TWI599541B - 於一氣泡塔內製造矽烷的方法 - Google Patents

於一氣泡塔內製造矽烷的方法 Download PDF

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Publication number
TWI599541B
TWI599541B TW101123333A TW101123333A TWI599541B TW I599541 B TWI599541 B TW I599541B TW 101123333 A TW101123333 A TW 101123333A TW 101123333 A TW101123333 A TW 101123333A TW I599541 B TWI599541 B TW I599541B
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Taiwan
Prior art keywords
hydride
reaction
reaction vessel
feed
vessel
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TW101123333A
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English (en)
Chinese (zh)
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TW201305051A (zh
Inventor
周百昇
普尼特 古普塔
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Ｍｅｍｃ電子材料公司
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    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/043—Monosilane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J10/00—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor
    • B01J10/002—Chemical processes in general for reacting liquid with gaseous media other than in the presence of solid particles, or apparatus specially adapted therefor carried out in foam, aerosol or bubbles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0006—Controlling or regulating processes
    • B01J19/0013—Controlling the temperature of the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053—Details of the reactor
    • B01J19/006—Baffles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0053—Details of the reactor
    • B01J19/0066—Stirrers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/18—Stationary reactors having moving elements inside
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00054—Controlling or regulating the heat exchange system
    • B01J2219/00056—Controlling or regulating the heat exchange system involving measured parameters
    • B01J2219/00058—Temperature measurement
    • B01J2219/00063—Temperature measurement of the reactants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
    • B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
    • B01J2219/00094—Jackets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00051—Controlling the temperature
    • B01J2219/00159—Controlling the temperature controlling multiple zones along the direction of flow, e.g. pre-heating and after-cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00164—Controlling or regulating processes controlling the flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00186—Controlling or regulating processes controlling the composition of the reactive mixture
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00191—Control algorithm
    • B01J2219/00193—Sensing a parameter
    • B01J2219/00195—Sensing a parameter of the reaction system
    • B01J2219/002—Sensing a parameter of the reaction system inside the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00191—Control algorithm
    • B01J2219/00193—Sensing a parameter
    • B01J2219/00195—Sensing a parameter of the reaction system
    • B01J2219/00202—Sensing a parameter of the reaction system at the reactor outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00191—Control algorithm
    • B01J2219/00211—Control algorithm comparing a sensed parameter with a pre-set value
    • B01J2219/00213—Fixed parameter value
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00049—Controlling or regulating processes
    • B01J2219/00191—Control algorithm
    • B01J2219/00222—Control algorithm taking actions
    • B01J2219/00227—Control algorithm taking actions modifying the operating conditions
    • B01J2219/00229—Control algorithm taking actions modifying the operating conditions of the reaction system
    • B01J2219/00231—Control algorithm taking actions modifying the operating conditions of the reaction system at the reactor inlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00761—Details of the reactor
    • B01J2219/00763—Baffles
    • B01J2219/00765—Baffles attached to the reactor wall
    • B01J2219/00777—Baffles attached to the reactor wall horizontal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Silicon Compounds (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
TW101123333A 2011-06-28 2012-06-28 於一氣泡塔內製造矽烷的方法 TWI599541B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201161502145P 2011-06-28 2011-06-28

Publications (2)

Publication Number Publication Date
TW201305051A TW201305051A (zh) 2013-02-01
TWI599541B true TWI599541B (zh) 2017-09-21

Family

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TW101123333A TWI599541B (zh) 2011-06-28 2012-06-28 於一氣泡塔內製造矽烷的方法

Country Status (7)

Country Link
US (1) US8834825B2 (enExample)
EP (1) EP2726410B1 (enExample)
JP (1) JP6009557B2 (enExample)
KR (2) KR101978107B1 (enExample)
CN (2) CN103648980B (enExample)
TW (1) TWI599541B (enExample)
WO (1) WO2013003148A2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3289789B1 (en) * 2015-05-01 2020-06-24 Assa Abloy AB Wearable discovery for authentication
KR20250092855A (ko) * 2023-12-15 2025-06-24 포스코홀딩스 주식회사 인산리튬의 제조 방법

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US4374111A (en) * 1980-11-21 1983-02-15 Allied Corporation Production of silane
US4632816A (en) 1982-12-13 1986-12-30 Ethyl Corporation Process for production of silane
US4474743A (en) 1983-07-21 1984-10-02 Ethyl Corporation Preparation of silane from amine alanes
FR2552434B1 (fr) * 1983-09-28 1985-10-25 Rhone Poulenc Spec Chim Procede de fabrication de silane a partir de methyldichlorosilane et de chlorosilanes
JPS623010A (ja) * 1983-12-28 1987-01-09 エシル　コ−ポレ−シヨン シランの精製方法
DE3409172A1 (de) * 1984-03-13 1985-09-26 D. Swarovski & Co., Wattens, Tirol Verfahren zur herstellung von silan
US4554141A (en) 1984-05-14 1985-11-19 Ethyl Corporation Gas stream purification
US4847061A (en) * 1987-07-20 1989-07-11 Ethyl Corporation Process for preparation of silane
US5075092A (en) * 1987-07-20 1991-12-24 Ethyl Corporation Process for preparation of silane
US5206004A (en) 1990-04-30 1993-04-27 Ethyl Corporation Silane compositions and process
TW218865B (enExample) * 1992-01-24 1994-01-11 Asahi Carbon Kabushiki Kaisha
US5211931A (en) 1992-03-27 1993-05-18 Ethyl Corporation Removal of ethylene from silane using a distillation step after separation using a zeolite molecular sieve
DE10017168A1 (de) * 2000-04-07 2001-10-11 Bayer Ag Verfahren und Anlage zur Herstellung von Silan
DE10336054B4 (de) * 2003-08-01 2005-12-15 Domo Caproleuna Gmbh Verfahren zur Herstellung von Hydroxylammoniumsalzen
US7568361B2 (en) * 2004-09-02 2009-08-04 Eastman Chemical Company Optimized liquid-phase oxidation
US8163261B2 (en) * 2005-04-05 2012-04-24 Voltaix, Llc System and method for making Si2H6 and higher silanes
DE102005046105B3 (de) * 2005-09-27 2007-04-26 Degussa Gmbh Verfahren zur Herstellung von Monosilan
US7927404B2 (en) * 2007-12-19 2011-04-19 Chevron U.S.A. Inc. Reactor having a downcomer producing improved gas-liquid separation and method of use
CN101348497B (zh) * 2008-08-29 2011-09-14 仙桃市蓝天化工有限责任公司 甲基三甲氧基硅烷的制备工艺
IT1391068B1 (it) * 2008-10-20 2011-11-18 Sunlit S R L Metodo per la produzione di silicio policristallino
US8388925B2 (en) 2009-12-30 2013-03-05 Memc Electronic Materials, Inc. Methods for producing aluminum trifluoride
US8529860B2 (en) 2009-12-30 2013-09-10 Memc Electronics Materials, Inc. Methods for producing silicon tetrafluoride
US8551298B2 (en) * 2010-10-05 2013-10-08 Memc Electronic Materials, Inc. Processes for purifying silane
US8524048B2 (en) * 2010-10-05 2013-09-03 Memc Electronic Materials, Inc. Processes for recovering silane from heavy-ends separation operations
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CN104159848B (zh) * 2011-12-30 2017-03-15 Memc电子材料有限公司 用于提纯硅烷的方法和系统

Also Published As

Publication number Publication date
TW201305051A (zh) 2013-02-01
CN103648980B (zh) 2017-10-13
KR20180105729A (ko) 2018-09-28
KR20140033172A (ko) 2014-03-17
EP2726410A2 (en) 2014-05-07
WO2013003148A3 (en) 2013-05-02
KR101978107B1 (ko) 2019-05-13
US8834825B2 (en) 2014-09-16
EP2726410B1 (en) 2016-05-11
CN107376793A (zh) 2017-11-24
JP6009557B2 (ja) 2016-10-19
CN107376793B (zh) 2021-04-13
US20130004405A1 (en) 2013-01-03
JP2014531379A (ja) 2014-11-27
WO2013003148A2 (en) 2013-01-03
CN103648980A (zh) 2014-03-19

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