CN103612917A - Temporary storage area system of AMHS - Google Patents
Temporary storage area system of AMHS Download PDFInfo
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- CN103612917A CN103612917A CN201310447589.5A CN201310447589A CN103612917A CN 103612917 A CN103612917 A CN 103612917A CN 201310447589 A CN201310447589 A CN 201310447589A CN 103612917 A CN103612917 A CN 103612917A
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- temporary storage
- working area
- amhs
- storage area
- storage equipment
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Abstract
The invention discloses a temporary storage area system of an AMHS. The temporary storage area system of the AMHS comprises at least one temporary storage device and at least one temporary storage area silicon wafer box storage mechanism, wherein each temporary storage area silicon wafer box storage mechanism comprises an installation portion arranged in a temporary storage area, a grip used for grabbing silicon wafer boxes, and an extendable mechanical arm for connecting the installation portion and the grip. According to the temporary storage area system of the AMHS, one or more storage mechanisms are arranged in the temporary storage areas, the silicon wafer boxes on the temporary storage devices are moved to the temporary storage device which is closer to a target delivery wagon or a target machine through the grips, the silicon wafer boxes at various positions can be moved, the time for storing in the running process of the delivery wagon is saved, and therefore the overall efficiency of the AMHS is improved. Meanwhile, the temporary storage area system of the AMHS is simple in structure and suitable for industrialization.
Description
Technical field
The present invention relates to semi-conductor integrated circuit material transfer equipment technical field, relate in particular to a kind of working area system of automatic material transfer system.
Background technology
Along with the development of semiconductor technology, 300mm silicon chip has progressively replaced 200mm silicon chip becomes main flow, and the weight of the silicon box of every box-packed year silicon chip also becomes approximately 9 kilograms by original approximately 4 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for the degree of utilization of factory building and the requirement of production cycle, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
Existing AMHS system all adopts the OHT waggon travelling on many track structures hanging on top ceiling and track, travel to and fro between (tool to tool transport model) between each board, or travel to and fro between between board and working area Stocker (between aisle in system interbay and aisle system intrabay).Delivery system in Jian, aisle, employing aisle as shown in Figure 1, each board 10 on every one side, board aisle is provided with silicon box stack portion 20(load port), OHT waggon 70(overhead hoist transport) can pick up the silicon box 30 in stack portion 20, and by track structure 60, be sent in the stack portion 20 of another board 10.The course of conveying of this silicon box 30 in same aisle is called system 110 in aisle, and the course of conveying of silicon box 30 between different aisle is called system 100 between aisle.In aisle, OHT waggon 70 is used in the conveying of system 110, between aisle, the conveying of system 100 is first silicon box 30 to be moved in working area 50 and temporarily stored with waggon 70, while by the time needing to use this silicon box 30, then with waggon 70 conveyances, arrive and specify board 10 places equally.
Visible, in prior art, in working area, temporary silicon box is all by the access of OHT waggon, such as waggon A is temporary in the P position in working area after silicon box is picked up, the board being positioned at away from the aisle, Q position of P position need to be used this silicon box, the waggon B distance (supposition waggon B in P position) of P → Q of just need at least travelling so, add presumable other waggons in path, waggon B need to expend a lot of time and pick up this silicon box.
Therefore, how in working area, realizing the movement of each position silicon box, save the time in waggon access driving process, improve the efficiency of AMHS entire system, is one of technical personnel technical issues that need to address.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of new AMHS working area system is provided.
For achieving the above object, the invention provides a kind of AMHS working area system, it comprises:
At least one temporary storage equipment, is laid in the middle working area of AMHS system board matrix;
At least one working area silicon box access mechanism, it comprises installation portion, the crawl handgrip of silicon box and the extensible mechanical arm of connection portion and handgrip that is arranged at working area, in order to the silicon box on a certain temporary storage equipment in working area is moved to another temporary storage equipment in working area.
Further, this access mechanism is more than two, and in the crawl scope of each access mechanism and the crawl scope of other at least one access mechanisms, at least comprises an identical temporary storage equipment.
Further, total crawl scope of all these access mechanisms comprises all temporary storage equipments.
Further, this installation portion is arranged on ground, end face or the temporary storage equipment in this working area.
Further, this installation portion is fixed on ground, end face or the temporary storage equipment in this working area.
Further, ground or the end face in this working area have guide rail, and this installation portion is slidably disposed on this guide rail.
The present invention adopts above technical scheme, a kind of new AMHS working area system is provided, it arranges one or several access mechanism in working area, and by handgrip, the silicon box on temporary storage equipment is moved to the temporary storage equipment close to more from targeted delivery car or target board, realize the movement of each position silicon box, save the time in waggon access driving process, thereby improved the efficiency of AMHS entire system.Meanwhile, the present invention is simple in structure, is suitable for industrialization.
Accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is the structural representation of existing AMHS system;
Fig. 2 is the AMHS working area System planes schematic diagram of first embodiment of the invention;
Fig. 3 is the access mechanism structural representation of AMHS working area system in second embodiment of the invention.
The specific embodiment
The first embodiment
Refer to Fig. 1, the AMHS working area system of the present embodiment comprises:
18 temporary storage equipments, be laid in the working area 1 in the middle of AMHS system board matrix, specifically comprise four A temporary storage equipments 21 in the first working area 11, two B temporary storage equipments 22 in two AB temporary storage equipments 212 in the second working area 12, the 3rd working area 13, two CD temporary storage equipments 234 in two C temporary storage equipments 23 in two BC temporary storage equipments 223 in the 4th working area 14, the 5th working area 15, the 6th working area 16 and four D temporary storage equipments 24 in the 7th working area 17;
Four working area silicon box access mechanisms, specifically comprise the first access mechanism 31, the second access mechanism 32, the 3rd access mechanism 33 and the 4th access mechanism 34, each access mechanism includes and is fixed on the ground installation portion in working area, the crawl handgrip of silicon box and the extensible mechanical arm of connection portion and handgrip, in order to the silicon box on a certain temporary storage equipment in working area is moved to another temporary storage equipment in working area.
Wherein, totally six temporary storage equipments that in the present embodiment, the crawl scope of the first access mechanism 31 comprises the first working area 11 and the second working area 12; Totally six temporary storage equipments that the crawl scope of the second access mechanism 32 comprises the second working area 12, the 3rd working area 13 and the 4th working area 14; Totally six temporary storage equipments that the crawl scope of the 3rd access mechanism 33 comprises the 4th working area 14, the 5th working area 15 and the 6th working area 16; Totally six temporary storage equipments that the crawl scope of the 4th access mechanism 34 comprises the 6th working area 16 and the 7th working area 17.
By the above-mentioned setting of the present embodiment, the second access mechanism 32 can transfer to the silicon box on AB temporary storage equipment 212 in the second working area 12 in the 4th working area 14 on BC temporary storage equipment 223, for from BC temporary storage equipment 223 waggon or the board close to used.
Utilize same principle, the silicon box in the first working area 11 can be transferred in the 7th working area 17 by the first access mechanism 31, the second access mechanism 32, the 3rd access mechanism 33 and the 4th access mechanism 34 successively.
the second embodiment
Please continue to refer to Fig. 2, the arranging with the first embodiment of working area and temporary storage equipment in the present embodiment, and four access mechanisms are laid a slide rail 6 on being in line in the first embodiment, slide rail 6 runs through seven working areas, the first working area to the.
The 5th access mechanism 5 that can slide and travel along slide rail 6 is set on slide rail 6, the 5th access mechanism 5 comprises installation portion, mechanical arm 53 and handgrip 54, installation portion comprises fixing pillar stiffener 52 on the slide block 51 that is arranged on slide rail 6 and slide block 51, mechanical arm 53 has two sections of bent arms, and its two ends are connected to pillar stiffener 52 and handgrip 54.
By the above-mentioned setting of the second embodiment, the 5th access mechanism can be along the silicon box on temporary storage equipment arbitrarily in slide rail 6 access working areas, and the silicon box of arbitrary height on can access temporary storage equipment.
In other embodiments, in order to increase the transfer efficiency of silicon box in working area, many slide rails and a plurality of access mechanism can be set, or on a slide rail, a plurality of access mechanisms be set, and a plurality of locating parts are set on slide rail to prevent access mechanism, bump.
Claims (6)
1. an AMHS working area system, is characterized in that, it comprises:
At least one temporary storage equipment, is laid in the middle working area of AMHS system board matrix;
At least one working area silicon box access mechanism, it comprises installation portion, the crawl handgrip of silicon box and the extensible mechanical arm of connection portion and handgrip that is arranged at working area, in order to the silicon box on a certain temporary storage equipment in working area is moved to another temporary storage equipment in working area.
2. AMHS according to claim 1 working area system, is characterized in that: this access mechanism is more than two, and in the crawl scope of each access mechanism and the crawl scope of other at least one access mechanisms, at least comprises an identical temporary storage equipment.
3. AMHS according to claim 2 working area system, is characterized in that: total crawl scope of all these access mechanisms comprises all temporary storage equipments.
4. AMHS according to claim 1 working area system, is characterized in that: this installation portion is arranged on ground, end face or the temporary storage equipment in this working area.
5. AMHS according to claim 4 working area system, is characterized in that: this installation portion is fixed on ground, end face or the temporary storage equipment in this working area.
6. AMHS according to claim 4 working area system, is characterized in that: ground or the end face in this working area have guide rail, and this installation portion is slidably disposed on this guide rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310447589.5A CN103612917A (en) | 2013-09-26 | 2013-09-26 | Temporary storage area system of AMHS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310447589.5A CN103612917A (en) | 2013-09-26 | 2013-09-26 | Temporary storage area system of AMHS |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103612917A true CN103612917A (en) | 2014-03-05 |
Family
ID=50163646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310447589.5A Pending CN103612917A (en) | 2013-09-26 | 2013-09-26 | Temporary storage area system of AMHS |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103612917A (en) |
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2013
- 2013-09-26 CN CN201310447589.5A patent/CN103612917A/en active Pending
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Application publication date: 20140305 |
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| WD01 | Invention patent application deemed withdrawn after publication |