CN103649823B - 图像中继波导及其产生方法 - Google Patents
图像中继波导及其产生方法 Download PDFInfo
- Publication number
- CN103649823B CN103649823B CN201280025996.0A CN201280025996A CN103649823B CN 103649823 B CN103649823 B CN 103649823B CN 201280025996 A CN201280025996 A CN 201280025996A CN 103649823 B CN103649823 B CN 103649823B
- Authority
- CN
- China
- Prior art keywords
- waveguide
- reverberator
- master mold
- plane
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title description 5
- 239000000463 material Substances 0.000 claims abstract description 49
- 238000000034 method Methods 0.000 claims abstract description 34
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 4
- 238000002360 preparation method Methods 0.000 claims abstract description 4
- 238000000576 coating method Methods 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 14
- 229910052751 metal Inorganic materials 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 239000004809 Teflon Substances 0.000 claims description 2
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- 239000013078 crystal Substances 0.000 description 28
- 238000005530 etching Methods 0.000 description 6
- 230000001902 propagating effect Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- NCGICGYLBXGBGN-UHFFFAOYSA-N 3-morpholin-4-yl-1-oxa-3-azonia-2-azanidacyclopent-3-en-5-imine;hydrochloride Chemical compound Cl.[N-]1OC(=N)C=[N+]1N1CCOCC1 NCGICGYLBXGBGN-UHFFFAOYSA-N 0.000 description 1
- 241000662429 Fenerbahce Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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- 229910052759 nickel Inorganic materials 0.000 description 1
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- 239000012780 transparent material Substances 0.000 description 1
- 229920006352 transparent thermoplastic Polymers 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4298—Coupling light guides with opto-electronic elements coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
- G02B27/017—Head mounted
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0013—Means for improving the coupling-in of light from the light source into the light guide
- G02B6/0015—Means for improving the coupling-in of light from the light source into the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0018—Redirecting means on the surface of the light guide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0036—2-D arrangement of prisms, protrusions, indentations or roughened surfaces
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
- G02B6/0011—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being planar or of plate-like form
- G02B6/0033—Means for improving the coupling-out of light from the light guide
- G02B6/0035—Means for improving the coupling-out of light from the light guide provided on the surface of the light guide or in the bulk of it
- G02B6/0038—Linear indentations or grooves, e.g. arc-shaped grooves or meandering grooves, extending over the full length or width of the light guide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Optical Integrated Circuits (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/117,965 | 2011-05-27 | ||
| US13/117,965 US8699842B2 (en) | 2011-05-27 | 2011-05-27 | Image relay waveguide and method of producing same |
| PCT/US2012/036317 WO2012166286A1 (fr) | 2011-05-27 | 2012-05-03 | Guide d'ondes relais d'image et procédé de fabrication de celui-ci |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103649823A CN103649823A (zh) | 2014-03-19 |
| CN103649823B true CN103649823B (zh) | 2015-11-25 |
Family
ID=47219271
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280025996.0A Expired - Fee Related CN103649823B (zh) | 2011-05-27 | 2012-05-03 | 图像中继波导及其产生方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8699842B2 (fr) |
| EP (1) | EP2715439A4 (fr) |
| KR (1) | KR20140035936A (fr) |
| CN (1) | CN103649823B (fr) |
| WO (1) | WO2012166286A1 (fr) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8699842B2 (en) * | 2011-05-27 | 2014-04-15 | Google Inc. | Image relay waveguide and method of producing same |
| JP6184370B2 (ja) * | 2014-04-30 | 2017-08-23 | オリンパス株式会社 | 導光プリズムおよび画像表示装置 |
| DE102014211555A1 (de) * | 2014-06-17 | 2015-12-17 | Robert Bosch Gmbh | Verfahren zum Ausbilden einer Kavität und Bauelement mit einer Kavität |
| GB201609027D0 (en) | 2016-05-23 | 2016-07-06 | Bae Systems Plc | Waveguide manufacturing method |
| CN105929545B (zh) * | 2016-06-20 | 2019-03-26 | 东莞市长资实业有限公司 | 波导式的头戴显示器的光学装置 |
| CN113341566B (zh) * | 2017-03-22 | 2023-12-15 | 鲁姆斯有限公司 | 交叠的反射面构造 |
| CN115663442A (zh) * | 2017-11-21 | 2023-01-31 | 应用材料公司 | 制造波导组合器的方法 |
| KR102438014B1 (ko) | 2017-11-29 | 2022-08-31 | 어플라이드 머티어리얼스, 인코포레이티드 | 도파관 결합기들의 방향성 식각 제조 방법 |
| CN108802892A (zh) * | 2018-06-08 | 2018-11-13 | 施轩杰 | 一种多片式光波导输入方案 |
| CN109901259B (zh) * | 2019-04-07 | 2021-03-05 | 深圳市美誉镜界光电科技有限公司 | 光波导结构、ar设备光学成像系统及ar设备 |
| KR20230078112A (ko) * | 2021-11-26 | 2023-06-02 | 주식회사 레티널 | 증강 현실용 광학 장치의 기판에 반사부를 형성하는 방법 |
| WO2023220512A1 (fr) * | 2022-05-10 | 2023-11-16 | Apple Inc. | Systèmes optiques avec réseaux et couches antireflet |
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| US8699842B2 (en) * | 2011-05-27 | 2014-04-15 | Google Inc. | Image relay waveguide and method of producing same |
| US8471967B2 (en) | 2011-07-15 | 2013-06-25 | Google Inc. | Eyepiece for near-to-eye display with multi-reflectors |
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-
2011
- 2011-05-27 US US13/117,965 patent/US8699842B2/en active Active
-
2012
- 2012-05-03 KR KR1020137032880A patent/KR20140035936A/ko not_active Application Discontinuation
- 2012-05-03 WO PCT/US2012/036317 patent/WO2012166286A1/fr active Application Filing
- 2012-05-03 EP EP12792477.7A patent/EP2715439A4/fr not_active Withdrawn
- 2012-05-03 CN CN201280025996.0A patent/CN103649823B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| EP2715439A4 (fr) | 2014-12-31 |
| US8699842B2 (en) | 2014-04-15 |
| EP2715439A1 (fr) | 2014-04-09 |
| KR20140035936A (ko) | 2014-03-24 |
| US20120301074A1 (en) | 2012-11-29 |
| CN103649823A (zh) | 2014-03-19 |
| WO2012166286A1 (fr) | 2012-12-06 |
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