CN103723516A - Maintenance vehicle and AMHS (automatic material handling system) - Google Patents
Maintenance vehicle and AMHS (automatic material handling system) Download PDFInfo
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- CN103723516A CN103723516A CN201310728357.7A CN201310728357A CN103723516A CN 103723516 A CN103723516 A CN 103723516A CN 201310728357 A CN201310728357 A CN 201310728357A CN 103723516 A CN103723516 A CN 103723516A
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- maintenance
- tool
- maintenance car
- amhs
- mechanical arm
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Abstract
The invention discloses a maintenance vehicle for an AMHS (automatic material handling system). The maintenance vehicle comprises a vehicle body, wheels and a control unit. The wheels are suspended on rails. A maintenance device arranged on the maintenance vehicle comprises a retractable manipulator, a tool grasper and a toolkit. The manipulator is mounted on the vehicle body, the tool grasper is mounted at the front end of the manipulator, and the toolkit accommodates at least one tool. The maintenance device is arranged on the maintenance vehicle, so that maintenance can be performed timely on faults of equipment such as transporters in the AMHS system to guarantee normal operation of the system, and the technical problems caused by manual maintenance are avoided.
Description
Technical field
The present invention relates to semi-conductor integrated circuit mass transport board technical field, relate in particular to a kind of maintenance car and AMHS system.
Background technology
Along with the development of semiconductor technology, 300mm silicon chip has progressively replaced 200mm silicon chip becomes main flow, and the weight of the silicon box of every box-packed year silicon chip also becomes approximately 9 kilograms by original approximately 4 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for the degree of utilization of factory building and the requirement of production cycle, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
Existing AMHS system all adopts the OHT waggon travelling on many track structures hanging on top ceiling and track, travel to and fro between (tool to tool transport model) between each board, or travel to and fro between between board and working area Stocker (between aisle in system interbay and aisle system intrabay).Between employing aisle as shown in Figure 1, the delivery system in aisle, each board 10 on every one side, board aisle is provided with silicon box stack portion 20(load port), OHT waggon 70(overhead hoist transport) can pick up the silicon box 30 in stack portion 20, and by track structure 60, be sent in the stack portion 20 of another board 10.The course of conveying of this silicon box 30 in same aisle is called system 110 in aisle, and the course of conveying of silicon box 30 between different aisle is called system 100 between aisle.In aisle, OHT waggon 70 is used in the conveying of system 110, between aisle, the conveying of system 100 is first silicon box 30 to be moved in working area 50 and temporarily stored with waggon 70, while by the time needing to use this silicon box 30, then with waggon 70 conveyances, arrive and specify board 10 places equally.
In the operation of AMHS system, can there is unavoidably the situation that the devices such as waggon break down, at this moment, if manually enter clean room, keep in repair, destroy space cleanliness and do not say, also must stop whole system, greatly reduce conveyance efficiency, also expend manpower.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of maintenance car and AMHS system are provided.
For achieving the above object, the invention provides a kind of maintenance car for AMHS system, it comprises vehicle body, is suspended to wheel and control unit on track, wherein, on this maintenance car, be also provided with maintenance unit, this maintenance unit comprises and is arranged on vehicle body and telescopic mechanical arm, is installed on the tool piece handgrip of mechanical arm front end and holds the tool box of at least one tool piece.
Further, this mechanical arm is formed by connecting by least two sections of straight-arm foldings.
Further, this mechanical arm is installed on vehicle body turnably.
Further, this tool piece handgrip is installed on mechanical arm front end turnably.
Further, the tool piece in this tool piece handgrip and tool box has the connecting portion cooperatively interacting.
Further, this connecting portion connects by buckle, and this connecting portion also has Anti-fall safety device.
Further, on this maintenance car vehicle body or maintenance unit, be also provided with camera.
Further, this camera is located at mechanical arm front end.
Further, this tool box is fixed on vehicle body.
Further, this tool box has downward opening, for tool piece handgrip fetching tool part.
The present invention also provides a kind of AMHS system, and it comprises multiple boards, track structure, at least one waggon, overhead control unit and at least one above-mentioned maintenance car.
Maintenance car of the present invention and AMHS system, by maintenance unit is set on dolly, can keep in repair the fault of the equipment such as the waggon occurring in AMHS system in time, to guarantee the normal operation of system, and the above-mentioned technical matters of avoiding artificial maintenance to bring.
Accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is the structural representation of existing automatic material transfer system;
Fig. 2 is the maintenance car structural representation of first embodiment of the invention.
The specific embodiment
the first embodiment
Refer to Fig. 2, the maintenance car 1 for AMHS system in the present embodiment, it comprises vehicle body 11, is suspended to wheel 12 and control unit (not shown) on track.Wherein, be also provided with maintenance unit on maintenance car 1, maintenance unit comprises and being arranged on vehicle body 11 and telescopic mechanical arm 21, the tool piece handgrip 22 that is installed on mechanical arm 21 front ends and tool box 23.
In the present embodiment, mechanical arm 21 is formed by connecting by two sections of straight-arm foldings; Tool box 23 is fixed in vehicle body 11, it is under shed and have 3 tool piece grooves 24, can place three tool pieces 25, tool piece handgrip 22 can be from the interior fetching tool part 25 of tool piece groove 24, tool piece handgrip 22 is connected to the control unit (not shown) in vehicle body by circuit, the maintenance action of control unit driving and control tool part handgrip 22.
In the present embodiment, tool piece handgrip 22 has with tool piece 25 a pair of connecting portion cooperatively interacting, and as buckle connection mode, and has safety device, to prevent that tool piece from dropping when the maintenance activity.
In other embodiments, tool piece handgrip can pass through conventional rotating mechanism, is installed on turnably the front end of mechanical arm, and mechanical arm also can pass through conventional rotating mechanism, is installed on turnably on vehicle body, to realize the maintenance range of 360 °; In addition, tool box also can be fixed on mechanical arm.
In other embodiments, the front end of mechanical arm is also provided with camera, and parallel with tool piece handgrip, for the picture in operating personal Real Time Observation dedusting space, more intuitively, effectively controls maintenance car, carries out dedusting operation.
the second embodiment
The AMHS system of the present embodiment, it comprises the track structure that the board of rectangular laying, many long rails and cross track suspention arrange, the maintenance car of being located at least one the waggon, overhead control unit and at least one above-mentioned the first embodiment that travel on track structure, and this maintenance car is located on track structure and is travelled.
Claims (10)
1. the maintenance car for AMHS system, it comprises vehicle body, is suspended to wheel and control unit on track, it is characterized in that: on this maintenance car, be also provided with maintenance unit, this maintenance unit comprises and is arranged on vehicle body and telescopic mechanical arm, is installed on the tool piece handgrip of mechanical arm front end and holds the tool box of at least one tool piece.
2. the maintenance car for AMHS system according to claim 1, is characterized in that: this mechanical arm is formed by connecting by least two sections of straight-arm foldings, and this mechanical arm is installed on vehicle body turnably.
3. the maintenance car for AMHS system according to claim 1, is characterized in that: this tool piece handgrip is installed on mechanical arm front end turnably.
4. the maintenance car for AMHS system according to claim 1, is characterized in that: the tool piece in this tool piece handgrip and tool box has the connecting portion cooperatively interacting.
5. the maintenance car for AMHS system according to claim 4, it is characterized in that: this connecting portion connects by buckle, and this connecting portion also has Anti-fall safety device.
6. the maintenance car for AMHS system according to claim 1, is characterized in that: on this maintenance car vehicle body or maintenance unit, be also provided with camera.
7. the maintenance car for AMHS system according to claim 6, is characterized in that: this camera is located at mechanical arm front end.
8. the maintenance car for AMHS system according to claim 1, is characterized in that: this tool box is fixed on vehicle body.
9. the maintenance car for AMHS system according to claim 1, is characterized in that: this tool box has downward opening, for tool piece handgrip fetching tool part.
10. an AMHS system, is characterized in that: it comprises that multiple boards, track structure, at least one waggon, overhead control unit and at least one are according to the maintenance car described in claim 1 to 9 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310728357.7A CN103723516A (en) | 2013-12-25 | 2013-12-25 | Maintenance vehicle and AMHS (automatic material handling system) |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310728357.7A CN103723516A (en) | 2013-12-25 | 2013-12-25 | Maintenance vehicle and AMHS (automatic material handling system) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103723516A true CN103723516A (en) | 2014-04-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310728357.7A Pending CN103723516A (en) | 2013-12-25 | 2013-12-25 | Maintenance vehicle and AMHS (automatic material handling system) |
Country Status (1)
| Country | Link |
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| CN (1) | CN103723516A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108382445A (en) * | 2018-04-28 | 2018-08-10 | 山东小胖网络科技有限公司 | A kind of server dismounting maintenance car device with fixation and recognition function |
| TWI821552B (en) * | 2019-04-03 | 2023-11-11 | 日商村田機械股份有限公司 | Traveling vehicle system |
-
2013
- 2013-12-25 CN CN201310728357.7A patent/CN103723516A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108382445A (en) * | 2018-04-28 | 2018-08-10 | 山东小胖网络科技有限公司 | A kind of server dismounting maintenance car device with fixation and recognition function |
| TWI821552B (en) * | 2019-04-03 | 2023-11-11 | 日商村田機械股份有限公司 | Traveling vehicle system |
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Application publication date: 20140416 |