JP2010091906A - Method for manufacturing electro-optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To appropriately perform optical alignment treatment of a liquid crystal device in which various aligning directions of the liquid crystal exist in a pixel. <P>SOLUTION: In a method for manufacturing an electro-optical device, light from a light source 32 is made incident on a wire grid polarizer 42, and a plate-shaped member W having an alignment layer is irradiated with linearly polarized light emitted from the wire grid polarizer 42 and is subjected to the optical alignment treatment, wherein the light source 32 defines a longitudinal direction, the wire grid polarizer 42 has: a first region 51 including a wire grid 41 disposed so as to be adjacent to the longitudinal direction and extending to a first direction; and a second region 52 including the wire grid 41 extending to a second direction different from the first direction, and the optical alignment treatment is achieved by irradiating regions on the plate-shaped member W different from each other with each of: first polarized light emitted from the first region 51 of the wire grid polarizer 42; and second polarized light emitted from the second region 52 of the wire grid polarizer 42 simultaneously. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a method for manufacturing an electro-optical device.

A liquid crystal device as one of the electro-optical devices includes a pair of substrates bonded together with a sealant, and a liquid crystal layer sealed between the pair of substrates. An alignment film for aligning liquid crystal molecules contained in the liquid crystal layer in a predetermined direction is formed on the surface of the pair of substrates on the liquid crystal layer side. As an alignment treatment method for such an alignment film, in recent years, photo-alignment in which alignment treatment is performed by exposing polarized light to a photo-alignment material has attracted attention (for example, Patent Document 1).

As one of such optical alignment methods, there is a method of irradiating an alignment film with light irradiated from a long arc type, that is, a fluorescent lamp type (long) light source (for example, Patent Document 2).
By transporting the substrate on which the alignment film is formed under the above-described light source, alignment processing of a large-area alignment film can be performed efficiently.

JP 2004-347668 A JP 2006-126464 A

However, the alignment method using the apparatus having the above-described configuration is not suitable for forming an alignment in a direction orthogonal to the conveyance direction, and high accuracy cannot be expected. Therefore, there is a problem that alignment processing cannot be suitably performed in a liquid crystal device in which the alignment directions of liquid crystals are different within a pixel, such as a horizontal electric field type transflective liquid crystal device whose market is expanding in recent years.

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

[Application Example 1] An alignment film placed on the transport surface of the transport means, which has the light irradiated from the light source incident on the wire grid polarizer, and the linearly polarized light emitted from the wire grid polarizer is placed on the transport surface. An electro-optical device manufacturing method for performing optical alignment processing by irradiating a plate-like member, wherein the light source has a longitudinal direction and irradiates light, and the wire grid polarizer is adjacent to the longitudinal direction. A first region having a wire grid extending in a first direction and a second region having a wire grid extending in a second direction different from the first direction. And a first output from the first region of the wire grid polarizer.
And the second polarized light having a polarization direction different from the first polarized light emitted from the second region of the wire grid polarizer, respectively, on the plate member having the alignment film. A method of manufacturing an electro-optical device, wherein the region is simultaneously irradiated to perform photo-alignment processing.

With such a manufacturing method, it is possible to form orientations in directions different from each other for each minute region adjacent in the pixel region. Accordingly, it is possible to reduce the manufacturing cost of the liquid crystal device in which the alignment direction of the liquid crystal is different in the pixel region.

Application Example 2 In the above-described manufacturing method, the wire grid polarizer is a first in which a wire grid extending in the first direction is selectively provided corresponding to the first region. A wire grid polarizer and a second wire grid overlaid on the first wire grid polarizer and selectively provided in correspondence with the second region, the wire grid extending in the second direction. A method for manufacturing an electro-optical device, comprising: a polarizer.

With such a configuration, it is only necessary to form wire grids in the same direction on the individual wire grid polarizers. Therefore, according to such a manufacturing method, alignments in different directions can be formed for each further finer region adjacent in the pixel region, and the manufacturing cost of a liquid crystal device with high display quality can be reduced.

Application Example 3 In the above-described manufacturing method, in the wire grid polarizer, the first region and the second region are arranged on the same substrate. Production method.

With such a configuration, the configuration of the wire grid polarizer can be simplified. Therefore, the manufacturing cost of the electro-optical device can be reduced.

Application Example 4 Light irradiated from a light source is incident on a wire grid polarizer, and linearly polarized light emitted from the wire grid polarizer is placed on a transport surface of a transport unit via a modulation element. A method of manufacturing an electro-optical device that performs optical alignment processing by irradiating a plate-like member having an alignment film, wherein the light source has a longitudinal direction and irradiates light, and the modulation element has the longitudinal direction. A first region having a different birefringence and a second region arranged adjacent to each other, the first polarized light emitted from the first region of the modulation element, and the modulation The first polarized light emitted from the second region of the element and the second polarized light having a different polarization direction,
A method of manufacturing an electro-optical device, wherein a light alignment process is performed by simultaneously irradiating different regions on the plate-like member having the alignment film.

With such a manufacturing method, it is possible to form orientations in directions different from each other for each minute region adjacent in the pixel region. Accordingly, it is possible to reduce the manufacturing cost of the liquid crystal device in which the alignment direction of the liquid crystal is different in the pixel region.

Application Example 5 In the above-described electro-optical device manufacturing method, the modulation element includes a phase in which the first region has optical isotropy and the second region has birefringence. A modulation element that emits polarized light that has passed through the wire grid polarizer as the first polarized light without changing the polarization direction in the first region, and changes the polarization direction in the second region; A method for manufacturing an electro-optical device, wherein the light is emitted as two polarized light beams.

With such a modulation element, the polarization direction can be changed without electrical control. Therefore, with such a manufacturing method, it is possible to further reduce the manufacturing cost of the liquid crystal device in which the alignment direction of the liquid crystal is different for each minute region adjacent in the pixel region.

Application Example 6 In the above-described electro-optical device manufacturing method, the region having birefringence is formed by curing a polymerizable liquid crystal.

When the polymerizable liquid crystal is subjected to thermal patterning, a region having birefringence and a region having optical isotropy can be formed at a fine pitch. Therefore, according to such a manufacturing method, alignments in different directions can be formed for each further finer region adjacent in the pixel region, and the manufacturing cost of a liquid crystal device with high display quality can be reduced.

Application Example 7 In the above-described method for manufacturing an electro-optical device, the modulation element includes a first substrate, a second substrate bonded to the first substrate via a sealing material, and the first substrate. A liquid crystal element comprising: a liquid crystal layer filled in a region surrounded by the sealing material between one substrate and the second substrate; and an electrode for applying a voltage to the liquid crystal layer. By changing the orientation state of the layer for each region adjacent to the longitudinal direction, polarized light with different polarization directions,
A method of manufacturing an electro-optical device, wherein a light alignment process is performed by simultaneously irradiating different regions on the plate-like member having the alignment film.

If it is a liquid crystal element as a modulation element of such a structure, the above-mentioned polarization direction can be easily changed by selection of the electrode which applies the above-mentioned voltage. Therefore, alignment processing of a wide variety of liquid crystal devices can be performed using the same modulation element, and the manufacturing cost can be further reduced.

Hereinafter, a liquid crystal device and a method for manufacturing the liquid crystal device will be described with reference to the drawings. In each figure shown below, in order to make each component large enough to be recognized on the drawing,
The dimensions and ratios of the components are appropriately changed from the actual ones.

(First embodiment)
FIG. 1 is a diagram schematically illustrating a configuration of a liquid crystal device that is a target of the manufacturing method of the present embodiment.
FIG. 1A is a perspective view of the liquid crystal device 1, and FIG. 1B is a cross-sectional view taken along line AA ′ in FIG. The liquid crystal device 1 is an FFS (Fringe-Field Switching) type transflective liquid crystal device, which is one of the transverse electric field methods, and an element substrate 10 and a counter substrate 10 which are bonded to each other via a frame-shaped seal material 14. A substrate 11 is provided. Both of the above substrates need to be transparent and are made of glass or quartz.

A liquid crystal layer 55 is sealed in a space surrounded by the element substrate 10, the counter substrate 11, and the sealing material 14. A first polarizing plate 47 is disposed on the surface of the element substrate 10 opposite to the liquid crystal layer 55, and a second polarizing plate 48 is disposed on the surface of the counter substrate 11 opposite to the liquid crystal layer 55. Is arranged. The element substrate 10 is larger than the counter substrate 11 and is bonded in a state where a part of the element substrate 10 protrudes from the counter substrate 11. A driver IC 15 for driving the liquid crystal layer 55 is mounted on the protruding portion.

A first alignment film 57 a is formed on the surface of the element substrate 10 on the liquid crystal layer 55 side, and a second alignment film 57 b is formed on the surface of the counter substrate 11 on the liquid crystal layer 55 side. Therefore, the liquid crystal layer 55 is sandwiched between the pair of alignment films described above, and the initial alignment state is defined by the alignment films. Pixels 26 (see FIG. 3 and the like) to be described later are regularly formed in the image forming area 100. Note that the pixel 26 has both a planar concept indicating a light emitting region and a functional concept including components such as a pixel electrode described later.

The liquid crystal device 1 is an active matrix type liquid crystal device, and each pixel is driven by a TFT (thin film transistor) 20 (see FIG. 3 and the like) as a switching element, and the alignment state of the liquid crystal in the pixel portion changes, whereby an image is displayed. An image is formed in the formation area 100. The manufacturing method according to the present embodiment provides the alignment regulating force along the vibration direction of the polarized light by irradiating the thin film made of the photo-alignment material with the linearly polarized ultraviolet rays in the above-described pair of alignment film forming steps. It is related with the process to perform.

FIG. 2 is a circuit configuration diagram of the liquid crystal device 1. In each of the plurality of pixels 26 regularly arranged in the image forming region 100 of the liquid crystal device 1, a pixel electrode 21, a common electrode 22, and a TFT 20 for controlling switching of the pixel electrode 21 are formed. The common electrode 22 is electrically connected to the common line 106 extending from the scanning line driving circuit 112, and is held at a common potential between all the pixels 26, that is, the entire image forming region 100. In addition, the alphabet attached to the pixel 26 is a color of a color filter, which will be described later, included in each pixel.

A data line 104 extending from the data line driving circuit 114 is electrically connected to the source electrode of the TFT 20. Here, the extending direction of the data line 104 is defined as the Y direction. The data line driving circuit 114 sends the image signals S1, S2,..., Sn to each pixel 2 via the data line 104.
6 is supplied.

A scanning line 102 extending from the scanning line driving circuit 112 is electrically connected to the gate electrode of the TFT 20. Here, the extending direction of the scanning line 102 is defined as the X direction. A scanning signal G that is supplied from the scanning line driving circuit 112 to the scanning line 102 in a pulse manner at a predetermined timing.
1, G2,..., Gm are applied to the gate electrode of the TFT 20 in this order in a line sequential manner. The pixel electrode 21 is electrically connected to the drain electrode of the TFT 20. The TFT 20 serving as a switching element is turned on for a certain period by the input of scanning signals G1, G2,..., Gm, so that the image signals S1, S2,. Writing is performed on the pixel electrode 21. Image signals S1, S2,..., Sn written to the liquid crystal through the pixel electrode 21 are transmitted between the pixel electrode 21 and the common electrode 22 facing each other through the liquid crystal layer 55 (see FIG. 1B). Held for a certain period of time.

FIG. 3 is a diagram schematically showing a configuration on the surface on the liquid crystal layer 55 side of the element substrate 10 of the liquid crystal device 1 of the present embodiment. As shown in the drawing, each pixel 26 has a pixel electrode 21 having a ladder-like planar shape (a shape in plan view) and a substantially rectangular common shape formed at a position substantially overlapping the pixel electrode 21 in a plan view. And an electrode 22. The pixel electrode 21 is connected to the TFT 20 via the contact hole 20c. Both the electrodes are formed so as to overlap in a plan view in a substantially rectangular frame formed by the scanning lines 102 and the data lines 104 formed so as to be substantially orthogonal to each other, and are electrically connected by an interlayer insulating layer (not shown). Is electrically insulated.

The TFT 20 is formed near the intersection of the scanning line 102 and the data line 104, and is electrically connected to the data line 104 and the pixel electrode 21. As described above, the extending direction of the scanning line 102 is the X direction, and the extending direction of the data line 104 is the Y direction.

A region where both the electrodes overlap is a pixel region that emits transmitted light or reflected light. Further, on the counter substrate 11 side of each pixel region, a color filter (not shown) corresponding to alphabet colors (B = blue, G = green, R = red) attached to the pixel 26 and each A light shielding layer (not shown) that shields light between the color filters is formed. As shown,
Each pixel region is divided into a reflective display region R and a transmissive display region T by a dividing line parallel to the scanning line 102. The transmissive display region T is a region that forms an image by transmitting light emitted from a backlight (not shown), and the reflective display region R is a region that forms an image by reflecting external light.

Note that the transmissive display region T and the reflective display region R described above are regions that are originally determined for each pixel region, but in this specification, the transmissive display region T and the reflective display region R are continuous in the extending direction of the scanning line 102 (that is, the light shielding layer forming region also includes Defined as a band-like region. The reason is that, as will be described later, the manufacturing method of the present embodiment is related to a method of forming an alignment film oriented in different directions in both the display areas. This is because it is formed over at least the entire image forming region 100 so as to overlap, and the photo-alignment process is continuously performed along the extending direction of the scanning line 102.

The pixel electrode 21 is made of a transparent conductive material such as ITO (indium oxide / tin alloy), and has a slit 23 and a belt-like portion 24 that is a region between the slits. The strip and the common electrode 22
The orientation direction of the liquid crystal molecules contained in the liquid crystal layer 55 is controlled by the electric field formed between the two.

The common electrode 22 is made of a transparent conductive material such as ITO, and corresponds to the transmissive display region T. The reflective common electrode 22t is made of a metal material having light reflectivity such as aluminum or silver and corresponds to the reflective display region R. 22r. Transparent common electrode 22t and reflective common electrode 22
r are electrically connected to each other at their ends. In the present embodiment, the reflective common electrode 2
2r is formed integrally with a common line 106 extending in parallel with the scanning line 102. Therefore, the common electrode 22 composed of the transparent common electrode 22t and the reflective common electrode 22r is electrically connected to the common line 106.

The alignment direction (alignment regulating direction) of the alignment film (the pair of alignment films) in the transmissive display region T is a direction having an angle from the same direction (0 degree) to 7 degrees as the extending direction of the scanning line 102. In the following description, the angle is the same (0 degree) as the extending direction. Therefore, when no voltage is applied (a voltage is not applied between the pixel electrode 21 and the common electrode 22), the liquid crystal molecules LCt in the region are aligned in a direction substantially parallel to the scanning line 102. On the other hand, the alignment direction of the alignment film in the reflective display region R is a direction having an angle of approximately 45 degrees counterclockwise with respect to the extending direction of the scanning line 102. The angle is also a value having a predetermined width, but in the following description, 45
Described as a degree. Accordingly, when no voltage is applied, the liquid crystal molecules LCr in the region are scanned line 1
Oriented in the direction of 45 degrees with respect to 02.

If a voltage is applied between the pair of electrodes, the liquid crystal molecules LC (LCr and LCr
Ct) rotates in accordance with the magnitude of the applied voltage. An image is formed in the image forming region 100 by emitting transmitted light or reflected light at a ratio corresponding to the rotation angle for each pixel 26. Note that, as described above, the liquid crystal device 1 is a lateral electric field type liquid crystal device, and the alignment direction of the first alignment film 57a and the alignment direction of the second alignment film 57b in both the regions are the same.

FIG. 4 is a diagram showing the arrangement of two types of display areas on the substrate. FIG. 4A is a diagram showing the arrangement of the pixels 26 in the image forming region 100 of the element substrate 10 and the counter substrate 11. As shown in the drawing, the image forming region 100 of the element substrate 10 and the counter substrate 11 has a pixel 26 (
R, G, B) are regularly formed. Each pixel 26 has a transmissive display region T and a reflective display region R adjacent in the Y direction. Therefore, in the image forming region 100, the transmissive display region T and the reflective display region R adjacent in the Y direction extend in a strip shape in the X direction.

FIG. 4B shows a mother substrate W as a plate-like member used when the liquid crystal device 1 is manufactured.
FIG. The mother substrate W is an assembly of the element substrate 10 or the counter substrate 11 described above. In the liquid crystal device 1, the element substrate 10 and the counter substrate 11 are separately formed on such a large-area substrate (mother substrate W) and bonded through the sealing material 14.
Individual liquid crystal devices 1 are obtained. Therefore, the above-described photo-alignment processing of the pair of alignment films is performed collectively on the alignment film formed on the whole mother substrate W. The film before the photo-alignment treatment is not originally an alignment film, but in the following description, a film made of a polymer material before the photo-alignment treatment is also called an alignment film.

Specifically, using a long light source extending in the X direction, irradiation of ultraviolet rays that vibrate substantially parallel to the extending direction (X direction) of the scanning line with respect to the transmissive display region T, and the reflective display region R Are simultaneously irradiated with ultraviolet rays oscillating in a direction of approximately 45 degrees with respect to the direction in which the scanning line extends, and the width of the pixel 26 in the Y direction (several μm to several hundreds μm) is approximately half the width of Y. Two types of alignment regions extending in the direction and having different alignment directions are formed at the same time.
Note that the region between the pixels 26 adjacent to each other in the Y direction in FIG. 3 does not need to be provided with orientation, but in this specification, it is described that the region is also provided with orientation.

FIG. 5 is a diagram showing a photo-alignment processing method common to the present embodiment and second to fourth embodiments to be described later, and is viewed from the longitudinal direction 33 (see FIG. 6) of the elongated light source 32. FIG. Moreover, it is a figure which shows the apparatus used for this photo-alignment processing method. FIG. 6 is a perspective view schematically showing a photo-alignment processing method as a method for manufacturing the electro-optical device according to the present embodiment. Irradiation light 39 and wire grid polarizer 42 irradiated from the light source 32, the condensing mirror 36, and the light source 32
The condensing lens 34 and the mother substrate W are illustrated, and the conveying means 38 (see FIG. 5) is not shown. Hereinafter, description will be made with reference to both the above-mentioned drawings.

As shown in FIGS. 5 and 6, the apparatus used in the photo-alignment processing method of the present embodiment is a light source 32.
A condenser mirror 36, a wire grid polarizer 42, a condenser lens 34, and a conveying means 38. The light source 32 is a light source that emits ultraviolet rays for performing photo-alignment processing.
As shown in FIG. 6, it has a long shape, that is, a rod shape having a central axis. The direction of the central axis is the longitudinal direction 33. As illustrated, the longitudinal direction is substantially the same as the Y direction.
The “longitudinal direction” is a concept applied to other components such as the wire grid polarizer 42. The condensing mirror 36 has a long shape having at least a length (dimension in the longitudinal direction) equal to that of the light source 32. It is located so as to cover the opposite side of the light source 32 to the conveying means 38 side, and most of the light emitted from the light source 32 to the surroundings is reflected in the direction of the wire grid polarizer 42 and condensed.

The light source 32 and the condenser mirror 36 have a positional relationship such that the central axis of the light source 32 substantially coincides with the first focal point of the condenser mirror 36. The light emitted from the light source 32 is collected by the condensing mirror 36, converted into linearly polarized light by the wire grid polarizer 42, condensed by the condensing lens 34, and irradiated to the mother substrate W conveyed by the conveying means 38. ing. The condensing lens 34 is not essential, and it is possible to irradiate the mother substrate W at the second focal point of the condensing mirror 36. However, since this method leads to an increase in the size of the apparatus, it is preferable to use the condenser lens 34. In addition, since the condensing mirror 36 is elongate, the focal point is also a straight line continuous in the longitudinal direction. However, in the sectional view perpendicular to the longitudinal direction, it can be illustrated by “points”. Indicated as “focus”.

The condensing lens 34 is a long plano-convex lens positioned between the light source 32 and the conveying means 38. Mother substrate W is obtained by focusing linearly polarized light transmitted through the wire grid polarizer only in the X direction.
It is possible to irradiate a region extending in the Y direction and having a narrow width (in the X direction). In addition, the aspect of a condensing lens is not limited to a plano-convex lens, A biconvex lens etc. can also be used.

The transport means 38 has a function of transporting the mother substrate W as a plate-shaped member at an arbitrary speed in the transport direction indicated by an arrow, that is, the X direction, with the alignment film of the mother substrate as the light source 32 side. As described above, the light source 32 and the like have a long shape having a central axis, and the central axes are parallel to each other and along the Y direction. The transport means 38 is set so that the transport surface, that is, the substrate surface of the mother substrate W to be transported is parallel to the above-described central axis.

The wire grid polarizer 42 has a long shape, and is disposed between the light source 32 and the condenser lens 34 (
The central axis (of the wire grid polarizer) is positioned so as to be parallel to the central axis of the light source 32 and the like. And the irradiation light 39 which is the natural light (light with which the vibration direction is randomly distributed) irradiated from the light source is changed into linearly polarized light that vibrates in a predetermined direction. In the following description, the irradiation light 39 includes both natural light before passing through the wire grid polarizer 42 and linearly polarized light after passing through the wire grid polarizer 42.

As illustrated, the wire grid polarizer 42 has first regions 51 and second regions 52 that are rectangular regions alternately adjacent to each other in the longitudinal direction. Here, “adjacent” means that they are lined up without overlapping each other and without a gap. First region 51
Is an area corresponding to the transmissive display area T (see FIG. 4) of the mother substrate W. Second region 52
Is an area corresponding to the reflective display area R (see FIG. 4) of the mother substrate W.

The first region 51 and the second region 52 can simultaneously form a first polarized light (first linearly polarized light) and a second polarized light (second linearly polarized light) having different vibration directions. Therefore, according to the method of manufacturing the electro-optical device according to the present embodiment, by using the wire grid polarizer 42, the alignment film of the mother substrate W can be simultaneously subjected to the optical alignment processing in different directions for each region. it can. Specifically, the alignment process in the extending direction of the scanning line 102 necessary for the transmissive display region T, that is, the X direction, and the extending direction of the scanning line 102 necessary for the reflective display region R, that is, 45 degrees with respect to the X direction. Directional orientation treatment can be performed simultaneously.

Here, the configuration of the wire grid polarizer 42 will be described. FIG. 7 is a diagram showing a configuration of a general wire grid polarizer. FIG. 7A is a schematic perspective view of a wire grid polarizer, and FIG. 7B is a cross-sectional view of the wire grid polarizer on a plane perpendicular to the extending direction of the wire grid.

The wire grid polarizer 42 is made of a transparent substrate 53 made of glass, quartz, or the like, and a metal body (thin metal wire) having a common width and height arranged in parallel on the transparent substrate with a predetermined pitch. In the following description, this metal body is referred to as a wire grid 41. The wire grid 41 is formed by photolithography using a metal film formed on the transparent substrate 53 using interference exposure. The pitch of each wire grid 41 is not more than the wavelength of the irradiated light, desirably not more than 1/3. The material for forming the wire grid 41 is preferably Al (aluminum) or Ag (silver) having a high reflectance.

The wire grid polarizer 42 having such a structure has a property of polarizing and separating light irradiated from above, that is, light traveling from the wire grid 41 toward the transparent substrate 53. Specifically, when light having a wavelength smaller than the above-described pitch, width, and height is irradiated from above in the figure, among the vibration components constituting the light, the longitudinal direction of the wire grid 41 (extends) The polarization component parallel to the direction) is reflected, and the polarization component orthogonal to the longitudinal direction of the metal body is transmitted. Therefore, natural light can be converted into linearly polarized light.

FIG. 8 is a diagram showing a wire grid polarizer 42 used in the present embodiment. FIG.
a) is a schematic plan view of a first wire grid polarizer 42a and a second wire grid polarizer 42b constituting the wire grid polarizer 42, FIG. 8B is a schematic perspective view of the wire grid polarizer 42, FIG. 8C is a schematic cross-sectional view of the wire grid polarizer 42 on the YZ plane.

As shown in FIG. 8B, the wire grid polarizer 42 includes two wire grid polarizers, that is, a first wire grid polarizer 42 a and a second wire grid polarizer 4.
And 2b are stacked so as to have a slight gap. In the following description, the wire grid polarizer 42 is also used as a general term for the two wire grid polarizers (a, b).

As shown in FIG. 8A, the first wire grid polarizer 42 a extends to the first region 51 on the transparent substrate 53 in the Y direction (that is, the direction orthogonal to the scanning line 102). It has. And the 2nd wire grid polarizer 42b is transparent substrate 5
3 is provided with a wire grid 41 extending in a direction of approximately 45 degrees counterclockwise with respect to the Y direction. The Y direction is the first direction, and a direction of approximately 45 degrees counterclockwise with respect to the Y direction is the second direction.

As described above, the first region 51 is a region corresponding to the transmissive display region T in the Y direction, and the second region 52 is a region corresponding to the reflective display region R in the Y direction. And as shown in FIG.8 (c), the 1st area | region 51 and the 2nd area | region 52 are alternately and complementarily formed in the longitudinal direction of the wire grid polarizer 42 by planar view. Therefore, when the 1st wire grid polarizer 42a and the 2nd wire grid polarizer 42b are piled up, the 1st field 51 and the 2nd field 52 do not overlap each other in plane view, and are spaced apart. It is arranged not to have.

With this arrangement, the irradiation light 39 applied to the wire grid polarizer 42 passes through either the first region 51 or the second region 52 as shown in the figure. That is, it transmits the wire grid 41 provided with either the first wire grid polarizer 42a or the second wire grid polarizer 42b. Then, it becomes linearly polarized light that vibrates in a direction orthogonal to the extending direction of the wire grid 41 formed in any of the above-described regions, and is irradiated onto the mother substrate W. Specifically, the irradiation light 39 transmitted through the wire grid 41 provided in the first wire grid polarizer 42a becomes the first linearly polarized light that vibrates in the X direction, and the wire grid provided in the second wire grid polarizer 42b. The irradiation light 39 transmitted through 41 is X
The second linearly polarized light that vibrates in a direction of 45 degrees with respect to the direction is applied to the mother substrate W at the same time.

The direction of the arrow shown in the condensing lens 34 in FIG. 6 is the vibration direction described above. The vibration direction coincides with the initial alignment direction of the liquid crystal molecules LC in the transmissive display region T and the reflective display region R shown in FIG. Accordingly, the mother substrate W is irradiated with ultraviolet rays from the light source 32 (see FIG. 5).
(In the direction of the arrow), the alignment film (first film) in the transmissive display region T of each pixel 26 included in each substrate (element substrate 10 or counter substrate 11) arranged in a matrix on the mother substrate W. The alignment film 57a or the second alignment film 57b) is subjected to a photo-alignment process in the extending direction of the scanning line 102, and the alignment film in the reflective display region R is opposite to the extending direction of the scanning line 102. A photo-alignment process in the direction of approximately 45 degrees in the clockwise direction is simultaneously performed. Therefore, according to the manufacturing method according to the present embodiment, a liquid crystal device having the alignment film 57 aligned in different directions in the transmissive display region T and the reflective display region R in the pixel 26 can be obtained.

As described above, the pixel size of a general liquid crystal device is several μm to several 100 μm. Therefore, when the rubbing method is used, it is difficult to obtain a liquid crystal device having the alignment film 57 aligned in different directions within the pixel 26. According to the manufacturing method of the liquid crystal device of the present embodiment, light (ultraviolet rays) whose vibration direction is changed in the longitudinal direction at a fine pitch can be irradiated at the same time. A liquid crystal device having alignment films with different alignment directions in T and the reflective display region R can be obtained while suppressing an increase in manufacturing cost.

Moreover, the manufacturing method of this embodiment also irradiates light in which the fine vibration direction is switched at a fine pitch because the wire grid polarizer 42 is formed by overlapping two wire grid polarizers 42 (a, b). It contributes to doing. As described above, since the wire grid 41 is formed using interference exposure, the manufacturing cost (of the polarizer) is required in order to form two or more wire grids 41 whose extending directions intersect on the same substrate. Can be increased. Since the wire grid polarizer 42 used in this embodiment does not intersect with the wire grid 41 formed on each transparent substrate 53, a general method for manufacturing a wire grid polarizer can be applied as it is. Is preferred.
Note that the two wire grid polarizers 42 (a
, B) may be stacked (so as not to be spaced) or may be spaced apart.

(Second Embodiment)
Next, a second embodiment will be described. FIG. 9 is a diagram schematically showing a wire grid polarizer 42 used in the manufacturing method according to the second embodiment. The liquid crystal device that is the object of the manufacturing method according to the present embodiment is the same as the liquid crystal device 1 shown in FIGS. Then, similarly to the first embodiment, the mother substrate W shown in FIG. 4 is irradiated with polarized light. Further, the apparatus used for irradiation of polarized light used is substantially the same as the apparatus shown in FIG. 5, and the mother substrate W is transported and the photo-alignment process is performed as shown in FIG. The only difference is the wire grid polarizer 42. Therefore, the manufacturing method of this embodiment will be described using only the wire grid polarizer 42 shown in FIG.

FIG. 9 is a diagram showing a wire grid polarizer 42 used in the manufacturing method according to the second embodiment. 9A is a plan view, and FIG. 9B is a cross-sectional view taken along the line BB ′ in FIG. 9A. As shown in FIG. 9A, in the wire grid polarizer 42 according to the present embodiment, wire grids 41 having different extending directions are formed on a single transparent substrate 53. The wire grid 41 is formed in each of the first region 51 and the second region 52 alternately divided in the Y direction of the transparent substrate 53, that is, in the direction orthogonal to the extending direction of the scanning line 102 during the photo-alignment process. Yes. Here, “alternate” means the first region 51 and the second region 5 in the first embodiment.
As in 2, it is said that they are arranged so as not to overlap each other and to have no gap. Therefore, the irradiation light 39 (see FIG. 5) irradiated to the wire grid polarizer 42 according to the present embodiment by the light source 32 (see FIG. 5) is one of the first region 51 and the second region 52. Transparent.

Here, the extending direction of the wire grid 41 included in the wire grid polarizer 42 is the same as that of the wire grid polarizer 42 of the first embodiment described above. That is, the extending direction of the wire grid 41 formed in the first region 51 is the Y direction (that is, the direction orthogonal to the scanning line 102), and the extending direction of the wire grid 41 formed in the second region 52 is The direction is approximately 45 degrees counterclockwise with respect to the Y direction. Therefore, the irradiation light 39 transmitted through the first region 51 becomes the first linearly polarized light that vibrates in the X direction, and the irradiation light 39 transmitted through the second region 52 vibrates in a direction of 45 degrees with respect to the X direction. The second linearly polarized light is applied to the mother substrate W at the same time.

As a result, as in the case of using the wire grid polarizer 42 according to the first embodiment, the optical alignment process in the extending direction of the scanning line 102 with respect to the alignment film in the transmissive display region T of the pixel 26 and the reflective display region A photo-alignment process in the direction of approximately 45 degrees counterclockwise with respect to the extending direction of the scanning line 102 with respect to the alignment film in R is simultaneously performed. Therefore, according to the manufacturing method according to the present embodiment, a liquid crystal device having the alignment film 57 aligned in different directions in the transmissive display region T and the reflective display region R in the pixel 26 can be obtained.

(Third embodiment)
Next, a third embodiment will be described with reference to FIGS. FIG. 10 is a diagram corresponding to FIG. 6 used in the first embodiment, and is a perspective view schematically showing a photo-alignment processing method according to the present embodiment and a fourth embodiment described later. Similar to FIG. 6, the light source 32 and the condenser 3
6, irradiation light 39 emitted from the light source 32, wire grid polarizer 42, and condenser lens 34.
And the mother substrate W are illustrated. Although not shown, the transfer means is provided with a transfer means similar to the transfer means 38 shown in FIG. 5, that is, a transfer means capable of transferring the mother substrate W in the X direction.
In addition, the liquid crystal device which is the object of the manufacturing method according to the present embodiment is the same as the liquid crystal device 1 shown in FIGS. The element substrate 10 and the counter substrate 11 of the liquid crystal device 1 are the same as in the first embodiment in that they are formed in a matrix on the mother substrate W, respectively.

As shown in FIG. 10, the configuration of the light source 32, the condensing mirror 36, and the like are also similar to the photo-alignment processing method according to the first embodiment. That is, the light source 32 has a long shape having a longitudinal direction 33 that substantially coincides with the Y direction, and is located at the focal point (actually, a line in which the focal point continues in the Y direction) of the long condensing mirror 36. ing. Irradiation light 39 emitted from the light source 32 is collected in the direction of the mother substrate W by the condensing mirror 36, and then converted into two types of linearly polarized light having different vibration directions by an optical element 40 described later. It is squeezed in the X direction. And Y on the mother board W
An area extending in the direction and having a narrow width in the X direction is irradiated. The difference from the photo-alignment processing method according to the first embodiment is a means for forming different linearly polarized light for each of the transmissive display area T and the reflective display area R of the mother substrate W. In the manufacturing method according to the present embodiment, linearly polarized light that differs for each region is obtained by the optical element 40 that combines the wire grid polarizer 42 and the phase modulation element 45 as the modulation element. FIG. 11 schematically shows the configuration of the optical element 40.

FIG. 11A is a schematic plan view of the wire grid polarizer 42 in the present embodiment.
FIG. 11 (b) is a schematic plan view of the phase modulation element 45, and FIG. 11 (c) is a diagram of C in FIG. 11 (a).
It is a schematic cross section of the optical element 40 in the -C 'line. As shown in FIG. 11C, the optical element 40 used in this embodiment is a combination of a wire grid polarizer 42 and a phase modulation element 45 as a modulation element. In FIG. 11, the wire grid polarizer 42 and the phase modulation element 45 are illustrated as being stacked. However, as illustrated in FIG. 10, the wire grid polarizer 42 and the phase modulation element 45 may be arranged with an interval therebetween. However, the wire grid polarizer 42 needs to be positioned on the light source 32 side.

The wire grid polarizer 42 used in the present embodiment has the same configuration as that of the wire grid polarizer 42 used in the second embodiment described above, and includes a transparent substrate 53 and a wire grid 41 formed on the transparent substrate. It consists of and. However, the extending direction of the wire grid 41 is only the Y direction. Therefore, the wire grid polarizer 42 of this embodiment forms only a single linearly polarized light. In the optical element 40 according to the present embodiment, the first region 51 and the second region 52 (see FIG. 11B) are obtained by using the single linearly polarized light by the phase modulation element 45.
Different directions are linearly polarized light.

As shown in FIG. 11B, the phase modulation element 45 has a birefringent region (in plan view)
Hereinafter, it is referred to as a “birefringent region”. ) 61 and an optically isotropic region (hereinafter referred to as “isotropic region”) 62 are adjacent to each other in the Y direction. The isotropic region 62 is a region corresponding to the second region 52, and the isotropic region 62 is a region corresponding to the first region 51 described above.

As shown in FIG. 11C, the phase modulation element 45 is composed of a pair of transparent substrates 53 arranged opposite to each other with a sealant 14 interposed therebetween and a polymerizable liquid crystal layer (polymerizable liquid crystal) filled between the pair of transparent substrates. And a layer 56 in which the alignment state is fixed by curing the material with ultraviolet rays or the like. An alignment film (not shown) is formed between the transparent substrate 53 and the polymerizable liquid crystal layer 56. The alignment directions of the (pair of) alignment films are the same. The polymerizable liquid crystal layer is cured in a state of being oriented in a predetermined direction in the birefringent region 61 to form a birefringent layer 63, and is randomly oriented in the isotropic region 62. The isotropic layer 64 is hardened in the state.

The alignment for each region of the polymerizable liquid crystal layer is formed by thermal patterning. When a polymerizable liquid crystal material is filled between the pair of transparent substrates 53, the liquid crystal material is aligned along the alignment direction of the pair of alignment films. In this state, when only the birefringent region 61 is selectively irradiated with ultraviolet rays, the polymerizable liquid crystal material in the region is cured while maintaining the alignment state provided by the pair of alignment films, and the birefringent layer 63 and Become. Next, the filled polymerizable liquid crystal material is heated. Then, in spite of the alignment regulating force of the pair of alignment films, the polymerizable liquid crystal material in the uncured isotropic region 62 is randomly aligned. When the ultraviolet ray is irradiated again while maintaining this state, the isotropic layer 64 is formed in the isotropic region. The birefringent layer 63 and the isotropic layer 64 allow the phase modulation element 45 to generate linearly polarized light that vibrates in different directions in the two (two types) regions.

FIG. 12 is a diagram showing the orientation direction of the birefringent layer 63, the vibration direction of linearly polarized light obtained by the orientation, and the like. The four directions shown in FIG. 12 are the extending direction (that is, the Y direction) 81 of the wire grid 41 and the vibration direction 8 of the first linearly polarized light applied to the phase modulation element 45.
2, the alignment direction 83 of the polymerizable liquid crystal layer 56 in the birefringent layer 63, and the second linearly polarized light generated in the birefringent layer 63 (see FIG. 11) formed in the birefringent region 61. Vibration direction 84.

Since the extending direction 81 of the wire grid 41 is the Y direction as described above, the vibration direction 82 of the linearly polarized light applied to the phase modulation element 45 is the X direction. The alignment direction 83 of the polymerizable liquid crystal layer 56 is inclined 22.5 degrees with respect to the X direction, that is, 67.5 degrees with respect to the extending direction of the wire grid 41. Here, the alignment direction 83 of the polymerizable liquid crystal layer 56 is determined by the polymerizable liquid crystal layer 56.
It is also the alignment direction of the above-mentioned pair of alignment films that sandwich the film.

The layer thickness of the polymerizable liquid crystal layer 56 in the birefringent layer 63 is set so that the birefringence value Δn · d is λ / 2. Therefore, the vibration direction 84 of the second linearly polarized light generated in the birefringent layer 63 is 45 with respect to the vibration direction 82 of the linearly polarized light irradiated to the phase modulation element 45.
The direction has an angle of degrees.

As described above, the birefringent region 61 in which the birefringent layer 63 is formed has the optical element 40.
The second region is a region corresponding to the reflective display region R shown in FIG. Therefore, when the optical element 40 according to the present embodiment is used, the reflection display region R of the mother substrate W (see FIG. 4) has an angle of 45 degrees counterclockwise with respect to the X direction, that is, the extending direction of the scanning line 102. Can be formed.

On the other hand, the isotropic region 62 where the isotropic layer 64 is formed has the optical element 40 as described above.
The first region 51 is a region corresponding to the transmissive display region T shown in FIG. Further, the light irradiated to the isotropic layer 64 passes through the isotropic layer while maintaining the vibration direction in the initial state, that is, the X direction. Therefore, the first linearly polarized light generated in the isotropic region 62 is in the X direction.

As described above, the isotropic region 62 in which the isotropic layer 64 is formed has the optical element 40.
The first region 51 is a region corresponding to the transmissive display region T shown in FIG. Therefore, when the optical element 40 according to the present embodiment is used, an alignment in the X direction, that is, the extending direction of the scanning line 102 can be formed in the transmissive display region T of the mother substrate W (see FIG. 4).

As described above, the mother substrate W is a pair of substrates (element substrate 10) included in each liquid crystal device.
Alternatively, each of the counter substrates 11). Therefore, the optical element 4 according to the present embodiment.
When the alignment film 57 formed on the mother substrate W is subjected to a photo-alignment process using 0 as shown in FIG. 10, it is set at a fine pitch (several μm to several hundreds μm) in the Y direction of the alignment film. In addition, the orientations in the directions required for both the band-like transmissive display region T and the reflective display region R can be simultaneously formed.

The optical element 40 used in the manufacturing method according to the present embodiment has a function similar to that of the optical element 40 configured by only the wire grid polarizer 42 used in the first and second embodiments. And it is common in the point which can implement the orientation process of a different direction for every area | region divided by a fine pitch. However, since the extending direction of the wire grid 41 is single, the wire grid polarizer 42 can be easily formed.
Since the phase modulation element 45 can be formed using a normal photolithography method, fine patterning can be easily performed. Therefore, according to the manufacturing method according to the present embodiment, when manufacturing a liquid crystal device that requires alignment processing in different directions in a pixel, such as a transflective liquid crystal device, a higher-definition liquid crystal device is manufactured. it can.

(Fourth embodiment)
Next, a fourth embodiment will be described.
The liquid crystal device that is the target of the manufacturing method according to the present embodiment is the same as the liquid crystal device 1 shown in FIGS. 1 to 3 (as in the manufacturing method according to the third embodiment). The photo-alignment processing method according to this embodiment is substantially the same as the photo-alignment processing method according to the third embodiment shown in FIG. That is, the configuration and arrangement of the light source 32, the condensing lens 34, the condensing mirror 36, etc. are also shown in FIG.
This is similar to the photo-alignment processing method according to the third embodiment shown in FIG.

In the manufacturing method according to the present embodiment, the irradiation light 3 emitted from the light source 32 is configured as described above.
9 is two types of linearly polarized light having different vibration directions by the optical element 40. And
In the two regions on the mother substrate W adjacent to each other in the Y direction (the direction orthogonal to the extending direction of the scanning line 102), that is, the transmissive display region T and the reflective display region R (see FIG. 4), each linearly polarized light Is being irradiated. The difference from the photo-alignment processing method according to the third embodiment is only the configuration of the optical element 40. (Refer to FIG. 6 for each symbol.) Therefore, only the optical element 40 will be described for the method of manufacturing the electro-optical device according to this embodiment.

FIG. 13 is a diagram schematically showing an optical element 40 used in the manufacturing method according to the fourth embodiment. FIG. 13A is a diagram showing a region drive electrode 68 formed on the first transparent substrate 53a.
FIG. 13B is a diagram showing the common drive electrode 67 formed on the second transparent substrate 53b.
FIG. 13C is a cross-sectional view taken along the line DD ′ of FIG. 13A, and FIG.
2 is a diagram showing the alignment direction of an alignment film (not shown) formed on the liquid crystal layer (modulation element liquid crystal layer 49 to be described later) side of a pair of transparent substrates that constitutes the substrate.

The optical element 40 used in the manufacturing method of this embodiment is similar to the optical element 40 used in the above-described third embodiment. That is, the wire grid polarizer 42 and the modulation element are combined so that the wire grid polarizer 42 is positioned on the light source 32 (see FIG. 5) side. However, it differs from the method of manufacturing the electro-optical device according to the third embodiment described above in that the liquid crystal element 46 having a polarization modulation function is used as the modulation element.

As shown in FIG. 13C, the configuration of the wire grid polarizer 42 is the same as that of the wire grid polarizer 42 used in the third embodiment, and is formed on the transparent substrate 53 and the transparent substrate. The wire grid 41 extends in the Y direction. The wire grid polarizer 42 forms only a single linearly polarized light, and the single linearly polarized light is converted into the liquid crystal element 46.
The linearly polarized light in the different direction for each of the two regions (the first region 51 and the second region 52) (first
Linearly polarized light and second linearly polarized light).

As shown in FIG. 13C, the liquid crystal element 46 includes a pair of transparent substrates 53 including a first transparent substrate 53a and a second transparent substrate 53b that are bonded to face each other with the sealant 14 therebetween.
The modulation element liquid crystal layer 49 is a TN type liquid crystal layer sandwiched between the pair of transparent substrates, and a pair of electrodes formed on the modulation element liquid crystal layer 49 side of the pair of transparent substrates.

Of the pair of electrodes described above, the electrode formed on the first transparent substrate 53 a is the region drive electrode 68.
The electrode that faces the region driving electrode with the modulation element liquid crystal layer 49 interposed therebetween is the common driving electrode 67.
It is. The region drive electrode 68 is formed so as to correspond to each of the first region 51 and the second region 52 and at a slight distance from each other. Between both electrodes and the transparent substrate 53,
That is, an alignment film (not shown) is formed between the first transparent substrate 53 a and the region drive electrode 68 and between the second transparent substrate 53 b and the common drive electrode 67. The alignment direction of the pair of alignment films is shown in FIG. 13D together with the extending direction 81 of the wire grid 41 and the like.

As shown in FIG. 13D, the extending direction 81 of the wire grid 41 is the Y direction, and the vibration direction 85 of the linearly polarized light that is transmitted through the grid and irradiated on the liquid crystal element 46 is the X direction.
The alignment direction of the alignment film of the first transparent substrate 53a is the X direction, and the alignment direction of the alignment film of the second transparent substrate 53b is a direction inclined 45 degrees counterclockwise from the X direction. Therefore, the liquid crystal molecules contained in the modulation element liquid crystal layer 49 rotate 45 degrees counterclockwise when viewed from the wire grid polarizer 42 side when no voltage is applied between the pair of electrodes. Are oriented as follows. When linearly polarized light is irradiated onto the region of such orientation, the polarized light is emitted toward the condensing lens 34 with the vibration direction rotated 45 degrees counterclockwise. On the other hand, when a voltage is applied between the pair of electrodes described above, the liquid crystal molecules contained in the modulation element liquid crystal layer 49 are arranged in the Z direction, that is, perpendicular to the alignment film. The linearly polarized light irradiated to the region having such orientation is emitted toward the condenser lens 34 while maintaining the vibration direction in the initial state.

As described above, the region drive electrode 68 is formed (patterned) so as to correspond to each of the first region 51 and the second region 52. Therefore, a voltage is applied between the region drive electrode 68 and the common drive electrode 67 formed in the first region 51, and the region drive electrode 68 and the common drive electrode 67 formed in the second region 52 are connected. When the optical element 40 is irradiated with the irradiation light 39 from the light source 32 in a state where no voltage is applied to the optical element 40, the irradiation light 39 is irradiated toward the mother substrate W as follows.

First, the light transmitted through the first region 51 of the optical element 40 becomes the first linearly polarized light that maintains the vibration in the vibration direction before transmission, that is, in the X direction (that is, the extending direction of the scanning line 102). Is irradiated to the transmissive display area T of the mother substrate W. Then, the alignment film 57 (see FIG. 1B) formed in the transmissive display region on the surface of the mother substrate W on the light source 32 side is given an alignment in the X direction, that is, the extending direction of the scanning line 102. .

On the other hand, the light transmitted through the second region 52 of the optical element 40 becomes a second linearly polarized light having a vibration rotated 45 degrees counterclockwise from the vibration direction before transmission, that is, the X direction, and is a condensing lens. The reflective display area R of the mother substrate W is irradiated through the line 34. Then, the alignment film 57 formed in the reflective display region on the surface of the mother substrate W on the light source 32 side is opposite from the extending direction of the scanning line 102 toward the Y direction (that is, the extending direction of the data line 104). An orientation in a direction rotated 45 degrees clockwise is imparted.

As described above, the mother substrate W is a pair of substrates (element substrate 10) included in each liquid crystal device.
Alternatively, each of the counter substrates 11). Therefore, the optical element 4 according to the present embodiment.
When the alignment film formed on the mother substrate W was subjected to a photo-alignment process using 0, the pitch was set at a fine pitch (several μm to several hundreds μm) in the Y direction of the alignment film. Orientations in the required directions can be simultaneously formed in both the band-like transmissive display region T and the reflective display region R.

Similar to the optical element 40 used in the third embodiment, the optical element 40 used in the manufacturing method according to the present embodiment is configured by combining a wire grid polarizer 42 and a modulation element. The difference is that a liquid crystal element 46 having a TN type liquid crystal is used as a modulation element instead of a polymerizable liquid crystal. Such a liquid crystal element can be selected by selecting the region driving electrode 68 to be applied.
Optical alignment processing in a direction having an angle with respect to the scanning line 102 can be performed on an arbitrary region. Accordingly, different optical patterning processes can be performed using one optical element 40, and the manufacturing efficiency and the like can be improved.

(Modification 1)
In the liquid crystal element 46 used in the above-described fourth embodiment, the region drive electrode 68 includes the first region 5.
It was formed so as to correspond to both the first and second regions 52. However, when no voltage is applied to the region drive electrode 68 corresponding to the second region 52, the configuration can be simplified without forming the region drive electrode 68 corresponding to the region. FIG. 14 shows the liquid crystal element 4 of the first modification.
FIG. As shown in the figure, the structure is simplified by forming only the region driving electrode 68 corresponding to the first region 51, and the manufacturing cost of the liquid crystal element 46 and the manufacturing cost of the optical element 40 including the liquid crystal element are reduced. is doing. In FIG. 14, elements common to the components of the liquid crystal element 46 shown in FIG. 13 are given the same reference numerals, and descriptions of different descriptions are partially omitted.

(Modification 2)
In the liquid crystal element 46 used in the above-described fourth embodiment, the region drive electrode 68 includes the first region 5.
The first and second regions 52 are formed so as to correspond one-to-one. However, a plurality of region drive electrodes can be formed for each region described above. The liquid crystal element shown in FIG. 15 is a diagram showing the liquid crystal element 46 of Modification 2. As shown in the drawing, two region drive electrodes 68 are formed for each region, and the present invention can be applied to a liquid crystal device miniaturized so that the pitch of the pixels 26 (see FIG. 3 and the like) is halved. It is also possible to form three or more region drive electrodes 68 for each region. In FIG. 15, the same reference numerals are given to elements common to the components of the liquid crystal element 46 shown in FIG. 13, and some of the descriptions of the different descriptions are omitted, similar to the first modification described above. .

(Modification 3)
In the above-described first to fourth embodiments, the mode in which the alignment film 57 formed on the mother substrate W is irradiated with polarized light has been described. However, an embodiment in which only the alignment film is transported without using the mother substrate W is also possible. By using the roll-shaped alignment film and the winding mechanism of the alignment film, the alignment process can be performed by passing only the alignment film through the region irradiated with the ultraviolet rays irradiated from the light source 32.

(Modification 4)
In each of the embodiments described above, there are two types of alignment directions formed in the alignment film. But 3
It is also possible to provide orientations in more than one direction. In the first embodiment, by using a wire grid polarizer 42 in which three transparent substrates on which wire grids 41 extending in different directions are formed are used, orientations in three kinds of directions are imparted to the alignment film. be able to. Second
In the embodiment, the alignment direction of the wire grid 41 can be set to three types, whereby the alignment film can be provided with the alignment in three types of directions. In the third embodiment, the birefringent region 61 is provided with two types of regions in which the alignment directions of the polymerizable liquid crystals constituting the region are different from each other, thereby imparting alignment in three types of directions to the alignment film. Can do.

FIG. 3 is a diagram schematically illustrating a configuration of a liquid crystal device. FIG. 3 is a circuit configuration diagram of a liquid crystal device. The figure which shows typically the structure on the surface by the side of the liquid crystal layer of the element substrate of a liquid crystal device. The figure which shows arrangement | positioning of two types of display areas on a board | substrate. The schematic cross section which shows the photo-alignment processing method of 1st Embodiment. The schematic perspective view which shows the photo-alignment processing method of 1st Embodiment. The figure which shows the structure of a wire grid polarizer. The schematic diagram of the wire grid polarizer concerning 1st Embodiment. The schematic diagram of the wire grid polarizer concerning 2nd Embodiment. The perspective view which shows typically the photo-alignment processing method concerning 3rd Embodiment. The figure which shows typically the optical element used with the manufacturing method concerning 3rd Embodiment. The figure which shows the orientation direction of a birefringent layer, the vibration direction etc. of the linearly polarized light obtained by this orientation. The figure which shows typically the optical element used with the manufacturing method concerning 4th Embodiment. The figure which shows the liquid crystal element concerning the modification 1. The figure which shows the liquid crystal element concerning the modification 2.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Liquid crystal device as an electro-optical device, 10 ... Element substrate, 11 ... Opposite substrate, 14 ... Sealing material, 15 ... Driver IC, 20 ... TFT (thin film transistor), 20c ... Contact hole, 21 ... Pixel electrode, 22 ... Common Electrode, 22t ... transparent common electrode, 22r ... reflective common electrode,
DESCRIPTION OF SYMBOLS 23 ... Slit, 24 ... Strip part, 26 ... Pixel, 32 ... Light source, 33 ... Longitudinal direction, 34 ... Condensing lens, 36 ... Condensing mirror, 38 ... Conveying means, 39 ... Irradiation light, 40 ... Optical element, 41 ... wire grid, 42 ... wire grid polarizer, 42a ... first wire grid polarizer,
42b ... second wire grid polarizer, 45 ... phase modulation element as modulation element, 46 ...
Liquid crystal element as a modulation element, 47: first polarizing plate, 48: second polarizing plate, 49: liquid crystal layer of modulation element, 51: first region, 52: second region, 53: transparent substrate, 53a ... 1st transparent substrate, 53b ... 2nd transparent substrate, 55 ... Liquid crystal layer, 56 ... Polymerizable liquid crystal layer, 57 ... Alignment film, 57
a ... first alignment film, 57b ... second alignment film, 61 ... birefringent region, 62 ... isotropic region, 6
DESCRIPTION OF SYMBOLS 3 ... Birefringent layer, 64 ... Isotropic layer, 67 ... Common drive electrode, 68 ... Area drive electrode, 81 ... Extension direction of a grid, 82 ... Vibration direction of the linearly polarized light irradiated to a phase modulation element, 83 ... orientation direction of polymerizable liquid crystal layer in birefringent layer, 84 ... vibration direction of linearly polarized light generated in birefringent layer, 85 ... vibration direction of linearly polarized light irradiated to liquid crystal element, 100 ... image forming region, 1
02 ... Scanning line 104 ... Data line 106 ... Common line 112 ... Scanning line drive circuit 114 ...
Data line driving circuit, LC ... liquid crystal molecule, R ... reflective display region, T ... transmissive display region, W ... mother substrate as plate member.

Claims (7)

Light emitted from a light source is incident on a wire grid polarizer, and linearly polarized light emitted from the wire grid polarizer is applied to a plate-like member having an alignment film placed on the transport surface of the transport means. An electro-optical device manufacturing method for performing optical alignment processing,
The light source has a longitudinal direction and emits light, and the wire grid polarizer is
A first region having a wire grid extending in a first direction and arranged adjacent to the longitudinal direction and a wire grid extending in a second direction different from the first direction are provided. A second region,
The first polarized light emitted from the first region of the wire grid polarizer and the second polarized light having a polarization direction different from that of the first polarized light emitted from the second region of the wire grid polarizer. And an optical alignment process by simultaneously irradiating different regions on the plate-like member having the alignment film. A method of manufacturing the electro-optical device according to claim 1,
The wire grid polarizer includes a first wire grid polarizer in which a wire grid extending in the first direction is selectively provided corresponding to the first region, and the first wire grid polarization. A wire grid overlaid on the child and extending in the second direction is the second
And a second wire grid polarizer that is selectively provided corresponding to the area of the electro-optical device. A method of manufacturing the electro-optical device according to claim 1,
In the wire grid polarizer, the first region and the second region are arranged on the same substrate. The light irradiated from the light source is incident on the wire grid polarizer, and the linearly polarized light emitted from the wire grid polarizer has an alignment film placed on the transport surface of the transport means via the modulation element. A method of manufacturing an electro-optical device that irradiates a plate-like member and performs optical alignment treatment,
The light source has a longitudinal direction to irradiate light, and the modulation element has a first region and a second region having different birefringence arranged adjacent to the longitudinal direction. And
A first polarized light emitted from the first region of the modulation element; and the second polarization of the modulation element.
The first polarized light emitted from the first region and the second polarized light having a different polarization direction are simultaneously irradiated to different regions on the plate-like member having the alignment film to perform a photo-alignment process. A method for manufacturing an electro-optical device. A method for manufacturing the electro-optical device according to claim 4,
The modulation element is a phase modulation element in which the first region has optical isotropy and the second region has birefringence, and the polarized light transmitted through the wire grid polarizer is First
The method of manufacturing an electro-optical device, wherein the first polarized light is emitted without changing the polarization direction in the region, and is emitted as the second polarized light with the polarization direction changed in the second region. A method for manufacturing the electro-optical device according to claim 5,
The method of manufacturing an electro-optical device, wherein the birefringent region is formed by curing a polymerizable liquid crystal. A method for manufacturing the electro-optical device according to claim 4,
The modulation element includes a first substrate, a second substrate bonded to the first substrate via a sealing material, and the sealing material between the first substrate and the second substrate. A liquid crystal element comprising: a liquid crystal layer filled in an enclosed region; and an electrode for applying a voltage to the liquid crystal layer,
By changing the alignment state of the liquid crystal layer for each region adjacent in the longitudinal direction, different alignment directions on the plate-shaped member having the alignment film are simultaneously irradiated with polarized light having different polarization directions to perform photo-alignment. A method for manufacturing an electro-optical device, characterized by performing processing.

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