CN103776790A - Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna - Google Patents
Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna Download PDFInfo
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Abstract
The invention relates to an infrared spectrum enhancement and detection method and an infrared spectrum enhancement and detection device based on a graphene nano antenna. The device comprises a light source, a collimating lens, a one-point detector and an MEMS (micro-electromechanical system) grating light modulator based on the three-dimensional graphene nano antenna. Infrared light emitted from the light source is irradiated to the MEMS grating light modulator based on the three-dimensional graphene nano antenna through the collimating lens, an interference signal of the MEMS grating light modulator can be detected by the one-point detector, a detection signal is demodulated through Fourier transform, a spectrum is reproduced, and trace molecules are detected according to obtained spectrum information; the device has the advantages of good stability, high response speed, high sensitivity, dynamic tunable broadband, high enhancement factor and the like, can be expected to greatly increase the variety of substances detected by an infrared spectroscopic analysis technology and improve the detection sensitivity of the infrared spectroscopic analysis technology, and has a huge development space and a wide application prospect.
Description
Technical field
The present invention relates to infrared spectrum technology field, relate in particular to a kind of method and device that surface strengthens infrared absorption spectrum detecting band and improves detection sensitivity of expanding.
Background technology
Infrared spectrum technology is that a kind of direct detection discloses molecular vibration mechanism and function thereof by molecular vibration patterns of change, realizes technology and method that material is carried out to feature identification and quantitative test.This technology has " fingerprint " characteristic of height, without sample mark, fast response time, instrument popularity rate is the highest, the advantages such as spectrum picture library is the most complete, be to determine the powerful tools of molecular composition, conformation and structural change information and indispensable means, be widely used in that environmental monitoring, food safety detection, chemical composition analysis, explosive detection and biologic medical etc. involve the interests of the state and the people and the key areas of lifelines of the national economy.But, be subject to the restriction of infrared spectrum instrument performance, traditional infrared spectral technique only can carry out qualitative and quantitative detection to micro substance, when in the process that detected object is developed to trace molecule or even unimolecule by micro substance, it is extremely faint that interaction between infrared waves and molecule becomes, and run into unprecedented severe challenge while making to adopt traditional infrared spectral technique to thin layer or trace Molecular Detection.
In the face of this challenge, the surface enhancing infrared absorption spectroscopies (Surface-EnhancedInfrared Absorption) that fast development is got up has significantly strengthened the infrared spectrum Absorption Characteristics of tested molecule, sensitivity and the accuracy of molecular spectrum are increased substantially, become gradually detection trace and monomolecular feature, characterize the effective test analysis instrument of meticulous molecular structure, there is application prospect extremely widely in hypersensitivity trace materials and analysis of molecules field.Based on domestic and international present Research retrieval, this technology mainly comprises following a few class:
The one, the infrared spectrum Enhancement Method of employing metal nano island film.The ultimate principle that infrared spectrum strengthens is: when molecular adsorption is during nano metal island particle surperficial, by excite the surface plasma resonance of metal nano island film at infrared band, surperficial local electric field is produced greatly to be strengthened, thereby increase the signal of adsorption molecule, its infrared absorption is under general measuring condition, there is no 10～1000 times of metal nanoparticle.For example, 2002, the chemical plating method of the inventions such as osawa has successfully been realized deposited gold film on silicon, and the simple and electroless plating of the method makes than vacuum evaporation that metal film is combined with substrate more firmly and the infrared spectrum of having realized fragrant little molecule, CO molecule, organic molecule strengthens.2003, Akata etc. were applied to SEIRAS in the research of protein structure and function in a creative way, had observed the molecule fine structure that conventional infrared technique cannot be observed.2005, Li Qiaoxia etc., by depositing the Cd film of thick layer on the electroless plating Au film on ATR infrared window Si post reflecting surface, successfully obtained the SEIRAS on Pt, Pd, Ru and Ni electrode again, and 1599,1484,1068cm
-1observe the characteristic absorption peak of absorption Py molecule.2013, the employing hydro-thermal methods such as Wang Qian were prepared a kind of silver nano-grain surface and have been strengthened infrared substrate, for detection of low concentration thiram agricultural chemicals.Result shows, this enhancing substrate can detect and be low to moderate 10
-7the thiram agricultural chemicals of mol/L, strengthens ability up to 150 times to the infrared spectrum of thiram molecule.2013, for Zhu Weicheng etc., chemogenic deposit silver mirror method, sol method and electrochemical plating were at substrate of glass deposition Ag particle island film, and the infrared spectrum of having observed ortho-nitraniline in Ag/Glass substrate strengthens signal.Although the method has obtained significant achievement in electrochemical analysis field, for electrochemical development has brought new opportunity.But the method remains in enhancer limited, repeatability need the defect improving.
The 2nd, the infrared spectrum Enhancement Method of employing metal nano antenna.Process the metal island film that obtains and strengthen infrared absorption spectrum and exist enhancer low in order to solve traditional handicraft, strengthen jitter, the shortcomings such as poor repeatability, based on nanoprocessing technological revolution progress in recent years, employing has controllability, repeatable metal nano antenna strengthens molecule electromagnetic infrared wave around, and the enhancer of infrared spectrum is greatly provided.According to domestic and international present Research, the enhancer of surface-reinforced infrared spectrum is up to reaching 10 at present
5～10
6, realized the breakthrough that part detecting material monomolecular is measured.For example: 2006, Enders etc. on wet chemical method, utilize positive stearylmercaptan as adsorbate at silica crystal adsorption Au nano particle, use transmitted light vertical incidence, the enhancer obtaining is about 2000.2009, the surface that Adato etc. utilize electronic beam photetching process to obtain plasma antenna array strengthened infrared substrate, and for the detection of protein, each antenna array is shown 145 molecules, and detection limit is only 10
-21mol, the enhancer obtaining can reach 10
4～10
5.2013, the researchs such as Wang are made metal grating by standard photolithography techniques and are strengthened infrared absorption spectrum, by at metal-air and metal-substrate interface excitating surface plasma excimer, the resonance peak of one-dimensional grating, along with grating periodic linear is adjustable, is greater than 0.6 × 10 at the edge of metal band to the SEIRA enhancer of polymethyl acid molecule
4.2013, the local surface plasma resonance that Lv Haitao etc. excite in nano-pillar array of structures, greatly strengthened local electromagnetic intensity, and produced strong near-field coupling in different structures, this makes nanostructured have higher sensing sensitivity and great quality factor.2013, Heykel etc. used broadband logarithm period nano-antenna at middle-infrared band 3700cm
-1, 5285.7cm
-1, 6842.8cm
-1realize three resonance wavelengths, strengthened near the electromagnetic intensity of this resonance wavelength.Adopt the method to survey streptavidin molecule, its infrared spectroscopy signals has increased by 10
4doubly.
Although enhancer is greatly improved.But surface plasma body resonant vibration wavelength and its project organization of conventional metals island film and metal Nano structure are one to one.Once after the structural parameters of enhancing substrate are fixing, the enhancing of infrared absorption spectrum is also just fixing, can not adjust maximum absorption peak wavelength.Therefore, the enhancing substrate that processing obtains only can realize the infrared narrow wave band corresponding with this structure realized to spectrum enhancing, cannot realize infrared wide-band spectrum and strengthen.So just make the method to detect single molecular vibration pattern or one matter.Although a harmonic peak can be become to several harmonic peaks by structural design, but be subject to the restriction of nanoprocessing technique.It is still very narrow that the method strengthens wave band, cannot break through the restriction of metal material self dispersion characteristics.For unknown sample, its detectivity is greatly limited, and cannot build one kind of multiple quasi-molecules and detect general-purpose platform, does not have the universal significance of trace Molecular Detection.
Summary of the invention
The object of the invention is to overcome weak point of the prior art, a kind of infrared spectrum enhancing of broadband dynamic tuning and detection method and device based on three-dimensional grapheme nano-antenna proposed, there is cheapness, easy to use, detection sensitivity is high, can mass production, can carry out the advantages such as multiple or polycomponent trace molecular detection, can be used for the field such as environmental monitoring, food security.
For solving technical matters of the present invention, the technical scheme adopting is:
First the present invention proposes a kind of infrared spectrum based on graphene nano antenna and strengthens and sniffer, and described device comprises light source, collimation lens, MEMS grating light modulator and single-point detector based on three-dimensional grapheme nano-antenna; The infrared light that described light source sends is irradiated on the MEMS grating light modulator based on three-dimensional grapheme nano-antenna through collimation lens, the interference signal coverlet point probe of MEMS grating light modulator is surveyed and is obtained, detectable signal passes through Fourier transform demodulation again, carry out spectrum reproduction, realize the detection to trace molecule according to gained spectral information.
In device, MEMS grating light modulator based on three-dimensional grapheme nano-antenna comprises the movable reflection grating in upper strata, metallic reflector, silicon substrate, three-dimensional grapheme nano-antenna and flexible support structure, described metallic reflection is deposited upon on silicon substrate, described three-dimensional grapheme nano-antenna is produced on metallic reflector, the movable reflection grating in described upper strata is supported on silicon substrate by flexible support structure, and cover above metallic reflector and three-dimensional grapheme nano-antenna, and between them, leave suitable clearance, between upper strata removable slit and metallic reflector, prepare and be connected wire by micro fabrication, apply external drive voltage V
1change spacing between metallic reflector and upper strata removable slit, thereby change the catoptrical optical path difference of two-way,
Three-dimensional grapheme nano-antenna in MEMS grating light modulator comprises metal electrode, three-dimensional grapheme film, three-dimensional medium structure, graphene film and dielectric layer; Described cvd dielectric layer is on metallic reflector, graphene film is covered on dielectric layer, on graphene film, there is three-dimensional medium structure, three-dimensional grapheme Film laminated is on three-dimensional medium structure, metal electrode couples together three-dimensional grapheme film and graphene film, between metal electrode and metallic reflector, prepare and connect wire by micro fabrication, apply external voltage V
2form electrically doped loop, Graphene surface conductivity is regulated, Graphene surface plasma coupling resonance frequency tuning, to consistent with the vibration frequency phase modulation of trace molecule, is improved to the interaction of molecule and light, thereby strengthen the absorption of trace molecule to light.
The present invention further proposes to utilize the infrared spectrum that said apparatus is realized to strengthen and detection method: the infrared light that light source sends through lens lighting to MEMS grating light modulator, part illumination is mapped in three-dimensional grapheme nano-antenna, in the time that incident light frequency meets wave vector matching condition, on three-dimensional grapheme film and graphene film, excite Graphene surface plasma bulk effect, form very strong local electromagnetic field, increase the interaction of its near surface trace molecule and light, by the modulation of external voltage, the resonance frequency of surface plasma is adjusted to consistent with the vibration frequency of trace molecule, now, show as trace molecule the incident light of this frequency is had to very strong absorption, be converted into reflected light finally by crossing metallic reflector, this reflected light is with the absorption of vibrations information of three-dimensional grapheme nano-antenna surface trace molecule.Another part light is through the movable reflection grating reflection in upper strata, by external drive voltage, the movable reflection grating in upper strata is controlled, make reflected light form optical path difference between the movable reflection grating in upper strata and lower metal emitting electrode layer, the reflected light in two reflection horizon is interfered, interference signal coverlet point probe is surveyed and is obtained, detectable signal passes through Fourier transform demodulation again, reappears thereby realize spectrum, realizes the detection to trace molecule according to gained spectral information.
According to Drude model, the band inside surface conductivity of Graphene can approximate representation be
Wherein
for brief Planck constant, E
ffor Graphene Fermi level, e is elementary charge, and τ is carrier relaxation time, and ω is incident light angular frequency.Change the Fermi level E of Graphene by external voltage
frealization is tuning to Graphene surface conductivity.The linear wave that meets Graphene surface plasmon polaritons when the inferior wave vector of different diffraction level is
Can form very strong local electromagnetic field on Graphene surface, increase the interaction of its near surface trace molecule and light.Wherein q (ω) is the wave vector of Graphene surface plasma wave, and n is integer,
for nanostructured reciprocal lattice vector.
By external drive voltage, distance between the movable reflection grating in upper strata and lower metal reflection horizon is scanned, make reflected light spacing t between the movable reflection grating in upper strata and lower metal emitting electrode layer form optical path difference △=2tcos θ, the reflected light in two reflection horizon is interfered, record the intensity level W (△) as optical path difference function by single-point detector, just can try to achieve spectral density function by its Fourier transform.
Pass through again Fourier transform demodulation, reappear thereby realize spectrum, realize the detection to trace molecule according to gained spectral information.
The present invention is as follows with respect to the advantage of prior art:
First, the present invention adopts the MEMS grating light modulator based on three-dimensional grapheme nano-antenna, adopts MEMS technology integral process to complete, and avoids the modulating system that uses tradition huge, not only there is optical modulation effect, have again and strengthen the absorption humidification of trace molecule to light, adopt single-point detector simultaneously, it is low that the system of formation has cost, fast response time, highly sensitive, the advantage such as volume is little, low in energy consumption.
Second, Graphene has good chemical stability, thermal stability and gas molecule impenetrability, can effectively prevent the device instability and the oxidizable corrosion that cause due to the direct interaction of trace molecule and conventional metals nanostructured, guarantee stability and the repeatability of device.
The 3rd, Graphene has the two-dimensional electron gas of monolayer carbon atomic building, and its surface plasma resonance peak position is in infrared band, thereby greatly increases the interaction of trace molecule and light, realizes the very big increase of enhancer.
The 4th, free electronic concentration in Graphene can change several orders of magnitude by the modulation of extra electric field, modulating speed is up to 100GHz, and the limit bandwidth that the tunability of Graphene can make its breakthrough have geometry to determine, realizes the broadband adjusting of infrared local light field.Avoid use metal material frequency band range narrow, and problem that can not dynamic tuning.The present invention realizes the adjusting to Graphene surface conductivity by applying external bias voltage, thereby it is tuning to realize Graphene surface plasma resonance frequency broadband.
The 5th, in three-dimensional grapheme nano-antenna,---three-dimensional medium structure---the graphene film version that adopted three-dimensional grapheme film, three-dimensional grapheme nano-antenna has not only increased effective contact area of trace molecule and Graphene, and by exciting surface plasma bulk effect and the coupling effect of three-dimensional grapheme film and lower floor's graphene film, realize the effect that coupling strengthens to Graphene surface plasma wave simultaneously, thereby greatly strengthened the absorption of trace molecule to light.
Visible, this device has good stability, fast response time, highly sensitive, broadband dynamic-tuning, enhancer advantages of higher, be expected to increase substantially detecting material kind and the sensitivity of Infrared Spectrum Technology, there is huge development space and application prospect widely.
Accompanying drawing explanation
Fig. 1 strengthens based on the infrared spectrum of graphene nano antenna and the index path of sniffer;
The MEMS grating light modulator schematic diagram of Fig. 2 based on three-dimensional grapheme nano-antenna;
Fig. 3 three-dimensional grapheme nano-antenna schematic diagram;
Fig. 4 three-dimensional grapheme nano-antenna stereographic map;
Under the different voltage conditions of Fig. 5, three-dimensional grapheme nano-antenna infrared absorption harmonic peak schematic diagram;
Fig. 6 is in the t1 moment, and three-dimensional grapheme nano-antenna strengthens design sketch to molecule infrared absorption spectrum;
Fig. 7 is in the t2 moment, and three-dimensional grapheme nano-antenna strengthens design sketch to molecule infrared absorption spectrum.
Embodiment
Below in conjunction with accompanying drawing, the present invention is further elaborated:
The broadband dynamic tuning infrared spectrum enhancing based on three-dimensional grapheme nano-antenna of the present invention's design and the structure of sniffer are referring to Fig. 1, it comprises: light source 1, MEMS grating light modulator 2 based on three-dimensional grapheme nano-antenna, collimation lens 3, single-point detector 4.Light path is closed: the infrared light that light source 1 sends is irradiated on the MEMS grating light modulator 2 based on three-dimensional grapheme nano-antenna through collimation lens 3, by exciting Graphene surface plasma bulk effect, utilize the modulation of external voltage, the coupling resonance frequency of Graphene surface plasma is adjusted to consistent with the vibration frequency of trace molecule, improve the tested trace molecule electromagnetic intensity in unit space around, increase the interaction of its near surface trace molecule and light, the light that carries the absorption of vibrations information of trace molecule 5 is converted into reflected light by metallic reflector, by external drive voltage, distance between the movable reflection grating in upper strata and lower metal reflection horizon is scanned to formation optical path difference interferes simultaneously, interference signal coverlet point probe 4 is surveyed and is obtained, detectable signal passes through Fourier transform demodulation again, thereby realizing spectrum reappears, realize the detection of detection to the multiple different vibration modes of a kind of molecule and the different vibration modes of different kinds of molecules according to gained spectral information.
Referring to Fig. 2, the MEMS grating light modulator 2 based on three-dimensional grapheme nano-antenna comprises: the movable reflection grating 2-1 in upper strata, external voltage V
12-2, metallic reflector 2-3, silicon substrate 2-4, three-dimensional grapheme nano-antenna 2-5, flexible support structure 2-6, external voltage V
22-7.Metallic reflector 2-3 is deposited on silicon substrate 2-4, three-dimensional grapheme nano-antenna 2-5 is produced on metallic reflector 2-3, the movable reflection grating 2-1 in upper strata is supported on silicon substrate 2-4 by flexible support structure 2-6, and cover above metallic reflector and three-dimensional grapheme nano-antenna, and between them, leave suitable clearance, between upper strata removable slit 2-1 and metallic reflector 2-3, prepare and be connected wire by micro fabrication, apply external drive voltage V
1change spacing between metallic reflector 2-3 and upper strata removable slit 2-1, thereby change the catoptrical optical path difference of two-way.
Referring to Fig. 3 and Fig. 4, three-dimensional grapheme nano-antenna 2-5 comprises metal electrode 2-5-1, three-dimensional grapheme film 2-5-2, and three-dimensional medium structure 2-5-3, graphene film 2-5-4, dielectric structure 2-5-5, can be optimized design according to 3-D nano, structure.Dielectric layer 2-5-5 is deposited on metallic reflector 2-3, graphene film 2-5-4 is covered on dielectric layer 2-5-5, on graphene film, there is three-dimensional medium structure 2-5-3, three-dimensional grapheme film 2-5-2 is compounded on three-dimensional medium structure, metal electrode 2-5-1 couples together three-dimensional grapheme film 2-5-2 and graphene film 2-5-4, between metal electrode 2-5-1 and metallic reflector 2-5-1, prepare and connect wire by micro fabrication, apply external voltage V
22-7 forms electrically doped loop, Graphene surface conductivity is regulated, Graphene surface plasma coupling resonance frequency tuning, to consistent with the vibration frequency phase modulation of trace molecule, is improved to the interaction of molecule and light, thereby strengthen the absorption of trace molecule to light.
The manufacture craft of the MEMS grating light modulator based on three-dimensional grapheme nano-antenna:
Utilize peroxidating technology first on silicon substrate 2-4, depositing layer of metal layer, form metallic reflector 2-3; Deposit layer of transparent infrared optical material formation dielectric layer 2-5-5 in the above and play insulating effect.The graphene film 2-5-4 preparing is transferred on dielectric layer 2-5-5.The three-dimensional medium structure 2-5-3 with three-dimensional grapheme film 2-5-2 preparing is compound on graphene layer 2-5-4.Prepared and connected wire by micro fabrication, external load resistance, at pull-up resistor two ends output voltage, forms electrically doped loop.The flexible support structure 2-6 and the upper strata removable slit 2-1 that utilize sacrificial layer technology to make on metallic reflector 2-3, leave suitable clearance between metallic reflector 2-3 and upper strata removable slit 2-1; Flexible support structure 2-6 one end of supporting upper strata removable slit 2-1 is supported on suprabasil fixed support column, and the other end is connected on the removable slit 2-1 of upper strata; Between upper strata removable slit 2-1 and metallic reflector 2-3, apply external voltage V
12-2, changes spacing between metallic reflector 2-3 and upper strata removable slit 2-1, thereby changes the catoptrical optical path difference of two-way.
The infrared spectrum of this device strengthens and detection method is specially: the directional light part illumination through collimation lens 3 is mapped on three-dimensional grapheme nano-antenna 2-5, in the time that incident light frequency meets wave vector matching condition, on three-dimensional grapheme film 2-5-2 and graphene film 2-5-4, excite Graphene surface plasma bulk effect, form very strong local electromagnetic field at three-dimensional grapheme film 2-5-2 and graphene film 2-5-4 surface, increase the interaction of its near surface trace molecule 5 with light, by the modulation of external voltage 2-7, the resonance frequency of surface plasma is adjusted to consistent with the vibration frequency of trace molecule 5, now, show as trace molecule 5 incident light of this frequency is had to very strong absorption, be converted into reflected light finally by crossing metallic reflector 2-3, this reflected light is with the absorption of vibrations information of three-dimensional grapheme nano-antenna 2-5 surface trace molecule 5, another part light is through the movable reflection grating 2-1 reflection in upper strata, by external drive voltage V
12-2 controls the movable reflection grating 2-1 in upper strata, make reflected light form optical path difference between the movable reflection grating 2-1 in upper strata and lower metal emitting electrode layer 2-3, the reflected light in two reflection horizon is interfered, interference signal coverlet point probe 4 is surveyed and is obtained, detectable signal passes through Fourier transform demodulation again, reappear thereby realize spectrum, realize the detection to trace molecule 5 according to gained spectral information.
Under different voltage conditions, three-dimensional grapheme nano-antenna infrared absorption harmonic peak schematic diagram as shown in Figure 5.Regulate external bias loop voltage to change the surface conductivity of Graphene, thereby realize the broadband dynamic-tuning that strengthens harmonic peak.Different external voltages is respectively for different enhancing harmonic peaks.Numerical value is V1, V2, and V3, the voltage of V4 is corresponding Peak1, Peak2, Peak3 and Peak4 peak respectively.
In the t1 moment, three-dimensional grapheme nano-antenna is carried out infrared spectrum to tested molecule and is strengthened design sketch as shown in Figure 6.In this moment, the harmonic peak of three-dimensional grapheme nano-antenna is modulated onto λ 1 annex, thereby the molecule that is λ 1 to absorbing wavelength carries out the enhancing of spectral absorption signal.
In the t2 moment, three-dimensional grapheme nano-antenna is carried out infrared spectrum to tested molecule and is strengthened design sketch as shown in Figure 7.In this moment, the harmonic peak of three-dimensional grapheme nano-antenna is modulated onto λ 2 annexes, thereby the molecule that is λ 2 to absorbing wavelength carries out the enhancing of spectral absorption signal.
Claims (5)
1. strengthen and sniffer based on the infrared spectrum of graphene nano antenna, it is characterized in that: described device comprises light source, collimation lens, MEMS grating light modulator and single-point detector based on three-dimensional grapheme nano-antenna; The infrared light that described light source sends is irradiated on the MEMS grating light modulator based on three-dimensional grapheme nano-antenna through collimation lens, the interference signal coverlet point probe of MEMS grating light modulator is surveyed and is obtained, detectable signal passes through Fourier transform demodulation again, carry out spectrum reproduction, realize the detection to trace molecule according to gained spectral information;
The described MEMS grating light modulator based on three-dimensional grapheme nano-antenna comprises the movable reflection grating in upper strata, metallic reflector, silicon substrate, three-dimensional grapheme nano-antenna and flexible support structure, described metallic reflection is deposited upon on silicon substrate, described three-dimensional grapheme nano-antenna is produced on metallic reflector, the movable reflection grating in described upper strata is supported on silicon substrate by flexible support structure, and cover above metallic reflector and three-dimensional grapheme nano-antenna, and between them, leave suitable clearance, between upper strata removable slit and metallic reflector, prepare and be connected wire by micro fabrication, apply external drive voltage V
1change spacing between metallic reflector and upper strata removable slit, thereby change the catoptrical optical path difference of two-way,
Described three-dimensional grapheme nano-antenna comprises metal electrode, three-dimensional grapheme film, three-dimensional medium structure, graphene film and dielectric layer; Described cvd dielectric layer is on metallic reflector, graphene film is covered on dielectric layer, on graphene film, there is three-dimensional medium structure, three-dimensional grapheme Film laminated is on three-dimensional medium structure, metal electrode couples together three-dimensional grapheme film and graphene film, between metal electrode and metallic reflector, prepare and connect wire by micro fabrication, apply external voltage V
2form electrically doped loop, Graphene surface conductivity is regulated, Graphene surface plasma coupling resonance frequency tuning, to consistent with the vibration frequency phase modulation of trace molecule, is improved to the interaction of molecule and light, thereby strengthen the absorption of trace molecule to light.
2. the infrared spectrum based on graphene nano antenna according to claim 1 strengthens and sniffer, it is characterized in that: described 3-D nano, structure is nano-pore, nano-pillar, nanometer platform or nanocone, its horizontal section diameter is 20nm～800nm, and height or the degree of depth are 30nm～600nm.
3. the infrared spectrum based on graphene nano antenna according to claim 2 strengthens and sniffer, it is characterized in that: the material of described three-dimensional medium structure and dielectric layer is infrared band transparent material silicon, calcium fluoride, germanium, gallium arsenide etc.
4. the infrared spectrum based on graphene nano antenna according to claim 2 strengthens and sniffer, it is characterized in that: 1～20 layer of described graphene film.
5. the method for utilizing the device described in claim 1-4 to carry out infrared spectrum enhancing and detection, it is characterized in that: the infrared light that light source sends is irradiated on the MEMS grating light modulator based on three-dimensional grapheme nano-antenna through collimation lens, part illumination is mapped in three-dimensional grapheme nano-antenna, in the time that incident light frequency meets wave vector matching condition, on three-dimensional grapheme film and graphene film, excite Graphene surface plasma bulk effect, form very strong local electromagnetic field, improve the tested molecule electromagnetic intensity in unit space around, increase the interaction of its near surface trace molecule and light, by external voltage V
2modulation, resonance wavelength is changed within the scope of broadband, when the coupling resonance frequency of Graphene surface plasma is adjusted to consistent with the vibration frequency of trace molecule, show as trace molecule the incident light of this frequency is had to very strong absorption, be converted into reflected light finally by crossing metallic reflector, this reflected light is with the absorption of vibrations information of three-dimensional grapheme nano-antenna surface trace molecule, another part light is through the movable reflection grating reflection in upper strata, by external drive voltage V
1the movable reflection grating in upper strata is controlled, make reflected light form optical path difference between the movable reflection grating in upper strata and lower metal emitting electrode layer, the reflected light in two reflection horizon is interfered, interference signal coverlet point probe is surveyed and is obtained, detectable signal passes through Fourier transform demodulation again, carry out spectrum reproduction, realize the detection to trace molecule according to gained spectral information.
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