CN103733728A - 缺陷检测方法、有机el元件的修复方法以及有机el显示面板 - Google Patents
缺陷检测方法、有机el元件的修复方法以及有机el显示面板 Download PDFInfo
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- CN103733728A CN103733728A CN201380002539.4A CN201380002539A CN103733728A CN 103733728 A CN103733728 A CN 103733728A CN 201380002539 A CN201380002539 A CN 201380002539A CN 103733728 A CN103733728 A CN 103733728A
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/44—Testing lamps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
- G09G3/22—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
- G09G3/30—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
- G09G3/32—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
- G09G3/3208—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/861—Repairing
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012-134817 | 2012-06-14 | ||
JP2012134817 | 2012-06-14 | ||
PCT/JP2013/001015 WO2013186961A1 (ja) | 2012-06-14 | 2013-02-22 | 欠陥検出方法、有機el素子のリペア方法、および有機el表示パネル |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103733728A true CN103733728A (zh) | 2014-04-16 |
CN103733728B CN103733728B (zh) | 2017-03-08 |
Family
ID=49757816
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201380002539.4A Active CN103733728B (zh) | 2012-06-14 | 2013-02-22 | 缺陷检测方法、有机el元件的修复方法以及有机el显示面板 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9121914B2 (zh) |
JP (1) | JP6142212B2 (zh) |
CN (1) | CN103733728B (zh) |
WO (1) | WO2013186961A1 (zh) |
Cited By (3)
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CN105225632A (zh) * | 2014-05-30 | 2016-01-06 | 乐金显示有限公司 | 有机发光显示装置和像素修复方法 |
CN108995379A (zh) * | 2018-07-27 | 2018-12-14 | 深圳市华星光电技术有限公司 | 用于面板制程的喷墨打印系统及方法 |
CN109287135A (zh) * | 2017-05-19 | 2019-01-29 | 周星工程股份有限公司 | 有机发光装置及其制造方法 |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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US9515130B2 (en) | 2012-06-21 | 2016-12-06 | Joled Inc. | Covering method and organic EL element manufacturing method |
US9748509B2 (en) | 2013-07-10 | 2017-08-29 | Joled Inc. | Organic EL element and organic EL display panel |
JP6205664B2 (ja) * | 2014-02-10 | 2017-10-04 | 株式会社Joled | バンクの補修方法、有機el表示装置及びその製造方法、 |
US9755193B2 (en) * | 2014-02-10 | 2017-09-05 | Joled Inc. | Bank repair method, organic EL display device, and production method for same |
JP6277380B2 (ja) | 2014-02-25 | 2018-02-14 | 株式会社Joled | El表示装置の製造方法 |
KR102205700B1 (ko) * | 2014-07-16 | 2021-01-21 | 삼성전자주식회사 | 유기 전계발광 표시장치 및 그 제조 방법 |
JP2016110904A (ja) * | 2014-12-09 | 2016-06-20 | 株式会社Joled | 有機発光素子の製造方法および有機発光素子 |
JP6649714B2 (ja) * | 2015-08-04 | 2020-02-19 | 株式会社Joled | バンク補修方法、有機el表示装置の製造方法および有機el表示装置 |
CN109147656B (zh) * | 2017-06-27 | 2021-01-22 | 京东方科技集团股份有限公司 | 显示面板的修复系统和修复方法 |
KR102554711B1 (ko) | 2018-08-07 | 2023-07-12 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 리페어 방법 |
CN112285506A (zh) * | 2020-10-27 | 2021-01-29 | 国网重庆市电力公司电力科学研究院 | 一种激光超声聚焦检测成像系统 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1674726A (zh) * | 2004-03-24 | 2005-09-28 | 株式会社日立显示器 | 有机电致发光显示装置的制造方法 |
JP2005310659A (ja) * | 2004-04-23 | 2005-11-04 | Nippon Seiki Co Ltd | 有機elパネルの製造方法 |
CN1791288A (zh) * | 2004-10-29 | 2006-06-21 | 株式会社半导体能源研究所 | 制造发光器件的方法 |
WO2006077767A1 (ja) * | 2005-01-21 | 2006-07-27 | Pioneer Corporation | 有機el素子の製造方法およびこれにより得られた有機el素子 |
CN101174376A (zh) * | 2006-09-04 | 2008-05-07 | 三洋电机株式会社 | 电致发光显示装置的缺陷检查方法及修正方法、制造方法 |
JP2010267420A (ja) * | 2009-05-13 | 2010-11-25 | Panasonic Corp | 有機el素子検査リペア方法および装置 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05163488A (ja) | 1991-12-17 | 1993-06-29 | Konica Corp | 有機薄膜エレクトロルミネッセンス素子 |
US5443922A (en) * | 1991-11-07 | 1995-08-22 | Konica Corporation | Organic thin film electroluminescence element |
JP2000340366A (ja) * | 1999-05-27 | 2000-12-08 | Tdk Corp | 発光ダイオード |
JP4423701B2 (ja) * | 1999-06-07 | 2010-03-03 | Tdk株式会社 | 有機el表示装置 |
JP4067875B2 (ja) | 2001-06-01 | 2008-03-26 | 株式会社半導体エネルギー研究所 | アクティブマトリクス型発光装置の修理方法及び作製方法 |
US6777249B2 (en) * | 2001-06-01 | 2004-08-17 | Semiconductor Energy Laboratory Co., Ltd. | Method of repairing a light-emitting device, and method of manufacturing a light-emitting device |
US7190335B2 (en) * | 2002-03-26 | 2007-03-13 | Semiconductor Energy Laboratory Co., Ltd. | Light emitting device and method of manufacturing the same |
JP2004247088A (ja) | 2003-02-12 | 2004-09-02 | Denso Corp | 有機elパネルの製造方法 |
JP4884747B2 (ja) | 2004-10-29 | 2012-02-29 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
CN101426856B (zh) * | 2006-04-18 | 2012-11-21 | 小松精练株式会社 | 热熔型构件以及有机el显示面板 |
US8772052B2 (en) * | 2009-02-10 | 2014-07-08 | Panasonic Corporation | Repaired organic EL display and method for manufacturing same including repairing process |
JP5375732B2 (ja) * | 2010-04-26 | 2013-12-25 | 株式会社島津製作所 | バリヤ膜を形成する方法およびバリヤ膜を形成するために用いるcvd装置 |
JP5690333B2 (ja) * | 2010-04-27 | 2015-03-25 | パナソニック株式会社 | 有機el表示装置の検査方法 |
WO2011155159A1 (ja) * | 2010-06-07 | 2011-12-15 | パナソニック株式会社 | 有機el表示装置の製造方法 |
JP5687110B2 (ja) * | 2011-03-29 | 2015-03-18 | 株式会社ジャパンディスプレイ | 表示装置 |
CN102845132B (zh) * | 2011-04-12 | 2015-12-16 | 株式会社日本有机雷特显示器 | 有机el元件的制造方法和激光焦点位置设定方法 |
WO2012168973A1 (ja) * | 2011-06-08 | 2012-12-13 | パナソニック株式会社 | 有機el素子及び有機el素子の製造方法 |
JP5654037B2 (ja) * | 2011-09-15 | 2015-01-14 | パナソニック株式会社 | 有機el素子の製造方法及び評価方法 |
-
2013
- 2013-02-22 US US14/238,227 patent/US9121914B2/en active Active
- 2013-02-22 WO PCT/JP2013/001015 patent/WO2013186961A1/ja active Application Filing
- 2013-02-22 JP JP2014501334A patent/JP6142212B2/ja active Active
- 2013-02-22 CN CN201380002539.4A patent/CN103733728B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1674726A (zh) * | 2004-03-24 | 2005-09-28 | 株式会社日立显示器 | 有机电致发光显示装置的制造方法 |
JP2005310659A (ja) * | 2004-04-23 | 2005-11-04 | Nippon Seiki Co Ltd | 有機elパネルの製造方法 |
CN1791288A (zh) * | 2004-10-29 | 2006-06-21 | 株式会社半导体能源研究所 | 制造发光器件的方法 |
WO2006077767A1 (ja) * | 2005-01-21 | 2006-07-27 | Pioneer Corporation | 有機el素子の製造方法およびこれにより得られた有機el素子 |
CN101174376A (zh) * | 2006-09-04 | 2008-05-07 | 三洋电机株式会社 | 电致发光显示装置的缺陷检查方法及修正方法、制造方法 |
JP2010267420A (ja) * | 2009-05-13 | 2010-11-25 | Panasonic Corp | 有機el素子検査リペア方法および装置 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105225632A (zh) * | 2014-05-30 | 2016-01-06 | 乐金显示有限公司 | 有机发光显示装置和像素修复方法 |
CN105225632B (zh) * | 2014-05-30 | 2018-04-13 | 乐金显示有限公司 | 有机发光显示装置和像素修复方法 |
CN109287135A (zh) * | 2017-05-19 | 2019-01-29 | 周星工程股份有限公司 | 有机发光装置及其制造方法 |
CN109287135B (zh) * | 2017-05-19 | 2023-07-18 | 周星工程股份有限公司 | 有机发光装置及其制造方法 |
CN108995379A (zh) * | 2018-07-27 | 2018-12-14 | 深圳市华星光电技术有限公司 | 用于面板制程的喷墨打印系统及方法 |
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US9121914B2 (en) | 2015-09-01 |
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