CN103648980B - 在泡罩塔中制备硅烷的方法 - Google Patents

在泡罩塔中制备硅烷的方法 Download PDF

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Publication number
CN103648980B
CN103648980B CN201280031623.4A CN201280031623A CN103648980B CN 103648980 B CN103648980 B CN 103648980B CN 201280031623 A CN201280031623 A CN 201280031623A CN 103648980 B CN103648980 B CN 103648980B
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hydride
reaction
feed
reaction vessel
vessel
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Chinese (zh)
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CN103648980A (zh
Inventor
B·邹
P·古普塔
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Jiangsu Zhongneng Polysilicon Technology Development Co ltd
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SunEdison Inc
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J10/00Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
    • B01J10/002Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor carried out in foam, aerosol or bubbles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006Controlling or regulating processes
    • B01J19/0013Controlling the temperature of the process
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053Details of the reactor
    • B01J19/006Baffles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053Details of the reactor
    • B01J19/0066Stirrers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18Stationary reactors having moving elements inside
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00Silicon; Compounds thereof
    • C01B33/04Hydrides of silicon
    • C01B33/043Monosilane
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00051Controlling the temperature
    • B01J2219/00054Controlling or regulating the heat exchange system
    • B01J2219/00056Controlling or regulating the heat exchange system involving measured parameters
    • B01J2219/00058Temperature measurement
    • B01J2219/00063Temperature measurement of the reactants
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00051Controlling the temperature
    • B01J2219/00074Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00087Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
    • B01J2219/00094Jackets
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00051Controlling the temperature
    • B01J2219/00159Controlling the temperature controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00164Controlling or regulating processes controlling the flow
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00186Controlling or regulating processes controlling the composition of the reactive mixture
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00191Control algorithm
    • B01J2219/00193Sensing a parameter
    • B01J2219/00195Sensing a parameter of the reaction system
    • B01J2219/002Sensing a parameter of the reaction system inside the reactor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00191Control algorithm
    • B01J2219/00193Sensing a parameter
    • B01J2219/00195Sensing a parameter of the reaction system
    • B01J2219/00202Sensing a parameter of the reaction system at the reactor outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00191Control algorithm
    • B01J2219/00211Control algorithm comparing a sensed parameter with a pre-set value
    • B01J2219/00213Fixed parameter value
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049Controlling or regulating processes
    • B01J2219/00191Control algorithm
    • B01J2219/00222Control algorithm taking actions
    • B01J2219/00227Control algorithm taking actions modifying the operating conditions
    • B01J2219/00229Control algorithm taking actions modifying the operating conditions of the reaction system
    • B01J2219/00231Control algorithm taking actions modifying the operating conditions of the reaction system at the reactor inlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00761Details of the reactor
    • B01J2219/00763Baffles
    • B01J2219/00765Baffles attached to the reactor wall
    • B01J2219/00777Baffles attached to the reactor wall horizontal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
CN201280031623.4A 2011-06-28 2012-06-20 在泡罩塔中制备硅烷的方法 Active CN103648980B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710815855.3A CN107376793B (zh) 2011-06-28 2012-06-20 在泡罩塔中制备硅烷的方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161502145P 2011-06-28 2011-06-28
US61/502,145 2011-06-28
PCT/US2012/043302 WO2013003148A2 (en) 2011-06-28 2012-06-20 Processes for producing silane in a bubble column

Related Child Applications (1)

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CN103648980A CN103648980A (zh) 2014-03-19
CN103648980B true CN103648980B (zh) 2017-10-13

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US (1) US8834825B2 (enExample)
EP (1) EP2726410B1 (enExample)
JP (1) JP6009557B2 (enExample)
KR (2) KR101978107B1 (enExample)
CN (2) CN103648980B (enExample)
TW (1) TWI599541B (enExample)
WO (1) WO2013003148A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3289789B1 (en) * 2015-05-01 2020-06-24 Assa Abloy AB Wearable discovery for authentication
KR20250092855A (ko) * 2023-12-15 2025-06-24 포스코홀딩스 주식회사 인산리튬의 제조 방법

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374111A (en) * 1980-11-21 1983-02-15 Allied Corporation Production of silane
CN85101821A (zh) * 1984-03-13 1987-01-10 斯瓦罗夫斯基公司 制备硅烷的方法
US5075092A (en) * 1987-07-20 1991-12-24 Ethyl Corporation Process for preparation of silane
WO2010046751A2 (en) * 2008-10-20 2010-04-29 Sunlit S.R.L. Method for the production of polycrystalline silicon

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4632816A (en) 1982-12-13 1986-12-30 Ethyl Corporation Process for production of silane
US4474743A (en) 1983-07-21 1984-10-02 Ethyl Corporation Preparation of silane from amine alanes
FR2552434B1 (fr) * 1983-09-28 1985-10-25 Rhone Poulenc Spec Chim Procede de fabrication de silane a partir de methyldichlorosilane et de chlorosilanes
JPS623010A (ja) * 1983-12-28 1987-01-09 エシル コ−ポレ−シヨン シランの精製方法
US4554141A (en) 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
US4847061A (en) * 1987-07-20 1989-07-11 Ethyl Corporation Process for preparation of silane
US5206004A (en) 1990-04-30 1993-04-27 Ethyl Corporation Silane compositions and process
TW218865B (enExample) * 1992-01-24 1994-01-11 Asahi Carbon Kabushiki Kaisha
US5211931A (en) 1992-03-27 1993-05-18 Ethyl Corporation Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve
DE10017168A1 (de) * 2000-04-07 2001-10-11 Bayer Ag Verfahren und Anlage zur Herstellung von Silan
DE10336054B4 (de) * 2003-08-01 2005-12-15 Domo Caproleuna Gmbh Verfahren zur Herstellung von Hydroxylammoniumsalzen
US7568361B2 (en) * 2004-09-02 2009-08-04 Eastman Chemical Company Optimized liquid-phase oxidation
US8163261B2 (en) * 2005-04-05 2012-04-24 Voltaix, Llc System and method for making Si2H6 and higher silanes
DE102005046105B3 (de) * 2005-09-27 2007-04-26 Degussa Gmbh Verfahren zur Herstellung von Monosilan
US7927404B2 (en) * 2007-12-19 2011-04-19 Chevron U.S.A. Inc. Reactor having a downcomer producing improved gas-liquid separation and method of use
CN101348497B (zh) * 2008-08-29 2011-09-14 仙桃市蓝天化工有限责任公司 甲基三甲氧基硅烷的制备工艺
US8388925B2 (en) 2009-12-30 2013-03-05 Memc Electronic Materials, Inc. Methods for producing aluminum trifluoride
US8529860B2 (en) 2009-12-30 2013-09-10 Memc Electronics Materials, Inc. Methods for producing silicon tetrafluoride
US8551298B2 (en) * 2010-10-05 2013-10-08 Memc Electronic Materials, Inc. Processes for purifying silane
US8524048B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Processes for recovering silane from heavy-ends separation operations
US8821825B2 (en) 2010-12-23 2014-09-02 Sunedison, Inc. Methods for producing silane
US8388914B2 (en) 2010-12-23 2013-03-05 Memc Electronic Materials, Inc. Systems for producing silane
CN104159848B (zh) * 2011-12-30 2017-03-15 Memc电子材料有限公司 用于提纯硅烷的方法和系统

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374111A (en) * 1980-11-21 1983-02-15 Allied Corporation Production of silane
CN85101821A (zh) * 1984-03-13 1987-01-10 斯瓦罗夫斯基公司 制备硅烷的方法
US5075092A (en) * 1987-07-20 1991-12-24 Ethyl Corporation Process for preparation of silane
WO2010046751A2 (en) * 2008-10-20 2010-04-29 Sunlit S.R.L. Method for the production of polycrystalline silicon

Also Published As

Publication number Publication date
TWI599541B (zh) 2017-09-21
TW201305051A (zh) 2013-02-01
KR20180105729A (ko) 2018-09-28
KR20140033172A (ko) 2014-03-17
EP2726410A2 (en) 2014-05-07
WO2013003148A3 (en) 2013-05-02
KR101978107B1 (ko) 2019-05-13
US8834825B2 (en) 2014-09-16
EP2726410B1 (en) 2016-05-11
CN107376793A (zh) 2017-11-24
JP6009557B2 (ja) 2016-10-19
CN107376793B (zh) 2021-04-13
US20130004405A1 (en) 2013-01-03
JP2014531379A (ja) 2014-11-27
WO2013003148A2 (en) 2013-01-03
CN103648980A (zh) 2014-03-19

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Effective date of registration: 20181219

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Effective date of registration: 20230808

Address after: Room 205, West Zone, 2nd Floor, No. 707 Zhangyang Road, China (Shanghai) Pilot Free Trade Zone, Pudong New Area, Shanghai

Patentee after: GCL New (Shanghai) Photovoltaic Technology Co.,Ltd.

Address before: 17th Floor, Global Trade Plaza, 1 West Austin Road, Kowloon, China

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Effective date of registration: 20231211

Address after: 221000 No. 66, Yangshan Road, Xuzhou Economic and Technological Development Zone, Xuzhou City, Jiangsu Province

Patentee after: JIANGSU ZHONGNENG POLYSILICON TECHNOLOGY DEVELOPMENT Co.,Ltd.

Address before: Room 205, West District, 2nd floor, no.707 Zhangyang Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai, 200120

Patentee before: GCL New (Shanghai) Photovoltaic Technology Co.,Ltd.