KR101978107B1 - 버블 컬럼에서 실란의 제조 방법 - Google Patents
버블 컬럼에서 실란의 제조 방법 Download PDFInfo
- Publication number
- KR101978107B1 KR101978107B1 KR1020187026593A KR20187026593A KR101978107B1 KR 101978107 B1 KR101978107 B1 KR 101978107B1 KR 1020187026593 A KR1020187026593 A KR 1020187026593A KR 20187026593 A KR20187026593 A KR 20187026593A KR 101978107 B1 KR101978107 B1 KR 101978107B1
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- South Korea
- Prior art keywords
- reaction
- hydride
- feed
- vessel
- reaction vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910000077 silane Inorganic materials 0.000 title claims abstract description 25
- 238000000034 method Methods 0.000 title claims description 27
- 238000006243 chemical reaction Methods 0.000 claims abstract description 174
- 150000004678 hydrides Chemical class 0.000 claims abstract description 66
- 238000004519 manufacturing process Methods 0.000 claims abstract description 15
- 239000011541 reaction mixture Substances 0.000 claims description 28
- -1 halide salt Chemical class 0.000 claims description 27
- 239000002904 solvent Substances 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 12
- 239000007787 solid Substances 0.000 claims description 6
- 238000003756 stirring Methods 0.000 claims description 4
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 229920000570 polyether Polymers 0.000 claims description 3
- 230000005587 bubbling Effects 0.000 claims 2
- 239000000376 reactant Substances 0.000 abstract description 23
- 238000013019 agitation Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 63
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 35
- 239000003513 alkali Substances 0.000 description 24
- 239000000047 product Substances 0.000 description 20
- 239000007788 liquid Substances 0.000 description 17
- 150000001342 alkaline earth metals Chemical class 0.000 description 12
- 150000004756 silanes Chemical class 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 239000011734 sodium Substances 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 229910001508 alkali metal halide Inorganic materials 0.000 description 3
- 229910001615 alkaline earth metal halide Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000012527 feed solution Substances 0.000 description 3
- 150000004820 halides Chemical class 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 229910000104 sodium hydride Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- KLZUFWVZNOTSEM-UHFFFAOYSA-K Aluminium flouride Chemical compound F[Al](F)F KLZUFWVZNOTSEM-UHFFFAOYSA-K 0.000 description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- 239000002841 Lewis acid Substances 0.000 description 2
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 150000007517 lewis acids Chemical class 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910020828 NaAlH4 Inorganic materials 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- KEAYESYHFKHZAL-UHFFFAOYSA-N Sodium Chemical compound [Na] KEAYESYHFKHZAL-UHFFFAOYSA-N 0.000 description 1
- VSKBCRUQHHGABO-UHFFFAOYSA-N [Al].[H][H].[H][H].[H][H] Chemical compound [Al].[H][H].[H][H].[H][H] VSKBCRUQHHGABO-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 150000001447 alkali salts Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 1
- 208000012839 conversion disease Diseases 0.000 description 1
- 230000029087 digestion Effects 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 150000004673 fluoride salts Chemical class 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 159000000011 group IA salts Chemical class 0.000 description 1
- SPRIOUNJHPCKPV-UHFFFAOYSA-N hydridoaluminium Chemical compound [AlH] SPRIOUNJHPCKPV-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 239000012312 sodium hydride Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/04—Hydrides of silicon
- C01B33/043—Monosilane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
- B01J10/002—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor carried out in foam, aerosol or bubbles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/0013—Controlling the temperature of the process
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
- B01J19/006—Baffles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
- B01J19/0066—Stirrers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/18—Stationary reactors having moving elements inside
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00054—Controlling or regulating the heat exchange system
- B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
- B01J2219/00058—Temperature measurement
- B01J2219/00063—Temperature measurement of the reactants
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
- B01J2219/00094—Jackets
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00159—Controlling the temperature controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00164—Controlling or regulating processes controlling the flow
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00186—Controlling or regulating processes controlling the composition of the reactive mixture
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
- B01J2219/00193—Sensing a parameter
- B01J2219/00195—Sensing a parameter of the reaction system
- B01J2219/002—Sensing a parameter of the reaction system inside the reactor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
- B01J2219/00193—Sensing a parameter
- B01J2219/00195—Sensing a parameter of the reaction system
- B01J2219/00202—Sensing a parameter of the reaction system at the reactor outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
- B01J2219/00211—Control algorithm comparing a sensed parameter with a pre-set value
- B01J2219/00213—Fixed parameter value
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00191—Control algorithm
- B01J2219/00222—Control algorithm taking actions
- B01J2219/00227—Control algorithm taking actions modifying the operating conditions
- B01J2219/00229—Control algorithm taking actions modifying the operating conditions of the reaction system
- B01J2219/00231—Control algorithm taking actions modifying the operating conditions of the reaction system at the reactor inlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00761—Details of the reactor
- B01J2219/00763—Baffles
- B01J2219/00765—Baffles attached to the reactor wall
- B01J2219/00777—Baffles attached to the reactor wall horizontal
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Dispersion Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161502145P | 2011-06-28 | 2011-06-28 | |
| US61/502,145 | 2011-06-28 | ||
| PCT/US2012/043302 WO2013003148A2 (en) | 2011-06-28 | 2012-06-20 | Processes for producing silane in a bubble column |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020137034548A Division KR20140033172A (ko) | 2011-06-28 | 2012-06-20 | 버블 컬럼에서 실란의 제조 방법 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20180105729A KR20180105729A (ko) | 2018-09-28 |
| KR101978107B1 true KR101978107B1 (ko) | 2019-05-13 |
Family
ID=46466877
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020187026593A Active KR101978107B1 (ko) | 2011-06-28 | 2012-06-20 | 버블 컬럼에서 실란의 제조 방법 |
| KR1020137034548A Ceased KR20140033172A (ko) | 2011-06-28 | 2012-06-20 | 버블 컬럼에서 실란의 제조 방법 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020137034548A Ceased KR20140033172A (ko) | 2011-06-28 | 2012-06-20 | 버블 컬럼에서 실란의 제조 방법 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US8834825B2 (enExample) |
| EP (1) | EP2726410B1 (enExample) |
| JP (1) | JP6009557B2 (enExample) |
| KR (2) | KR101978107B1 (enExample) |
| CN (2) | CN103648980B (enExample) |
| TW (1) | TWI599541B (enExample) |
| WO (1) | WO2013003148A2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3289789B1 (en) * | 2015-05-01 | 2020-06-24 | Assa Abloy AB | Wearable discovery for authentication |
| KR20250092855A (ko) * | 2023-12-15 | 2025-06-24 | 포스코홀딩스 주식회사 | 인산리튬의 제조 방법 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4374111A (en) * | 1980-11-21 | 1983-02-15 | Allied Corporation | Production of silane |
| US4632816A (en) | 1982-12-13 | 1986-12-30 | Ethyl Corporation | Process for production of silane |
| US4474743A (en) | 1983-07-21 | 1984-10-02 | Ethyl Corporation | Preparation of silane from amine alanes |
| FR2552434B1 (fr) * | 1983-09-28 | 1985-10-25 | Rhone Poulenc Spec Chim | Procede de fabrication de silane a partir de methyldichlorosilane et de chlorosilanes |
| JPS623010A (ja) * | 1983-12-28 | 1987-01-09 | エシル コ−ポレ−シヨン | シランの精製方法 |
| DE3409172A1 (de) * | 1984-03-13 | 1985-09-26 | D. Swarovski & Co., Wattens, Tirol | Verfahren zur herstellung von silan |
| US4554141A (en) | 1984-05-14 | 1985-11-19 | Ethyl Corporation | Gas stream purification |
| US4847061A (en) * | 1987-07-20 | 1989-07-11 | Ethyl Corporation | Process for preparation of silane |
| US5075092A (en) * | 1987-07-20 | 1991-12-24 | Ethyl Corporation | Process for preparation of silane |
| US5206004A (en) | 1990-04-30 | 1993-04-27 | Ethyl Corporation | Silane compositions and process |
| TW218865B (enExample) * | 1992-01-24 | 1994-01-11 | Asahi Carbon Kabushiki Kaisha | |
| US5211931A (en) | 1992-03-27 | 1993-05-18 | Ethyl Corporation | Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve |
| DE10017168A1 (de) * | 2000-04-07 | 2001-10-11 | Bayer Ag | Verfahren und Anlage zur Herstellung von Silan |
| DE10336054B4 (de) * | 2003-08-01 | 2005-12-15 | Domo Caproleuna Gmbh | Verfahren zur Herstellung von Hydroxylammoniumsalzen |
| US7568361B2 (en) * | 2004-09-02 | 2009-08-04 | Eastman Chemical Company | Optimized liquid-phase oxidation |
| US8163261B2 (en) * | 2005-04-05 | 2012-04-24 | Voltaix, Llc | System and method for making Si2H6 and higher silanes |
| DE102005046105B3 (de) * | 2005-09-27 | 2007-04-26 | Degussa Gmbh | Verfahren zur Herstellung von Monosilan |
| US7927404B2 (en) * | 2007-12-19 | 2011-04-19 | Chevron U.S.A. Inc. | Reactor having a downcomer producing improved gas-liquid separation and method of use |
| CN101348497B (zh) * | 2008-08-29 | 2011-09-14 | 仙桃市蓝天化工有限责任公司 | 甲基三甲氧基硅烷的制备工艺 |
| IT1391068B1 (it) * | 2008-10-20 | 2011-11-18 | Sunlit S R L | Metodo per la produzione di silicio policristallino |
| US8388925B2 (en) | 2009-12-30 | 2013-03-05 | Memc Electronic Materials, Inc. | Methods for producing aluminum trifluoride |
| US8529860B2 (en) | 2009-12-30 | 2013-09-10 | Memc Electronics Materials, Inc. | Methods for producing silicon tetrafluoride |
| US8551298B2 (en) * | 2010-10-05 | 2013-10-08 | Memc Electronic Materials, Inc. | Processes for purifying silane |
| US8524048B2 (en) * | 2010-10-05 | 2013-09-03 | Memc Electronic Materials, Inc. | Processes for recovering silane from heavy-ends separation operations |
| US8821825B2 (en) | 2010-12-23 | 2014-09-02 | Sunedison, Inc. | Methods for producing silane |
| US8388914B2 (en) | 2010-12-23 | 2013-03-05 | Memc Electronic Materials, Inc. | Systems for producing silane |
| CN104159848B (zh) * | 2011-12-30 | 2017-03-15 | Memc电子材料有限公司 | 用于提纯硅烷的方法和系统 |
-
2012
- 2012-06-20 KR KR1020187026593A patent/KR101978107B1/ko active Active
- 2012-06-20 US US13/528,386 patent/US8834825B2/en active Active
- 2012-06-20 KR KR1020137034548A patent/KR20140033172A/ko not_active Ceased
- 2012-06-20 CN CN201280031623.4A patent/CN103648980B/zh active Active
- 2012-06-20 EP EP12733304.5A patent/EP2726410B1/en active Active
- 2012-06-20 JP JP2014518647A patent/JP6009557B2/ja active Active
- 2012-06-20 WO PCT/US2012/043302 patent/WO2013003148A2/en not_active Ceased
- 2012-06-20 CN CN201710815855.3A patent/CN107376793B/zh active Active
- 2012-06-28 TW TW101123333A patent/TWI599541B/zh active
Also Published As
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|---|---|
| TWI599541B (zh) | 2017-09-21 |
| TW201305051A (zh) | 2013-02-01 |
| CN103648980B (zh) | 2017-10-13 |
| KR20180105729A (ko) | 2018-09-28 |
| KR20140033172A (ko) | 2014-03-17 |
| EP2726410A2 (en) | 2014-05-07 |
| WO2013003148A3 (en) | 2013-05-02 |
| US8834825B2 (en) | 2014-09-16 |
| EP2726410B1 (en) | 2016-05-11 |
| CN107376793A (zh) | 2017-11-24 |
| JP6009557B2 (ja) | 2016-10-19 |
| CN107376793B (zh) | 2021-04-13 |
| US20130004405A1 (en) | 2013-01-03 |
| JP2014531379A (ja) | 2014-11-27 |
| WO2013003148A2 (en) | 2013-01-03 |
| CN103648980A (zh) | 2014-03-19 |
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