CN103696013A - Gallium arsenide polycrystal liquid-seal-free synthesizer - Google Patents
Gallium arsenide polycrystal liquid-seal-free synthesizer Download PDFInfo
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- CN103696013A CN103696013A CN201310755720.4A CN201310755720A CN103696013A CN 103696013 A CN103696013 A CN 103696013A CN 201310755720 A CN201310755720 A CN 201310755720A CN 103696013 A CN103696013 A CN 103696013A
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Abstract
The invention provides a gallium arsenide polycrystal liquid-seal-free synthesizer. The gallium arsenide polycrystal liquid-seal-free synthesizer comprises a synthesizing furnace body and a graphite system positioned in the synthesized furnace body, wherein the graphite system comprises a temperature preservation unit, a heating unit and a synthesizing unit; the temperature preservation unit comprises a graphite temperature preservation cover and a graphite temperature preservation barrel; the heating unit comprises an electrode, a heater and a peripheral temperature control circuit; the synthesizing unit as well as the electrode and the heater in the heating unit are positioned in the temperature preservation unit; the heater and the electrode in the heating unit are positioned on the middle and lower part of the periphery of the synthesizing unit; the synthesizing unit comprises a graphite crucible cover, a graphite crucible and a boron nitride crucible. The gallium arsenide polycrystal liquid-seal-free synthesizer is characterized in that the graphite system also comprises a moving unit for enabling the synthesizing unit to lift and rotate; the moving unit is connected with the synthesizing unit and the synthesizing furnace body; step shapes designed at the joint of the graphite crucible and the graphite crucible cover are fit.
Description
Technical field
The present invention relates to a kind of synthesizer of gallium arsenide polycrystal, especially relate to a kind of aneroid sealing-in synthesizer of gallium arsenide polycrystal.
Background technology
Along with scientific and technological development and progress, much more more and more semiconductor material is applied in photoelectric device, such as materials such as gallium arsenide polycrystals, and the material requires such as gallium arsenide polycrystal are synthetic, the synthesis technique of current existing gallium arsenide polycrystal exists numerous defects and inconvenience, and synthetic gallium arsenide polycrystal crystallinity is bad and yield rate is lower.Therefore, find a kind of aneroid sealing-in synthesizer of above defect of can avoiding and become at present exigence the most.
Summary of the invention
The invention provides a kind of gallium arsenide polycrystal non-liquid seal apparatus for converting, comprise synthetic body of heater and be positioned at the graphite system that synthesizes body of heater, graphite system comprises heat-insulation unit, heating unit and synthesis unit, heat-insulation unit comprises graphite stay-warm case and graphite insulated tank, heating unit comprises electrode, well heater and peripheral temperature control circuit, synthesis unit, and the electrode in heating unit and well heater are positioned at the inside of heat-insulation unit, well heater in heating unit and electrode are positioned at the peripheral middle and lower part of synthesis unit, synthesis unit comprises plumbago crucible lid, plumbago crucible and boron nitride crucible, it is characterized in that, described graphite system also comprises the moving cell that synthesis unit lifting is rotated, moving cell and synthesis unit, synthetic body of heater is connected, plumbago crucible and plumbago crucible cover at junction design step shape and match.
Embodiment
Below in conjunction with specific embodiment, further set forth the present invention.Should be understood that these embodiment are only not used in and limit the scope of the invention for the present invention is described.In addition should be understood that those skilled in the art can make various changes or modifications the present invention after having read the content of the present invention's instruction, these equivalent form of values fall within the application's appended claims limited range equally.
This gallium arsenide polycrystal non-liquid seal apparatus for converting, comprise synthetic body of heater and be positioned at the graphite system that synthesizes body of heater, graphite system comprises heat-insulation unit, heating unit and synthesis unit, heat-insulation unit comprises graphite stay-warm case and graphite insulated tank, heating unit comprises electrode, well heater and peripheral temperature control circuit, synthesis unit, and the electrode in heating unit and well heater are positioned at the inside of heat-insulation unit, well heater in heating unit and electrode are positioned at the peripheral middle and lower part of synthesis unit, synthesis unit comprises plumbago crucible lid, plumbago crucible and boron nitride crucible, it is characterized in that, described graphite system also comprises the moving cell that synthesis unit lifting is rotated, moving cell and synthesis unit, synthetic body of heater is connected, plumbago crucible and plumbago crucible cover at junction design step shape and match.
Claims (1)
1. a gallium arsenide polycrystal non-liquid seal apparatus for converting, comprise synthetic body of heater and be positioned at the graphite system that synthesizes body of heater, graphite system comprises heat-insulation unit, heating unit and synthesis unit, heat-insulation unit comprises graphite stay-warm case and graphite insulated tank, heating unit comprises electrode, well heater and peripheral temperature control circuit, synthesis unit, and the electrode in heating unit and well heater are positioned at the inside of heat-insulation unit, well heater in heating unit and electrode are positioned at the peripheral middle and lower part of synthesis unit, synthesis unit comprises plumbago crucible lid, plumbago crucible and boron nitride crucible, it is characterized in that, described graphite system also comprises the moving cell that synthesis unit lifting is rotated, moving cell and synthesis unit, synthetic body of heater is connected, plumbago crucible and plumbago crucible cover at junction design step shape and match.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201310755720.4A CN103696013A (en) | 2013-12-26 | 2013-12-26 | Gallium arsenide polycrystal liquid-seal-free synthesizer |
Applications Claiming Priority (1)
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CN201310755720.4A CN103696013A (en) | 2013-12-26 | 2013-12-26 | Gallium arsenide polycrystal liquid-seal-free synthesizer |
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CN103696013A true CN103696013A (en) | 2014-04-02 |
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CN201310755720.4A Pending CN103696013A (en) | 2013-12-26 | 2013-12-26 | Gallium arsenide polycrystal liquid-seal-free synthesizer |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104328499A (en) * | 2014-09-30 | 2015-02-04 | 青岛康和食品有限公司 | Gallium arsenide base polycrystal liquid seal-free synthesis apparatus |
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2013
- 2013-12-26 CN CN201310755720.4A patent/CN103696013A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104328499A (en) * | 2014-09-30 | 2015-02-04 | 青岛康和食品有限公司 | Gallium arsenide base polycrystal liquid seal-free synthesis apparatus |
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Application publication date: 20140402 |
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WD01 | Invention patent application deemed withdrawn after publication |