CN103693445A - AMHS (automated material handling system) stocker system - Google Patents
AMHS (automated material handling system) stocker system Download PDFInfo
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- CN103693445A CN103693445A CN201310739705.0A CN201310739705A CN103693445A CN 103693445 A CN103693445 A CN 103693445A CN 201310739705 A CN201310739705 A CN 201310739705A CN 103693445 A CN103693445 A CN 103693445A
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- amhs
- temporary storage
- working area
- silicon box
- area system
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Abstract
The invention discloses an AMHS (automated material handling system) stocker system comprising at least one stocking device arranged in an AMHS stocker. Each stocking device is provided with a rotary sinuous stocking table which is driven by a transmission device to rotate in a sinuous manner. A plurality of stocking brackets for holding silicon wafer boxes are arranged on each stocking table. The rotary sinuous stocking tables are adopted, so that the silicon wafer boxes in the stocker can move; silicon wafer box grippers are provided, so that the silicon wafer boxes on a transporter can be handled fast and can move to any position of the stocking tables or between the different stocking tables, the time of running process of the transporter for handling is saved, and overall efficiency of an AMHS is improved.
Description
Technical field
The present invention relates to semi-conductor integrated circuit material transfer equipment technical field, relate in particular to a kind of working area system of automatic material transfer system.
Background technology
Along with the development of semiconductor technology, 300mm silicon chip has progressively replaced 200mm silicon chip becomes main flow, and the weight of the silicon box of every box-packed year silicon chip also becomes approximately 9 kilograms by original approximately 4 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for the degree of utilization of factory building and the requirement of production cycle, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
Existing AMHS system all adopts the OHT waggon travelling on many track structures hanging on top ceiling and track, travel to and fro between (tool to tool transport model) between each board, or travel to and fro between between board and working area Stocker (between aisle in system interbay and aisle system intrabay).Between employing aisle as shown in Figure 1, the delivery system in aisle, each board 10 on every one side, board aisle is provided with silicon box stack portion 20(load port), OHT waggon 70(overhead hoist transport) can pick up the silicon box 30 in stack portion 20, and by track structure 60, be sent in the stack portion 20 of another board 10.The course of conveying of this silicon box 30 in same aisle is called system 110 in aisle, and the course of conveying of silicon box 30 between different aisle is called system 100 between aisle.In aisle, OHT waggon 70 is used in the conveying of system 110, between aisle, the conveying of system 100 is first silicon box 30 to be moved in working area 50 and temporarily stored with waggon 70, while by the time needing to use this silicon box 30, then with waggon 70 conveyances, arrive and specify board 10 places equally.
Visible, in prior art, in working area, temporary silicon box is all by the access of OHT waggon, such as waggon A is temporary in the P position in working area after silicon box is picked up, the board being positioned at away from the aisle, Q position of P position need to be used this silicon box, the waggon B distance (supposition waggon B in P position) of P → Q of just need at least travelling so, add presumable other waggons in path, waggon B need to expend a lot of time and pick up this silicon box.
Therefore, how in working area, realizing the movement of each position silicon box, save the time in waggon access driving process, improve the efficiency of AMHS entire system, is one of technical personnel technical issues that need to address.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of new AMHS working area system is provided.
For achieving the above object, the invention provides a kind of AMHS working area system, it comprises that at least one is located at the temporary storage equipment in AMHS system working area, this temporary storage equipment has helicoid back-shaped temporary storage platform, this temporary storage platform is back-shaped rotation by actuator drives, has a plurality of for placing the temporary bracket of silicon box in this temporary storage platform.
Further, this temporary storage platform has two sections of parallel straight sections and the linkage section that is connected these two sections of straight section two ends.
Further, the both sides of this at least one straight section are provided with at least one silicon box grabbing device.
Further, this silicon box grabbing device is located on the extended line of this straight section.
Further, the centre of this back-shaped temporary storage platform is also provided with at least one silicon box grabbing device.
Further, this working area system comprises at least two temporary storage equipments, between these two temporary storage equipments, is also provided with at least one silicon box grabbing device.
Further, this silicon box grabbing device comprises the handgrip of extensile mechanical arm and crawl silicon box.
Further, this temporary bracket is provided with silicon box detector, to survey on this temporary bracket whether placed silicon box.
Further, this back-shaped temporary storage platform back-shaped rotation clockwise or counterclockwise.
The present invention adopts above technical scheme, a kind of new AMHS working area system is provided, it has helicoid back-shaped temporary storage platform, realize the movement of each position silicon box of working area, again by silicon box grabbing device is set, can fast pick and place silicon box on waggon, realize the movement of silicon box between temporary storage platform optional position or different temporary storage platform, save the time in waggon access driving process, thereby improve the efficiency of AMHS entire system.
Accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is the structural representation of existing AMHS system;
Fig. 2 is the AMHS working area System planes schematic diagram of first embodiment of the invention;
Fig. 3 is the AMHS working area System planes schematic diagram of second embodiment of the invention;
Fig. 4 is the silicon box grabbing device structural representation in second embodiment of the invention.
The specific embodiment
the first embodiment
Refer to Fig. 2, the AMHS working area system of the present embodiment comprises: it comprises a temporary storage equipment 1 of being located in AMHS system working area, temporary storage equipment 1 has helicoid back-shaped temporary storage platform 11, by driving device (not shown) driving, back-shaped rotation has a plurality of for placing the temporary bracket 12 of silicon box temporary storage platform 11 in temporary storage platform 11.
Wherein, temporary storage platform 11 has two sections of parallel straight sections 13 and two sections of linkage sections 14 that are connected 13 two sections of straight sections, form one three-back-shaped, during running, temporary storage platform 11 can be along cw or the back-shaped rotation of anticlockwise direction, the rotation direction of clws shown in arrow in Fig. 2.
In the present embodiment, on temporary bracket 12, be also provided with silicon box detector, to survey on this temporary bracket whether placed silicon box.This silicon box detector can be located at the center of temporary bracket surface.
the second embodiment
Refer to Fig. 3, the AMHS working area system of the present embodiment comprises: the temporary storage equipment 1 in two the first embodiment, two straight sections of these two temporary storage equipments 1 lay respectively on same straight line, this straight line is the path position of AMHS system suspention track, makes waggon can just silicon box be rendered to or be picked up the temporary bracket on temporary storage equipment straight section when through temporary storage equipment.
In the present embodiment, the both sides of two sections of straight sections of this two temporary storage equipments are respectively provided with a silicon box grabbing device 31, amount to 6 silicon box grabbing devices 31, in order to fast to carry silicon box between waggon and its contiguous temporary bracket, and carry silicon box between the temporary bracket of two temporary storage equipments, therefore its position need be located on the extended line of straight section, on the path of AMHS track.
In the present embodiment, the centre of each temporary storage equipment temporary storage platform is respectively provided with a silicon box grabbing device, for the movement realizing silicon box on different temporary brackets between same temporary storage platform.
Please continue to refer to Fig. 4, the silicon box grabbing device in the present embodiment comprises base 51, extensile mechanical arm 52 and handgrip 53.
In other embodiments, in order to increase the transfer efficiency of silicon box in working area, can adjust the quantity of temporary storage equipment, silicon box grabbing device.
Claims (9)
1. an AMHS working area system, it is characterized in that, it comprises: at least one is located at the temporary storage equipment in AMHS system working area, this temporary storage equipment has helicoid back-shaped temporary storage platform, this temporary storage platform is back-shaped rotation by actuator drives, has a plurality of for placing the temporary bracket of silicon box in this temporary storage platform.
2. AMHS according to claim 1 working area system, is characterized in that: this temporary storage platform has two sections of parallel straight sections and the linkage section that is connected these two sections of straight section two ends.
3. AMHS according to claim 2 working area system, is characterized in that: the both sides of this at least one straight section are provided with at least one silicon box grabbing device.
4. AMHS according to claim 3 working area system, is characterized in that: this silicon box grabbing device is located on the extended line of this straight section.
5. AMHS according to claim 3 working area system, is characterized in that: the centre of this back-shaped temporary storage platform is also provided with at least one silicon box grabbing device.
6. AMHS according to claim 3 working area system, is characterized in that: this working area system comprises at least two temporary storage equipments, between these two temporary storage equipments, is also provided with at least one silicon box grabbing device.
7. according to the AMHS working area system described in claim 3 to 6, it is characterized in that: this silicon box grabbing device comprises extensile mechanical arm and captures the handgrip of silicon box.
8. AMHS according to claim 7 working area system, is characterized in that: this temporary bracket is provided with silicon box detector, to survey on this temporary bracket whether placed silicon box.
9. AMHS according to claim 8 working area system, is characterized in that: the back-shaped rotation clockwise or counterclockwise of this back-shaped temporary storage platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310739705.0A CN103693445A (en) | 2013-12-27 | 2013-12-27 | AMHS (automated material handling system) stocker system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310739705.0A CN103693445A (en) | 2013-12-27 | 2013-12-27 | AMHS (automated material handling system) stocker system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103693445A true CN103693445A (en) | 2014-04-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310739705.0A Pending CN103693445A (en) | 2013-12-27 | 2013-12-27 | AMHS (automated material handling system) stocker system |
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| CN (1) | CN103693445A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109427638A (en) * | 2017-08-24 | 2019-03-05 | 细美事有限公司 | Carrier transferring apparatus and method |
| CN110542451A (en) * | 2018-05-29 | 2019-12-06 | 台湾积体电路制造股份有限公司 | Error detection method and manufacturing facility |
-
2013
- 2013-12-27 CN CN201310739705.0A patent/CN103693445A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109427638A (en) * | 2017-08-24 | 2019-03-05 | 细美事有限公司 | Carrier transferring apparatus and method |
| CN110542451A (en) * | 2018-05-29 | 2019-12-06 | 台湾积体电路制造股份有限公司 | Error detection method and manufacturing facility |
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Application publication date: 20140402 |