CN103693554A - Transport vehicle for automatic material transport system - Google Patents
Transport vehicle for automatic material transport system Download PDFInfo
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- CN103693554A CN103693554A CN201310719196.5A CN201310719196A CN103693554A CN 103693554 A CN103693554 A CN 103693554A CN 201310719196 A CN201310719196 A CN 201310719196A CN 103693554 A CN103693554 A CN 103693554A
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- flexible mechanical
- waggon
- rotating disk
- mechanical arms
- automatic material
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Abstract
The invention discloses a transport vehicle for an automatic material transport system. The transport vehicle comprises a vehicle body, a control unit in the vehicle body, wheels at the top of the vehicle body and a lifting device at the bottom of the vehicle body, wherein the lifting device comprises two telescopic mechanical arms which are respectively fixed on the front side and the rear side of the bottom of the vehicle body through a rotating device and capable of horizontally rotating; the tail ends of the two telescopic mechanical arms are provided with silicon wafer box fetching/placing components. By arranging the two telescopic mechanical arms, the carrying quantity of silicon wafer boxes can be increased, and the silicon wafer boxes can be transmitted between the two telescopic mechanical arms and transmitted to a next transport vehicle, and the transfer efficiency is improved; by arranging the rotating device, the telescopic directions of the telescopic mechanical arms or the front position and rear position of the silicon wafer boxes can be interchanged, and the transfer mode and efficiency of the transport vehicle are improved.
Description
Technical field
The present invention relates to semi-conductor integrated circuit material transfer equipment technical field, relate in particular to waggon in a kind of silicon box automated material handling systems.
Background technology
Along with the development of semiconductor technology, 300mm silicon chip has progressively replaced 200mm silicon chip becomes main flow, and the weight of the silicon box of every box-packed year silicon chip also becomes approximately 9 kilograms by original approximately 4 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for the degree of utilization of factory building and the requirement of production cycle, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
In prior art, a kind of main flow AMHS for the manufacture of 300mm silicon chip adopts suspension type conveyer, it comprises a plurality of for depositing silicon chip storage equipment (STOCKER) and one or more aerial elevator delivery car (Overhead Hoist Transport of semi-conductor silicon chip, be called for short OHT), for transmit silicon chip between each station of silicon chip fabrication region.The silicon chip leaving in STOCKER is loaded into box type container, front opening film magazine (Front Opening Unified Pod, be called for short FOUP) for example, and they are passed to the OHT waggon of advancing on the track that dangles subsequently.
As a rule, between silicon box circulation and board and storage equipment or between board and board, all to transport by a waggon, because track has many waggons simultaneously in operation, when the starting point of silicon box and terminal are distant time, its waggon of conveyance need to wherein just may run into other waggons and be forced to stop or detouring through longer track section, has reduced to a certain extent conveyance efficiency.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of new waggon for automatic material transfer system is provided.
For achieving the above object, the invention provides a kind of waggon for automatic material transfer system, this waggon is suspended to the track of system, it comprises control unit, the wheel at vehicle body top and the jacking system of body bottom in vehicle body, vehicle body, this jacking system comprises two flexible mechanical arms, these two flexible mechanical arms are separately fixed at the both sides, front and back of body bottom by slewing arrangement, and can horizontally rotate, and the end of these two flexible mechanical arms is equipped with silicon box and picks and places parts.
Further, this slewing arrangement is two the first rotating disks, and these two flexible mechanical arms are separately fixed on two the first rotating disks, and the first rotating disk is fixed on body bottom and can horizontally rotates.
Further, this slewing arrangement is second rotating disk, and these two flexible mechanical arms are fixed on second rotating disk, and the second rotating disk is fixed on body bottom and can horizontally rotates.
Further, this slewing arrangement comprises two the first rotating disks and second rotating disk, these two flexible mechanical arms are separately fixed at two the first rotating disks, and the first rotating disk is fixed on the second rotating disk and can horizontally rotates, and the second rotating disk is fixed on body bottom and can horizontally rotates.
Further, this flexible mechanical arm is by least two sections of collapsible being formed by connecting of straight-arm.
Further, this flexible mechanical arm is stretched by hydraulic pump drive, and this Hydraulic Pump is connected with control unit signal.
Further, this silicon box picks and places parts and is connected with the end of flexible mechanical arm by ball shape rotary mechanism, so that its crawl direction that all can keep down under arbitrary operating state of flexible mechanical arm.
The present invention adopts above technical scheme, a kind of new waggon for automatic material transfer system is provided, at waggon body bottom, two flexible mechanical arms are installed, can increase the delivery quantity of silicon box, and can make silicon box between these two flexible mechanical arms, transmit and to pass to the waggon closing on, improved conveyance efficiency; By the setting of slewing arrangement, can realize the flexible direction of flexible mechanical arm or realize the exchange of silicon box front and back position, improved conveyance mode and the efficiency of waggon.
Accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is the first status architecture schematic diagram of first embodiment of the invention waggon;
Fig. 2 is the second status architecture schematic diagram of first embodiment of the invention waggon;
Fig. 3 picks and places the connection diagram of handgrip in first embodiment of the invention waggon.
The specific embodiment
the first embodiment
Refer to Fig. 1, the present embodiment is suspended on the track 9 of system for the waggon 1 of automatic material transfer system, and it comprises the control unit (not shown) in vehicle body 11, vehicle body, the wheel 12 at vehicle body top and the jacking system of body bottom.
Wherein, jacking system comprises that the first flexible mechanical arm 13 and the second flexible mechanical arm 13 of flexible mechanical arm 14, the first and the second flexible mechanical arm are fixed on the both sides, front and back of body bottom by the first rotating disk 15 and the second rotating disk 16 respectively, and can horizontally rotate.The first flexible mechanical arm 13 is by the first front straight-arm 131 and collapsible being formed by connecting of the first rear straight-arm 132, and the first front straight-arm 131 ends are provided with first and pick and place handgrip 133 for picking and placeing silicon box; The second flexible mechanical arm 14 is by the second front straight-arm 141 and collapsible being formed by connecting of the second rear straight-arm 142, and the end of the second front straight-arm 141 is provided with second and picks and places handgrip 143 for picking and placeing silicon box.
The first rear straight-arm 132 is fixed on the first rotating disk 15, the first rotating disk 15 is fixed on body bottom and can horizontally rotates, so that the first flexible mechanical arm 13 can rotate to be the state in Fig. 2, so that the silicon box that the first flexible mechanical arm 13 is captured passes to the waggon in the place ahead; The second rear straight-arm 142 is fixed on the second rotating disk 16, the second rotating disk 16 is fixed on equally body bottom and can horizontally rotates, so that the second flexible mechanical arm 14 can rotate to be the state in Fig. 2, so that the silicon box that the second flexible mechanical arm 14 is captured passes to the waggon at rear.Same principle, under Fig. 1 state, the first flexible mechanical arm 13 can directly complete passing mutually of silicon box with the second flexible mechanical arm 14.When the silicon box on the second flexible mechanical arm 14 will pass to the waggon in waggon 1 the place ahead (i.e. left side in figure), can first pass to the first flexible mechanical arm 13, then by the first flexible mechanical arm 13, rotate to be the state in Fig. 2, then pass to the place ahead waggon.
In the present embodiment, by hydraulic pump drive, it stretches two flexible mechanical arms, and this Hydraulic Pump is connected with control unit signal.
In the present embodiment, first picks and places handgrip and second picks and places handgrip and by Liang Ge ball shape rotary mechanism, is connected with the end of flexible mechanical arm respectively.As shown in Figure 3, ball shape rotary mechanism 18 comprises the spheroid 182 of spherical housing 181 and Qi Nei, first picks and places handgrip 133 is fixed on spheroid 182, spherical housing 181 and the first front straight-arm 131 fix, rotation by spheroid 182 in spherical housing 181, makes first to pick and place the crawl direction that handgrip 133 all can keep down under arbitrary operating state of the first flexible mechanical arm 13.
the second embodiment
In the present embodiment, arranging all with shown in Fig. 2 of vehicle body, control unit, wheel, two flexible mechanical arms, but different from the first embodiment is, two flexible mechanical arms are not to be separately fixed on two rotating disks, but be fixed on a traffic cycle, traffic cycle is fixed on body bottom and can horizontally rotates. simultaneouslyBy such setting, the front and back position that can realize two flexible mechanical arms exchanges, thereby the silicon box capturing on rear flexible mechanical arm can be passed to the waggon in this waggon the place ahead.
the 3rd embodiment
In the present embodiment, on the basis of the first embodiment, increased traffic cycle, the first rotating disk and the second rotating disk are fixed on a traffic cycle simultaneously and can horizontally rotate, and traffic cycle is fixed on again body bottom and can horizontally rotates.By such setting, can further increase the alerting ability of mechanical arm, improve the conveyance efficiency of waggon.
Claims (7)
1. the waggon for automatic material transfer system, this waggon is suspended to the track of system, it is characterized in that: it comprises control unit, the wheel at vehicle body top and the jacking system of body bottom in vehicle body, vehicle body, this jacking system comprises two flexible mechanical arms, these two flexible mechanical arms are separately fixed at the both sides, front and back of body bottom by slewing arrangement, and can horizontally rotate, the end of these two flexible mechanical arms is equipped with silicon box and picks and places parts.
2. the waggon for automatic material transfer system according to claim 1, it is characterized in that: this slewing arrangement is two the first rotating disks, these two flexible mechanical arms are separately fixed on two the first rotating disks, and the first rotating disk is fixed on body bottom and can horizontally rotates.
3. the waggon for automatic material transfer system according to claim 1, it is characterized in that: this slewing arrangement is second rotating disk, these two flexible mechanical arms are fixed on second rotating disk, and the second rotating disk is fixed on body bottom and can horizontally rotates.
4. the waggon for automatic material transfer system according to claim 1, it is characterized in that: this slewing arrangement comprises two the first rotating disks and second rotating disk, these two flexible mechanical arms are separately fixed at two the first rotating disks, the first rotating disk is fixed on the second rotating disk and can horizontally rotates, and the second rotating disk is fixed on body bottom and can horizontally rotates.
5. according to the waggon for automatic material transfer system described in claim 1 to 4 any one, it is characterized in that: this flexible mechanical arm is by least two sections of collapsible being formed by connecting of straight-arm.
6. the waggon for automatic material transfer system according to claim 5, is characterized in that: this flexible mechanical arm is stretched by hydraulic pump drive, and this Hydraulic Pump is connected with control unit signal.
7. the waggon for automatic material transfer system according to claim 6, it is characterized in that: this silicon box picks and places parts and is connected with the end of flexible mechanical arm by ball shape rotary mechanism, so that its crawl direction that all can keep down under arbitrary operating state of flexible mechanical arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719196.5A CN103693554A (en) | 2013-12-23 | 2013-12-23 | Transport vehicle for automatic material transport system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310719196.5A CN103693554A (en) | 2013-12-23 | 2013-12-23 | Transport vehicle for automatic material transport system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103693554A true CN103693554A (en) | 2014-04-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310719196.5A Pending CN103693554A (en) | 2013-12-23 | 2013-12-23 | Transport vehicle for automatic material transport system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103693554A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108909576A (en) * | 2018-08-17 | 2018-11-30 | 成都跟驰科技有限公司 | A kind of multi-functional goods and materials disaster relief transport vehicle |
-
2013
- 2013-12-23 CN CN201310719196.5A patent/CN103693554A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108909576A (en) * | 2018-08-17 | 2018-11-30 | 成都跟驰科技有限公司 | A kind of multi-functional goods and materials disaster relief transport vehicle |
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Application publication date: 20140402 |