CN103733045B - 泵浦探针测量装置 - Google Patents
泵浦探针测量装置 Download PDFInfo
- Publication number
- CN103733045B CN103733045B CN201280038519.8A CN201280038519A CN103733045B CN 103733045 B CN103733045 B CN 103733045B CN 201280038519 A CN201280038519 A CN 201280038519A CN 103733045 B CN103733045 B CN 103733045B
- Authority
- CN
- China
- Prior art keywords
- light
- pump
- ultrashort
- light pulse
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/636—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited using an arrangement of pump beam and probe beam; using the measurement of optical non-linear properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1719—Carrier modulation in semiconductors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1725—Modulation of properties by light, e.g. photoreflectance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1789—Time resolved
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1789—Time resolved
- G01N2021/1791—Time resolved stroboscopic; pulse gated; time range gated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/069—Supply of sources
- G01N2201/0696—Pulsed
- G01N2201/0697—Pulsed lasers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/12—STS [Scanning Tunnelling Spectroscopy]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/245—Detection characterised by the variable being measured
- H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/26—Electron or ion microscopes
- H01J2237/28—Scanning microscopes
- H01J2237/2818—Scanning tunnelling microscopes
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Optics & Photonics (AREA)
- Nonlinear Science (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
Description
Claims (24)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011-169682 | 2011-08-02 | ||
JP2011169682A JP5610399B2 (ja) | 2011-08-02 | 2011-08-02 | ポンププローブ測定装置 |
PCT/JP2012/069517 WO2013018813A1 (ja) | 2011-08-02 | 2012-07-31 | ポンププローブ測定装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103733045A CN103733045A (zh) | 2014-04-16 |
CN103733045B true CN103733045B (zh) | 2017-05-10 |
Family
ID=47629334
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201280038519.8A Expired - Fee Related CN103733045B (zh) | 2011-08-02 | 2012-07-31 | 泵浦探针测量装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US8982451B2 (zh) |
EP (1) | EP2741072B1 (zh) |
JP (1) | JP5610399B2 (zh) |
KR (1) | KR20140056304A (zh) |
CN (1) | CN103733045B (zh) |
CA (1) | CA2880769A1 (zh) |
TW (1) | TWI471549B (zh) |
WO (1) | WO2013018813A1 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109632705A (zh) * | 2019-01-15 | 2019-04-16 | 西安文理学院 | 单次激发飞秒时间分辨吸收光谱测量装置 |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110295295A1 (en) | 2006-01-31 | 2011-12-01 | Ethicon Endo-Surgery, Inc. | Robotically-controlled surgical instrument having recording capabilities |
US9386983B2 (en) | 2008-09-23 | 2016-07-12 | Ethicon Endo-Surgery, Llc | Robotically-controlled motorized surgical instrument |
US9927350B2 (en) * | 2013-10-17 | 2018-03-27 | Trustees Of Boston University | Thermal property microscopy with frequency domain thermoreflectance and uses thereof |
US10327764B2 (en) | 2014-09-26 | 2019-06-25 | Ethicon Llc | Method for creating a flexible staple line |
KR101545849B1 (ko) * | 2014-04-28 | 2015-08-24 | 에스엔유 프리시젼 주식회사 | 간섭계의 스캐닝 동기화 방법 |
JP6397318B2 (ja) * | 2014-11-26 | 2018-09-26 | 浜松ホトニクス株式会社 | 電場ベクトル検出方法及び電場ベクトル検出装置 |
FR3054380B1 (fr) * | 2016-07-20 | 2018-09-07 | Universite de Bordeaux | Systeme et procede de spectrometrie acoustique resonante |
RU2687991C1 (ru) * | 2017-11-20 | 2019-05-17 | Дмитрий Алексеевич Дворецкий | Способ определения времени релаксации плёночного просветляющегося поглотителя с помощью фемтосекундного волоконного лазера в режиме генерации |
WO2019131410A1 (ja) * | 2017-12-27 | 2019-07-04 | 株式会社Photo electron Soul | 試料検査装置、および、試料検査方法 |
JP7129099B2 (ja) * | 2018-01-19 | 2022-09-01 | Gセラノスティックス株式会社 | 走査プローブ顕微鏡、測定方法 |
CN109085197B (zh) * | 2018-06-29 | 2021-07-13 | 中国科学院电工研究所 | 热反射测量系统 |
CN118376583A (zh) * | 2018-12-10 | 2024-07-23 | 普渡研究基金会 | 通过红外吸收的宽场光热传感的超快化学成像 |
EP3896462A4 (en) * | 2018-12-13 | 2022-08-10 | Gtheranostics Co., Ltd. | OPTICAL OUTPUT SYSTEM, MEASUREMENT SYSTEM, OPTICAL PUMP PROBE SCANNING TUNNELING MICROSCOPE SYSTEM, COMPUTER DEVICE, CALCULATION PROGRAM AND METHOD |
US10845248B1 (en) | 2019-05-01 | 2020-11-24 | Trustees Of Boston University | Systems and methods for bond-selective transient phase imaging |
WO2021177195A1 (ja) * | 2020-03-02 | 2021-09-10 | 国立大学法人東京農工大学 | 光検出装置、および光検出方法 |
CN111443062B (zh) * | 2020-04-26 | 2024-05-31 | 中国科学院西安光学精密机械研究所 | 一种半导体材料瞬态折射率超快检测装置及方法 |
CN111721973A (zh) * | 2020-05-14 | 2020-09-29 | 北京大学 | 一种实现原子尺度激光泵浦探测的方法和装置 |
CN111721974A (zh) * | 2020-05-14 | 2020-09-29 | 北京大学 | 一种实现原子尺度激光泵浦探测的方法和装置 |
CN111638387B (zh) * | 2020-06-12 | 2021-08-03 | 中国科学院长春光学精密机械与物理研究所 | 一种基于双位移台的stm动态响应检测系统及方法 |
US11287494B2 (en) * | 2020-07-28 | 2022-03-29 | Nearfield Atomics, Inc. | Time-multiplexed dual atomic magnetometry |
CN111750989A (zh) * | 2020-08-17 | 2020-10-09 | 江苏博创翰林光电高科技有限公司 | 多尺度时间分辨光谱仪 |
CN111750990A (zh) * | 2020-08-17 | 2020-10-09 | 江苏博创翰林光电高科技有限公司 | 基于电子学同步的时间分辨光谱仪 |
EP4027133A1 (en) | 2021-01-12 | 2022-07-13 | Vilnius University | Estimating the luminescence kinetics of rare earth ions in a transparent luminescent material |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5150248A (en) * | 1989-07-21 | 1992-09-22 | Alfano Robert R | Terahertz repetition rate optical computing systems, and communication systems and logic elements using cross-phase modulation based optical processors |
JPH06307818A (ja) * | 1993-04-23 | 1994-11-04 | Nippon Steel Corp | 短パルス光を用いた薄膜評価装置 |
US6008906A (en) * | 1995-08-25 | 1999-12-28 | Brown University Research Foundation | Optical method for the characterization of the electrical properties of semiconductors and insulating films |
WO2002054046A1 (fr) * | 2000-12-28 | 2002-07-11 | Dmitri Olegovich Lapotko | Procede et dispositif d'examen phototermique d'irregularites microscopique |
US7352469B2 (en) * | 2001-11-06 | 2008-04-01 | Mcgrew Stephen P | Quantum resonance analytical instrument |
US7016421B2 (en) | 2001-11-15 | 2006-03-21 | Hrl Laboratories, Llc | Time-interleaved delta sigma analog to digital modulator |
US7106446B2 (en) * | 2002-06-21 | 2006-09-12 | Therma-Wave, Inc. | Modulated reflectance measurement system with multiple wavelengths |
CN1186621C (zh) * | 2003-01-27 | 2005-01-26 | 中国科学院上海光学精密机械研究所 | 超快过程的探测装置 |
CN100438237C (zh) * | 2006-09-29 | 2008-11-26 | 华东师范大学 | 宽带太赫兹光产生器 |
JP4839481B2 (ja) * | 2006-11-29 | 2011-12-21 | 独立行政法人科学技術振興機構 | ポンププローブ測定装置及びそれを用いた走査プローブ顕微鏡装置 |
JP2008139029A (ja) | 2006-11-30 | 2008-06-19 | Univ Of Miyazaki | 顕微鏡試料作成における樹脂包埋補助ツール及びこれを使用した樹脂包埋方法 |
US8368877B2 (en) | 2008-07-01 | 2013-02-05 | Nxp B.V. | Measuring apparatus |
WO2011041472A1 (en) * | 2009-10-02 | 2011-04-07 | Imra America, Inc. | Optical signal processing with modelocked lasers |
-
2011
- 2011-08-02 JP JP2011169682A patent/JP5610399B2/ja not_active Expired - Fee Related
-
2012
- 2012-07-31 CN CN201280038519.8A patent/CN103733045B/zh not_active Expired - Fee Related
- 2012-07-31 EP EP12819852.0A patent/EP2741072B1/en active Active
- 2012-07-31 US US14/236,771 patent/US8982451B2/en not_active Expired - Fee Related
- 2012-07-31 WO PCT/JP2012/069517 patent/WO2013018813A1/ja active Application Filing
- 2012-07-31 KR KR1020147005306A patent/KR20140056304A/ko not_active Application Discontinuation
- 2012-07-31 CA CA2880769A patent/CA2880769A1/en active Pending
- 2012-08-01 TW TW101127706A patent/TWI471549B/zh not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109632705A (zh) * | 2019-01-15 | 2019-04-16 | 西安文理学院 | 单次激发飞秒时间分辨吸收光谱测量装置 |
Also Published As
Publication number | Publication date |
---|---|
TWI471549B (zh) | 2015-02-01 |
JP5610399B2 (ja) | 2014-10-22 |
EP2741072A1 (en) | 2014-06-11 |
KR20140056304A (ko) | 2014-05-09 |
TW201315985A (zh) | 2013-04-16 |
JP2013032993A (ja) | 2013-02-14 |
US20140240710A1 (en) | 2014-08-28 |
EP2741072B1 (en) | 2020-01-01 |
EP2741072A4 (en) | 2015-07-08 |
WO2013018813A1 (ja) | 2013-02-07 |
US8982451B2 (en) | 2015-03-17 |
CA2880769A1 (en) | 2013-02-07 |
CN103733045A (zh) | 2014-04-16 |
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C06 | Publication | ||
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: Saitama Prefecture, Japan Patentee after: National Research and Development Corporation Science and technology revitalization organization Address before: Saitama Prefecture, Japan Patentee before: JAPAN SCIENCE AND TECHNOLOGY AGENCY |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191224 Address after: Japan in Ibaraki County Patentee after: Shigekawa Hidemi Address before: Saitama Prefecture, Japan Patentee before: National Research and Development Corporation Science and technology revitalization organization Effective date of registration: 20191224 Address after: Tokyo Capital of Japan Patentee after: Treatment and Diagnosis Technology Co.,Ltd. Address before: Japan in Ibaraki County Patentee before: Shigekawa Hidemi |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170510 |