CN103482318A - Track and transportation vehicle assembly for automatic material conveying system - Google Patents
Track and transportation vehicle assembly for automatic material conveying system Download PDFInfo
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- CN103482318A CN103482318A CN201310460447.2A CN201310460447A CN103482318A CN 103482318 A CN103482318 A CN 103482318A CN 201310460447 A CN201310460447 A CN 201310460447A CN 103482318 A CN103482318 A CN 103482318A
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- track
- waggon
- assembly
- magnetic
- automatic material
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Abstract
The invention discloses a track and transportation vehicle assembly for an automatic material conveying system. The track and transportation vehicle assembly comprises a track which is arranged in a suspension mode and a transportation vehicle which is lifted on the track in a suspension mode. A magnetic part is arranged in the part, at a groove bottom face position, of a body of the transportation vehicle. A metal bar which can be attracted by the magnetic part is arranged at the bottom face of the track. A magnetism shielding part is arranged between a cable of the side of the track and the metal bar/the magnetic part of the transportation vehicle. According to the track and transportation vehicle assembly for the automatic material conveying system, the track metal bar and the magnetic part of the transportation vehicle are arranged and mutually attracted, running stability and safety of the transportation vehicle on the track are improved, the loading capacity of the transportation vehicle is improved, the magnetism shielding part can effectively prevent a magnetic field generated by the magnetic part from interfering with a power supply cable.
Description
Technical field
The present invention relates to semi-conductor integrated circuit material transfer equipment technical field, relate in particular to track and waggon assembly in a kind of silicon box automated material handling systems.
Background technology
Along with the development of semiconductor technology, the 300mm silicon chip has progressively replaced the 200mm silicon chip becomes main flow, the weight of the silicon box of every box-packed year silicon chip also by original approximately 4 kilograms become approximately 9 kilograms.Therefore, still, by the manual conveyance of manpower, not only can lower efficiency, also have the possibility of carrying personnel personal injury.Simultaneously, quartz conductor is manufactured more and more harsh for degree of utilization and the requirement of production cycle of factory building, automatic material transfer system (Automated Material Handling Systems is called for short AMHS) carries the importance of the tie of silicon chip also day by day to highlight as connecting between each manufacturing module.
In prior art, a kind of main flow AMHS for the manufacture of 300mm silicon chip adopts the suspension type conveyer, it comprises a plurality of silicon chip storage equipment (STOCKER) and one or more aerial elevator delivery car (Overhead Hoist Transport for depositing semi-conductor silicon chip, be called for short OHT), between each station of silicon chip fabrication region, transmitting silicon chip.The silicon chip left in STOCKER is loaded into box type container, front opening film magazine (Front Opening Unified Pod, be called for short FOUP) for example, and they are passed to the OHT waggon of advancing on the track that dangles subsequently.Waggon is generally to power by the non-contact power mode, and its principle of work is exactly to lay special cable in a side of track, and the magnetic line of force that waggon produces by this cable of cutting obtains power supply.
Wherein, these all transmission all are based on the track dangled on top ceiling and realize, and along with the change of die size is large, the development of the size of 300mm silicon box forward 450mm, the weight of silicon box FOUP is increasing, and therefore load-carrying capacity and the stability of OHT waggon has been proposed to the new requirement.Existing suspension type waggon adopts the wheel suspension that is arranged on roof to travel in orbit mostly.Consider on track and need retaining space that pipe link is installed, track is fixed on to the top ceiling in AMHS space, wheel can only be arranged on the place of rail top face near both sides, makes the contact surface of wheel and track limited.Along with the increase of silicon box weight, this deficiency may produce safety hidden danger.
In sum, need to propose the load-carrying capacity that a kind of new suspension type track and waggon improve waggon and improve its suspention stability and safety in orbit.
Summary of the invention
The object of the invention is to make up above-mentioned the deficiencies in the prior art, a kind of new track for automatic material transfer system and waggon assembly are provided.
For achieving the above object, the invention provides a kind of track for automatic material transfer system and waggon assembly, it comprises the track of unsettled setting and is suspended to the waggon on track, a side of this track is provided with to the cable of waggon power supply, this waggon comprises vehicle body, wheel, silicon box fetching device and bindiny mechanism, this vehicle body top has the groove passed for track, the both sides of this groove have the wheel installation portion, this wheel is arranged on the wheel installation portion, this waggon is suspended on track wheel wheel face while travelling and supports the end face that pastes track and roll, this vehicle body groove side and this cable correspondence position also are provided with electricity getting device and form Power Supply Assembly with cable, this bindiny mechanism connects respectively vehicle body and silicon box fetching device, wherein, be provided with magnetic part in the vehicle body of the groove bottom position of this waggon vehicle body, the bonding jumper that can be attracted by this magnetic part is set in the bottom surface of this track and forms the magnetic assembly with magnetic part, be provided with the magnetic shield part to prevent both magnetic interference between this Power Supply Assembly and magnetic assembly.
Further, this magnetic shield part is fixing in orbit.
Further, this magnetic shield part is fixed on the track bottom surface above this magnetic assembly or is fixed in the track side surfaces of Power Supply Assembly one side, and shelters from the scope that can communicate with any straight line between this magnetic assembly and Power Supply Assembly.
Further, the material of this magnetic shield part is selected from non-magnetic corrosion-resistant steel, silicon steel or glass-felt plastic.
Further, this bonding jumper is fixed in the upper or lower surface of track bottom surface, and this waggon vehicle body has shell at the place, bottom surface of this groove, and this magnetic part is fixed on shell.
Further, this magnetic part is magnetic material, or for after energising, producing the electromagnetism part of magnetic.
Further, the shell at this groove bottom place upwards is provided with at least one buffer unit.
Further, this waggon vehicle body also has shell at place, the side of this groove, and the shell at the place, two sides of this groove is equipped with at least one buffer unit to direction in groove.
Further, this buffer unit is ball or roller, and is fixed on shell by elastic component.
Further, this wheel is fixed on the wheel installation portion by elastic component, and this bindiny mechanism comprises a lifting mechanism, so that the oscilaltion of silicon box fetching device.
The present invention adopts above technical scheme, a kind of new track for automatic material transfer system and waggon assembly are provided, by in the track bottom surface, bonding jumper being set, position near track in vehicle body arranges magnetic part, can produce sucking action to bonding jumper, relies on such attractive force, offset the deadweight of part waggon, waggon firmly is suspended on track, has improved its stability of travelling in orbit and safety, also promoted the load-carrying ability of waggon; Secondly, the present invention only produces the attractive force between waggon vehicle body and track, except the magnetic part of the weight of can ignoring, does not increase the total weight of track and waggon, can not increase the extra heavy burden of unsettled delivery system; Moreover the interference that cause power cable in the magnetic field that the arranging of magnetic shield part can effectively avoid magnetic part to produce, make the power supply to waggon keep stable.The present invention is simple in structure, is suitable for industrialization.
The accompanying drawing explanation
For can clearer understanding objects, features and advantages of the present invention, below with reference to accompanying drawing, preferred embodiment of the present invention is described in detail, wherein:
Fig. 1 is track and the waggon unit construction schematic diagram of first embodiment of the invention;
Fig. 2 is track and the waggon unit construction schematic diagram of second embodiment of the invention; And
Fig. 3 is track and the waggon unit construction schematic diagram of third embodiment of the invention.
The specific embodiment
the first embodiment
Refer to Fig. 1, the track of the present embodiment and waggon assembly are for AMHS suspension type delivery system, wherein, the right flank of track 9 is provided with to the first cable 921 of waggon power supply, waggon comprises the first vehicle body 11, the first wheel 14, the first silicon box fetching device 16 and the first bindiny mechanism 15, the first vehicle body 11 tops have the first groove 12 passed for track 9, the first groove 12 is for square and have upper shed to pass through for the pipe link 91 of joining rails 9, the first groove 12 both sides have respectively the first wheel installation portion 13, the section of the first wheel installation portion 13 is inverted L shape, as shown in Figure 1, and the length (not shown) that 30cm is arranged at depression angle, the first wheel 14 all is equipped with at its top downwards, the first wheel 14 under each first wheel installation portion 13 has 5 steamboats, so that being suspended on track the wheel face of wheel while travelling, waggon can support the end face that pastes track, and make wheel rolling, and two row totally ten steamboats make waggon and track that ten contact points be arranged, make it keep in the process of moving stable.
The position of corresponding the first cable 921 of the right side wall of the first groove 12 also is provided with the first electricity getting device 17, and forms Power Supply Assembly with the first cable 921, in order to waggon is powered.Be provided with magnet 18 in the first vehicle body 11 of the basal surface position of the first groove 12, magnet 18 is fixed in the first vehicle body 11, and the upper surface of track 9 bottom surfaces is fixed with the metal iron bar 93 that can be attracted by magnet 18 and forms the magnetic assembly with magnet 18.Be fixed with one deck stainless steel substrates 922 above metal iron bar 93, it covers the magnetic assembly fully, therefore can shelter from the scope that can communicate with any straight line between magnetic assembly and Power Supply Assembly, be the magnetic assembly with Power Supply Assembly between there is no the place can straight line be communicated with, all by stainless steel substrates 922, blocked the impact of the magnetic field produced for shielded magnet 18 and metal iron bar 93 on Power Supply Assembly.
The magnet 18 of the present embodiment is used ndfeb magnet, in other embodiments, also can adopt the magnetic materials of other known own tools such as ferrite lattice, alnico magnet, SmCo; The known metal material that the metal iron bar also can be attracted by magnetic materials such as magnet by other; Also the stainless steel substrates of the present embodiment can be replaced by other non-magnetic materials, as silicon steel, glass-felt plastic etc.
In other embodiments, the length of wheel installation portion and the quantity that steamboat is set can be regulated according to actual conditions, as less waggon is equipped with the long wheel installation portion of 15cm and two row totally 6 steamboats.
In other embodiments, the shape of groove is not limited to square, can also be oblong or other shapes changed according to trade shape; The shape of wheel installation portion also is not limited to inverted L shape, so long as wheel can be installed, makes wheel can support the configuration of subsides rail top face rolling all within protection domain of the present invention downwards.
the second embodiment
Refer to Fig. 2, the track of the present embodiment and waggon assembly are for AMHS suspension type delivery system, wherein, the right flank of track 9 is provided with to the second cable 941 of waggon power supply, waggon comprises the second vehicle body 21, the second wheel 24, the second silicon box fetching device 26 and the second bindiny mechanism 25, the second vehicle body 21 tops have the second groove 22 passed for track 9, the second groove 22 is for square and have upper shed to pass through for the pipe link 91 of joining rails 9, the second groove 22 both sides have respectively the second wheel installation portion 23, the section of the second wheel installation portion 23 is inverted L shape, as shown in Figure 2, and the length (not shown) that 20cm is arranged at depression angle, the second wheel 24 all is equipped with at its top downwards, the second wheel 24 under each second wheel installation portion 23 has 3 steamboats, so that being suspended on track the wheel face of wheel while travelling, waggon can support the end face that pastes track, and make wheel rolling, and two row totally six steamboats make waggon and track that six contact points be arranged, make it keep in the process of moving stable.
The position of corresponding the second cable 941 of the right side wall of the second groove 22 also is provided with the second electricity getting device 27, and with 941 one-tenth Power Supply Assemblies of the second cable, in order to waggon is powered.The second vehicle body 21 has shell in bottom surface and the side of the second groove 22, bottom surface shell 211 is under track 9,28 of electromagnet are fixed on this bottom surface shell 211 and in the second vehicle body 21, and the lower surface of track 9 bottom surfaces is fixed with the oxidation iron bar 95 that the electromagnet 28 after can being energized attracts and forms the magnetic assemblies with electromagnet 28.Upper surface in track 9 bottom surfaces also is provided with one deck silicon steel plate 96, it covers the magnetic assembly fully, therefore can shelter from the scope that can communicate with any straight line between magnetic assembly and Power Supply Assembly, be the magnetic assembly with Power Supply Assembly between there is no the place can straight line be communicated with, all by silicon steel plate 96, blocked the impact of the magnetic field produced in order to shielded electromagnet 28 and oxidation iron bar 95 on Power Supply Assembly.
In the present embodiment, bottom surface shell 211 under the second groove 22 upwards also is provided with two balls 212 of the every row of two row, the side shell 213 of the second groove 22 both sides also all is provided with two rollers 214 of row to direction in groove, and ball 212 and roller 214 all are provided with spring with the junction of shell.Ball and roller the contact point that can increase track and vehicle body is set, make travelling of waggon more stable, and the arranging when can make track or waggon rock of spring or other elastic components, for both provide a buffering, failsafety or the potential safety hazard of avoiding both shocks to cause.
the 3rd embodiment
Refer to Fig. 3, the track of the present embodiment and the setting of waggon and the first embodiment are basic identical, but replaced stainless steel substrates 922 horizontal in the first embodiment with vertical glass steel disc 923, and glass steel disc 923 is vertically to be fixed in the track side surfaces of Power Supply Assembly one side.Glass steel disc 923 covers Power Supply Assembly fully, therefore can shelter from the scope that can communicate with any straight line between magnetic assembly and Power Supply Assembly, be the magnetic assembly with Power Supply Assembly between there is no the place can straight line be communicated with, all by glass steel disc 923, blocked the impact of the magnetic field produced for shielded magnet 18 and metal iron bar 93 on Power Supply Assembly.
the 4th embodiment
The setting of the present embodiment waggon is identical with the second embodiment, but is provided with spring in the junction of the second wheel 24 and the second wheel installation portion 23, in order to give wheel and track, contacts and produces the buffering of vibrations; Simultaneously, in the second bindiny mechanism 25, lifting mechanism is set, makes the second silicon box fetching device 26 can oscilaltion, be convenient to pick and place the silicon box of differing heights.
Claims (10)
1. the track for automatic material transfer system and waggon assembly, it is characterized in that: it comprises the track of unsettled setting and is suspended to the waggon on track, a side of this track is provided with to the cable of waggon power supply, this waggon comprises vehicle body, wheel, silicon box fetching device and bindiny mechanism, this vehicle body top has the groove passed for track, the both sides of this groove have the wheel installation portion, this wheel is arranged on the wheel installation portion, this waggon is suspended on track wheel wheel face while travelling and supports the end face that pastes track and roll, this vehicle body groove side and this cable correspondence position also are provided with electricity getting device and form Power Supply Assembly with cable, this bindiny mechanism connects respectively vehicle body and silicon box fetching device, wherein, be provided with magnetic part in the vehicle body of the groove bottom position of this waggon vehicle body, the bonding jumper that can be attracted by this magnetic part is set in the bottom surface of this track and forms the magnetic assembly with magnetic part, be provided with the magnetic shield part to prevent both magnetic interference between this Power Supply Assembly and magnetic assembly.
2. the track for automatic material transfer system according to claim 1 and waggon assembly is characterized in that: this magnetic shield part is fixing in orbit.
3. the track for automatic material transfer system according to claim 2 and waggon assembly, it is characterized in that: this magnetic shield part is fixed on the track bottom surface above this magnetic assembly or is fixed in the track side surfaces of Power Supply Assembly one side, and shelters from the scope that can communicate with any straight line between this magnetic assembly and Power Supply Assembly.
4. according to the described track for automatic material transfer system of claims 1 to 3 any one and waggon assembly, it is characterized in that: the material of this magnetic shield part is selected from non-magnetic corrosion-resistant steel, silicon steel or glass-felt plastic.
5. the track for automatic material transfer system according to claim 4 and waggon assembly, it is characterized in that: this bonding jumper is fixed in the upper or lower surface of track bottom surface, this waggon vehicle body has shell at the place, bottom surface of this groove, and this magnetic part is fixed on shell.
6. the track for automatic material transfer system according to claim 5 and waggon assembly, it is characterized in that: this magnetic part is magnetic material, or for after energising, producing the electromagnetism part of magnetic.
7. the track for automatic material transfer system according to claim 5 and waggon assembly, it is characterized in that: the shell at this groove bottom place upwards is provided with at least one buffer unit.
8. the track for automatic material transfer system according to claim 5 and waggon assembly, it is characterized in that: this waggon vehicle body also has shell at place, the side of this groove, and the shell at the place, two sides of this groove is equipped with at least one buffer unit to direction in groove.
9. according to the described track for automatic material transfer system of claim 7 or 8 and waggon assembly, it is characterized in that: this buffer unit is ball or roller, and is fixed on shell by elastic component.
10. the track for automatic material transfer system according to claim 5 and waggon assembly, it is characterized in that: this wheel is fixed on the wheel installation portion by elastic component, this bindiny mechanism comprises a lifting mechanism, so that the oscilaltion of silicon box fetching device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310460447.2A CN103482318A (en) | 2013-09-30 | 2013-09-30 | Track and transportation vehicle assembly for automatic material conveying system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310460447.2A CN103482318A (en) | 2013-09-30 | 2013-09-30 | Track and transportation vehicle assembly for automatic material conveying system |
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| Publication Number | Publication Date |
|---|---|
| CN103482318A true CN103482318A (en) | 2014-01-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310460447.2A Pending CN103482318A (en) | 2013-09-30 | 2013-09-30 | Track and transportation vehicle assembly for automatic material conveying system |
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| Country | Link |
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| CN (1) | CN103482318A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107804637A (en) * | 2016-09-09 | 2018-03-16 | 株式会社大福 | Article carrying equipment |
| CN108284526A (en) * | 2018-03-12 | 2018-07-17 | 宁波海纳节能墙体材料有限公司 | One kind can pinpoint cutting conveying appliance |
| CN111392351A (en) * | 2020-03-23 | 2020-07-10 | 深圳柏缔自动化科技有限公司 | Material conveying equipment |
-
2013
- 2013-09-30 CN CN201310460447.2A patent/CN103482318A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107804637A (en) * | 2016-09-09 | 2018-03-16 | 株式会社大福 | Article carrying equipment |
| CN108284526A (en) * | 2018-03-12 | 2018-07-17 | 宁波海纳节能墙体材料有限公司 | One kind can pinpoint cutting conveying appliance |
| CN111392351A (en) * | 2020-03-23 | 2020-07-10 | 深圳柏缔自动化科技有限公司 | Material conveying equipment |
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Application publication date: 20140101 |