CN109586042A - A kind of wave absorbing device and preparation method thereof - Google Patents
A kind of wave absorbing device and preparation method thereof Download PDFInfo
- Publication number
- CN109586042A CN109586042A CN201811465647.6A CN201811465647A CN109586042A CN 109586042 A CN109586042 A CN 109586042A CN 201811465647 A CN201811465647 A CN 201811465647A CN 109586042 A CN109586042 A CN 109586042A
- Authority
- CN
- China
- Prior art keywords
- layer
- metal
- graphene
- metal grating
- grating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q17/00—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
- H01Q17/007—Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with means for controlling the absorption
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01Q—ANTENNAS, i.e. RADIO AERIALS
- H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
Abstract
The present invention provides a kind of wave absorbing devices and preparation method thereof, including substrate and the first metal electrode being sequentially located on substrate, the first metal grating layer, first medium layer, graphene hyperbolic layer, second dielectric layer and the second metal grating layer；Graphene hyperbolic layer includes the graphene layer and third dielectric layer that multilayer is arranged alternately；Second metal grating layer and the first metal grating layer are all two-dimensional square periodic array, and the period of the second metal grating layer is different with the period of the first metal grating layer.First metal grating layer and the second metal grating layer provide wave vector compensation respectively, excite the surface phasmon of graphene hyperbolic layer, by incident electromagnetic wave local in the graphene hyperbolic layer with high loss, so that the electromagnetic wave of certain wavelength is completely absorbed.Also, since the first metal grating layer is different with the period of the second metal grating layer, the phasmon wave of two different wave lengths can be excited, and then the perfect of dual wavelength may be implemented and absorb.
Description
Technical field
The present invention relates to wave absorbing device technical fields, more specifically to a kind of wave absorbing device and preparation method thereof.
Background technique
Perfect wave absorbing device (Perfect Metamaterial Absorber, PMA) is that one kind can inhale electromagnetic wave completely
The device of receipts.Since Meta Materials have extraordinary physical property not available for natural material, and the perfection designed using Meta Materials
Wave absorbing device has many advantages, such as that absorptivity is high and thickness is thin, therefore, has been received using the perfect wave absorbing device that Meta Materials make
The extensive concern of people.
In order to solve the problems, such as that the Meta Materials perfection wave absorbing device absorption peak of early stage fixes this, researchers devise some bases
In the perfect wave absorbing device of active control material such as graphene, vanadium dioxide etc..Since graphene has excellent photoelectric characteristic, and
Fermi level can be regulated and controled by modes such as chemical doping, gate voltages, therefore, be answered using perfect wave absorbing device prepared by grapheme material
With relatively broad.
But currently based in the perfect wave absorbing device of grapheme material, graphene used is only that single layer or minority are several layers of
Graphene film or graphene micro-nano structure array, this results in the electromagnetic wave absorptivity of perfect wave absorbing device lower.
Summary of the invention
In view of this, the present invention provides a kind of wave absorbing device and preparation method thereof, to solve the electromagnetism of existing wave absorbing device
The lower problem of wave absorptivity.
To achieve the above object, the invention provides the following technical scheme:
A kind of wave absorbing device, including substrate and the first metal electrode being sequentially located on the substrate, the first metal grating
Layer, first medium layer, graphene hyperbolic layer, second dielectric layer and the second metal grating layer；
The graphene hyperbolic layer includes the graphene layer and third dielectric layer that multilayer is arranged alternately；
Second metal grating layer and first metal grating layer are all two-dimensional square periodic array, and described
The period of two metal grating layers is different with the period of first metal grating layer.
It optionally, further include the second metal electrode and voltage control circuit；
Second metal electrode wraps up the side of the graphene hyperbolic layer；
The voltage control circuit is connected with first metal electrode and second metal electrode, for passing through voltage
Regulation, changes the absorption peak of the wave absorbing device.
Optionally, the number of plies of the graphene layer and the third dielectric layer is greater than or equal to 3, is less than or equal to 20.
Optionally, the period of first metal grating layer is twice of the period of second metal grating layer.
Optionally, the period of first metal grating layer is 500nm-50 μm；
The period of second metal grating layer is 500nm-50 μm.
Optionally, the material of the dielectric layer includes silica, aluminium oxide, polyimide resin and magnesium fluoride.
Optionally, the material of first metal grating layer includes gold, silver, platinum, aluminium and copper；
The material of second metal grating layer includes gold, silver, platinum, aluminium and copper；
The material of first metal electrode and second metal electrode includes gold, silver, platinum, aluminium and copper.
A kind of preparation method of wave absorbing device, comprising:
Substrate is provided；
The first metal layer is formed over the substrate, partial etching is carried out to the first metal layer, to form the first gold medal
Belong to electrode and the first metal grating layer positioned at first surface of metal electrode, first metal grating layer is two-dimensional side
Block period array；
First medium layer is formed in the first metal grating layer surface；
Graphene hyperbolic layer is formed in the first medium layer surface, the graphene hyperbolic layer is arranged alternately including multilayer
Graphene layer and third dielectric layer；
Second dielectric layer is formed in the graphene hyperbolic layer surface；
Second metal layer is formed in the second medium layer surface, and the second metal layer is performed etching, forms the
Two metal grating layers, second metal grating layer are two-dimensional square periodic array, and week of second metal grating layer
Phase is different with the period of first metal grating layer.
Optionally, further includes:
Form the second metal electrode for wrapping up the graphene hyperbolic layer；
The voltage control circuit being connected with first metal electrode and second metal electrode is formed, to pass through voltage
Regulation, changes the absorption peak of the wave absorbing device.
Optionally, forming graphene hyperbolic layer in the first medium layer surface includes:
Using graphene layer described in PMMA technique transfers and the deposition third dielectric layer.
Compared with prior art, the technical scheme provided by the invention has the following advantages:
Wave absorbing device provided by the present invention and preparation method thereof, the first metal grating layer and the second metal grating layer mention respectively
It is compensated for wave vector, excites the surface phasmon of graphene hyperbolic layer, by incident electromagnetic wave local in the stone with high loss
In black alkene hyperbolic layer, so that the electromagnetic wave of certain wavelength is completely absorbed, so that the electromagnetic wave absorptivity of wave absorbing device
It is higher.Also, since the first metal grating layer is different with the period of the second metal grating layer, two differences can be excited
The phasmon wave of wavelength, and then the perfect of dual wavelength may be implemented and absorb, further increase the electromagnetic wave absorptivity of wave absorbing device.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 is the structural schematic diagram of wave absorbing device provided in an embodiment of the present invention；
Fig. 2 is the top view of the first metal grating layer provided in an embodiment of the present invention；
Fig. 3 is the top view of the second metal grating layer provided in an embodiment of the present invention；
Fig. 4 is the structural parameters schematic diagram of wave absorbing device provided in an embodiment of the present invention；
Fig. 5 is the result schematic diagram of the electromagnetic finite meta analysis of wave absorbing device provided in an embodiment of the present invention；
Fig. 6 is a kind of absorption peak schematic diagram of wave absorbing device provided in an embodiment of the present invention；
Fig. 7 is the flow chart of the preparation method of wave absorbing device provided in an embodiment of the present invention.
Specific embodiment
It is core of the invention thought above, to keep the above objects, features and advantages of the present invention more obvious easily
Understand, following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention is clearly and completely retouched
It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, every other implementation obtained by those of ordinary skill in the art without making creative efforts
Example, shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of wave absorbing devices of electromagnetic wave absorption, are applied to the technologies such as radar and photodetection neck
Domain.As shown in Figure 1, wave absorbing device provided in an embodiment of the present invention includes substrate 10 and the first gold medal being sequentially located on substrate 10
Belong to electrode 11, the first metal grating layer 12, first medium layer 13, graphene hyperbolic layer 14, second dielectric layer 15 and the second metal
Grating layer 16.
Wherein, graphene hyperbolic layer 14 includes the graphene layer 140 and third dielectric layer 141 that multilayer is arranged alternately.It is optional
Ground, graphene layer 140 are the graphene or intrinsic graphene of the graphene of n-type doping, p-type doping.Second metal grating layer 16
It is all two-dimensional square periodic array with the first metal grating layer 12, and the period of the second metal grating layer 16 and the first metal light
The period of grid layer 12 is different.
In the embodiment of the present invention, the first metal grating layer 12 and the second metal grating layer 16 provide wave vector compensation respectively, swash
The surface phasmon for sending out graphene hyperbolic layer 14, by incident electromagnetic wave local in the graphene hyperbolic layer 14 with high loss
In, so that the electromagnetic wave of certain wavelength is completely absorbed, so that the absorptivity of wave absorbing device is higher.Also, due to
One metal grating layer 12 is different with the period of the second metal grating layer 16, therefore, can excite waiting from sharp for two different wave lengths
Elementary wave, and then the perfect of dual wavelength may be implemented and absorb, further increase the electromagnetic wave absorptivity of wave absorbing device.
Further, wave absorbing device provided in an embodiment of the present invention further includes the second metal electrode and voltage control circuit (figure
In be not shown).Wherein, the side of the second metal electrode package graphene hyperbolic layer 14；Voltage control circuit and the first metal electricity
Pole 11 is connected with the second metal electrode, for changing the absorption peak of wave absorbing device by regulating and controlling voltage.Optionally, voltage control electricity
Road includes voltage source and control circuit etc..
Since when the fermi level of graphene changes, the characteristic of graphene hyperbolic layer 14 can also change, because
This, will also be changed, i.e., by the surface plasmon resonance peak that the first metal grating layer and the second metal grating layer excite
The position of the absorption peak of wave absorbing device can also change.Since the fermi level (corresponding conductance) of graphene can pass through external voltage
Adjusting size, therefore, the embodiment of the present invention change the external voltage of graphene hyperbolic layer 14 by voltage control circuit, so as to inhale
The absorption peak of wave device is changed with the modulation of external voltage, so that the electromagnetism of different wave length can be absorbed in wave absorbing device
Wave.Also, since graphene hyperbolic layer 14 includes two kinds of materials of graphene and dielectric layer, graphene hyperbolic layer 14 has
The characteristic of hyperbolic material, so that the micro variation of graphene fermi level, can be obtained effective modulation of wave absorbing device absorption peak, from
And make the modulation sensitivity of wave absorbing device higher.
Optionally, the number of plies of graphene layer 140 and third dielectric layer 141 is greater than or equal to 3, is less than or equal to 20, such as stone
Black alkene hyperbolic layer 14 includes 8 layers of graphene layer 140 and 8 layer third dielectric layer 141, and graphene layer 140 and third dielectric layer 141
It is arranged alternately on the direction perpendicular to substrate 10, is based on this, can make wave absorbing device while with higher absorption rate, inhaled
The thickness of wave device is also relatively thin, convenient for wave absorbing device every field application.
Optionally, the period of the first metal grating layer 12 is 500nm-50 μm；The period of second metal grating layer 16 is
500nm-50μm.Optionally, the period of the first metal grating layer 12 is twice of the period of the second metal grating layer 16.Such as Fig. 2
Shown, the first metal grating layer 12 is the array of 2 rows 2 column arrangement, as shown in figure 3, the second metal grating layer 16 is 4 rows 4 column row
The array of cloth, the period of the first metal grating layer 12 shown in Fig. 2 are the two of the period of the second metal grating layer 16 shown in Fig. 3
Times.It should be noted that the grating surrounding in the first metal grating layer 12 is filled with dielectric layer, to form even curface, with
Just first medium layer 13 is deposited in the first metal grating layer 12.
Since the absorption peak of wave absorbing device is more sensitive to the material and structural parameters of wave absorbing device, meter can be passed through
The structural parameters of adjustment wave absorbing device are calculated, the period of the first metal grating layer 12 and the second metal grating layer 16 is such as adjusted, can make
The assimilation effect for obtaining wave absorbing device is optimal.
In addition, it should be noted that, the material of the dielectric layer in the embodiment of the present invention include but are not limited to silica,
Aluminium oxide, polyimide resin, magnesium fluoride.The material of first metal grating layer 12 include but are not limited to gold, silver, platinum, aluminium or
Copper；The material of second metal grating layer 16 includes but are not limited to gold, silver, platinum, aluminium or copper.First metal electrode 11 and the second gold medal
The material for belonging to electrode includes but are not limited to gold, silver, platinum, aluminium or copper.
In one particular embodiment of the present invention, as shown in figure 4, w1=200nm, h1=100nm, P2=400nm, t1
=40nm, t2=40nm, w2=400nm, h2=700nm, t3=10m, P1=800nm.The period of first metal grating layer 12
It is twice of the period of the second metal grating layer 16.The layer of graphene layer 140 and third dielectric layer 141 in graphene hyperbolic layer 14
Number is 8, third dielectric layer 141 with a thickness of 10nm, graphene layer 140 with a thickness of 0.5nm.The folding of All Media in the structure
The rate of penetrating is set as 1.25, and metal material used in metal grating layer and metal electrode is Au, and the fermi level of graphene is set as
0.3eV, then the result of electromagnetic finite meta analysis is as shown in figure 5, wherein Fig. 5 (a) is two infrared bands by wave absorbing device
The schematic diagram of absorption peak, absorptivity is close to 1；Fig. 5 (b) is influence of the size of reflection graphene fermi level to absorption peak
Schematic diagram；Fig. 5 (c) and Fig. 5 (d) is the schematic diagram for reflecting influence of 141 thickness of third dielectric layer to absorption peak；5 (e) be anti-
Reflect the schematic diagram of influence of the number of plies of 140/ third dielectric layer 141 of graphene layer in graphene hyperbolic layer 14 to absorption peak；Fig. 5
It (f) is the schematic diagram of influence of the metal grating layer period size to absorption peak in reflection wave absorbing device, at this time the second metal grating layer
16 and first the period ratio of metal grating layer 12 be fixed as 1:2, what is changed in figure is the period size of integral unit.As it can be seen that inhaling
The structural parameters of wave device play decisive role to absorption peak, and by the change to graphene fermi level, it can be achieved that absorbing
The regulation at peak plays the effect of active control.Fig. 6 is the absorption peak schematic diagram of wave absorbing device provided in an embodiment of the present invention,
Relatively good assimilation effect can be reached between 0 °~70 °.
The embodiment of the invention also provides a kind of preparation methods of wave absorbing device, as shown in fig. 7, comprises:
S101: substrate is provided；
S102: being formed on the substrate the first metal layer, carries out partial etching to the first metal layer, to form the first metal electricity
Pole and the first metal grating layer positioned at the first surface of metal electrode, the first metal grating layer are two-dimensional square periodic array；
S103: first medium layer is formed in the first metal grating layer surface；
S104: graphene hyperbolic layer is formed in first medium layer surface, graphene hyperbolic layer includes what multilayer was arranged alternately
Graphene layer and third dielectric layer；
S105: second dielectric layer is formed in graphene hyperbolic layer surface；
S106: second metal layer is formed in second medium layer surface, and second metal layer is performed etching, forms the second gold medal
Belong to grating layer, the second metal grating layer is two-dimensional square periodic array, and the period of the second metal grating layer and the first metal
The period of grating layer is different.
Wherein, forming graphene hyperbolic layer in first medium layer surface includes:
Using PMMA technique transfers graphene layer and deposition third dielectric layer.
Specifically, after providing substrate, the first metal layer is formed on the substrate, forms photoresist on the first metal layer surface
And after carrying out exposure development, the first exposure mask is formed, partial etching then is carried out to the first metal layer, to form the first metal electrode
With the grating array for being located at the first surface of metal electrode, optionally, grating array is battle array of two-dimensional square period as shown in Figure 2
Column.After removing the first exposure mask, the second exposure mask of covering grating array is formed, then metallization medium layer, so that dielectric layer fills up light
Gap between grid array, to form first metal grating layer with flat surface.
Later, first medium layer is deposited in the first metal grating layer surface, it is double to form graphene in first medium layer surface
Bent layer, wherein graphene layer can be transferred to by lining using PMMA (poly methyl methacrylate, acrylic) technology
On bottom, and third dielectric layer is deposited on graphene layer.Then, graphene hyperbolic layer surface deposits second dielectric layer, and the
Second medium layer surface depositing second metal layer, and second metal layer is performed etching, form the second grating array i.e. the second metal
Grating layer, the second metal grating layer are two-dimensional square periodic array as shown in Figure 3, and the period of the second metal grating layer and
The period of first metal grating layer is different.
In the embodiment of the present invention, the first metal grating layer and the second metal grating layer provide wave vector compensation respectively, excite stone
The surface phasmon of black alkene hyperbolic layer, by incident electromagnetic wave local in the graphene hyperbolic layer with high loss, thus
The electromagnetic wave of certain wavelength can be made to be completely absorbed, so that the absorptivity of wave absorbing device is higher.Also, due to the first metal light
The period of grid layer and the second metal grating layer is different, therefore, can excite the phasmon wave of two different wave lengths, and then can be with
It realizes that the perfect of dual wavelength absorbs, further increases the electromagnetic wave absorptivity of wave absorbing device.
Further, the preparation method of wave absorbing device provided in an embodiment of the present invention, further includes:
Form the second metal electrode of package graphene hyperbolic layer；
The voltage control circuit being connected with the first metal electrode and the second metal electrode is formed, to change by regulating and controlling voltage
Become the absorption peak of wave absorbing device.
Since when the fermi level of graphene changes, the characteristic of graphene hyperbolic layer can also change, therefore,
It will also be changed by the surface plasmon resonance peak that the first metal grating layer and the second metal grating layer excite, i.e. suction wave
The position of the absorption peak of device can also change.Since the fermi level (corresponding conductance) of graphene can be adjusted by external voltage
Size, therefore, the embodiment of the present invention change the external voltage of graphene hyperbolic layer by voltage control circuit, so that wave absorbing device
Absorption peak is changed with the modulation of external voltage, so that the electromagnetic wave of different wave length can be absorbed in wave absorbing device.And
And since graphene hyperbolic layer includes two kinds of materials of graphene and dielectric layer, graphene hyperbolic layer has hyperbolic material
Characteristic, so that the micro variation of graphene fermi level, can be obtained effective modulation of wave absorbing device absorption peak, so that inhaling wave
The modulation sensitivity of device is higher.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For device disclosed in embodiment
For, since it is corresponded to the methods disclosed in the examples, so being described relatively simple, related place is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (10)
1. a kind of wave absorbing device, which is characterized in that including substrate and the first metal electrode being sequentially located on the substrate,
One metal grating layer, first medium layer, graphene hyperbolic layer, second dielectric layer and the second metal grating layer；
The graphene hyperbolic layer includes the graphene layer and third dielectric layer that multilayer is arranged alternately；
Second metal grating layer and first metal grating layer are all two-dimensional square periodic array, and second gold medal
The period for belonging to grating layer is different with the period of first metal grating layer.
2. wave absorbing device according to claim 1, which is characterized in that further include the second metal electrode and voltage control circuit；
Second metal electrode wraps up the side of the graphene hyperbolic layer；
The voltage control circuit is connected with first metal electrode and second metal electrode, for passing through voltage tune
Control, changes the absorption peak of the wave absorbing device.
3. wave absorbing device according to claim 1, which is characterized in that the number of plies of the graphene layer and the third dielectric layer
More than or equal to 3, less than or equal to 20.
4. wave absorbing device according to claim 1, which is characterized in that the period of first metal grating layer is described second
Twice of the period of metal grating layer.
5. wave absorbing device according to claim 1, which is characterized in that the period of first metal grating layer is 500nm-50
μm；
The period of second metal grating layer is 500nm-50 μm.
6. wave absorbing device according to claim 1, which is characterized in that the material of the dielectric layer includes silica, oxidation
Aluminium, polyimide resin and magnesium fluoride.
7. wave absorbing device according to claim 2, which is characterized in that the material of first metal grating layer include gold, silver,
Platinum, aluminium and copper；
The material of second metal grating layer includes gold, silver, platinum, aluminium and copper；
The material of first metal electrode and second metal electrode includes gold, silver, platinum, aluminium and copper.
8. a kind of preparation method of wave absorbing device characterized by comprising
Substrate is provided；
The first metal layer is formed over the substrate, partial etching is carried out to the first metal layer, to form the first metal electricity
Pole and the first metal grating layer positioned at first surface of metal electrode, first metal grating layer are two-dimensional square week
Phase array；
First medium layer is formed in the first metal grating layer surface；
Graphene hyperbolic layer is formed in the first medium layer surface, the graphene hyperbolic layer includes the stone that multilayer is arranged alternately
Black alkene layer and third dielectric layer；
Second dielectric layer is formed in the graphene hyperbolic layer surface；
Second metal layer is formed in the second medium layer surface, and the second metal layer is performed etching, forms the second gold medal
Belong to grating layer, second metal grating layer be two-dimensional square periodic array, and the period of second metal grating layer and
The period of first metal grating layer is different.
9. according to the method described in claim 8, it is characterized by further comprising:
Form the second metal electrode for wrapping up the graphene hyperbolic layer；
The voltage control circuit being connected with first metal electrode and second metal electrode is formed, to pass through voltage tune
Control, changes the absorption peak of the wave absorbing device.
10. according to the method described in claim 8, it is characterized in that, forming graphene hyperbolic in the first medium layer surface
Layer include:
Using graphene layer described in PMMA technique transfers and the deposition third dielectric layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811465647.6A CN109586042B (en) | 2018-12-03 | 2018-12-03 | Wave absorber and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811465647.6A CN109586042B (en) | 2018-12-03 | 2018-12-03 | Wave absorber and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109586042A true CN109586042A (en) | 2019-04-05 |
| CN109586042B CN109586042B (en) | 2020-08-28 |
Family
ID=65926414
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811465647.6A Active CN109586042B (en) | 2018-12-03 | 2018-12-03 | Wave absorber and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109586042B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111682319A (en) * | 2020-04-14 | 2020-09-18 | 中国计量大学 | Design method of novel broadband tunable coding super surface based on metal-graphene |
| CN116818704A (en) * | 2023-03-09 | 2023-09-29 | 苏州荣视软件技术有限公司 | High-precision full-automatic detection method, equipment and medium for semiconductor flaw AI |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1463631A1 (en) * | 2001-12-20 | 2004-10-06 | Flex Products, Inc. | Achromatic multilayer diffractive pigments and foils |
| CN103594792A (en) * | 2013-11-21 | 2014-02-19 | 中国科学院上海微系统与信息技术研究所 | Manufacturing method of antenna device with combination between hyperbolic dielectric and graphenenanoribbon |
| CN103776790A (en) * | 2014-02-25 | 2014-05-07 | 重庆大学 | Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna |
| CN103872153A (en) * | 2014-03-19 | 2014-06-18 | 中国科学技术大学 | Cascading solar cell with metal micro-nano structure as center electrode |
| CN104570402A (en) * | 2013-10-12 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spatial light modulator based on metamaterial structures and preparation method for spatial light modulator |
| US20150357504A1 (en) * | 2013-01-30 | 2015-12-10 | Suzhou Institute Of Nano-Tech And Nano-Bionics Of Chinese Academy Of Science | Graphene transistor optical detector based on metamaterial structure and application thereof |
| CN105572865A (en) * | 2016-01-25 | 2016-05-11 | 中国科学院上海光学精密机械研究所 | Spectrum selective absorber based on single-layer graphene and Bragg grating |
| CN106025572A (en) * | 2016-05-26 | 2016-10-12 | 华北水利水电大学 | Partial non-periodic structure based graphene ultra-broadband wave absorber |
| CN107452844A (en) * | 2017-07-21 | 2017-12-08 | 中国工程物理研究院电子工程研究所 | The high frequency quantum dot single-photon source of hyperbolic Meta Materials composite grating enhancing |
| CN107479296A (en) * | 2017-08-14 | 2017-12-15 | 安徽大学 | Tunable intermediate infrared narrow-band absorber |
| CN107579354A (en) * | 2017-08-11 | 2018-01-12 | 中国科学技术大学 | Based on double fiber ring resonator structure, changeable wideband THz wave perfect absorber |
| CN108363126A (en) * | 2018-02-24 | 2018-08-03 | 南京信息工程大学 | A kind of unrelated wide angle graphene absorber of polarization |
| CN207689699U (en) * | 2018-01-19 | 2018-08-03 | 中国计量大学 | A kind of double frequency-band Terahertz wave absorbing device based on band and continuous layer graphene |
| CN208173803U (en) * | 2018-05-15 | 2018-11-30 | 中国计量大学 | Terahertz wave absorbing device that a kind of broadband based on graphene and Meta Materials is adjustable |
| CN109543288A (en) * | 2018-11-16 | 2019-03-29 | 中国舰船研究设计中心 | Based on the high power radiation source design method for being mutated topological state |
-
2018
- 2018-12-03 CN CN201811465647.6A patent/CN109586042B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1463631A1 (en) * | 2001-12-20 | 2004-10-06 | Flex Products, Inc. | Achromatic multilayer diffractive pigments and foils |
| US20150357504A1 (en) * | 2013-01-30 | 2015-12-10 | Suzhou Institute Of Nano-Tech And Nano-Bionics Of Chinese Academy Of Science | Graphene transistor optical detector based on metamaterial structure and application thereof |
| CN104570402A (en) * | 2013-10-12 | 2015-04-29 | 中国科学院苏州纳米技术与纳米仿生研究所 | Spatial light modulator based on metamaterial structures and preparation method for spatial light modulator |
| CN103594792A (en) * | 2013-11-21 | 2014-02-19 | 中国科学院上海微系统与信息技术研究所 | Manufacturing method of antenna device with combination between hyperbolic dielectric and graphenenanoribbon |
| CN103776790A (en) * | 2014-02-25 | 2014-05-07 | 重庆大学 | Infrared spectrum enhancement and detection method and infrared spectrum enhancement and detection device based on graphene nano antenna |
| CN103872153A (en) * | 2014-03-19 | 2014-06-18 | 中国科学技术大学 | Cascading solar cell with metal micro-nano structure as center electrode |
| CN105572865A (en) * | 2016-01-25 | 2016-05-11 | 中国科学院上海光学精密机械研究所 | Spectrum selective absorber based on single-layer graphene and Bragg grating |
| CN106025572A (en) * | 2016-05-26 | 2016-10-12 | 华北水利水电大学 | Partial non-periodic structure based graphene ultra-broadband wave absorber |
| CN107452844A (en) * | 2017-07-21 | 2017-12-08 | 中国工程物理研究院电子工程研究所 | The high frequency quantum dot single-photon source of hyperbolic Meta Materials composite grating enhancing |
| CN107579354A (en) * | 2017-08-11 | 2018-01-12 | 中国科学技术大学 | Based on double fiber ring resonator structure, changeable wideband THz wave perfect absorber |
| CN107479296A (en) * | 2017-08-14 | 2017-12-15 | 安徽大学 | Tunable intermediate infrared narrow-band absorber |
| CN207689699U (en) * | 2018-01-19 | 2018-08-03 | 中国计量大学 | A kind of double frequency-band Terahertz wave absorbing device based on band and continuous layer graphene |
| CN108363126A (en) * | 2018-02-24 | 2018-08-03 | 南京信息工程大学 | A kind of unrelated wide angle graphene absorber of polarization |
| CN208173803U (en) * | 2018-05-15 | 2018-11-30 | 中国计量大学 | Terahertz wave absorbing device that a kind of broadband based on graphene and Meta Materials is adjustable |
| CN109543288A (en) * | 2018-11-16 | 2019-03-29 | 中国舰船研究设计中心 | Based on the high power radiation source design method for being mutated topological state |
Non-Patent Citations (1)
| Title |
|---|
| M.GRANDE等: "Graphene-based absorber exploiting guided mode resonances in one-dimensional gratings", 《OPTICS EXPRESS》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111682319A (en) * | 2020-04-14 | 2020-09-18 | 中国计量大学 | Design method of novel broadband tunable coding super surface based on metal-graphene |
| CN116818704A (en) * | 2023-03-09 | 2023-09-29 | 苏州荣视软件技术有限公司 | High-precision full-automatic detection method, equipment and medium for semiconductor flaw AI |
| CN116818704B (en) * | 2023-03-09 | 2024-02-02 | 苏州荣视软件技术有限公司 | High-precision full-automatic detection method, equipment and medium for semiconductor flaw AI |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109586042B (en) | 2020-08-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9444002B2 (en) | Graphene transistor optical detector based on metamaterial structure and application thereof | |
| CN103259097B (en) | A kind of Terahertz metamaterial modular construction and preparation thereof and regulate and control method | |
| US9348076B2 (en) | Polarizer with variable inter-wire distance | |
| CN208173803U (en) | Terahertz wave absorbing device that a kind of broadband based on graphene and Meta Materials is adjustable | |
| EP3508893B1 (en) | Light absorbing body, bolometer, infrared ray absorbing body, solar thermal power generating device, radiant cooling film, and method for manufacturing light absorbing body | |
| CN104535198B (en) | Terahertz micro-metering bolometer based on meta-material absorber and preparation method thereof | |
| CN107316915A (en) | Photodetector of integrated graphene molybdenum disulfide of visible light wave range and preparation method thereof | |
| CN104319471A (en) | Tunable nanometer antenna and preparation method thereof | |
| RU2754985C2 (en) | Field-effect tunable absorber with near-zero dielectric permittivity | |
| CN112255715A (en) | Method for realizing broadband light absorption enhancement based on ultrathin metal film and wave absorbing device | |
| CN107170849B (en) | A kind of super surface texture of stripe shape polarizes related narrowband detector and its preparation and application | |
| CN109586042A (en) | A kind of wave absorbing device and preparation method thereof | |
| JP6126490B2 (en) | Optical filter | |
| CN111045121B (en) | Polarization-controlled surface plasmon dual-function super surface and design and preparation method thereof | |
| CN207834582U (en) | A kind of polarization based on graphene multi-resonant does not depend on broadband Terahertz wave absorbing device | |
| KR20130137712A (en) | Light-detection systems | |
| Tu et al. | Hydrogenated amorphous silicon solar cell on glass substrate patterned by hexagonal nanocylinder array | |
| TWI512963B (en) | Photo detector | |
| CN108878537A (en) | Thin film transistor (TFT) and preparation method thereof, display panel and display device | |
| CN113782621A (en) | Plasmon enhanced tellurium-cadmium-mercury microcavity infrared detector and preparation method thereof | |
| CN108375812B (en) | Three-frequency absorber based on optical Tamm state | |
| CN103681962B (en) | Based on the photodetector preparation method vertically arranging semiconductor nanowires | |
| CN109613633B (en) | Ultra-narrow multi-band optical sensor | |
| CN102096123B (en) | Method for preparing planar zoom magnification super-resolution imaging lens | |
| Hyun Lee et al. | Light confinement-induced antireflection of ZnO nanocones |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |