CN103466324A - Automatic handling system - Google Patents
Automatic handling system Download PDFInfo
- Publication number
- CN103466324A CN103466324A CN 201310447606 CN201310447606A CN103466324A CN 103466324 A CN103466324 A CN 103466324A CN 201310447606 CN201310447606 CN 201310447606 CN 201310447606 A CN201310447606 A CN 201310447606A CN 103466324 A CN103466324 A CN 103466324A
- Authority
- CN
- China
- Prior art keywords
- equipment
- track
- material handling
- handling systems
- automated material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention discloses an automatic handling system, which comprises equipment arranged in a matrix type, a track structure, at least one delivery wagon and a control unit, wherein each piece of equipment is provided with a stacking part and a silicon chip box storing and taking mechanism, and an equipment passage where the stacking part of each piece of equipment is located is provided with only one track. After the above technical scheme is adopted, the number of tracks is effectively reduced, the structure of the track is simpler compared with that of the track in the prior art, the load of a roof of a system space, such as a ceiling is greatly reduced, and the safety is improved; since the time of storing and taking the boxes is saved, the automatic handling system can always run on a main track, so that the integral handing efficiency of the handling system is improved; the operation burden of the control unit is reduced, and the stability of the system is ensured.
Description
Technical field
The present invention relates to semi-conductor integrated circuit material transfer equipment technical field, relate in particular to a kind of silicon box automated material handling systems.
Background technology
Along with the development of semiconductor technology, the 300mm silicon chip has progressively replaced the 200mm silicon chip becomes main flow, the weight of the silicon box of every box-packed year silicon chip also by original approximately 4 kilograms become approximately 9 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for degree of utilization and the requirement of production cycle of factory building, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
Transformation due to silicon chip from 200mm to 300mm, the Semi Auto conveyance mode that factory adopts has been reformed into Full Auto conveyance mode, namely from AMHS be responsible for system between aisle (interbay), system in aisle (intrabay) is responsible in artificial conveyance, evolve and realize by AMHS for system in system between aisle and aisle.This mode has greatly alleviated the working strength of production line operating personal, has avoided again the loss caused because of human accident simultaneously.
In prior art, a kind of main flow AMHS for the manufacture of 300mm silicon chip comprises a plurality of silicon chip storage equipment (STOCKER) and one or more aerial elevator delivery cars (OHT) for depositing semi-conductor silicon chip, between each station of silicon chip fabrication region, transmitting silicon chip.The silicon chip left in STOCKER is loaded into box type container, front opening film magazine (Front Opening Unified Pod, be called for short FOUP) for example, and they are passed to the OHT advanced on the track that dangles subsequently.For instance, be by the silicon box conveyance of Tool A to Tool B, existing general conveyance path is Tool A → Stoker01 → Stocker02 → Tool B.
For the further automation of elevator system, prior art provides again the conveyance pattern of a kind of Tool To Tool, namely direct Tool A → Tool B.U.S. Pat 7356378B1 discloses a kind of factory automation system, embodiment and accompanying drawing have disclosed layout and the OHT trolley travelling mode of system middle orbit, visible, the mode of several direct transportation silicon box can be arranged between two equipment 112, also comprise by storing in a warehouse 120 as intermediate link.
Yet, although the existing conveyer of being put down in writing as above-mentioned patent can be realized the direct conveying of silicon box between two equipment, but need to set up complicated track structure, especially at least to set up a track at each equipment place, cause that track structure is numerous and diverse, the top ceiling load increases, affects safety; On the other hand, numerous tracks select optimal path to manufacture trouble also to the OHT dolly, and dolly winds possibly and severally curvedly could arrive target device, and control system also wants the multiple path of computing possible, has affected to a certain extent conveyance efficiency.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of new automated material handling systems is provided.
For achieving the above object, the invention provides a kind of automated material handling systems, it comprises:
A plurality of equipment, be rectangular laying, and each equipment has the stack portion of stacking silicon box and the access mechanism of transportation that silicon box is come and gone between stack portion and this equipment aisle, stack portion place;
Track structure, it has many tracks that are interconnected and dangles and is fixed in the top of system space, and the equipment aisle at each equipment stacking section place has and only has a track to lay;
At least one waggon, hang on track structure and can advance along track; And
Control unit, be connected with the waggon signal with this equipment.
Further, in this apparatus matrices, the vertical equipment stacking of every row section towards unanimously.
Further, adjacent vertical two row equipment stacking sections is towards the opposite.
Further, the stack portion that this track is arranged at two row neighbouring devices is together between the equipment aisle at place.
Further, the periphery of this apparatus matrices is also laid a circle track.
Further, this access mechanism comprises vertical slide rail, the extension arm be connected with vertical slide rail on the equipment of being fixed on and is located on extension arm and silicon box load member that can be elastic.
Further, this silicon box load member by the slide rail on extension arm carry out elastic or this silicon box load member be fixed in can be elastic extension arm on.
Further, this silicon box load member is supporting plate, clamping plate, cups one hand in the other before the chest or handgrip.
Further, each equipment has one or more stack portion, and each equipment or each stack portion are equipped with an access mechanism.
Further, the silicon box load member of this access mechanism can extend position under track.
The present invention adopts above technical scheme, a kind of new automated material handling systems is provided, it only arranges a track in the equipment aisle with silicon box stack portion one side, greatly reduced number of tracks, make track structure compare prior art simpler, the system space top also reduces greatly as the load of top ceiling, has improved safety and conveyance efficiency; Secondly, the silicon box stack portion is provided with access mechanism, can collect the silicon box that waggon sends here and be stored on corresponding stack portion, perhaps waggon is taken off and passed to the silicon box on stack portion, like this, waggon has just been saved the time of each equipment access, and it is moved always on the trunk track, improves the whole conveyance efficiency of conveyer; Moreover the increase of the minimizing of number of tracks and conveyance efficiency, also reduced the computational burden of control unit, guaranteed the stability of system.
The accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is the automated material handling systems plan sketch of first embodiment of the invention;
Fig. 2 is the structural representation of silicon box access mechanism and waggon in first embodiment of the invention.
The specific embodiment
Refer to Fig. 1, the automated material handling systems of the present embodiment comprises:
Be 48 equipment 1 that 8 * 6 matrixes are laid, each equipment 1 has two and stacks the stack portion 11 of silicon box and the access mechanism (not shown) of transportation that silicon box is come and gone between stack portion and equipment aisle, stack portion place, in the present embodiment, longitudinally in 6 row equipment 1, the stack portion 11 of every row equipment 1 towards being all consistent, and adjacent two row equipment 1 stack portion 11 is towards the opposite, the equipment 1 display mode that is thus stack portion shown in Fig. 1 11 " face-to-face ", " dos-à-dos ", can at utmost reduce the quantity of track;
Track structure, track 2 by many tops of being fixed in system space of being interconnected and dangling forms, the equipment aisle at each stacking 11 place of equipment 1 has and only has a track 2 to lay, and this apparatus matrices has 4 vertical described equipment aisle, and four tracks 2 longitudinally are set thus; Simultaneously, in order to make track form the loop be interconnected, also in order under the prerequisite guaranteeing minimum orbit quantity, to provide maximum routing, at this apparatus matrices periphery and the middle track 2 that laterally also is laid with, the track intersection integrates with and communicates in twos by arc;
Waggon 3, be provided with 5 and hang on track 2 and can advance along track 2; And
Control unit, be connected (not shown) with equipment 1 with waggon 3 signals.
Heavy line in Fig. 1 has shown will be transported to the silicon box of device A stack portion A1 the path of equipment B stack portion B2, and because matrix intermediate lateral track has waggon just in operation, so control unit has calculated this shortest path result through simple path.
Please continue to consult Fig. 2 simultaneously, show in the present embodiment the structural representation of access mechanism and waggon on equipment.This access mechanism has two vertical slide rails 12, two extension arms 13 and silicon box clamping plate 14.Wherein, article two, vertical slide rail 12 is located at the both sides of stack portion 11 and is fixed on equipment 1, article two, extension arm 13 is connected with two vertical slide rails 12 respectively and slide rail 12 upper and lower translations along the longitudinal, silicon box clamping plate 14 are located on two extension arms 13, it comprises and can carry out the two clamping plates stretched out on the connecting rod of transverse translation and connecting rod along slide rail on extension arm 13, and clamping plate have the effect that the L-type structure can have support concurrently and clamp silicon box.Wherein, the silicon box load member can also be supporting plate, cup one hand in the other before the chest support commonly used, the clamping mechanical instruments such as (on fork truck) or handgrip.
In operating process, when the waggon 3 that is loading silicon box 4 along track 2, drive in the top of equipment 1 stack portion 11 that need to deposit and slow down and stop, extension arm 13 slide rail 12 along the longitudinal rises, silicon box clamping plate 14 to project forwardly to track 2 be waggon 3 under position, lifting mechanism 31 descends silicon box 4 and is put on silicon box clamping plate 14, silicon box clamping plate 14 supports also clamp silicon box, by retraction and decline, silicon box 4 is placed on target stack portion 11.Wherein, waggon 3, lifting mechanism 31, access mechanism are controlled by control unit.
In Another Application, the principle that silicon box flows to waggon by access mechanism is same as described above, therefore repeat no more.
In the present embodiment, each equipment has two stack portion, and each stack portion is equipped with an access mechanism, but can adjust according to practical application the quantity of stack portion, and the also quantity of capable of regulating access mechanism and position, to realize the purpose identical with the present invention.
Claims (10)
1. an automated material handling systems, is characterized in that, it comprises:
A plurality of equipment, be rectangular laying, and each equipment has the stack portion of stacking silicon box and the access mechanism of transportation that silicon box is come and gone between stack portion and this equipment aisle, stack portion place;
Track structure, it has many tracks that are interconnected and dangles and is fixed in the top of system space, and the equipment aisle at each equipment stacking section place has and only has a track to lay;
At least one waggon, hang on track structure and can advance along track; And
Control unit, be connected with the waggon signal with this equipment.
2. automated material handling systems according to claim 1 is characterized in that: in this apparatus matrices, the vertical equipment stacking of every row section towards unanimously.
3. automated material handling systems according to claim 2 is characterized in that: adjacent vertical two row equipment stacking sections towards the opposite.
4. automated material handling systems according to claim 3 is characterized in that: the stack portion that this track is arranged at two row neighbouring devices is together between the equipment aisle at place.
5. automated material handling systems according to claim 4, it is characterized in that: the periphery of this apparatus matrices is also laid a circle track.
6. according to the described automated material handling systems of claim 1 to 5 any one, it is characterized in that: this access mechanism comprises vertical slide rail, the extension arm be connected with vertical slide rail on the equipment of being fixed on and is located on extension arm and silicon box load member that can be elastic.
7. automated material handling systems according to claim 6 is characterized in that: this silicon box load member by the slide rail on extension arm carry out elastic or this silicon box load member be fixed in can be elastic extension arm on.
8. automated material handling systems according to claim 7, it is characterized in that: this silicon box load member is supporting plate, clamping plate, cups one hand in the other before the chest or handgrip.
9. automated material handling systems according to claim 8 is characterized in that: the silicon box load member of this access mechanism can extend position under track.
10. automated material handling systems according to claim 6, it is characterized in that: each equipment has one or more stack portion, and each equipment or each stack portion are equipped with an access mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201310447606 CN103466324A (en) | 2013-09-26 | 2013-09-26 | Automatic handling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201310447606 CN103466324A (en) | 2013-09-26 | 2013-09-26 | Automatic handling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103466324A true CN103466324A (en) | 2013-12-25 |
Family
ID=49791418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201310447606 Pending CN103466324A (en) | 2013-09-26 | 2013-09-26 | Automatic handling system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103466324A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105996488A (en) * | 2016-07-05 | 2016-10-12 | 佛山市联智新创科技有限公司 | Intelligent shoe cabinet capable of automatically discharging shoes |
| CN109671652A (en) * | 2018-12-25 | 2019-04-23 | 上海微阱电子科技有限公司 | A kind of silicon wafer discriminating conduct |
| CN110556317A (en) * | 2019-08-13 | 2019-12-10 | 世源科技工程有限公司 | semiconductor processing system |
-
2013
- 2013-09-26 CN CN 201310447606 patent/CN103466324A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105996488A (en) * | 2016-07-05 | 2016-10-12 | 佛山市联智新创科技有限公司 | Intelligent shoe cabinet capable of automatically discharging shoes |
| CN109671652A (en) * | 2018-12-25 | 2019-04-23 | 上海微阱电子科技有限公司 | A kind of silicon wafer discriminating conduct |
| CN110556317A (en) * | 2019-08-13 | 2019-12-10 | 世源科技工程有限公司 | semiconductor processing system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102054725B (en) | System and method for overhead cross-system transportation | |
| US9548230B2 (en) | Temporary storage device, transport system, and temporary storage method | |
| CN102290486B (en) | Substrate processing apparatus and method for loading and unloading substrates | |
| US7798759B2 (en) | Modular terminal for high-throughput AMHS | |
| US7780392B2 (en) | Horizontal array stocker | |
| KR101453828B1 (en) | Transfer system | |
| US9845193B2 (en) | Conveyance system | |
| KR101275607B1 (en) | Stocker | |
| CN103466324A (en) | Automatic handling system | |
| CN103395589A (en) | Automatic material transmission system and material transmission method | |
| KR102453197B1 (en) | Apparatus for loading substrate storage container | |
| WO2013150841A1 (en) | Conveyance system | |
| CN202967393U (en) | Automatic transferring track structure and transferring system | |
| CN103693444A (en) | Automatic moving track structure and moving system | |
| CN103600992A (en) | AMHS (automatic material handling system) temporary storage area system | |
| KR101334767B1 (en) | Handling System for Semiconductor device | |
| CN103601097A (en) | Transport used for automated material handling system | |
| CN103274215A (en) | Equipment front end device and storage and transportation method for silicon chip box | |
| CN103612976A (en) | Track structure and handling system for automated material handling | |
| US20190088615A1 (en) | Apparatus and method for packaging components | |
| JP6578794B2 (en) | Transport system | |
| CN220253210U (en) | Automatic running structure of inserting machine | |
| CN214826757U (en) | Integral transfer system of conveyor | |
| KR102231176B1 (en) | Apparatus for transferring articles | |
| TWI392634B (en) | Wafer conveying and dispensing device and method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20131225 |
|
| WD01 | Invention patent application deemed withdrawn after publication |