separating block, heat preservation water flowing out from the outer layer channel of the heat preservation sleeve pipe assembly flows into the heat preservation water connecting block and flows into the water return space in the glue path separating block through the water outlet hole in the heat preservation water reversing block, the heat preservation water in the water return space flows into the inner layer channel of the, all the photoresist tubes to be insulated are collected in the glue path collecting block and penetrate into an inner layer channel in the insulation sleeve pipe assembly through a water outlet flow passage in the insulation water circulating block, a photoresist nozzle is arranged in the glue path separating block, and all the photoresist tubes penetrating out of the inner layer channel of the insulation sleeve pipe assembly are separated in the glue path separating block and are respectively connected with different photoresist nozzles.
The heat-preservation sleeve assembly comprises a heat-preservation outer sleeve and a heat-preservation inner sleeve, the heat-preservation inner sleeve is arranged in the heat-preservation outer sleeve, the outer channel is formed between the heat-preservation inner sleeve and the heat-preservation outer sleeve, and the inner channel is formed inside the heat-preservation inner sleeve.
The same end of the heat-preservation outer sleeve and the same end of the heat-preservation inner sleeve are fixedly connected with a heat-preservation water pressure tightening block, and the heat-preservation water pressure tightening block is fixedly connected with the heat-preservation water circulation block.
An inner connecting hole and an outer connecting hole are arranged in the heat preservation water pressing block, a water outlet runner on the heat preservation water circulating block is communicated with an inner layer channel of the heat preservation sleeve pipe assembly through the inner connecting hole, and a water inlet runner on the heat preservation water circulating block is communicated with an outer layer channel of the heat preservation sleeve pipe assembly through the outer connecting hole.
And a pressing block sealing ring (5) is arranged between the heat preservation water circulation block and the heat preservation water pressing block.
One end of the heat-preservation outer sleeve, which is far away from the heat-preservation water circulation block, is fixedly connected with the heat-preservation water connection block through an outer pipe joint, a sleeve-shaped inner joint is arranged on one water outlet side of a water return hole in the heat-preservation water reversing block, and one end of the heat-preservation inner sleeve, which is far away from the heat-preservation water circulation block, penetrates through the heat-preservation water connection block and then is fixedly connected with the inner joint.
And a plurality of ferrule joints are arranged on the rubber road gathering block, and all paths of photoresist pipes to be insulated enter the rubber road gathering block through different ferrule joint penetrating pipes respectively.
An inlet sealing ring is arranged between the glue path gathering block and the heat preservation water circulating block, a reversing sealing ring is arranged between the heat preservation water connecting block and the heat preservation water reversing block, and a return water sealing ring is arranged between the heat preservation water reversing block and the glue path separating block.
And the photoresist tubes separated in the photoresist separating block are respectively connected with the photoresist nozzles through reaming sealing pieces.
The heat preservation water circulation block is provided with a heat preservation water access pipe and a heat preservation water outlet pipe, the heat preservation water access pipe is communicated with an outer layer channel in the heat preservation sleeve pipe assembly through the water inlet flow channel, and the heat preservation water outlet pipe is communicated with an inner layer channel in the heat preservation sleeve pipe assembly through the water outlet flow channel.
The invention has the advantages and positive effects that:
1. the invention can simultaneously carry out heat preservation on the multi-path photoresist and has small occupied volume.
2. The invention has the advantages that the back water space is arranged at the heat preservation tail end, the photoresist is preserved heat in the pipeline in the whole process, and the heat preservation effect is good.
3. The invention reduces the amount of water for plant and heat preservation devices and reduces the production cost.
Drawings
Figure 1 is a schematic structural view of the present invention,
figure 2 is a cross-sectional view of the invention of figure 1,
figure 3 is a cross-sectional view of the insulating sleeve assembly of figure 1,
FIG. 4 is a schematic view of the flow of insulating water at the end of the present invention of FIG. 1.
The heat-preservation water circulation device comprises a sleeve joint 1, a glue path gathering block 2, an inlet sealing ring 3, a heat-preservation water circulation block 4, a pressing block sealing ring 5, a heat-preservation water pressing block 6, a heat-preservation outer sleeve 7, a heat-preservation inner sleeve 8, a photoetching rubber tube 9, an outer tube joint 10, a heat-preservation water connecting block 11, a reversing sealing ring 12, a heat-preservation water reversing block 13, a backwater sealing ring 14, a glue path separating block 15, a hole expanding sealing piece 16, a photoresist nozzle 17, a heat-preservation water inlet tube 18, a heat-preservation water outlet tube 19, a water outlet flow channel 20, a backwater hole 21, a water outlet hole 22 and a backwater space 23.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
As shown in fig. 1 to 4, the present invention comprises a glue path converging block 2, a heat preservation water circulation block 4, a heat preservation sleeve pipe assembly, a heat preservation water connection block 11, a heat preservation water reversing block 13 and a glue path separating block 15, wherein the heat preservation water circulation block 4 and the heat preservation water connection block 11 are respectively arranged at two ends of the heat preservation sleeve pipe assembly, the glue path converging block 2 is arranged at the outer side of the heat preservation water circulation block 4, the heat preservation water reversing block 13 and the glue path separating block 15 are sequentially arranged at the outer side of the heat preservation water connection block 11, an outer layer channel and an inner layer channel are arranged in the heat preservation sleeve pipe assembly, a heat preservation water access pipe 18 and a heat preservation water access pipe 19 are arranged on the heat preservation water circulation block 4, in addition, a water inlet flow channel and a water outlet flow channel 20 are arranged in the heat preservation water circulation block 4, the heat preservation water access pipe 18 is communicated with the outer layer channel in the heat preservation sleeve pipe assembly through the water inlet flow channel, and the heat preservation water access pipe 19 is communicated with the inner layer, as shown in fig. 4, one end of the heat preservation water connecting block 11 is open, the other end is closed, the open end of the heat preservation water connecting block 11 is fixedly connected with the heat preservation water reversing block 13, the heat preservation water reversing block 13 is provided with a plurality of water outlet holes 22 and a water return hole 21, a water return space 23 is arranged in the glue path separating block 15, the heat preservation water flowing out from the outer layer channel of the heat preservation sleeve assembly flows into the heat preservation water connecting block 11 and flows into the water return space 23 in the glue path separating block 15 through the water outlet holes 22 on the heat preservation water reversing block 13, the heat preservation water in the water return space 23 flows into the inner layer channel of the heat preservation sleeve assembly through the water return hole 21 on the heat preservation water reversing block 13, as shown in fig. 1-2, a plurality of joints 1 are arranged on the glue path collecting block 2, and the various clamp photo-etching rubber tubes 9 to be heat preserved respectively penetrate into the glue path collecting block 2 through different joints 1, and the wires are bundled in the glue path gathering block 2 and then pass through a water outlet flow passage 20 in the heat-preservation water circulation block 4 together to enter an inner layer channel in the heat-preservation sleeve pipe assembly, as shown in fig. 2 and 4, a photoresist nozzle 17 is arranged in the glue path separating block 15, and each path of photoresist tube 9 which penetrates out of the inner layer channel of the heat-preservation sleeve pipe assembly is separated in the glue path separating block 15 and is respectively connected with different photoresist nozzles 17.
As shown in fig. 2 to 4, the heat-insulating sleeve assembly includes a heat-insulating outer sleeve 7, a heat-insulating inner sleeve 8, a heat-insulating water pressing block 6 and an outer pipe joint 10, the heat-insulating inner sleeve 8 is disposed in the heat-insulating outer sleeve 7, the outer channel is formed between the heat-insulating inner sleeve 8 and the heat-insulating outer sleeve 7, and the inner channel is formed inside the heat-insulating inner sleeve 8. One end of each of the heat-preservation outer sleeve 7 and the heat-preservation inner sleeve 8 is fixedly connected with the heat-preservation water pressing block 6, the heat-preservation water pressing block 6 is fixedly connected with the heat-preservation water circulating block 4, an inner connecting hole and an outer connecting hole are formed in the heat-preservation water pressing block 6, a water outlet flow channel 20 on the heat-preservation water circulating block 4 is communicated with an inner channel of the heat-preservation sleeve component through the inner connecting hole, a water inlet flow channel on the heat-preservation water circulating block 4 is communicated with an outer channel of the heat-preservation sleeve component through the outer connecting hole, as shown in fig. 4, the other end of the heat-preservation outer sleeve 7 is fixedly connected with the heat-preservation water connecting block 11 through the outer pipe joint 10, a sleeve-shaped inner joint is arranged on the water outlet side of the water return hole 21 on the heat-preservation water reversing block 13, and the other end of the.
As shown in fig. 2, an inlet seal ring 3 is arranged between the glue path gathering block 2 and the heat preservation water circulation block 4, a press block seal ring 5 is arranged between the heat preservation water circulation block 4 and the heat preservation water pressing block 6, a reversing seal ring 12 is arranged between the heat preservation water connecting block 11 and the heat preservation water reversing block 13, and a return seal ring 14 is arranged between the heat preservation water reversing block 13 and the glue path separating block 15. The photoresist tubes 9 separated in the photoresist tube separating block 15 are connected to a photoresist nozzle 17 through a counterbore seal 16.
The working principle of the invention is as follows:
after binding wires in the glue path gathering block 2, all the photoresist tubes 9 to be insulated sequentially pass through the water outlet flow passage 20 of the heat-insulating water circulation block 4, an inner layer passage in the heat-insulating sleeve pipe assembly and a water return hole 21 of the heat-insulating water reversing block 13 and then enter the glue path separation block 15, and are respectively connected with different photoresist nozzles 17 after being separated in the glue path separation block 15, the heat preservation water flows into an outer layer channel of the heat preservation sleeve assembly through a heat preservation water access pipe 18 on the heat preservation water circulation block 4, flows into a water return space 23 of the rubber road gathering block 2 through the heat preservation water connecting block 11 and the water outlet hole 22 on the heat preservation water reversing block 13, then flows into an inner layer channel of the heat-preservation sleeve assembly through a water return hole 21 on the heat-preservation water reversing block 13 and preserves the heat of each path of photoetching rubber pipe 9 of the bunch, and the heat-preservation water flowing out of the inner layer channel flows out through a heat-preservation water outlet pipe 19 on the heat-preservation water circulating block 4.
Claims (9)
1. A multipath photoresist heat preservation device is characterized in that: including glue way collection piece (2), heat preservation water circulation piece (4), heat preservation thimble assembly, heat preservation water connecting block (11), heat preservation water switching-over piece (13) and glue way separation block (15) that connect gradually, be equipped with skin passageway and inlayer passageway in the heat preservation thimble assembly, be equipped with into water runner, play water runner (20), heat preservation water access pipe (18) and heat preservation water contact tube (19) on heat preservation water circulation piece (4), just heat preservation water access pipe (18) pass through outer passageway in water runner and the heat preservation thimble assembly communicates with each other, heat preservation water contact tube (19) pass through go out water runner (20) and communicate with each other with the inlayer passageway in the heat preservation thimble assembly be equipped with apopore (22) and return water hole (21) on heat preservation water switching-over piece (13) be equipped with return water space (23) in glue way separation block (15), each way of waiting to keep warm photoetching rubber tube (9) is in order to pass after binding a bunch in glue way collection piece (2) The water outlet flow passage (20) of the heat preservation water circulation block (4), the inner layer passage in the heat preservation sleeve pipe assembly and the water return hole (21) of the heat preservation water reversing block (13) enter the glue path separation block (15), and are respectively connected with different photoresist nozzles (17) after being separated in the glue path separation block (15), the heat preservation water flows into an outer layer channel of the heat preservation sleeve assembly through a heat preservation water access pipe (18) on the heat preservation water circulation block (4), flows into a water return space (23) of the rubber road gathering block (2) through a heat preservation water connecting block (11) and a water outlet hole (22) on a heat preservation water reversing block (13), then flows into an inner layer channel of the heat-preservation sleeve assembly through a water return hole (21) on the heat-preservation water reversing block (13) for preserving heat of all paths of photoetching rubber pipes (9) of the bunch, and the heat-preservation water flowing out of the inner layer channel flows out through a heat-preservation water outlet pipe (19) on the heat-preservation water circulating block (4).
2. The multi-path photoresist incubation device of claim 1, wherein: the heat-preservation sleeve assembly comprises a heat-preservation outer sleeve (7) and a heat-preservation inner sleeve (8), the heat-preservation inner sleeve (8) is arranged in the heat-preservation outer sleeve (7), the heat-preservation inner sleeve (8) and the heat-preservation outer sleeve (7) form the outer channel, and the heat-preservation inner sleeve (8) is formed inside the inner channel.
3. The multi-path photoresist incubation device of claim 2, wherein: the same end of the heat-preservation outer sleeve (7) and the same end of the heat-preservation inner sleeve (8) are fixedly connected with a heat-preservation water pressing block (6), and the heat-preservation water pressing block (6) is fixedly connected with the heat-preservation water circulating block (4).
4. The multi-path photoresist incubation device of claim 3, wherein: an inner connecting hole and an outer connecting hole are arranged in the heat preservation water pressing block (6), a water outlet flow channel (20) on the heat preservation water circulating block (4) is communicated with an inner layer channel of the heat preservation sleeve pipe assembly through the inner connecting hole, and a water inlet flow channel on the heat preservation water circulating block (4) is communicated with an outer layer channel of the heat preservation sleeve pipe assembly through the outer connecting hole.
5. The multi-path photoresist incubation device of claim 3, wherein: and a briquetting sealing ring (5) is arranged between the heat preservation water circulation block (4) and the heat preservation water compression block (6).
6. The multi-path photoresist incubation device of claim 2, wherein: keep away from in heat preservation outer tube (7) keep away from heat preservation water circulation piece (4) one end through an outer union coupling (10) with heat preservation water connecting block (11) link firmly return water hole (21) on heat preservation water switching-over piece (13) go out water one side and be equipped with the nipple that is the cover tube-shaped, keep away from in heat preservation interior sleeve pipe (8) keep away from heat preservation water circulation piece (4) one end pass behind heat preservation water connecting block (11) with the nipple links firmly.
7. The multi-path photoresist incubation device of claim 1, wherein: the glue path gathering block (2) is provided with a plurality of clamping sleeve joints (1), and all the photoetching rubber tubes (9) to be insulated enter the glue path gathering block (2) through different clamping sleeve joints (1) in a penetrating mode.
8. The multi-path photoresist incubation device of claim 1, wherein: an inlet sealing ring (3) is arranged between the glue path gathering block (2) and the heat preservation water circulating block (4), a reversing sealing ring (12) is arranged between the heat preservation water connecting block (11) and the heat preservation water reversing block (13), and a return sealing ring (14) is arranged between the heat preservation water reversing block (13) and the glue path separating block (15).
9. The multi-path photoresist incubation device of claim 1, wherein: the photoresist tubes (9) separated in the photoresist separating block (15) are respectively connected with a photoresist nozzle (17) through a reaming sealing piece (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610983873.8A CN108062004B (en) | 2016-11-09 | 2016-11-09 | Multipath photoresist heat preservation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610983873.8A CN108062004B (en) | 2016-11-09 | 2016-11-09 | Multipath photoresist heat preservation device |
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| Publication Number | Publication Date |
|---|---|
| CN108062004A CN108062004A (en) | 2018-05-22 |
| CN108062004B true CN108062004B (en) | 2020-10-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610983873.8A Active CN108062004B (en) | 2016-11-09 | 2016-11-09 | Multipath photoresist heat preservation device |
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| CN (1) | CN108062004B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111135410B (en) * | 2020-01-16 | 2022-09-09 | 江西海尔医疗科技有限公司 | Medical oxygen insulating tube and oxygen humidifier |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1570766A (en) * | 2003-07-11 | 2005-01-26 | 友达光电股份有限公司 | Photoresist coating device |
| CN101628552A (en) * | 2009-08-05 | 2010-01-20 | 奇瑞汽车股份有限公司 | Vehicle food heating and heat-insulating device |
| CN203084415U (en) * | 2012-09-20 | 2013-07-24 | 广州市爱司凯科技股份有限公司 | Developing circulating cold and hot exchange constant temperature device for plate developer |
| CN103792790A (en) * | 2012-10-30 | 2014-05-14 | 沈阳芯源微电子设备有限公司 | Thermostatic control system of photoresist and developing solvent |
| CN103807571A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Heat-preservation device of photoresist pipeline casing pipe |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2963817B1 (en) * | 2010-08-16 | 2013-10-18 | Technip France | CONNECTION TIP FOR A FLEXIBLE TRANSPORT CONDUIT OF A CRYOGENIC FLUID. |
-
2016
- 2016-11-09 CN CN201610983873.8A patent/CN108062004B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1570766A (en) * | 2003-07-11 | 2005-01-26 | 友达光电股份有限公司 | Photoresist coating device |
| CN101628552A (en) * | 2009-08-05 | 2010-01-20 | 奇瑞汽车股份有限公司 | Vehicle food heating and heat-insulating device |
| CN203084415U (en) * | 2012-09-20 | 2013-07-24 | 广州市爱司凯科技股份有限公司 | Developing circulating cold and hot exchange constant temperature device for plate developer |
| CN103792790A (en) * | 2012-10-30 | 2014-05-14 | 沈阳芯源微电子设备有限公司 | Thermostatic control system of photoresist and developing solvent |
| CN103807571A (en) * | 2012-11-06 | 2014-05-21 | 沈阳芯源微电子设备有限公司 | Heat-preservation device of photoresist pipeline casing pipe |
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| CN108062004A (en) | 2018-05-22 |
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Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Applicant before: Shenyang Siayuan Electronic Equipment Co., Ltd. |
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