JP4603387B2 - Manufacturing apparatus for optical elements for liquid crystal display devices - Google Patents

Description

  The present invention relates to an apparatus for manufacturing an optical element for a liquid crystal display device that irradiates polarized light and has a desired molecular orientation alignment with respect to a photo-alignment film on a substrate.

  In recent years, liquid crystal display devices (LCDs) that have attracted attention as flat panel displays are display elements that utilize electro-optical changes in liquid crystals, and are marketed for notebook PCs and other applications due to their thin, lightweight, and low power consumption characteristics. Has expanded. In recent years, there has been a rapid demand for a liquid crystal display device as a large display for TV, replacing the conventional CRT-TV.

  The liquid crystal display device includes a pair of optical elements and a liquid crystal cell provided between the pair of optical elements. Among these, the optical element is a base material, a photo-alignment film provided on one surface of the base material, a liquid crystal display element compensator provided on the other surface of the base material, a viewing angle improving plate for a liquid crystal display element, an optical position And a light compensation layer including a phase difference plate, an optical rotator, a λ / 4 plate, a λ / 2 plate, and the like, whereby a wider viewing angle can be obtained. In particular, an optical element is an indispensable member in a large display for TV use that requires a wide viewing angle. These optical elements are prepared by aligning and fixing liquid crystal molecules in a specific direction, and it is necessary to perform alignment treatment on the photo-alignment film coated on the substrate.

  As the normal alignment treatment, a rubbing method is used in which a polymer film such as polyimide is provided on a substrate such as glass and is rubbed in one direction with a cloth or the like. As a result, the liquid crystal molecules in contact with the substrate are arranged so that their long axes (directors) are parallel or perpendicular to the rubbing direction. Since the rubbing method generates static electricity and dust in the manufacturing process, a cleaning process is required after the alignment process, and in particular, TFT elements are destroyed by static electricity in TFT (thin layer transistor) type liquid crystal cells that are widely used in recent years. This is a cause of lowering the manufacturing yield.

  Furthermore, with the recent increase in size of base materials, rubbing treatment is becoming difficult in terms of apparatus and cost, and a non-contact method is required.

  As a typical method for determining the alignment direction of the alignment layer in a non-contact manner, there is a method of aligning liquid crystal molecules by irradiating polarized light to a photo-alignment film made of anisotropic absorbing molecules (Patent Documents 1 and 2). . When such a method is used, anisotropy can be imparted to a large-area photo-alignment film in a non-contact manner.

  Further, by installing a polarizing element capable of rotating the polarization axis on the light source side, desired anisotropy can be easily given to the photo-alignment material. (Patent Document 3).

As a polarization exposure apparatus, for example, there is an apparatus that performs optical alignment of an alignment film by irradiating polarized light. Light including ultraviolet rays emitted from the lamp is collected by the elliptical condensing mirror, reflected by the first plane mirror, and incident on the integrator lens. The light emitted from the integrator lens enters the collimator lens through the shutter and the second plane mirror, is converted into parallel light by the collimator lens, and enters the polarizing element. Then, the polarized light emitted from the polarizing element is incident on the substrate having the alignment layer (Patent Document 4).
US Pat. No. 5,032,009 U.S. Pat. No. 4,974,941 JP 2000-206525 A Japanese Patent Laid-Open No. 10-194345

  For example, in Patent Document 4, a desired polarized light is obtained in the vicinity of the optical axis where the incident angle of light is close to 0 °, but the incident angle decreases toward the outer periphery of the light irradiation region, and depending on the incident angle of light, The light component of non-polarized light increases at the outer peripheral portion, and a polymer other than the specific direction reacts in the photo-alignment film, so that an axial deviation occurs between the central portion and the outer peripheral portion in the irradiation surface. Furthermore, the polarization direction may change at the outer periphery of the polarizing element depending on the configuration conditions of the polarizing element and the incident angle of light. For example, when diverging light is incident on a polarizing element composed of 15 quartz glasses, the polarization direction may be tilted by a maximum of 6 ° on both sides of the light irradiation region.

  Here, the case where optical anisotropy is imparted to the photo-alignment film will be described. In the production of optical elements for liquid crystal display devices, alignment-processed photo-alignment films are formed on a single large glass substrate according to the size of one screen of the liquid crystal display device and to reduce manufacturing costs. There are things to do. In particular, along with the recent increase in the size of LCD screens, alignment efficiency is improved by forming a photo-alignment film that has been subjected to alignment treatment on a large substrate by further multi-faceting. The substrate size referred to as the sixth generation is 1600 × 1800 mm, and the seventh generation is 2000 × 2000 mm. In general, a large substrate is moved in the direction of one axis or two axes in the X-axis or Y-axis direction depending on the number or position of the imposition.

  However, when the substrate size is increased, it is difficult to uniformly form a large number of alignment films that have undergone alignment treatment within one substrate.

  The present invention has been made in consideration of the above points, and the alignment-processed photo-alignment film can be formed in a single substrate with multiple faces, and each alignment-processed photo-alignment film is the same. An object of the present invention is to provide an apparatus for manufacturing an optical element for a liquid crystal display device, which can manufacture an optical element for a liquid crystal display device having an alignment direction of.

The present invention comprises a stage on which a substrate on which a photo-alignment film containing a photo-alignment material is formed is placed, a light source that is disposed above the stage and that emits light, and light from the light source is polarized light. A polarizing element that irradiates the photo-alignment film of the base material on the stage with this polarized light to give the alignment film a desired molecular orientation, and a mask having an opening disposed between the stage and the polarizing element, The center of the opening of the mask coincides with the center of the polarized light from the polarizing element, the stage is moved relative to the opening of the mask by the stage drive unit, and the alignment-processed optical alignment is performed at a desired position of the substrate on the stage. A plurality of films are formed in multiple faces, and an additional polarizing element on which the polarized light that has passed through the photo-alignment film and the substrate arrives is provided on the stage side, and a light receiver is provided on the back surface of the additional polarizing element, and the polarizing element is provided in the light receiver. Drive control unit that rotates The drive controller is configured to rotate the polarizing element based on a signal from the light receiver so that the angle difference between the transmission axis of the polarizing element and the transmission axis of the additional polarizing element has a predetermined value. An apparatus for manufacturing an optical element for a liquid crystal display device .

  In the optical element for a liquid crystal display device according to the present invention, the drive control unit rotates the polarizing element so that the angle difference between the transmission axis of the polarizing element and the transmission axis of the additional polarizing element is 90 °. It is a manufacturing device.

  In the optical element for a liquid crystal display device according to the present invention, the drive control unit rotates the polarizing element so that the angle difference between the transmission axis of the polarizing element and the transmission axis of the additional polarizing element is 0 °. It is a manufacturing device.

  The present invention is the optical element manufacturing apparatus for a liquid crystal display device, wherein the additional polarizing element is rotatably attached to the stage.

  As described above, according to the present invention, an optical element for a liquid crystal display device that can form an alignment-treated alignment film on a substrate in multiple faces and each alignment-processed alignment film has the same alignment direction is provided. It can be manufactured accurately and reliably.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIGS. 1 to 9 are views showing an apparatus for manufacturing an optical element for a liquid crystal display device according to the present invention. First, as shown in FIGS. 2A and 2B, a vertical alignment mode liquid crystal display device 15 is a pair of liquid crystals. The display device optical elements 16a and 16b and the liquid crystal 17 provided between the pair of liquid crystal display optical elements 16a and 16b are provided.

  Among these, one (downward) optical element 16a includes a base material 3 such as a glass substrate, a photo-alignment film 7 including a photo-alignment material provided on one surface of the base material 3, and the other of the base material 3. And a polarizing plate 18 provided on the surface.

  The other (upper) optical element 16b is formed on a base material 3 such as a glass substrate, a photo-alignment film 7 including a photo-alignment material provided on one surface of the base material 3, and the other surface of the base material 3. And an optical compensation layer 8 provided.

  Further, the optical element 16 b has a polarizing plate 18 provided on the optical compensation layer 8.

  Next, the optical compensation layer 8 of the optical element 16b will be described with reference to FIG. As shown in FIG. 2B, the optical compensation layer 8 is provided on a base material 8d such as a glass substrate, a photo-alignment film 8a provided on the base material 8d and having a certain molecular orientation arrangement, and the photo-alignment film 8a. And the liquid crystal layer 8c provided on the liquid crystal layer 8b.

  When producing each optical element 16a, 16b, a photo-alignment film containing a photo-alignment material such as chalcone, coumarin, polyvinyl cinnamate, polyimide, adbenzene, etc. on one surface of the substrate 3 (literature, latest in LCD) Alignment technology) 7 is formed, and the optical alignment film 7 is irradiated with polarized light by an optical element manufacturing apparatus for a liquid crystal display device described later.

  Further, in FIG. 2A, the upper substrate 3 and the photo-alignment film 7 from the upper substrate 3 and the photo-alignment film 7 to the lower photo-alignment film 7 and the substrate 3, that is, the substrate 3, the photo-alignment film 7, and the liquid crystal in this order from above. 17, the photo-alignment film 7 and the substrate 3 constitute a liquid crystal cell 17a.

  Next, an apparatus for manufacturing the optical element 16 for a liquid crystal display device for manufacturing such an optical element 16 will be described. As shown in FIG. 1, an optical element manufacturing apparatus for a liquid crystal display device includes a stage 4 on which a substrate 3 such as a glass substrate on which a photo-alignment film 7 including a photo-alignment material is formed is placed on a surface, 4, a light source 1 disposed above and irradiating light, a polarizing element (first polarizing element) 2 rotatably disposed between the light source 1 and the stage 4, a photo-alignment film 7 on the stage 4 and And an additional polarizing element (second polarizing element) 5 disposed below the substrate 3.

  Among these, the first polarizing element 2 and the second polarizing element 5 are all film-like polarizing elements, polarizing beam splitters, PBSs (consisting of one or more plates with a proofer angle), anisotropic absorbing media, Although it consists of a reflective surface or a scattering medium, as the 1st polarizing element 2 and the 2nd polarizing element 5, things like a wire grid are mentioned.

  The first polarizing element 2 converts the light from the light source 1 into polarized light, and irradiates the photo-alignment film 7 of the substrate 3 on the stage 4 with this polarized light, thereby arranging a desired molecular orientation array on the photo-alignment film 7. It comes to be able to give. Further, the first polarizing element 2 is rotated by the drive control unit 9.

  Furthermore, a light receiver 6 is provided on the back side of the second polarizing element 5, and this light receiver 6 is connected to the drive control unit 9. Based on the signal from the light receiver 6, the drive control unit 9 sets the angle difference between the transmission axis of the first polarizing element 2 and the transmission axis of the second polarizing element 5 to a predetermined value, for example, 90 ° or 0 °. The first polarizing element 2 is driven to rotate.

  Furthermore, the second polarizing element 2 provided on the stage 4 also rotates on the stage 4.

  A mask 20 having an opening 20 a is disposed between the stage 4 and the first polarizing element 2. In this case, the center of the opening 20 a of the mask 20 coincides with the center of the polarized light from the first polarizing element 2. Further, the stage 4 can be moved relative to the opening 20a of the mask 20 relative to the opening 20a of the mask 20 in the X direction and the Y direction by a stage drive (see FIGS. 3 to 9).

  3 to 9, the Y direction coincides with the transport direction of the base material 3, and the X direction is a direction orthogonal to the transport direction of the base material 3.

  The polarized light obtained by transmitting the light from the light source 1 through the first polarizing element 2 has an effective irradiation area 21 on the stage 4. A central portion of the effective irradiation area 21 is a central area 21a with little axis deviation of polarized light (see FIG. 9). Here, FIG. 9 is a diagram showing an axial distribution of polarized light.

  As described above, the stage 4 is moved in the X direction and the Y direction when viewed from the plane by the stage driving unit 4a, whereby the X direction is relative to the light source 1, the first polarizing element 2, and the opening 20a of the mask 20. And move in the Y direction.

  In this way, the central area 21a of the polarized light transmitted through the first polarizing element 2 and the opening 20a of the mask 20 can be brought to the desired position of the substrate 3 on the stage 4, and at the desired position of the substrate 3. By using the central area 21a of the polarized light, the alignment process described later can be applied to the photo-alignment film 7 to form the alignment-processed photo-alignment film 7a.

  In the present embodiment, by moving the stage 4 in the X direction and the Y direction, a plurality of optical alignment films 7 on the single substrate 3 placed on the stage 4 are respectively provided in the X direction and the Y direction. The aligned alignment-processed photo-alignment films 7a can be formed. In this case, the molecular orientations of the alignment-treated photo-alignment films 7a are in the same direction.

  In this way, by forming a plurality of alignment-treated photo-alignment films 7a on the photo-alignment film 7 on the substrate 3 by multi-sided attachment, a multi-sided multi-faced optical element 16A is obtained. The multi-faced optical element 16A formed in this way is cut for each alignment-processed photo-alignment film 7a in the subsequent process, and the optical element 16a is obtained.

  Next, the operation of the present embodiment having such a configuration will be described.

  First, the base material 3 having the alignment film 7 formed on one surface is placed on the stage 4. Next, the second polarizing element 5 on the stage 4 side is rotated, and the direction of the transmission axis of the second polarizing element 5 is relative to the desired molecular orientation array formed on the photo-alignment film 7 provided on the substrate 3. Adjust to 0 ° or 90 °.

  Next, the light from the light source 1 is irradiated, and the light from the light source 1 is converted into polarized light through the first polarizing element 2. Next, the polarized light from the first polarizing element 2 is irradiated toward the photo-alignment film 7 on the base material 3 disposed on the stage 4 through the opening 20 a of the mask 20. At this time, the polarized light from the first polarizing element 2 reaches the second polarizing element 5 through the photo-alignment film 7 and the substrate 3.

  A light receiver 6 is provided on the back surface of the second polarizing element 5, and a signal from the light receiver 6 is sent to the drive controller 9.

  When the intensity of the light received by the light receiver 6 is minimum, that is, when the light is not received by the light receiver 6, the drive control unit 9 transmits the transmission axis of the first polarizing element 2 and the transmission axis of the second polarizing element 5. The angle between the transmission axis of the first polarizing element 2 and the transmission axis of the second polarizing element 5 is determined when it is determined that the angle difference between them is 90 ° and the intensity of the light received by the light receiver 6 is maximum. It is determined that the difference is 0 °.

  The drive control unit 9 rotates the first polarizing element 2 so that the angle difference between the transmission axis of the first polarizing element 2 and the transmission axis of the second polarizing element 5 is 90 ° or 0 °.

  In this state, the light alignment film 7 on the substrate 3 is irradiated with the polarized light from the first polarizing element 2 through the opening 20a of the mask 20, thereby performing an alignment process on the photo-alignment film 7. An oriented photo-alignment film 7 a having a desired molecular direction arrangement can be formed on the film 7.

  In this way, by using the above optical element manufacturing apparatus, a plurality of polyfaces having a desired molecular orientation array at a desired position of the photo-alignment film 7 by irradiating the photo-alignment film 7 on the substrate 3 with polarized light. The aligned alignment-processed photo-alignment film 7a is formed. Thereafter, the optical compensation layer 8 is formed on the other surface of the substrate 3 to form the multifaceted optical element 16A. Next, the optical element 16a can be obtained by cutting the multi-faced optical element 16A for each alignment-treated photo-alignment film 7a.

  Similarly, the photo-alignment film 7 formed on one surface of the substrate 3 is irradiated to form an alignment-processed photo-alignment layer 7a, and the photo-compensation layer 8 and the polarizing plate 18 are formed on the other surface of the substrate 3. The optical element 16b is obtained by sequentially forming the multi-faceted optical element 16A and cutting it for each alignment-processed photo-alignment film 7a.

  Next, the action of forming a plurality of alignment-treated photo-alignment films 7 at desired positions of the photo-alignment film 7 by irradiating the photo-alignment film 7 with polarized light will be described in detail.

  As described above, the polarized light transmitted through the first polarizing element 2 and the opening 20a of the mask 20 has the effective irradiation area 21 on the stage 4, and the central portion of the effective irradiation area 21 is the center where the axis deviation of the polarized light is small. It becomes area 21a (FIG. 3).

  Therefore, the stage drive unit 4a moves the stage 4 in the X direction and the Y direction so that the desired position of the substrate 3 placed on the stage 4 comes to a position corresponding to the central area 21a.

  First, the case where two alignment-treated alignment films 7a are formed on the substrate 3 in the X direction will be described.

  First, the base material 3 on the stage 4 is at a position where the central portion thereof corresponds to the central area 21a (FIG. 4).

  Next, the stage 4 is moved to the left in the X direction so that the right side portion of the base material 3 comes to a position corresponding to the central area 21a. In this state, the right side portion of the base material 3 is subjected to orientation treatment by irradiating polarized light. A finished photo-alignment film 7a is formed (FIG. 5A).

  Next, the stage 4 is moved to the right in the X direction so that the left side portion of the base material 3 comes to a position corresponding to the central area 21a. In this state, the left side portion of the base material 3 is subjected to orientation treatment by irradiating polarized light. A finished photo-alignment film 7a is formed (FIG. 5B).

  In this way, two alignment-processed photo-alignment films 7 a arranged in the X direction can be formed on the base material 3.

  Next, the case where two alignment-processed photo-alignment films 7a are formed in the Y direction on the substrate 3 will be described.

  First, the stage 4 is located behind the Y direction so that the front part of the base material 3 comes to a position corresponding to the central area 21a. In this state, the front part of the base material 3 has been subjected to the orientation treatment by irradiating polarized light. A photo-alignment film 7a is formed (FIG. 6A).

  Next, the stage 4 is moved forward in the Y direction so that the rear part of the base material 3 comes to a position corresponding to the central area 21a. In this state, the rear part of the base material 3 is subjected to the alignment treatment by irradiating polarized light. A photo-alignment film 7a is formed (FIG. 6B).

  In this way, two alignment-treated photo-alignment films 7a arranged in the Y direction can be formed on the base material 3.

  Next, the case where two alignment-processed light-treated films 7a in the X direction and three in the Y direction are formed on the substrate 3 will be described.

  As shown in FIGS. 7A and 7B, the polarized light transmitted through the first polarizing element 2 and the opening 20a of the mask 20 has an effective irradiation area 21 having a central area 21a in the center. Therefore, the stage 4 is sequentially moved in the X direction and the Y direction to bring the desired position of the base material 3 to a position corresponding to the central area 21a, and irradiate the photo-alignment film 7 on the base material 3 with polarized light. By doing so, the alignment-processed photo-alignment film 7a can be formed on the substrate 3 in which two in the X direction and three in the Y direction are arranged.

  Similarly, as shown in FIG. 8, the alignment-processed photo-alignment film 7 a can be formed on the base material 3, with three aligned in the X direction and two aligned in the Y direction.

  Next, examples of the present invention will be described.

  First, an automatic exposure machine (KP-5002, manufactured by USHIO INC.) Having a stage 4, a first polarizing element 2, and a light source 1 is prepared. Next, a film-like polarizing element to be the second polarizing element 5 was placed on the stage 4 so that its transmission axis was in the X-axis direction (⇔, 90 ° direction).

  In this embodiment, when the transmission axis of the first polarizing element 2 is oriented in the 0 ° direction, the angle difference between the transmission axis of the first polarizing element and the transmission axis of the second polarizing element 5 is 90 °.

During this time, the illuminance at a wavelength of 365 nm was measured with an illuminometer as the light receiver 6 provided on the back surface of the second polarizing element 5 to determine the transmission intensity. And the 1st polarizing element 2 was rotated 1 degree at a time by the drive control part 9 so that illumination intensity might be set to 0 mW / cm < ² >.

  In this state, the polarized light from the first polarizing element 2 is applied to the photo-alignment film 7 formed on one surface of the substrate 3 provided on the stage 4 through the opening 20a of the mask 20. As a result, a plurality of alignment-processed photo-alignment films 7 a having a desired molecular direction arrangement at desired positions of the photo-alignment film 7 are formed in a multifaceted manner. Next, the optical compensation layer 8 and the polarizing plate 18 were provided on the other surface of the substrate 3. In this way, a multifaceted optical element 16A was produced.

  On the other hand, after the polarized light from the first polarizing element 2 is irradiated to the photo-alignment film 7 formed on one surface of the base material 3 without adjusting the rotation of the first polarizing element 2, the other surface of the base material 3 The optical compensation layer 8 and the polarizing plate 18 were provided on the substrate to produce a multi-faceted optical element as a comparative example.

(Base material and alignment film)
An alignment film 7 having a thickness of 600 mm was formed by flexographic printing on a glass substrate (1737 material, manufactured by Corning) as a base material 3 subjected to appropriate cleaning treatment. Next, the alignment film 7 was given uniaxial anisotropy by irradiating the alignment film 7 with polarized light of 5 J / cm ² depending on whether the present invention or the comparative example was used.

  In the present invention, a glass substrate is used as the base material 3, but the present invention is not limited to the glass substrate. A plastic substrate made of polycarbonate, polymethyl methacrylate, polyethylene terephthalate, triacetyl cellulose, or the like may be used as the base material 3, and a film of polyethersulfone, polysulfone, polyproprene, polyimide, polyamideimide, polyetherketone, or the like may be used. It can also be used.

(Formation of optical compensation layer)
As described above, the optical compensation layer 8 has a multilayer structure including the photo-alignment film 8a and the liquid crystal layers 8b and 8c. Among these, the photo-alignment film 8a is produced as follows.

Preparation of ink RMM34 (manufactured by Merck) having an acrylate group that can be cured by ultraviolet irradiation was used as a liquid crystal material. 20 parts by weight of RMM34 was dissolved in propylene glycol monomethyl ether acetate as a solvent to obtain a retardation layer ink.

Optical alignment film 8a of optical compensation layer
The adjusted ink was applied onto the substrate 8d using a spin coating method. In this embodiment, the spin coating method is applied. However, the present invention is not limited to this as long as it can be uniformly applied on the substrate 8d, and die coating, slit coating, and a combination thereof may be used. Well, not particularly limited.

  Subsequently, the base material 8d coated with the adjustment ink was heated on a hot plate at 100 ° C. for 5 minutes to remove the residual solvent and develop a liquid crystal structure. Ultraviolet irradiation was performed (500 mJ / cm 2, 365 nm), the liquid crystal structure was fixed, and the alignment film 8 a of the optical compensation layer 8 was formed.

(Measurement)
The deviation of the transmission axis of the optical element according to the present invention obtained as described above and the optical element as a comparative example was measured using an Apec Sgoniophotometer (an automatic variable photometer measuring device). Specifically, this measurement method measures the transmission intensity when a sample is rotated between two T-shaped polarizers.

  As a result, the optical element produced according to the present invention hardly showed any deviation of the transmission axis.

  In the above embodiment, alignment is performed by irradiating the alignment film 7 formed on one surface of the substrate 3 with light using the optical element manufacturing apparatus 10 for a liquid crystal display device according to the present invention. The example in which the film 7 has a desired molecular orientation has been described.

  However, the optical alignment film 8a is formed on the base material 8d of the optical compensation layer 8 by using the optical element manufacturing apparatus 10 for a liquid crystal display device, and light is applied to the optical alignment film 8a. The photo-alignment film 8a may have a desired molecular orientation.

  Moreover, although the example which gave the desired molecular direction arrangement | sequence with respect to the photo-alignment film 7 by irradiating light with respect to the photo-alignment film 7 formed in the one surface of the base material 3 was demonstrated. The photo-alignment film 7 may be formed on one surface via a color filter, and the photo-alignment film 7 may be irradiated with light to have a desired molecular orientation.

The figure which shows one Embodiment of the manufacturing apparatus of the optical element for liquid crystal display devices by this invention. Schematic which shows a liquid crystal display device. The top view which shows the effective irradiation area of polarized light. The top view which shows the arrangement | positioning relationship between the effective irradiation area of polarized light, and a base material. The top view which forms the alignment processing completed alignment film located in a line with the X direction on the base material. The top view which forms the alignment-processed alignment film lined up in the Y direction on the base material. The top view which forms the alignment-processed alignment film lined up in the X direction and the Y direction on the base material. The top view which forms the alignment-processed alignment film lined up in the X direction and the Y direction on the base material. The figure which shows axial distribution within the effective irradiation area of polarized light.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 2 1st polarizing element 3 Base material 4 Stage 4a Stage drive part 5 2nd polarizing element 6 Light receiver 7 Optical alignment film 7a Alignment-processed photo-alignment film 8 Optical compensation layer 9 Drive control part 10 Optical element manufacturing apparatus 15 Liquid crystal display device 16 Optical element 16a Multi-faceted optical element 20 Mask 20a Aperture 21 Effective irradiation area 21a Central area

Claims (4)

A stage on which a substrate on which a photo-alignment film containing a photo-alignment material is formed is placed;
A light source disposed above the stage and irradiating light;
A polarizing element that converts light from a light source into polarized light and irradiates the photo-alignment film of the base material on the stage with this polarized light, thereby causing the alignment film to have a desired molecular orientation.
A mask having an aperture disposed between the stage and the polarizing element;
The center of the mask opening coincides with the center of the polarized light from the polarizing element,
The stage is moved relative to the opening of the mask by the stage drive unit, and a plurality of alignment-processed photo-alignment films are formed at a desired position of the base material on the stage by multi-faceting ,
On the stage side, an additional polarizing element is provided on which the polarized light transmitted through the photo-alignment film and the base material arrives, and a light receiver is provided on the back surface of the additional polarizing element.
Connect the drive control unit that rotates the polarizing element to the receiver,
The drive control unit rotates the polarizing element based on a signal from the light receiver so that the angle difference between the transmission axis of the polarizing element and the transmission axis of the additional polarizing element has a predetermined value. Equipment for manufacturing optical elements for equipment. The drive control unit and the transmission axis of the polarizing element, a liquid crystal display device for an optical element according to claim 1, wherein the angular difference is equal to or rotating the polarizing element so as to be 90 ° between the transmission axis of the additional polarizing element Manufacturing equipment. The drive control unit and the transmission axis of the polarizing element, a liquid crystal display device for an optical element according to claim 1, wherein the angular difference is equal to or rotating the polarizing element so that a 0 ° between the transmission axis of the additional polarizing element Manufacturing equipment. Add polarizing element to the stage, an apparatus for manufacturing a liquid crystal display device for an optical element according to claim 1, wherein the rotatably mounted.

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