CN103620487A - Photo-orienting illumination device - Google Patents
Photo-orienting illumination device Download PDFInfo
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- CN103620487A CN103620487A CN201280029086.XA CN201280029086A CN103620487A CN 103620487 A CN103620487 A CN 103620487A CN 201280029086 A CN201280029086 A CN 201280029086A CN 103620487 A CN103620487 A CN 103620487A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3058—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state comprising electrically conductive elements, e.g. wire grids, conductive particles
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
- G02B5/3066—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state involving the reflection of light at a particular angle of incidence, e.g. Brewster's angle
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/003—Alignment of optical elements
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
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Abstract
A photo-orienting illumination device comprising: a polarizing means (3) comprising a plurality of unit polarizers (31a-f) arranged adjacent in the adjacency direction; and a scanning means that scans in a prescribed scanning direction ultraviolet rays from a polarized light irradiation means (2) on to a substrate (9) mounted on a stage (4), by moving at least either the stage (4) or the polarized light irradiation means (2). The photo-orienting illumination device has good orienting characteristics as a result of the adjacent surfaces of the unit polarizers (31a-f) and the adjacency direction of the unit polarizers (31a-f) being inclined relative to the scanning direction.
Description
Technical field
The present invention relates to use in LCD panel manufacture field, especially for the substrate using at liquid crystal indicator on, to oriented film, give directionality so that the light directional illumination device that liquid crystal molecule is arranged along desired angle and direction.
Background technology
Along with utilization expansion, the demand of field of liquid crystal display in recent years increases, the shortcoming that strong request improves as liquid crystal indicator is in the past field angle, contrast ratio, animation performance demonstration etc.Especially on liquid crystal display substrate, liquid crystal molecule is being given in direction-sense oriented film, carried out the giving of equalization, pre-dumping (pretilt) angle of orientation direction, the various improvement such as formation (multiple domain (multidomain)) in a plurality of regions in single pixel.
All the time, as everyone knows to the polymeric layer forming (oriented film), give the advantage of directional characteristic and for this reason and the technology of use on liquid crystal display substrate.As this kind, give the method for directional characteristic, have the method that is called as cloth friction (rubbing) method, the method is when making to be wound around the rotor of cloth, substrate is moved, the processing that surperficial polymeric layer is rubbed strongly along one direction.
Yet, in this cloth rubbing manipulation, be noted and have the generation of static, in the generation of oriented film injurious surface mark, the various shortcoming such as generation of dust.For fear of the problem of this cloth rubbing manipulation, the known polarized light that oriented film is irradiated to ultraviolet region is to give the light rubbing manipulation of directional characteristic.
In patent documentation 1, about using the method for this kind of light rubbing manipulation, disclosing, utilize exposed mask, separately form the manufacture method of substrate for the liquid crystal display of the different a plurality of alignment regions of orientation direction.
In patent documentation 2, the polarising means that discloses the large area polarization plates that has a plurality of silica based boards and consist of the polarizer supporter of supporting silica based board, can carry out irradiation to the below of large area polarization plates equably by polarizer supporter is moved.
Patent documentation
Patent documentation 1: TOHKEMY 2007-219191 communique;
Patent documentation 2: TOHKEMY 2010-91906 communique.
Summary of the invention
In the disclosed polarising means of patent documentation 2, by using the large area polarization plates being formed by a plurality of quartz base plates, can be used in the polarization of large-area liquid crystal display cells.Yet, being difficult to accurately and seamlessly configure a plurality of quartz base plates, the irradiation that produces polarized light in the gap portion producing is uneven.The irradiation inequality of this kind of polarized light causes larger impact to polarization characteristic, aspect the image quality of the liquid crystal indicator of manufacturing, is becoming problem.
Therefore, light directional illumination device involved in the present invention possesses:
Polarizing light irradiation unit, worktable and scanning element,
Described smooth directional illumination device is characterised in that,
Described polarizing light irradiation unit possesses ultraviolet irradiation unit and polarization unit,
Described polarization unit possesses along a plurality of units polarizer configuring in abutting connection with direction adjacency,
The described unit polarizer makes the ultraviolet polarization from described ultraviolet irradiation unit outgoing,
Described worktable can be positioned in the substrate that surface has formed oriented film,
Described scanning element is by least one party of described worktable or described polarizing light irradiation unit is moved, thereby with respect to the described substrate loading in described worktable, makes ultraviolet ray from described polarizing light irradiation unit along set direction of scanning scanning,
Tilting with respect to direction of scanning in abutting connection with direction of the adjacent surface of the described unit polarizer and the described unit polarizer.
And light directional illumination device involved in the present invention is characterised in that to possess:
Orientation direction adjustment unit, it can be by adjusting to the film formed orientation direction of orientation described worktable or described polarizing light irradiation unit rotational.
And in light directional illumination device involved in the present invention, it is characterized in that:
The described unit polarizer is rectangular shape.
And in light directional illumination device involved in the present invention, it is characterized in that:
The adjacent surface of the described unit polarizer tilts in abutting connection with direction with respect to the described unit polarizer.
And in light directional illumination device involved in the present invention, it is characterized in that:
The described unit polarizer is parallelogram shape.
And in light directional illumination device involved in the present invention, it is characterized in that:
Described polarizing light irradiation unit possesses the shadow mask of the ultraviolet a part of shading from described polarization unit outgoing.
And in light directional illumination device involved in the present invention, it is characterized in that:
Described scanning element is used linear motor to make described movable workbench.
And light directional illumination device involved in the present invention is characterised in that to possess:
Extinction ratio adjustment unit, it can be by making described polarization unit rotate to adjust extinction ratio.
And in light directional illumination device involved in the present invention, it is characterized in that:
The described unit polarizer is wire-grid polarizers.
According to smooth directional illumination device of the present invention, use comprise a plurality of units polarizer and form polarization unit time, by the adjacent surface of the unit's of making polarizer and tilting with respect to direction of scanning in abutting connection with direction of the unit polarizer, the polarized UV rays that adjacent surface that can Shi Cong unit's polarizer irradiates spreads all over the set region on substrate and disperses, and seeks to irradiate uneven inhibition.
And, by setting, make the orientation direction adjustment unit of worktable or polarizing light irradiation unit rotational, the film formed orientation direction of the orientation at substrate can be adjusted into desired direction.
And the adjacent surface that is the rectangular shape ，Shi unit polarizer by the unit polarizer tilts with respect to the unit polarizer, can use and manufacture and process the unit polarizer that is easy to rectangular shape, and in polarization unit inside, make adjacent surface tilt.In addition, by the inclination of this adjacent surface, can relax the angle that worktable and polarizing light irradiation unit form.
And, by the unit's of making polarizer, be parallelogram shape, can use the hypotenuse of parallelogram shape, relax the angle that worktable and polarizing light irradiation unit form.
And, by arranging the shadow mask of the ultraviolet a part of shading from polarization unit outgoing, can seek the equalization of suitableization of irradiation area and the light quantity of full irradiation area of polarized UV rays.
And, by use linear motor in scanning element, can promptly and to have suppressed the state of mechanical vibration make movable workbench.
And, by being rotated, polarization unit possesses extinction ratio adjustment unit, irradiated polarized UV rays can be adjusted into extinction ratio arbitrarily.
Accompanying drawing explanation
Fig. 1 is the stereographic map of the related light directional illumination device of embodiments of the present invention;
Fig. 2 is the side cross-sectional view of the related light directional illumination device of embodiments of the present invention;
Fig. 3 is the vertical view of the related light directional illumination device of embodiments of the present invention;
Fig. 4 is the schematic diagram that the situation that the ultraviolet ray of the related light orienting device of embodiments of the present invention irradiates is shown;
Fig. 5 is for the polarization unit of light directional illumination device that embodiments of the present invention are related and the figure of the relation of direction of scanning are described;
Fig. 6 is the block diagram that the control formation of the related light directional illumination device of embodiments of the present invention is shown;
Fig. 7 is for the polarization unit of light directional illumination device that other embodiments of the present invention are related and the figure of the relation of direction of scanning are described;
Fig. 8 is for the polarization unit of light directional illumination device that other embodiments of the present invention are related and the figure of the relation of direction of scanning are described;
Fig. 9 is for the polarization unit of light directional illumination device that other embodiments of the present invention are related and the figure of the relation of direction of scanning are described;
Figure 10 is the figure of formation of variable mode that the extinction ratio of the related light directional illumination device of other embodiments of the present invention is shown.
Embodiment
Fig. 1 is the figure that the formation of the related light directional illumination device of embodiments of the present invention is shown.As main composition key element, the light directional illumination device 1 of present embodiment has polarizing light irradiation unit 2, scanning element.Polarizing light irradiation unit 2 is oriented film to be given to the unit of directional characteristic by the light beam of the oriented film irradiation ultraviolet radiation of the surface formation at substrate 9, in the present embodiment, polarizing light irradiation unit 2 possesses polarization unit 3 and has the ultraviolet irradiation unit 21 of catoptron 21a, ultraviolet radiation source 21b and form.In addition, in the present embodiment, as irradiating light, use ultraviolet ray, but also can use the irradiation light of its all band.Now, use the radiation source corresponding with used wave band.
The side cross-sectional view of the light directional illumination device that embodiments of the present invention shown in Figure 2 are related, the vertical view of the light directional illumination device that embodiments of the present invention shown in Figure 3 are related.Scanning element is by making worktable 4 mobile along set moving direction (being Y direction in the drawings), thereby makes the unit that 2 light beams that irradiate scan at substrate 9 from polarizing light irradiation unit.The scanning element of present embodiment has worktable 4, movable table 55, ball-screw 52, LM guide member 51, rotating part 54 and forms.Movable table 55 is mechanically combined with worktable 4 via rotating part 54.In addition, movable table 55 can move along direction of scanning by LM guide member 51.In this LM guide member 51, LM piece 51c, 51d can slide on LM track 51a, 51b.At LM piece 51c, 51d, be fixed with movable table 55.In the present embodiment, as shown in Figure 3, can carry out mobile movable table 55 by two LM guide member 51a, 51b.
In movable table 55, cut the threaded hole corresponding with ball-screw 52.Ball-screw 52, by this threaded hole, is made to ball-screw 52 rotations, thereby the rotation of ball-screw 52 is converted to movable table 55 with respect to the movement of direction of scanning.In addition, in movable table 55, at upper surface, be provided with rotating part 54.This rotating part 54 can be rotated in illustrated XY plane, can be used in the adjustment etc. of the polarization direction of the polarized light irradiating by polarizing light irradiation unit 2.
As scanning element, except using as in this embodiment LM guide member 51, ball-screw 52, can also use linear motor that worktable 4 is moved.By using linear motor, can promptly and to have suppressed the state of mechanical vibration make movable workbench.In addition, except making worktable 4 moves, can also be by polarizing light irradiation unit 2 is moved, or the two moves to make from polarizing light irradiation unit the 2 polarized UV rays B that irradiate along substrate 9 scannings to make worktable 4 and polarizing light irradiation unit 2.
In the present embodiment, by the polarized UV rays B direct irradiation from polarization unit 3 in substrate 9, but also can between polarization unit 3 and substrate 9, the blocking mask that irradiation area is restricted to slit-shaped be set, by mask is set, can limit irradiation area, only make effectively to irradiate light and be exposed to substrate 9, can seek the raising of directional properties.
At worktable 4, be provided with and become the substrate of exposure object 9.In the present embodiment, using in the direction of scanning of substrate 9 becomes the mode of longitudinal direction or transverse direction and arranges while utilizing as liquid crystal indicator.Surface becoming the substrate 9 of exposure object, forms membranaceous by molecular macromolecules of photoreactivity high score such as polyimide.If irradiate polarized UV rays on this oriented film, make polymeric membrane sex change, in not shown later operation, liquid crystal molecule is coated on polymeric membrane, liquid crystal molecule is subject to along specific direction, to arrange (orientation) from the effect of polymeric membrane.Originally, the polymeric membrane that this is had to directional characteristic was called oriented film, but generally speaking, will give directional characteristic polymeric membrane in the past also referred to as oriented film, also by giving directional characteristic polymeric membrane in the past, was called in the lump oriented film in this manual.
Polarizing light irradiation unit 2 comprises that polarization unit 3 forms with the ultraviolet radiation source 21 that comprises ultraviolet radiation source 21b, catoptron 21a.Ultraviolet ray radiation source 21 is used has the line source of major axis in the X-direction of Fig. 2, Fig. 3.In ultraviolet radiation source 21, not only can use this kind of line source, can also use the various light sources such as pointolite.The catoptron 21a of the ultraviolet ray of irradiating from the ultraviolet radiation source 21b such as UV-lamp by paraboloidal mirror etc. etc. is adjusted to as directional light or partial parallel light, as unpolarized ultraviolet light,long wave, to polarization unit 3 sides, irradiates.Polarization unit 3 is from unpolarized ultraviolet light,long wave, to take out the unit of the linear polarization component of set direction.In the present embodiment, by this polarization unit 3, from unpolarized ultraviolet light,long wave, take out the polarized UV rays B along set direction polarization, become the incident light to substrate 9.
In addition, in the present embodiment, the mode that polarizing light irradiation unit 2 tilts with the direction of scanning with respect to scanning element arranges.The situation of the inclination of the polarization unit 3 of the part as polarizing light irradiation unit 2 shown in Figure 3.Polarization unit 3 tilts with the amount shown in arrow from the scanning orthogonal directions 33 with direction of scanning quadrature.For ultraviolet radiation source 21, also with the angle coordinating with polarization unit 3, carry out the inclination with respect to scanning orthogonal directions 33.In addition, can also arrange and can freely change the orientation direction adjustment unit at the angle of inclination of polarizing light irradiation unit 2 by the driving of manual or use motor etc.By according to the change of product angle of inclination of manufacturing, can change the polarization direction with respect to substrate 9, realize the polarization characteristic corresponding with product.
The situation that the ultraviolet ray of schematically illustrated this polarization unit 3 is irradiated in Fig. 4.From the unpolarized ultraviolet light,long wave of the parallel or partial parallel of ultraviolet radiation source 21 outgoing by transmission constituent parts polarizer 31a～31f, polarization direction polarization along setting in each of constituent parts polarizer 31a～31f, is converted to polarized UV rays Ba～Bf.Each polarized UV rays Ba～Bf incides on substrate 9 and makes oriented film directed.In the irradiation area of Fig. 4, with the polarization direction of schematically illustrated each polarized UV rays of arrow Ba～Bf.In the present embodiment, the vergence direction by change polarizing light irradiation unit 2, can be adjusted at the polarization direction showing in this irradiation area.
In Fig. 5, the formation of the related polarization unit of embodiments of the present invention is shown.Fig. 5 observes the figure of polarization unit 3 from the negative direction of the Z axis shown in Fig. 1～Fig. 3 from top.The polarization unit 3 of present embodiment has along forming in abutting connection with direction 33 in abutting connection with a plurality of polarizer 31a～31f of unit of configuration.Polarizer 31a～the 31f of unit is by having used Brewster (Brewster) polarizer or the wire-grid polarizers of dielectric multilayer film to form.Polarizer 31a～the 31f of Ci Zhong unit be take quartz etc. as the optical element (polarizer) that composition forms, and uses in the present embodiment the rectangular-shaped polarizer.As shown in Figure 1, when irradiation area is formed to substrate 9, for substrate 9 is irradiated to polarized UV rays equably, need length from one side of substrate 9 until the polarization unit 3 of another side in opposite directions.Now, in the substrate 9 using in more than 50 inches large-scale liquid crystal indicators, demand has the polarization unit 3 of sufficient length.Large stretch of polarizer is not only manufactured difficulty, and present situation is also high price very of its price.In the present embodiment, by making as shown in Figure 5 the polarizer 31a～31f of unit of small pieces along in abutting connection with direction 33 in abutting connection with also using, can suppress the cost of light directional illumination device.
Yet, in the present embodiment, because the polarizer 31a of the unit of making～31f is in abutting connection with forming polarization unit 3, therefore can consider that the seam producing forms discrete state in the polarized UV rays that substrate 9 is irradiated between the adjacent polarizer 31a～31f of unit.In order to solve this kind of problem, in the present embodiment, as previously mentioned, the polarizing light irradiation unit 2 that comprises polarization unit 3 is tilted with respect to direction of scanning.Thereby as shown in Figure 5, the polarizer 31a～31f of unit becomes with respect to scanning orthogonal directions 35 in abutting connection with direction 33.
In the present embodiment, owing to using the polarizer 31a～31f of unit of rectangle, therefore follow the inclination of this polarization unit 3, the adjacent surface 34 of the polarizer 31a～31f of unit tilts with respect to direction of scanning.This kind of adjacent surface 34 with respect to being formed slopely by the unit polarizer 31 both sides of adjacency of direction of scanning, irradiate the repeat region of polarized UV rays, can spread all over this repeat region and relax the polarized UV rays that (equalization) irradiates substrate 9 from seam.
Fig. 6 is the block diagram that the control formation of the related light directional illumination device of embodiments of the present invention is shown.The light directional illumination device of present embodiment, as its control module, has control part 81, ball-screw drive division 82 and forms.At control part 81, be connected with for carrying out display part 83, the input part 84 to the exchange of user's various information.In addition, control part 81 is connected with rotating part 54, ultraviolet radiation source 21b, can control these various formations.
By this kind, controlled and formed, control part 81 rotarilys actuate ball-screw 6a by ball-screw drive division 82, thereby worktable 4 is moved along desired direction of scanning.Now, control part 81 carrys out the substrate 9 scanning polarized UV rays B to arranging at worktable 4 by lighting ultraviolet radiation source 21b.
In addition, control part 81 can also make worktable 4 rotations (rotation in the XY of Fig. 1～Fig. 3 face) by rotating part 54.By the rotation of worktable 4, change the substrate 9 of setting on worktable 4 and the angle of inclination of polarizing light irradiation unit 2, also can adjust polarized UV rays B with respect to the polarization direction of substrate 9.Can realize the polarization characteristic corresponding with the product of manufacturing.
In polarization unit 3, at this kind, use outside the mode of the rectangular-shaped polarizer 31a～31f of unit, can adopt variety of way.In Fig. 7, the formation of the related polarization unit of other embodiments 3 is shown.In the present embodiment, constituent parts polarizer 31a～31f is the parallelogram shape with the limit tilting with respect to direction of scanning.The constituent parts polarizer 31a polarizer 31c of～31fRu Yi unit be example record like that, an angle forms sharp angle α.
In the present embodiment, also with aforementioned embodiments similarly, polarizer 31a～the 31f of the unit of making tilts with respect to direction of scanning 35 in abutting connection with direction 33, and, by the inclination of polarizing light irradiation unit 2 self, the adjacent surface 34 between the polarizer 31a～31f of unit tilts with respect to direction of scanning.And in the present embodiment, the constituent parts polarizer 31a～31f of parallelogram shape has acute angle, thereby the hypotenuse of the polarizer 31a～31f of unit has inclination with respect to direction of scanning.So, in the present embodiment, these two inclinations of hypotenuse that utilize the inclination of this polarizing light irradiation unit 2 self and have a polarizer 31a～31f of unit of sharp angle α make adjacent surface 34 tilt with respect to direction of scanning, thereby can seek the mitigation at both angles of inclination.
That is, in the situation that only making polarizing light irradiation unit 2 tilt, in order to spread all over the whole width of substrate 9, irradiate polarized UV rays B, it is larger that angle of inclination becomes, and more needs the length of the length direction of polarizing light irradiation unit 2.By suppressing the angle of inclination of this kind of polarizing light irradiation unit 2, can shorten the length of the length direction of polarizing light irradiation unit 2.
On the other hand, in the situation that increase the hypotenuse of the polarizer 31a～31f of unit and the angle that direction of scanning forms, the angle of acute angle portion further diminishes.In Fig. 7, the repeat region that the polarizer 31b of unit and 31c by adjacency form is shown.In the situation that only realize the repeat region of equal length by the hypotenuse of the unit polarizer 31, as a reference and as shown in the polarizer 31z of unit recording, known sharp angle α > acute angles beta.In the unit polarizer 31, along with the angle of acute angle portion diminishes, its manufacture difficulty that becomes, and cost uprises.And, can expect being easy to produce at acute angle portion damaged, be difficult to process.Especially as in this embodiment ，Jiang unit's polarizer 31a～31f is fixed in the situation of fixed part 32, and due to the heat from ultraviolet radiation source 21, the possibility that acute angle portion is damaged further becomes large.
In the present embodiment, by utilizing the angle of inclination both sides of the angle of inclination of this kind of polarizing light irradiation unit 2 and the hypotenuse of the unit polarizer 31, seek the mitigation at both angles of inclination, form effective repeat region.
In addition, as described, be difficult to the precision polarizer 31a～31f of unit of the such parallelogram shape with acute angle portion of shop drawings 7 preferably, and cost uprises.In Fig. 8, same with Fig. 7, be the formation that makes adjacent surface 34 tilt in polarization unit 3.In this embodiment, same with Fig. 5, use the rectangular-shaped polarizer 31a～31f of unit.But, different in the fixed-direction this point with respect to fixed part 32.That is, by the rectangular-shaped polarizer 31a～31f of unit is fixed on to fixed part 32 in the mode tilting with respect to direction of scanning, with Fig. 7 similarly, in polarization unit 3, form the adjacent surface 34 of inclination.Now, in order to make the outgoing region of polarized UV rays not become unbalanced, preferably at fixed part 32, rectangular-shaped slit is set as illustrated in fig. 8, or the blocking mask in the unwanted region of shielding is set.According to this kind of mode, although the usage ratio of constituent parts polarizer 31a～31f reduces, can suppress the impact of seam, and the manufacture of the polarizer 31a～31f of the unit of making and process easy.
In Fig. 9, the polarization unit of the related light directional illumination device of other embodiments of the present invention and the relation of direction of scanning are shown.With respect to the mode that in the illustrated embodiment such as Fig. 3, polarizing light irradiation unit 2 is rotated with respect to worktable 4, in the present embodiment, by rotating part 54, make worktable 4 rotations, thereby make polarizing light irradiation unit 2 and load in the substrate 9 of worktable 4.Also by changing the anglec of rotation of rotating part 54, the polarization direction of the polarized UV rays B irradiating for substrate 9 is adjusted into direction arbitrarily in the present embodiment.
In Figure 10, the formation of the related light directional illumination device of other embodiments is shown.In the present embodiment, employing can be adjusted by polarization unit 3 formation of the extinction ratio (also referred to as polarization ratio) of the irradiation ultraviolet radiation B that substrate 9 is irradiated.In the present embodiment, in the unit polarizer 31 that forms polarization unit 3, adopt the Brewster polarizer.This Brewster polarizer is the polarizer consisting of dielectric multilayer film, can use Brewster angle to be separated into p wave polarization component and s wave polarization component, and sets extinction ratio compared with highland.
In the situation that this kind of Brewster polarizer being used to office's polarizer 31, the incident angle of the unpolarized ultraviolet light,long wave by the change incident unit polarizer 31, can adjust extinction ratio.Particularly, as shown in figure 10, using the length direction of polarization unit 3 (as the directions X of drawing depth direction) as axle, by polarization unit 3 is rotated, can at random adjust the extinction ratio of polarized UV rays B.By manually or by the extinction ratio adjustment unit that the control of control part 81 is rotated polarization unit 3 carrying out the rotation of polarization unit.
In addition in ， unit's polarizer 31, except this kind of Brewster polarizer, can also use wire-grid polarizers.Wire-grid polarizers can at random change wavelength band by the interval of the metal wire (grid) in inside setting.Wire-grid polarizers can be by utilizing the Simple process of pattern transfer to manufacture.Yet, in this wire-grid polarizers, can not realize the polarizer that for example surpasses the length of 2000mm, the scheme constituting of passing through a plurality of units polarizer 31 that present embodiment is such is effective.
In addition, the present invention is not limited only to these embodiments, suitably combines the formation of each embodiment and the embodiment that forms is also category of the present invention.
Description of reference numerals
1 smooth directional illumination device; 2 polarizing light irradiation unit; 21a catoptron; 21b ultraviolet ray radiation source; 3 polarization units; The 31 unit polarizers; 32 fixed parts; The 33 unit polarizers in abutting connection with direction; The adjacent surface of the 34 unit polarizers; 35 scanning orthogonal directionss; 4 worktable; 51a, b LM track; 51c, d LM piece; 54 rotating parts; 55 movable table; 52 ball-screws; 81 control parts; 82 ball-screw drive divisions; 83 display parts; 84 input parts; 9 substrates; 9a substrate setting area.
Claims (according to the modification of the 19th of treaty)
1. a light directional illumination device, possesses polarizing light irradiation unit, worktable and scanning element, and described smooth directional illumination device is characterised in that:
Described polarizing light irradiation unit possesses ultraviolet irradiation unit and polarization unit,
Described polarization unit possesses along a plurality of units polarizer configuring in abutting connection with direction adjacency,
The described unit polarizer makes the ultraviolet polarization from described ultraviolet irradiation unit outgoing,
Described worktable can be positioned in the substrate that surface has formed oriented film,
Described scanning element is by least one party of described worktable or described polarizing light irradiation unit is moved, thereby with respect to the described substrate loading in described worktable, makes ultraviolet ray from described polarizing light irradiation unit along set direction of scanning scanning,
At the face parallel with described worktable, the tilting with respect to direction of scanning in abutting connection with direction of the adjacent surface of the described unit polarizer and the described unit polarizer.
2. smooth directional illumination device according to claim 1, is characterized in that possessing:
Orientation direction adjustment unit, it can be by making described worktable or described polarizing light irradiation unit rotational be adjusted at directed film formed orientation direction.
3. according to claim 1 or smooth directional illumination device claimed in claim 2, it is characterized in that:
The described unit polarizer is rectangular shape.
4. smooth directional illumination device according to claim 3, is characterized in that:
The adjacent surface of the described unit polarizer tilts in abutting connection with direction with respect to the described unit polarizer.
5. according to claim 1 or smooth directional illumination device claimed in claim 2, it is characterized in that:
The described unit polarizer is parallelogram shape.
According to claim 1 to the light directional illumination device described in any one in claim 4, it is characterized in that:
Described scanning element is used linear motor to make described movable workbench.
According to claim 1 to the light directional illumination device described in any one in claim 6, it is characterized in that:
Described polarizing light irradiation unit possesses the shadow mask of the ultraviolet a part of shading from described polarization unit outgoing.
According to claim 1 to the light directional illumination device described in any one in claim 7, it is characterized in that possessing:
Extinction ratio adjustment unit, it can be by making described polarization unit rotate to adjust extinction ratio.
According to claim 1 to the light directional illumination device described in any one in claim 7, it is characterized in that:
The described unit polarizer is wire-grid polarizers.
Claims (9)
1. a light directional illumination device, possesses polarizing light irradiation unit, worktable and scanning element, and described smooth directional illumination device is characterised in that:
Described polarizing light irradiation unit possesses ultraviolet irradiation unit and polarization unit,
Described polarization unit possesses along a plurality of units polarizer configuring in abutting connection with direction adjacency,
The described unit polarizer makes the ultraviolet polarization from described ultraviolet irradiation unit outgoing,
Described worktable can be positioned in the substrate that surface has formed oriented film,
Described scanning element is by least one party of described worktable or described polarizing light irradiation unit is moved, thereby with respect to the described substrate loading in described worktable, makes ultraviolet ray from described polarizing light irradiation unit along set direction of scanning scanning,
Tilting with respect to direction of scanning in abutting connection with direction of the adjacent surface of the described unit polarizer and the described unit polarizer, and
Tilting with respect to direction of scanning in abutting connection with direction of the described unit polarizer.
2. smooth directional illumination device according to claim 1, is characterized in that possessing:
Orientation direction adjustment unit, it can be by making described worktable or described polarizing light irradiation unit rotational be adjusted at directed film formed orientation direction.
3. according to claim 1 or smooth directional illumination device claimed in claim 2, it is characterized in that:
The described unit polarizer is rectangular shape.
4. smooth directional illumination device according to claim 3, is characterized in that:
The adjacent surface of the described unit polarizer tilts in abutting connection with direction with respect to the described unit polarizer.
5. according to claim 1 or smooth directional illumination device claimed in claim 2, it is characterized in that:
The described unit polarizer is parallelogram shape.
According to claim 1 to the light directional illumination device described in any one in claim 4, it is characterized in that:
Described scanning element is used linear motor to make described movable workbench.
According to claim 1 to the light directional illumination device described in any one in claim 6, it is characterized in that:
Described polarizing light irradiation unit possesses the shadow mask of the ultraviolet a part of shading from described polarization unit outgoing.
According to claim 1 to the light directional illumination device described in any one in claim 7, it is characterized in that possessing:
Extinction ratio adjustment unit, it can be by making described polarization unit rotate to adjust extinction ratio.
According to claim 1 to the light directional illumination device described in any one in claim 7, it is characterized in that:
The described unit polarizer is wire-grid polarizers.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2012/060568 WO2013157114A1 (en) | 2012-04-19 | 2012-04-19 | Photo-orienting illumination device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103620487A true CN103620487A (en) | 2014-03-05 |
| CN103620487B CN103620487B (en) | 2016-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280029086.XA Expired - Fee Related CN103620487B (en) | 2012-04-19 | 2012-04-19 | Light directional illumination device |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP5131886B1 (en) |
| KR (1) | KR101462274B1 (en) |
| CN (1) | CN103620487B (en) |
| TW (1) | TWI521258B (en) |
| WO (1) | WO2013157114A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108139630A (en) * | 2015-10-23 | 2018-06-08 | 株式会社 V 技术 | Polarized light illumination device and polarizing light irradiation method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5344105B1 (en) * | 2013-03-08 | 2013-11-20 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| JP5954594B2 (en) * | 2014-03-10 | 2016-07-20 | ウシオ電機株式会社 | Polarizing light irradiation apparatus for photo-alignment and polarized light irradiation method for photo-alignment |
| WO2017145975A1 (en) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | Polarized light irradiation device |
| JP2017151405A (en) * | 2016-02-22 | 2017-08-31 | 株式会社ブイ・テクノロジー | Polarized light irradiation device |
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| US20030043461A1 (en) * | 2001-08-29 | 2003-03-06 | Delpico Joseph | Polarized exposure for web manufacture |
| JP2004144884A (en) * | 2002-10-23 | 2004-05-20 | Ushio Inc | Polarizing light irradiation device for optical orientation |
| CN1769981A (en) * | 2004-11-05 | 2006-05-10 | 优志旺电机株式会社 | Polarization light emitting apparatus for light orientation |
| CN1973243A (en) * | 2004-06-02 | 2007-05-30 | 3M创新有限公司 | Polarized UV exposure system |
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| JPH11142850A (en) * | 1997-11-05 | 1999-05-28 | Hitachi Ltd | Method and device for polarization irradiation |
| JP2002006322A (en) * | 2000-06-21 | 2002-01-09 | Matsushita Electric Ind Co Ltd | Method for rubbing liquid crystal display device, liquid crystal display device and rubbing device |
| JP2010091906A (en) * | 2008-10-10 | 2010-04-22 | Seiko Epson Corp | Method for manufacturing electro-optical device |
| JP2012018256A (en) * | 2010-07-07 | 2012-01-26 | Hitachi High-Technologies Corp | Method for exposing alignment film for liquid crystal and device for the same |
| KR101462272B1 (en) * | 2010-10-01 | 2014-11-17 | 가부시키가이샤 에프케이 코우카쿠 겐큐쇼 | Photo-allignmemt exposure apparatus and photo-allignmemt exposure apparatus method |
-
2012
- 2012-04-19 WO PCT/JP2012/060568 patent/WO2013157114A1/en active Application Filing
- 2012-04-19 JP JP2012538013A patent/JP5131886B1/en active Active
- 2012-04-19 CN CN201280029086.XA patent/CN103620487B/en not_active Expired - Fee Related
- 2012-04-19 KR KR1020137018241A patent/KR101462274B1/en active IP Right Grant
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030043461A1 (en) * | 2001-08-29 | 2003-03-06 | Delpico Joseph | Polarized exposure for web manufacture |
| JP2004144884A (en) * | 2002-10-23 | 2004-05-20 | Ushio Inc | Polarizing light irradiation device for optical orientation |
| CN1973243A (en) * | 2004-06-02 | 2007-05-30 | 3M创新有限公司 | Polarized UV exposure system |
| CN1769981A (en) * | 2004-11-05 | 2006-05-10 | 优志旺电机株式会社 | Polarization light emitting apparatus for light orientation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108139630A (en) * | 2015-10-23 | 2018-06-08 | 株式会社 V 技术 | Polarized light illumination device and polarizing light irradiation method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101462274B1 (en) | 2014-11-17 |
| KR20140001241A (en) | 2014-01-06 |
| CN103620487B (en) | 2016-10-12 |
| JP5131886B1 (en) | 2013-01-30 |
| JPWO2013157114A1 (en) | 2015-12-21 |
| WO2013157114A1 (en) | 2013-10-24 |
| TWI521258B (en) | 2016-02-11 |
| TW201350973A (en) | 2013-12-16 |
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