CN103601097A - Transport used for automated material handling system - Google Patents
Transport used for automated material handling system Download PDFInfo
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- CN103601097A CN103601097A CN201310552161.7A CN201310552161A CN103601097A CN 103601097 A CN103601097 A CN 103601097A CN 201310552161 A CN201310552161 A CN 201310552161A CN 103601097 A CN103601097 A CN 103601097A
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- scissors rod
- waggon
- pedestal
- rod group
- underframe
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Abstract
The invention discloses a transport used for an automated material handling system. The transport comprises a transport body, a control unit in the transport body, wheels at the top of the transport body, and a forked type lifting device at the bottom of the transport body. The forked type lifting device comprises a substrate fixed on the transport body, at least one forked rod group arranged below the substrate and connected with the substrate, and a bottom frame arranged below the forked rod group and connected with the forked rod group. Guide rails are arranged on the substrate and the bottom frame, and the guide rails on the substrate and the bottom frame are respectively connected with at least one forked rod in a sliding manner. The forked rod group is driven by a hydraulic cylinder fixed on the substrate, the hydraulic cylinder is connected with a motor, the motor is connected with the control unit in a signal manner, and a picking part of a silicon chip box is arranged under the bottom frame. By the aid of the transport, bearing capacity of the transport can be enhanced, and accuracy of picking the silicon chip box and stability and safety of carrying the silicon chip box are improved.
Description
Technical field
The present invention relates to semi-conductor integrated circuit material transfer equipment technical field, relate in particular to waggon in a kind of silicon box automated material handling systems.
Background technology
Along with the development of semiconductor technology, 300mm silicon chip has progressively replaced 200mm silicon chip becomes main flow, and the weight of the silicon box of every box-packed year silicon chip also becomes approximately 9 kilograms by original approximately 4 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for the degree of utilization of factory building and the requirement of production cycle, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
In prior art, a kind of main flow AMHS for the manufacture of 300mm silicon chip adopts suspension type conveyer, it comprises a plurality of for depositing silicon chip storage equipment (STOCKER) and one or more aerial elevator delivery car (Overhead Hoist Transport of semi-conductor silicon chip, be called for short OHT), for transmit silicon chip between each station of silicon chip fabrication region.The silicon chip leaving in STOCKER is loaded into box type container, front opening film magazine (Front Opening Unified Pod, be called for short FOUP) for example, and they are passed to the OHT waggon of advancing on the track that dangles subsequently.Waggon is generally to power by non-contact power mode, and its principle of work is exactly to lay special cable in a side of track, and the magnetic line of force that waggon produces by this cable of cutting obtains power supply.
Wherein, these all transmission are all that the track based on dangling on top ceiling is realized, and along with the change of die size is large, the development of the size of 300mm silicon box forward 450mm, the weight of silicon box FOUP is increasing, and therefore the load-carrying capacity of OHT waggon and stability has been proposed to new requirement.The lifting mechanism that the most employing of existing suspension type waggon is arranged at the bottom of car picks and places silicon box, and wherein the more employing rubber of lifting mechanism rope connects fetching device.This just requires waggon static when picking and placeing silicon box, otherwise can cause rocking of fetching device and the stack portion that cannot aim at silicon box or board; In addition, along with the increase of silicon box weight, the load-carrying capacity of rubber rope is limited, and more aging, more damaged, brings hidden danger all to the stability of conveyer and safety.
In sum, need to propose a kind of new waggon and improve the load-carrying capacity of waggon, and improve stability and the safety of its conveyance silicon box.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of new waggon for automatic material transfer system is provided.
For achieving the above object, the invention provides a kind of waggon for automatic material transfer system, this waggon is suspended to the track of system, it comprises vehicle body, control unit in vehicle body, the wheel at vehicle body top and the crossing type lifting apparatus of body bottom, this crossing type lifting apparatus comprises the pedestal that is fixed on vehicle body, below pedestal below at least one group of scissors rod group being connected with pedestal and scissors rod group and the underframe being connected with scissors rod group, this pedestal and underframe are provided with guide rail, and the guide rail on pedestal and underframe respectively at least with a scissors rod sliding block joint, this scissors rod group is by the Hydraulic Cylinder being fixed on pedestal, this hydraulic actuating cylinder is connected with motor, and motor is connected with control unit signal, this underframe picks and places parts to having silicon box.
Further, this crossing type lifting apparatus comprises that at least two group scissors rod groups are hinged and forms, and this pedestal is connected by two scissors rods respectively with underframe, and in the scissors rod being connected with this pedestal or underframe, one is fixed on pedestal or underframe, and another root is connected with the guide rail of pedestal or underframe.
Further, this hydraulic actuating cylinder is connected with the scissors rod of being located in base rail.
Further, this scissors rod group comprises two row arranged side by side.
Further, a pair of co-located scissors rod group in this two row scissors rod group, connected by a pipe link at scissors rod infall separately, this hydraulic actuating cylinder is connected with this pipe link.
Further, this is the scissors rod group that top is connected with pedestal to co-located scissors rod group.
Further, this scissors rod group is aluminiferous metals or rigid plastic.
Further, this hydraulic actuating cylinder is connected with that one end that scissors rod is located in base rail.
Further, this underframe is the separable part of waggon vehicle body.
Further, this pick and place parts be hook or handgrip.
The present invention adopts above technical scheme, a kind of new waggon for automatic material transfer system is provided, by crossing type lifting apparatus being installed at waggon body bottom, can improve the load-carrying ability of waggon and jacking system thereof, also rocking of jacking system be can effectively avoid, thereby improve, the accuracy of silicon box, the stability of conveyance and safety picked and placeed.
Accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is the schematic diagram that first embodiment of the invention waggon is opened crossing type lifting apparatus;
Fig. 2 is the schematic diagram that first embodiment of the invention waggon draws crossing type lifting apparatus in.
The specific embodiment
the first embodiment
Refer to Fig. 1, the present embodiment is suspended on the track 9 of system for the waggon 1 of automatic material transfer system, and it comprises control unit (not shown), the wheel 12 at vehicle body 11 tops and the crossing type lifting apparatus 13 of vehicle body 11 bottoms in vehicle body 11, vehicle body 11.
Wherein, crossing type lifting apparatus 13 comprises the underframe 133 that is fixed on pedestal 131, pedestal 131 belows the scissors rod group being connected with pedestal 131 of vehicle body 11 and scissors rod group below and is connected with scissors rod group, pedestal 131 is provided with the first guide rail 134, and underframe 133 is provided with the second guide rail 135.According to waggon, pick and place the requirement of the range of silicon box, the scissors rod group of the present embodiment is hinged and is formed by three groups of scissors rods, comprises the first scissors rod group 1321, the second scissors rod group 1322 and the 3rd scissors rod group 1323.The first scissors rod group 1321 is comprised of cross one another the first scissors rod a and the second scissors rod b, the second scissors rod group 1322 is comprised of cross one another the 3rd scissors rod c and the 4th scissors rod d, and the 3rd scissors rod group 1323 is comprised of cross one another the 5th scissors rod e and the 6th scissors rod f.The top of the first scissors rod a is fixed on pedestal 131, the top of the second scissors rod b and the first guide rail 134 sliding block joints, and the bottom of the 5th scissors rod e and the second guide rail 135 sliding block joints, the bottom of the 6th scissors rod f is fixed on underframe 133.Hydraulic actuating cylinder 136 two ends are connected to pedestal 131 and the second scissors rod b, and hydraulic actuating cylinder 136 is also connected with motor (not shown), and motor is connected with control unit signal, with this, promotes scissors rod group, realizes the lifting of crossing type lifting apparatus 13.Underframe 133 is also provided with the grippers 14 of silicon box 8 downwards.In other embodiments, hydraulic actuating cylinder also can be connected on the 4th scissors rod d.
Please continue to refer to Fig. 2, Fig. 2 shows the state after the present embodiment crossing type lifting apparatus 13 draws in.In the present embodiment, underframe 133 is closed, and is a separable part for vehicle body 11, and, when crossing type lifting apparatus 13 draws in, underframe 133 connects with the first half of vehicle body 11, forms a complete waggon shell.Such benefit comprises: avoid crossing type lifting apparatus externally exposed; Avoid the dirt in waggon to drop; Increased the aesthetic property of waggon.
In the present embodiment, crossing type lifting apparatus setting is three groups of scissors rod groups longitudinally, improve the range that waggon picks and places silicon box, but can be according to the actual height folding and unfolding scissors rod group of silicon box in actual use; Meanwhile, crossing type lifting apparatus adopts aluminium material, when guaranteeing its structural strength, has alleviated as far as possible waggon weight.In other embodiments, crossing type lifting apparatus also can adopt rigid plastic etc. to have the material of some strength and lighter weight.
the second embodiment
In the present embodiment, the setting of vehicle body, pedestal and underframe is identical with the first embodiment, and crossing type lifting apparatus has comprised one group of scissors rod group, this group scissors rod group comprises two cross one another scissors rods, and it is identical with the first embodiment with the connection mode of pedestal and underframe.The present embodiment has reduced the quantity of scissors rod group, and the range of having dwindled jacking system, to be applicable to different occasions, has also alleviated the weight of waggon.
The hydraulic actuating cylinder two ends of the present embodiment are connected with that one end that pedestal and scissors rod are located in base rail respectively, and hydraulic actuating cylinder, in operation, all the time in level, promotes one end of scissors rod on guide rail by horizontal direction, realize the flexible of scissors rod group.
the 3rd embodiment
In the present embodiment, the setting of vehicle body, pedestal and underframe is identical with the second embodiment, and crossing type lifting apparatus has comprised two row scissors rod groups arranged side by side, every row scissors rod group comprises two groups of scissors rod groups that are longitudinally hinged, and the scissors rod group of every row top and bottom is identical with the first embodiment with the connection mode of pedestal and underframe.The infall of one group of scissors rod group and the scissors rod group infall of another row co-located above in two groups, by a pipe link, be connected, can be with reference to the point of crossing of the first scissors rod a and the second scissors rod b in figure 1, hydraulic actuating cylinder is connected with this pipe link, by promoting pipe link, realize the lifting of crossing type lifting apparatus.
Claims (10)
1. the waggon for automatic material transfer system, this waggon is suspended to the track of system, it is characterized in that: this waggon comprises vehicle body, control unit in vehicle body, the wheel at vehicle body top and the crossing type lifting apparatus of body bottom, this crossing type lifting apparatus comprises the pedestal that is fixed on vehicle body, below pedestal below at least one group of scissors rod group being connected with pedestal and scissors rod group and the underframe being connected with scissors rod group, this pedestal and underframe are provided with guide rail, and the guide rail on pedestal and underframe respectively at least with a scissors rod sliding block joint, this scissors rod group is by the Hydraulic Cylinder being fixed on pedestal, this hydraulic actuating cylinder is connected with motor, and motor is connected with control unit signal, this underframe picks and places parts to having silicon box.
2. the waggon for automatic material transfer system according to claim 1, it is characterized in that: this crossing type lifting apparatus comprises that at least two group scissors rod groups are hinged and forms, this pedestal is connected by two scissors rods respectively with underframe, and in the scissors rod being connected with this pedestal or underframe, one is fixed on pedestal or underframe, and another root is connected with the guide rail of pedestal or underframe.
3. the waggon for automatic material transfer system according to claim 2, is characterized in that: this hydraulic actuating cylinder is connected with the scissors rod of being located in base rail.
4. the waggon for automatic material transfer system according to claim 2, is characterized in that: this scissors rod group comprises two row arranged side by side.
5. the waggon for automatic material transfer system according to claim 4, it is characterized in that: a pair of co-located scissors rod group in this two row scissors rod group, connected by a pipe link at scissors rod infall separately, this hydraulic actuating cylinder is connected with this pipe link.
6. the waggon for automatic material transfer system according to claim 5, is characterized in that: this is scissors rod group top and that be connected with pedestal to co-located scissors rod group.
7. the waggon for automatic material transfer system according to claim 1, is characterized in that: this hydraulic actuating cylinder is connected with that one end that scissors rod is located in base rail.
8. the waggon for automatic material transfer system according to claim 1, is characterized in that: this underframe is the separable part of waggon vehicle body.
9. according to the waggon for automatic material transfer system described in claim 1 to 8 any one, it is characterized in that: this scissors rod group is aluminiferous metals or rigid plastic.
10. the waggon for automatic material transfer system according to claim 1, is characterized in that: this picks and places parts is hook or handgrip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310552161.7A CN103601097A (en) | 2013-11-08 | 2013-11-08 | Transport used for automated material handling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310552161.7A CN103601097A (en) | 2013-11-08 | 2013-11-08 | Transport used for automated material handling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103601097A true CN103601097A (en) | 2014-02-26 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310552161.7A Pending CN103601097A (en) | 2013-11-08 | 2013-11-08 | Transport used for automated material handling system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103601097A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104355265A (en) * | 2014-10-11 | 2015-02-18 | 泰兴市塔力机械制造有限公司 | Lifting device |
| CN107804687A (en) * | 2017-10-26 | 2018-03-16 | 广州莱因智能装备股份有限公司 | Full-automatic disc stack system |
-
2013
- 2013-11-08 CN CN201310552161.7A patent/CN103601097A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104355265A (en) * | 2014-10-11 | 2015-02-18 | 泰兴市塔力机械制造有限公司 | Lifting device |
| CN107804687A (en) * | 2017-10-26 | 2018-03-16 | 广州莱因智能装备股份有限公司 | Full-automatic disc stack system |
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Application publication date: 20140226 |
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| WD01 | Invention patent application deemed withdrawn after publication |