CN104319471A - Tunable nanometer antenna and preparation method thereof - Google Patents
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- CN104319471A CN104319471A CN201410553995.4A CN201410553995A CN104319471A CN 104319471 A CN104319471 A CN 104319471A CN 201410553995 A CN201410553995 A CN 201410553995A CN 104319471 A CN104319471 A CN 104319471A
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Abstract
The invention provides a tunable nanometer antenna and a preparation method thereof. The tunable nanometer antenna comprises three layers which comprise an upper layer metal structure, a middle layer single-layer grapheme and bottom substrate materials; the upper layer metal structure is a bowknot structure; the bowknot structure is formed by two isosceles trapezoids and a square. The preparation method of the tunable nanometer antenna comprises the following steps of covering the layer of single-layer grapheme on a silicon dioxide substrate through a chemical vapor deposition method; coating resist coating in a rotary mode on the single-layer grapheme; achieving structural corrosion and developing through the electron beam lithography technology; achieving evaporation of a golden layer through the vacuum electron beam evaporation technology; obtaining a final nanometer optical antenna through a lift-off process. The tunable nanometer antenna has the advantages of being small in size due to the fact that the thickness of a metamaterial structure is in the dozens of nanometer level and beneficial to application in integration optics; being high in signal intensity due to the fact that magnetic field enhance through the nanometer optical antenna can achieve more than 20000 times under illumination of incident light under specific frequency; being obvious in modulation effect.
Description
Technical field
The present invention relates to integrated optics field, particularly relate to tunable nano-antenna and preparation method thereof.
Background technology
Nano-antenna only produces resonance to the electromagnetic wave of characteristic frequency usually, only has and just can produce Localized field enhancement when incident light is specific wavelength, therefore do not have tunable character.
Current most nano-antenna can only provide electric Localized field enhancement, and can not provide strong magnetic Localized field enhancement.
Realize the regulating power of tunable nano-antenna to response wave length in middle-infrared band at present limited, the enhancing intensity of local area field is lower simultaneously.
Nanocomposite optical antenna forms by having periodic rare metal (gold, silver, copper etc.) nanostructure, its general principle is when light is radiated at metal and dielectric interface, because the dielectric constant of metal material is negative at visible light wave range and infrared band, the free electron of metal surface will vibrate along with electric field, resonance will be produced when the frequency of oscillation of electronics is consistent with incoming electromagnetic wave frequency, will produce surface plasma excimer (SPPs), this resonance effects can produce strong free electron collective oscillation.Due to a kind of magnetic distribution pattern that surface plasma excimer is metal and dielectric interface, thus by must be one positive one negative by the dielectric constant solving both sides, Maxwell (maxwell) equation known interface medium on the interface of metal and medium, and common metal is negative permittivity under plasma frequency, therefore surface phasmon appears on metal medium interface, again because nano-antenna size is in micro-nano magnitude, therefore gap is fed back very little, cause very strong electrostatic coupling, thus huge electromagnetic field can be obtained.The optical nano antenna of current research mostly is symmetrical dipole structure, is made up of two panels metallic film and feedback gap wherein.The length of resoant antenna depends on the wavelength of incident light.In theory, during resonance, antenna length is about the half of lambda1-wavelength, can be in fact but much smaller than the half of lambda1-wavelength.Nano-antenna oscillator arms shape can be rectangle, trapezoidal, bow tie etc., and thin-film material mostly is metal or carbon nano-tube.Because nanocomposite optical antenna has unique optical property, it has been widely used in the fields such as biomedicine, Solar use, high sensitivity detector, nonlinear optics and photocatalysis at present.
Traditional antenna can directly be modulated, and such as changes the antenna direction/length of broadcast receiver or TV to reach the object of regulation and control antenna, similar with it, and nano-antenna also can by regulation and control to reach the performance that can produce response to different frequency incident light.At present the Passive Control by changing Antenna Design and the Active Control Mode by changing antenna surrounding working environment are divided into the regulation and control of nanocomposite optical antenna.The former refers to by the change structural parameters of antenna or the compound mode of its nanostructures of starting with from the design parameter of antenna, and then changes the performance such as operating frequency, gain, directivity of antenna, thus reaches the regulation and control of nano-antenna, i.e. structures shape function.The latter refers to the dielectric constant by changing antenna surrounding medium, and can reach change antenna performance parameters, this regulation and control are so that active form non-structural to regulate and control antenna.It is changed by conductive polymer film electrochemical oxidation/reduction or is realized by oxidation/reduction bifurcation reversible molecular switch in chemical method, and can reach regulation and control object by covering photoelectricity active medium (as liquid crystal) with extra electric field on physical method.
But, the current modulation capability of adjustable nano-antenna to light frequency is limited, and need to be used for realizing the functional layer often more difficult acquisition experimentally of regulation and control, structure is also heavier, is unfavorable for integrated, is therefore difficult to actual application, simultaneously, can only produce faint magnetic resonance in the nano-antenna of middle-infrared band at present, the humidification for incident light wave is only tens times, so the signal produced is fainter.
Summary of the invention
For the deficiency of existing controllable nano-antenna, in order to effectively improve modulation capability and the signal strength signal intensity (namely increasing its local fields intensity) of nano-antenna optics, thus realize the design of the all-optical device such as high-speed optical switch, optical modulator, special propose following by nano-antenna and Graphene composition composite construction to realize novel efficient, tunable nano-antenna fast, and provide corresponding preparation scheme.
In order to solve problem in prior art, the invention provides a kind of tunable nano-antenna, it comprises three layers, the metal structure on upper strata, the single-layer graphene in intermediate layer, the base material of bottom, the metal structure on upper strata is butterfly structure structure, described butterfly structure structure comprises two isosceles trapezoids and a square composition, the upper base of two isosceles trapezoids is positioned on two relative limits of square, the length of the upper base of two isosceles trapezoids and foursquarely become equal, foursquare length of side G is 20 ± 2nm, the length D gone to the bottom of two isosceles trapezoids is 1.2 ± 0.1 μm, the height of two isosceles trapezoids is equal, the high length of two isosceles trapezoids adds that the length of the foursquare length of side equals the length D gone to the bottom of isosceles trapezoid, cycle P=2.5 ± 0.2 μm of tunable nano-antenna, metal structure thickness H
1=20 ± 5nm, single-layer graphene thickness H
2=0.33nm ± 0.05nm.
As a further improvement on the present invention, foursquare length of side G is 20 ± 1nm.
As a further improvement on the present invention, the length D gone to the bottom of two isosceles trapezoids is 1.2 ± 0.05 μm.
As a further improvement on the present invention, cycle P=2.5 ± 0.1 μm of tunable nano-antenna.
As a further improvement on the present invention, metal structure thickness H
1=20 ± 3nm.
As a further improvement on the present invention, single-layer graphene thickness H
2=0.33nm ± 0.03nm.
As a further improvement on the present invention, silicon dioxide is as base material.
As a further improvement on the present invention, the metal structure on upper strata is gold.
The preparation method of the tunable nano-antenna of above-mentioned any one, comprises the steps:
Utilize chemical vapour deposition technique method at SiO
2substrate covers one deck single-layer graphene;
At single-layer graphene surface spin coating photoresist;
Etching and the development of structure is completed with electron beam lithography;
Vacuum electron beam evaporation coating technique is adopted to realize the evaporation of layer gold;
Final nanocomposite optical antenna is obtained through stripping process.
The invention has the beneficial effects as follows:
Size is little: this metamaterial structure thickness at tens Nano grades, the application advantageously in integrated optics.
Signal strength signal intensity is high: under the irradiation of characteristic frequency incident light, and this nanocomposite optical antenna strengthens magnetic field can reach more than 20000 times, the detection of signal of being more convenient for.
Modulation effect is obvious: the adjustability of this optical nano antenna is good, and with the change of applied voltage, resonance location and resonant intensity all have obvious change.
Accompanying drawing explanation
Fig. 1 is common nano-antenna structural representation;
Fig. 2 is the structural representation of the tunable nano-antenna of the present invention;
Fig. 3 is the vertical view of the tunable nano-antenna of the present invention;
Fig. 4 is the end view of the tunable nano-antenna of the present invention;
Fig. 5 is reflectance spectrum of the present invention;
Fig. 6 is enhancing figure in magnetic field of the present invention;
Fig. 7 is the reflectance spectrum of optical nano antenna of the present invention under different applied voltage.
In Fig. 1, (a) is rectangle nano-antenna structure, and (b) is trapezoidal nano-antenna structure, and (c) is bow-tie nano-antenna structure, and (d) is cylindrical nanometer antenna structure.
Embodiment
Below in conjunction with accompanying drawing, the present invention will be further described.
In this design, using the backing material of Graphene as bow-tie antenna bottom, the property of Graphene is utilized to make nanocomposite optical antenna have regulatable performance.Having the nano-antenna that special optical character particularly has an optics magnetic response is generally be made up of metal Nano structure, the nano-antenna of particular design can well light local in nanometer scale spatially, thus in inside configuration, there is very strong local fields, existing design display, the Surface field intensity contacted with backing material at Meta Materials can strengthen more than 1000 times.And the Graphene nano material that to be known world thin, the hardest, it is almost completely transparent, only absorb the light of 2.3%, there is lower loss, meanwhile, because it has the character under different voltage with differing dielectric constant, therefore control voltage is passed through, namely can reach the object controlling Graphene and backing material electromagnetic attributes, thus intensity and the response frequency of local fields can be regulated, to realize the adjustable of this nanocomposite optical antenna.In the present invention drafted, by the Graphene pad of thick for individual layer 0.33nm or multilayer NX0.33nm (N is the number of plies) (X is multiplication sign) between metal Meta Materials and substrate silicon dioxide, because specially designed nanocomposite optical antenna is very responsive for the electromagnetic attributes of backing material, therefore when regulation voltage changes the electromagnetic property of grapheme material, the character of this nanocomposite optical antenna will change thereupon, it can change to the response frequency of incident light, thus reach regulatable function, meanwhile the field intensity of its local fields produced also has corresponding change, also can be used as optical switch in some cases to apply.
As shown in Figure 2: an optical nano antenna combining Graphene, agent structure is made up of Meta Materials, and metamaterial structure is made up of butterfly structure structure, and it comprises the metal structure 100 on upper strata, and intermediate layer is single-layer graphene 200, and bottom is base material 300.In the present invention, using silicon dioxide as base material 300, because silicon dioxide is stablized at middle-infrared band Nature comparison, there is no dispersion.
Bowknot structure in this nanocomposite optical antenna is metal material, selects gold as the material of metal derby at this, because gold compares silver and Yan Geng little in the loss of middle-infrared band.The difficulty of wherein preparation part is how to prepare the smaller structure of loss, and the single-layer graphene that preparation defect is less, because this structure metal structure is placed on the nano material that single-layer graphene forms above, so the extent of deterioration of metal and the integrity degree of single-layer graphene very large to its performance impact, and the precision that these two indexs are prepared with it is closely related, the way preparing metal nano film main is in the world electron beam evaporation plating at present, so material purity obtained is higher, surface ratio is more smooth, and loss is smaller.Preparing Graphene then has micromechanics to peel off, redox, chemical vapour deposition technique (CVD) etc.
Flow process prepared by the structure related to is as follows: first utilize CVD method at SiO
2substrate covers one deck single-layer graphene (SLG), then at the surperficial spin coating photoresist of single-layer graphene (SLG), etching and the development of structure is completed again with electron beam lithography, following employing vacuum electron beam evaporation coating technique realizes the evaporation of layer gold, eventually passes stripping process and obtains final nanocomposite optical antenna.
The geometry designs of this structure is as Fig. 3, shown in Fig. 4, a kind of tunable nano-antenna, it comprises three layers, the metal structure on upper strata, the single-layer graphene in intermediate layer, the base material of bottom, the metal structure on upper strata is butterfly structure structure, described butterfly structure structure comprises two isosceles trapezoids and a square composition, the upper base of two isosceles trapezoids is positioned on two relative limits of square, the length of the upper base of two isosceles trapezoids and foursquarely become equal, foursquare length of side G is 20 ± 2nm, the length D gone to the bottom of two isosceles trapezoids is 1.2 ± 0.1 μm, the height of two isosceles trapezoids is equal, the high length of two isosceles trapezoids adds that the length of the foursquare length of side equals the length D gone to the bottom of isosceles trapezoid, cycle P=2.5 ± 0.2 μm of tunable nano-antenna, metal structure thickness H
1=20 ± 5nm, single-layer graphene thickness H
2=0.33nm ± 0.05nm.
When this structure is placed under the light source irradiation of TE polarization when no power (namely under the inoperative state of Graphene), can the resonance effect of effective excitation structure, the reflectance spectrum of this structure is as shown in Figure 5.The magnetic resonance wavelength of this structure is at 6850nm as seen from Figure 5, now strengthen in the magnetic field intensity of metal structure and Graphene dielectric layer contact position and can reach more than 20000 times, the junction of two oscillators that this magnetic field primary limitation is symmetrical in antennas simultaneously, this magnetic field intensity strengthens figure as shown in Figure 6.
And when applying external voltage to this structure, its reflectance spectrum as shown in Figure 7.It should be noted that, when carrying out numerical simulation, the electromagnetic property of Graphene when we are by changing the Fermi level of Graphene and carrying out equivalent simulation additional different voltage.The Fermi level of Graphene
wherein
v
fbe constant, and n
sfor the doping level of Graphene, the doping level therefore changing Graphene when numerical simulation is equivalent to and changes applied voltage, wherein n
swith the lifting that the relation of both applied voltages is along with applied voltage, Fermi level improves, n
salso improve thereupon.Can see by figure, along with n
s7 (namely applied voltage increases) are brought up to by 1, the resonance location of this structure carries out blue shift, and its relative movement wavelength Δ λ=8%, surmounts the tuning capability of the tunable nanocomposite optical antenna of the current overwhelming majority, meanwhile, the resonant intensity of this antenna also decreases.This is caused, along with n by the electromagnetic property of single-layer graphene material in this wave band uniqueness
sraising, the conductivity of Graphene improves, and simultaneously because its imaginary part of dielectric constant also can increase, therefore can cause higher decay, thus make the reduction of resonant intensity.
The advantage that nano-antenna that this is tunable has is as follows:
1, can regulation and control resonance location easily and effectively and resonant intensity by adjustment applied voltage, wherein the change of applied voltage and resonance location relation as follows: applied voltage becomes greatly, and magnetic resonance blue shift, magnetic resonance intensity decreases.
2, at the regulating power of middle-infrared band, this structure comparatively emphasizes that the relative wavelength saved reaches 8%, strengthens simultaneously reach more than 20000 times to magnetic field, performance surmounts other structure current, is of very high actual application value.
3, this physical dimension is little, and thickness is thin.From the parameter of structure, the thickness of Meta Materials can reach 20nm rank, high for micro-nano photonic device utilizability.
Above content is in conjunction with concrete preferred implementation further description made for the present invention, can not assert that specific embodiment of the invention is confined to these explanations.For general technical staff of the technical field of the invention, without departing from the inventive concept of the premise, some simple deduction or replace can also be made, all should be considered as belonging to protection scope of the present invention.
Claims (9)
1. a tunable nano-antenna, it is characterized in that: it comprises three layers, the metal structure on upper strata, the single-layer graphene in intermediate layer, the base material of bottom, the metal structure on upper strata is butterfly structure structure, described butterfly structure structure comprises two isosceles trapezoids and a square composition, the upper base of two isosceles trapezoids is positioned on two relative limits of square, the length of the upper base of two isosceles trapezoids and foursquarely become equal, foursquare length of side G is 20 ± 2nm, the length D gone to the bottom of two isosceles trapezoids is 1.2 ± 0.1 μm, the height of two isosceles trapezoids is equal, the high length of two isosceles trapezoids adds that the length of the foursquare length of side equals the length D gone to the bottom of isosceles trapezoid, cycle P=2.5 ± 0.2 μm of tunable nano-antenna, metal structure thickness H
1=20 ± 5nm, single-layer graphene thickness H
2=0.33nm ± 0.05nm.
2. tunable nano-antenna according to claim 1, is characterized in that: foursquare length of side G is 20 ± 1nm.
3. tunable nano-antenna according to claim 1, is characterized in that: the length D gone to the bottom of two isosceles trapezoids is 1.2 ± 0.05 μm.
4. tunable nano-antenna according to claim 1, is characterized in that: cycle P=2.5 ± 0.1 μm of tunable nano-antenna.
5. tunable nano-antenna according to claim 1, is characterized in that: metal structure thickness H
1=20 ± 3nm.
6. tunable nano-antenna according to claim 1, is characterized in that: single-layer graphene thickness H
2=0.33nm ± 0.03nm.
7. tunable nano-antenna according to claim 1, is characterized in that: silicon dioxide is as base material.
8. tunable nano-antenna according to claim 1, is characterized in that: the metal structure on upper strata is gold.
9. the preparation method of the tunable nano-antenna of claim 1 to 8 any one, is characterized in that: comprise the steps:
Utilize chemical vapour deposition technique method at SiO
2-substrate covers one deck single-layer graphene;
At single-layer graphene surface spin coating photoresist;
Etching and the development of structure is completed with electron beam lithography;
Vacuum electron beam evaporation coating technique is adopted to realize the evaporation of layer gold;
Final nanocomposite optical antenna is obtained through stripping process.
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| CN104810575A (en) * | 2015-04-14 | 2015-07-29 | 哈尔滨理工大学 | Terahertz tuning device based on graphene |
| CN104836018A (en) * | 2015-04-30 | 2015-08-12 | 北京空间飞行器总体设计部 | Nano-antenna based on tunneling diode |
| CN104966745A (en) * | 2015-04-30 | 2015-10-07 | 北京空间飞行器总体设计部 | Nanometer rectification antenna based on silicon substrate |
| CN106153597A (en) * | 2015-04-21 | 2016-11-23 | 常熟浙瑞亘光电技术有限公司 | Dual wavelength multifunctional sensing element based on antenna auxiliary, preparation method and application |
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| CN109326854A (en) * | 2018-09-10 | 2019-02-12 | 桂林电子科技大学 | A kind of middle tunable IR bandstop filter based on graphene |
| CN105846073B (en) * | 2016-05-10 | 2019-05-21 | 哈尔滨工业大学深圳研究生院 | A kind of optical nano antenna and its design method with double one-way |
| CN109870766A (en) * | 2019-04-04 | 2019-06-11 | 太原理工大学 | A kind of perfection magnetic dipole nano-antenna design method |
| CN110048227A (en) * | 2019-04-23 | 2019-07-23 | 南京大学 | Based on the adjustable bowknot nano-antenna device and method of vanadium dioxide phase transformation dynamic |
| CN110441926A (en) * | 2019-07-09 | 2019-11-12 | 哈尔滨工程大学 | A kind of chiral tunable graphene metamaterial of middle infrared band binary channels multi information |
| CN110718754A (en) * | 2019-10-15 | 2020-01-21 | 中国电力科学研究院有限公司 | Metal-silicon micro-nanowire conical composite antenna for electro-optical modulator |
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| CN106153597B (en) * | 2015-04-21 | 2019-04-16 | 常熟浙瑞亘光电技术有限公司 | Dual wavelength multifunctional sensing element, preparation method and application based on antenna auxiliary |
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Application publication date: 20150128 |